CN218967508U

CN218967508U - Annular target packing plant

Info

Publication number: CN218967508U
Application number: CN202122705785.0U
Authority: CN
Inventors: 王绍帅; 董泽坤; 李玉鹏; 宋艳青; 刘星浩; 张志远; 曾浩; 张延宾
Original assignee: Grikin Advanced Material Co Ltd
Current assignee: Grikin Advanced Material Co Ltd
Priority date: 2021-11-04
Filing date: 2021-11-04
Publication date: 2023-05-05
Anticipated expiration: 2031-11-04

Abstract

The utility model belongs to the technical field of sputtering target packaging used in the fields of semiconductors and other applications, and particularly relates to a packaging device of an annular target, wherein the annular target comprises a main sputtering ring, a mounting accessory nail and a screw cap; the target packaging device comprises a packaging box, a packaging bag and packaging foam, wherein a Coil foam substrate of a ring product can realize the storage and protection of a sputtering ring and accessories through special design; the annular target packaging device has compact size, greatly saves the space required by packaging, and can reduce the resource waste and the storage pressure of a warehouse. And through the design to foam structure and product mode of placing, effectively realized protecting and fixed ring spare and accessory product, through drop test detection confirmation, can prevent that the artificial cause from causing the product to damage to and the product is in the transportation because of the packing is not tight and the risk that takes place not hard up.

Description

Annular target packing plant

Technical Field

The utility model belongs to the technical field of sputtering target packaging used in the fields of semiconductors and other applications, and particularly relates to a packaging device for an annular target.

Background

In the prior art, the sputtering target is widely applied to various electronic film preparations, the conventional sputtering target is usually cake-shaped and is composed of corresponding thickness and diameter, the conventional packaging device of the sputtering target can be classified into 4-6 inches, 8-10 inches, 12 inches and the like according to the diameter, the conventional packaging device of the sputtering target is composed of a packaging box, a Coil foam substrate and a foam cover plate, the conventional sputtering target is cake-shaped, the packaging mode is simple, the target is composed of a non-closed annular part and a fitting, the type of the sputtering target is inconsistent with that of the conventional cake-shaped target, the packaging mode is designed independently, the packaging size of a product is effectively reduced, the storage of client materials is facilitated, the external circle fastening and the internal circle supporting can be effectively carried out on the sputtering ring through the internal foam structure design, the sputtering ring is placed and deformed, and the fitting can be effectively foolproof through the design of placing the substrate fitting, so that the fitting is prevented from being released and leaked.

Disclosure of Invention

In order to overcome the drawbacks of the prior art, an objective of the present utility model is to provide an annular target packaging device, so as to solve the above-mentioned problems in the prior art.

The utility model relates to an annular target packaging device, which comprises a packaging box, a packaging bag and packaging foam, wherein the packaging foam comprises a Coil foam cover plate 1, a Coil foam substrate 2, a ring piece foam cover plate 3, a sputtering ring piece 4, an accessory foam cover plate 7 and an accessory 8; the packaging bag comprises a sputtering ring packaging bag 7-1 and an accessory packaging bag 7-2;

the Coil foam substrate is provided with a sputtering ring groove 6 for placing the sputtering ring 4, and the Coil foam substrate is provided with an accessory groove 9 for placing an accessory 8.

Preferably, the outer packing box is made of paper, the middle packing box is made of PP hollow plates, and the accessory packaging bag is made of PE+PA.

Preferably, the size of the Coil foam substrate 2 is 345×345×70mm, and the size of the foam cover plate 1 is 345×345×10mm; the size of the middle packaging box is 345mm multiplied by 70mm; the size of the sputtering ring packing bag is 500 x 600 x 0.12mm; the size of the accessory packaging bag is 180 x 35 x 0.12mm.

Preferably, the Coil foam substrate 2 is arranged in the middle packaging box, the accessory packaging bag is used for placing accessories, the accessories comprise screws and nuts, the accessories are placed into the accessory packaging bag one by one, after vacuumizing and heat sealing treatment, the packaged accessories are placed in the sputtering ring groove 6 on the Coil foam substrate 2, in the upper groove area of the packaged sputtering ring, the upper groove is placed to fill the accessory foam cover plate 3 for playing a supporting role in the packaging sputtering ring, and deformation of the products in the transportation process is prevented.

Preferably, the two-step cylindrical part below the screw is placed into the inside of the accessory nut through the end diameter of the nut, and the hole diameter of the nut is slightly larger than the step cylindrical diameter of the nail, so that the assembly mode can save space and can be used for detecting whether the fit clearance between the accessory nail and the nut is suitable for the Coil foam substrate 2.

The annular target packaging device has the following beneficial effects:

(1) The annular target packaging device reduces the size of the packaging device, reduces the packaging cost and improves the storage efficiency;

(2) The deformation of the ring product in the stress release process can be avoided;

(3) The anti-theft device has the advantages that effective anti-theft measures are adopted for the fittings nails and nuts, the size of the grooves is the length and width of the fittings for normally placing 5 sets of the fittings, the situation that the fittings are leaked and placed is prevented, the quantity of the fittings after being packaged and placed is clear at a glance, and the risk of inconsistent quantity of products to be shipped is avoided.

Drawings

FIG. 1 is a schematic view of an overall annular target packaging device of the present utility model;

FIG. 2 is a schematic packaging view of the annular target packaging device of the present utility model;

FIG. 3 is a schematic view of the assembly of the fitting screw cap;

FIG. 4 is a schematic illustration of the packaging of the accessory screw cap;

FIG. 5 is a diagram of the overall packaging foam structure;

fig. 6 is a perspective view of the package of the present utility model;

FIG. 7-1 is a schematic view of a sputtering ring packing bag;

FIG. 7-2 is a schematic view of a fitment packaging;

fig. 8 is a packaging foam.

The reference numerals in the drawings are:

1. a foam cover plate; 2. a Coil foam substrate; 3. a ring foam cover plate; 4. sputtering a ring member; 5. a ring packing bag; 6. sputtering ring groove; 7. a fitting foam deck; 8. a fitting; 9. fitting grooves; 7-1, packaging bags of sputtering ring pieces; 7-2, packaging bags for accessories.

Detailed Description

In order to make the objects, technical solutions and advantages of the present utility model become more apparent, the technical solutions in the embodiments of the present utility model will be described in more detail below with reference to the accompanying drawings in the embodiments of the present utility model. In the drawings, the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The described embodiments are some, but not all, embodiments of the utility model. The embodiments described below, together with the words of orientation, are exemplary and intended to explain the utility model and should not be taken as limiting the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model. Embodiments of the present utility model will be described in detail below with reference to the accompanying drawings.

In one broad embodiment of the utility model, a packaging device for annular Coil targets, as shown in fig. 1-8, comprises a packaging box, a Coil packaging bag, an accessory packaging bag and packaging foam, wherein the packaging box comprises an outer packaging box and a middle packaging box, and the packaging box comprises a foam cover plate 1, a Coil foam substrate 2, a ring foam cover plate 3, a sputtering ring 4, a ring packaging bag 5, a concave groove 6 for placing the sputtering ring on the Coil foam substrate, an accessory foam cover plate 7, a packaged accessory 8 and a foam bottom processed groove 9; the packaging bag comprises a sputtering ring packaging bag and an accessory packaging bag; the packaging foam comprises a foam cover plate 1 and a Coil foam substrate 2; the size of the outer packing box is 360-90 mm, and the paper material is made of the paper material; the size of the Coil foam substrate 2 is 345 x 70mm, and the size of the foam cover plate 1 is 345 x 10mm; the size of the middle packaging box is 345mm multiplied by 70mm, and the PP hollow plate is made of the material; the sputtering ring packing bag is 500 x 600 x 0.12mm; the accessory packaging bag is 180-35-0.12 mm, and PE+PA materials; the Coil foam substrate 2 is placed in the middle packaging box, 1 fitting packaging bag is prepared for placing fitting nails and screw caps, the fitting nails and the screw caps are combined together in a special mode, space is effectively saved, the fittings are placed in the packaging bag one by one, after vacuumizing and heat sealing treatment, the packaged fittings 8 are placed in grooves 9 machined in the foam bottom, and the grooves are matched with fitting foam cover plates 7 to finish the placement of the fittings; the size of the cylindrical steps at the bottom of the accessory nail is smaller than that of the hole at the end part of the accessory nut, and the two cylindrical steps below the screw are placed in the nut through the hole at the end part of the nut, so that space can be saved, and the accessory nail can be used for detecting whether a fit clearance between the accessory screw and the nut is proper or not; vacuumizing after packaging for 0.08-0.1MP for 1.0-2.0S, cooling the heat sealing area after vacuumizing, and placing the packaged fitting 8 in a groove on the packaging Coil foam substrate 2 and covering with sealing foam after confirming that the sealing quality is qualified; the sputtering ring 4 is packaged, an inner layer is packaged firstly, vacuumizing and heat sealing are carried out to confirm the packaging quality, four corners of the package are folded towards the center direction of the sputtering ring 4 after the first layer of packaging is finished, then a second layer of packaging is carried out, the packaging is placed in a concave groove 6 corresponding to a packaging Coil foam substrate 2, two parts of labels are printed, the packaging is placed on a ring packaging bag 5, after appearance inspection is finished, the packaging bag and the packaging box are respectively stuck with corresponding labels, the packaging is put into an outer package, and a ring foam cover plate 3 is covered; the packing box is an inner packing box, and the outer packing is carried out after the inner packing is finished, and the size of the packing box is 15-20cm larger than that of the inner packing box.

In the embodiment, the sputtering target packaging device provided by the utility model comprises a packaging box, a packaging bag, packaging foam and the like, wherein the Coil foam substrate of the ring product can realize the storage and protection of a sputtering ring and accessories through special design; the annular target packaging device has compact size, greatly saves the space required by packaging, and can reduce the resource waste and the storage pressure of a warehouse. And through the design to foam structure and product mode of placing, effectively realized protecting and fixed ring spare and accessory product, through drop test detection confirmation, can prevent that the artificial cause from causing the product to damage to and the product is in the transportation because of the risk that the packing does not closely take place not hard up.

Finally, it should be pointed out that: the above embodiments are only for illustrating the technical solution of the present utility model, and are not limiting. Although the utility model has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present utility model.

Claims

1. The annular target packaging device is characterized by comprising a packaging box, a packaging bag and packaging foam, wherein the packaging foam comprises a Coil foam cover plate (1), a Coil foam substrate (2), a ring piece foam cover plate (3), a sputtering ring piece (4), an accessory foam cover plate (7) and an accessory (8); the packaging box comprises an external packaging box and a middle packaging box, wherein the packaging bags comprise a sputtering ring packaging bag (7-1) and an accessory packaging bag (7-2);

the Coil foam substrate is provided with a sputtering ring groove (6) for placing a sputtering ring (4), and the Coil foam substrate is provided with an accessory groove (9) for placing an accessory (8).

2. The annular target packaging device according to claim 1, wherein the outer packaging box is made of paper, the middle packaging box is made of a PP hollow plate, and the accessory packaging bag is made of PE+PA.

3. The annular target packaging device according to claim 1, wherein the Coil foam substrate (2) has a size of 345 x 70mm and the foam cover plate (1) has a size of 345 x 10mm; the size of the middle packaging box is 345mm multiplied by 70mm; the size of the sputtering ring packing bag (7-1) is 500 x 600 x 0.12mm; the size of the accessory packaging bag (7-2) is 180-35-0.12 mm.

4. The annular target packaging device according to claim 1, wherein the Coil foam substrate (2) is arranged in the middle packaging box, the accessory packaging bag is used for placing accessories, the accessories comprise screws and nuts, the accessories are placed into the accessory packaging bag one by one, after vacuumizing and heat sealing treatment, the packaged accessories are placed in sputtering ring grooves (6) on the Coil foam substrate (2), and in the upper groove area of the packaged sputtering ring, an upper groove filling accessory foam cover plate (7) is placed for playing a supporting role in the packaging sputtering ring to prevent deformation in the product transportation process.

5. The annular target packaging device according to claim 4, wherein the two-step cylindrical portion below the screw is placed inside the fitting nut through the end diameter of the nut, the hole diameter of the nut is larger than the step cylindrical diameter of the nail, and the assembly method can save space and can be used for detecting whether the fit clearance between the fitting nail and the nut is suitable for the Coil foam substrate (2).