CN218958544U - Ion pump controller capable of igniting and self-extinguishing - Google Patents

Abstract

The utility model provides an ignition self-extinguishing type ion pump controller, which is applied to the technical field of sputtering ion pumps and comprises a control protection circuit, wherein the control protection circuit is connected with a primary side of a multi-stage step-up transformer, a secondary side of the multi-stage step-up transformer is connected with a voltage doubling rectifying circuit, and the voltage doubling rectifying circuit is connected with the control protection circuit; the control protection circuit comprises a main control module and a current sampling module, wherein the main control module is electrically connected with the power supply module, the output end of the main control module is connected with the relay output module, and the relay output module is connected with the primary of the multi-gear step-up transformer; the output end of the current sampling module is connected with the second input end of the main control module, and the input end of the current sampling module is connected with the voltage doubling rectifying circuit and the ion pump. Through the multi-gear adjustment, the continuous arc discharge phenomenon can be effectively prevented, accidents caused by electric leakage of the cable can be effectively avoided, frequent power failure of the ion pump can be avoided, and the normal operation of the ion pump is guaranteed.

Description

Ion pump controller capable of igniting and self-extinguishing

Technical Field

The utility model belongs to the technical field of sputter ion pumps, and particularly relates to a spark self-extinguishing type ion pump controller.

Background

Sputter ion pumps are indispensable equipment in high vacuum systems, and sputter ion pumps are typically operated at high pressures of up to kilovolts. In a vacuum system of an irradiation electron linear accelerator, the working voltage of a sputtering ion pump is mainly 7 KV. Under the voltage, the electrode and the transmission cable of the sputtering ion pump are extremely high in test, particularly the high-voltage electrode of the ion pump, and once the surface is stained, arc discharge and creepage are extremely easy to occur, even fire is ignited, and finally the electrode is damaged, so that vacuum damage is caused. Once passive vacuum failure occurs, it is catastrophic for the entire vacuum system.

Common ion pump control mostly adopts the following two modes, one is that whether overcurrent exists or not, the constant high-voltage output is always kept; the other is to disconnect the controller high voltage output immediately upon detecting the occurrence of an overcurrent until human intervention.

When adopting the mode of keeping fixed high pressure, if the ion pump surface takes place to draw the arc and strike sparks, can cause certain damage to the electrode definitely, in case the arc is drawn and is once produced, if the voltage does not drop to certain level or break, be difficult to interrupt its arc, and if the cable electric leakage condition appears, continuous high pressure can lead to the cable to blow out even the accident of striking sparks, exists great potential safety hazard.

When the mode of immediately disconnecting the high-voltage output of the controller is adopted, frequent power failure can occur in the use process, and the normal use of the ion pump is influenced.

Therefore, there is a need to provide an ion pump controller capable of adjusting the output according to the magnitude of the current of the ion pump to improve the above-mentioned problems.

Disclosure of Invention

In view of the above problems in the prior art, the utility model aims to provide a spark self-extinguishing type ion pump controller, which can control output according to the current of an ion pump, can effectively prevent the continuous arcing phenomenon and effectively avoid safety accidents caused by electric leakage of a cable by multi-gear adjustment of a multi-gear step-up transformer, can avoid frequent power failure of the ion pump, and is beneficial to ensuring normal operation of the ion pump.

The utility model provides an ionic pump controller of spark self-extinguishing formula, includes control protection circuit, control protection circuit is connected with the primary of multi-stage step-up transformer, the secondary of multi-stage step-up transformer is connected with the voltage doubling rectifier circuit, the feedback output of voltage doubling rectifier circuit is connected with control protection circuit, control protection circuit is connected with the negative pole of ionic pump, voltage doubling rectifier circuit is connected with the positive pole of ionic pump;

the control protection circuit comprises a main control module, a first input end of the main control module is electrically connected with the power supply module, an output end of the main control module is connected with an input end of the relay output module, and an output end of the relay output module is connected with a primary stage of the multi-stage step-up transformer;

the control protection circuit further comprises a current sampling module, wherein the output end of the current sampling module is connected with the second input end of the main control module, and the input end of the current sampling module is connected with the voltage doubling rectifying circuit and the ion pump.

In order to obtain power supply, the power supply module and the relay output module are connected with an external power frequency power supply.

In order to process the current output by the multi-stage step-up transformer, the voltage doubling rectifying circuit comprises a resistor I R1 and a resistor II R2 which are connected in series, wherein a capacitor I C1 and a capacitor II C2 are respectively connected in parallel with the resistor I R1 and the resistor II R2;

the voltage doubling rectifying circuit further comprises a capacitor tri C3 and a capacitor tetra C4 which are connected in series, and a resistor tri R3 and a resistor tetra R4 are respectively connected in parallel with the capacitor tri C3 and the capacitor tetra C4;

the capacitor tri-C3 is also connected with a diode D1 and a diode D2 in parallel, two ends of the capacitor tri-C3 are respectively connected with the anode of the diode D1 and the cathode of the diode D2, and a circuit between the diode D1 and the diode D2 is connected between the resistor R1 and the resistor R2 through wires

The capacitor C4 is also connected with a diode D3 and a diode D4 in parallel, two ends of the capacitor C4 are respectively connected with the anode of the diode D3 and the cathode of the diode D4, and a circuit between the diode D3 and the diode D4 is connected between the resistor R2 and the capacitor C2 through wires.

In order to realize the current feedback function, a first port is arranged at one end of the resistor I R1 far away from the resistor II R2, a second port is arranged on a circuit between the diode I D1 and the capacitor III C3, and the first port and the second port are connected with the secondary of the multi-gear step-up transformer;

one end of the capacitor III C3, which is far away from the capacitor IV C4, is provided with a feedback port, and the feedback port is connected with the current sampling module;

and an output port is arranged on a circuit between the capacitor C4 and the diode D4, and the output port is connected with an ion pump.

The beneficial effects of the utility model are as follows: this strike sparks from ion pump controller of putting out formula, gather the electric current feedback of voltage doubling rectifier circuit and ion pump through the current sampling module, judge the electric current size through main control module, can adjust relay output module's output according to actual electric current size, thereby adjust the gear of multi-gear step-up transformer to the position that suits with the electric current, through multi-gear adjustment, can effectively prevent the continuation of arcing phenomenon, also can effectively avoid the incident that the cable electric leakage causes, can avoid ion pump frequent power failure simultaneously, be favorable to guaranteeing ion pump's normal work.

Drawings

The accompanying drawings are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate the utility model and together with the embodiments of the utility model, serve to explain the utility model. In the drawings:

FIG. 1 is a block diagram of the structure of the present utility model;

fig. 2 is a circuit diagram of a control protection circuit of the present utility model;

fig. 3 is a circuit diagram of the voltage doubler rectifying circuit of the present utility model.

Detailed Description

Example 1

As shown in FIG. 1, the ion pump controller comprises a control protection circuit, a multi-stage step-up transformer and a voltage doubling rectifying circuit.

Specifically, the control protection circuit is connected with the primary side of the multi-stage step-up transformer, the secondary side of the multi-stage step-up transformer is connected with the voltage doubling rectifying circuit, the feedback output end of the voltage doubling rectifying circuit is connected with the control protection circuit, the control protection circuit is connected with the negative electrode of the ion pump, and the voltage doubling rectifying circuit is connected with the positive electrode of the ion pump. Since the controller is used for controlling the ion pump, the controller must be connected with the ion pump, and since the ion pump is the prior art, the operation principle is not shown in the drawings and will not be described again.

As shown in fig. 1, the multi-stage step-up transformer may be configured as a three-stage, divided into a highest stage, a second lowest stage, and a lowest stage, and the relay output module adjusts the stages of the multi-stage step-up transformer, so that the voltage-doubler rectifier circuit receives currents of different magnitudes to control the output of the ion pump.

As shown in fig. 2, the control protection circuit includes a main control module, a power module, a relay output module and a current sampling module, where the main control module has a programmable function, and optionally an MCU, and the power module and the relay output module are connected with an external power frequency power supply (not shown in the figure) and are powered by the external power frequency power supply, and the power module is used for digital-to-analog conversion and providing an adaptive voltage for the main control module.

Specifically, a first input end of the main control module is electrically connected with the power module, an output end of the main control module is connected with an input end of the relay output module, and an output end of the relay output module is connected with a primary stage of the multi-stage step-up transformer.

The output end of the current sampling module is connected with the second input end of the main control module, the input end of the current sampling module is connected with the voltage doubling rectifying circuit and the ion pump, the feedback current of the voltage doubling rectifying circuit and the current in the ion pump are collected through the current sampling module and are transmitted to the main control module, whether the current exceeds a threshold value is judged through a program in the main control module, the output of the main control module is regulated according to the sampled current, and therefore the relay output module is controlled to regulate the multi-gear step-up transformer to an adaptive gear according to the current.

As shown in fig. 3, the voltage doubling rectifying circuit includes a resistor one R1 and a resistor two R2 connected in series, and a capacitor one C1 and a capacitor two C2 are connected in parallel to the resistor one R1 and the resistor two R2 respectively; the voltage doubling rectifying circuit further comprises a capacitor tri C3 and a capacitor tetra C4 which are connected in series, and a resistor tri R3 and a resistor tetra R4 are respectively connected in parallel with the capacitor tri C3 and the capacitor tetra C4; the capacitor three C3 is also connected with a diode one D1 and a diode two D2 in parallel, two ends of the capacitor three C3 are respectively connected with the anode of the diode one D1 and the cathode of the diode two D2, and a circuit between the diode one D1 and the diode two D2 is connected between the resistor one R1 and the resistor two R2 through wires; and the capacitor four C4 is also connected with a diode three D3 and a diode four D4 in parallel, two ends of the capacitor four C4 are respectively connected with the anode of the diode three D3 and the cathode of the diode four D4, and a circuit between the diode three D3 and the diode four D4 is connected between the resistor two R2 and the capacitor two C2 through wires.

The circuit between the diode D1 and the capacitor C3 is provided with a second port, and the first port and the second port are connected with the secondary of the multi-stage step-up transformer; one end of the capacitor III C3, which is far away from the capacitor IV C4, is provided with a feedback port, and the feedback port is connected with the current sampling module and is used for transmitting feedback current; and an output port is arranged on a circuit between the capacitor C4 and the diode D4 and is connected with the ion pump.

Working principle: when the ignition self-extinguishing type ion pump controller is used, the multi-stage step-up transformer is in the highest gear by default, the actual current is collected through the current sampling module and is transmitted to the main control module, whether an overcurrent condition exists or not is judged by means of the software function of the main control module, if the overcurrent condition exists, the high-voltage output is disconnected for a period of time, then the multi-stage step-up transformer is regulated to the next lower gear, the high-voltage of one next lower stage is output again, if the overcurrent condition still exists in the gear at the moment, the high-voltage output end time is disconnected again, the multi-stage step-up transformer is regulated to the lowest gear, the high-voltage of one lowest stage is output again, and if the overcurrent condition exists in the lowest stage high-voltage condition, the high-voltage output is disconnected, and the operation is waited for staff.

The foregoing description is only a preferred embodiment of the present utility model, and the present utility model is not limited thereto, but it is to be understood that modifications and equivalents of some of the technical features described in the foregoing embodiments may be made by those skilled in the art, although the present utility model has been described in detail with reference to the foregoing embodiments. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.

Claims (4)

1. The ignition self-extinguishing type ion pump controller is characterized by comprising a control protection circuit, wherein the control protection circuit is connected with the primary side of a multi-stage step-up transformer, the secondary side of the multi-stage step-up transformer is connected with a voltage doubling rectifying circuit, the feedback output end of the voltage doubling rectifying circuit is connected with the control protection circuit, the control protection circuit is connected with the negative electrode of an ion pump, and the voltage doubling rectifying circuit is connected with the positive electrode of the ion pump;

the control protection circuit comprises a main control module, a first input end of the main control module is electrically connected with the power supply module, an output end of the main control module is connected with an input end of the relay output module, and an output end of the relay output module is connected with a primary stage of the multi-stage step-up transformer;

the control protection circuit further comprises a current sampling module, wherein the output end of the current sampling module is connected with the second input end of the main control module, and the input end of the current sampling module is connected with the voltage doubling rectifying circuit and the ion pump.

2. The spark self-extinguishing ion pump controller of claim 1, wherein the power module and relay output module are both connected to an external power frequency power source.

3. The ion pump controller of claim 1, wherein the voltage doubling rectifying circuit comprises a resistor I R1 and a resistor II R2 which are connected in series, wherein a capacitor I C1 and a capacitor II C2 are respectively connected in parallel with the resistor I R1 and the resistor II R2;

the voltage doubling rectifying circuit further comprises a capacitor tri C3 and a capacitor tetra C4 which are connected in series, and a resistor tri R3 and a resistor tetra R4 are respectively connected in parallel with the capacitor tri C3 and the capacitor tetra C4;

the capacitor three C3 is also connected with a diode one D1 and a diode two D2 in parallel, two ends of the capacitor three C3 are respectively connected with the anode of the diode one D1 and the cathode of the diode two D2, and a circuit between the diode one D1 and the diode two D2 is connected between the resistor one R1 and the resistor two R2 through a wire;

the capacitor C4 is also connected with a diode D3 and a diode D4 in parallel, two ends of the capacitor C4 are respectively connected with the anode of the diode D3 and the cathode of the diode D4, and a circuit between the diode D3 and the diode D4 is connected between the resistor R2 and the capacitor C2 through wires.

4. The ion pump controller of claim 3, wherein a first port is arranged at one end of the first resistor R1 far away from the second resistor R2, a second port is arranged on a circuit between the first diode D1 and the third capacitor C3, and the first port and the second port are connected with the secondary of the multi-stage step-up transformer;

one end of the capacitor III C3, which is far away from the capacitor IV C4, is provided with a feedback port, and the feedback port is connected with the current sampling module;

and an output port is arranged on a circuit between the capacitor C4 and the diode D4, and the output port is connected with an ion pump.

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