CN218955399U

CN218955399U - Drying device

Info

Publication number: CN218955399U
Application number: CN202223132156.4U
Authority: CN
Inventors: 左国军; 唐洪湘; 磨建新; 吴勇茂; 邓东平
Original assignee: Changzhou Jiejiachuang Intelligent Equipment Co ltd
Current assignee: Changzhou Jiejiachuang Intelligent Equipment Co ltd
Priority date: 2022-11-24
Filing date: 2022-11-24
Publication date: 2023-05-02
Anticipated expiration: 2032-11-24

Abstract

The utility model discloses a drying device, and relates to the technical field of silicon wafer processing. The method specifically comprises the following steps: the drying box body is provided with an air inlet and an air outlet; the heating piece is arranged at the air inlet and used for heating the air flow at the air inlet; the fan is arranged on one side of the heating piece, which is close to the air outlet, and is used for blowing heated air flow into the drying box body; the first temperature detection piece is arranged in the impeller cavity of the fan and used for detecting the temperature in the impeller cavity of the fan; and the control unit starts or closes the drying box body according to the detection result of the first temperature detection part. Aims to avoid the abnormal temperature of the drying device caused by the damage or the reverse rotation of the fan.

Description

Drying device

Technical Field

The utility model relates to the technical field of silicon wafer processing, in particular to a drying device.

Background

When the solar photovoltaic cell is prepared, the surface of the silicon wafer is required to be dried and solidified after the conductive paste is printed. The heating device is that the heater is used to preheat the air, then the blower blows evenly into the furnace chamber, and the temperature of the single temperature zone is directly controlled by the controller. The controller increases the power of each heating device when the temperature in the drying oven is lower than a preset temperature, and decreases the power of each heating device when the temperature in the drying oven is higher than the preset temperature. The temperature is adjusted by adjusting the power, and the service life of the blower is ignored. Once the fan is damaged or is reversed due to wrong connection, the potential safety hazard of equipment is increased, and meanwhile, the equipment is kept in an abnormal working state continuously.

How to avoid the abnormal temperature of the drying device caused by the damage or the reverse rotation of the fan becomes a technical problem to be solved urgently.

Disclosure of Invention

The utility model mainly aims to provide a drying device and silicon wafer processing equipment, and aims to avoid temperature abnormality of the drying device caused by damage or reversion of a fan.

In order to achieve the above object, the present utility model provides a drying apparatus comprising:

the drying box body is provided with an air inlet and an air outlet;

the heating piece is arranged at the air inlet and used for heating the air flow at the air inlet;

the fan is arranged on one side of the heating piece, which is close to the air outlet, and is used for blowing heated air flow into the drying box body;

the first temperature detection piece is arranged in the impeller cavity of the fan and used for detecting the temperature in the impeller cavity of the fan; and

and the control unit is used for starting or closing the drying box body according to the detection result of the first temperature detection piece.

In an embodiment of the present application, further includes:

the second temperature detection piece is arranged in the drying box body and used for detecting the temperature in the drying box body; the control unit adjusts the temperature in the drying box body according to the detection result of the second temperature detection piece.

In an embodiment of the present application, the first temperature detecting member and/or the second temperature detecting member is a thermocouple.

In an embodiment of the present application, the fan is a volute fan.

In an embodiment of the present application, a first conveying assembly for conveying the bearing member loaded with the member to be dried from the feed inlet to the discharge outlet of the drying box is provided in the drying box.

In an embodiment of the present application, the first transfer assembly includes:

at least two rotating shafts are respectively hoisted on the side wall of the drying box body, and each rotating shaft is provided with a gear and is in one-to-one linear correspondence with the position of the gear on the adjacent rotating shaft; and

at least one rack is respectively meshed with different gears which are in linear correspondence, and drives the bearing piece loaded with the piece to be dried to move along the direction from the feeding hole to the discharging hole along with the movement of the rotating shaft.

In an embodiment of the present application, the rack is covered with a rack cover that can be fastened to the carrier.

In an embodiment of the present application, the first transfer assembly further includes:

and the bearing shaft is hung on the side wall of the drying box body and used for bearing the rack.

In one embodiment of the present application, the support shaft is further provided with a guide for keeping the movement direction of the carrier in agreement with the movement direction of the rack.

In an embodiment of the present application, the guide member is provided with a position detecting member for detecting a movement position of the carrier member loaded with the member to be dried.

By adopting the technical scheme, the temperature in the impeller cavity of the fan is detected by the first temperature detection part, the temperature abnormality of the drying box body caused by the damage or the reversion of the fan is avoided, the drying quality problem of the drying part to be dried in the drying box body caused by the temperature abnormality is avoided, the drying quality of the drying box body to be dried is improved, and the drying box is simple in structure and convenient to implement.

Drawings

The utility model will now be described in detail with reference to specific embodiments and accompanying drawings, in which:

fig. 1 is a schematic structural view of a first embodiment of the present utility model.

Fig. 2 is a cross-sectional view taken along the direction A-A in fig. 1.

Fig. 3 is a sectional view in the direction B-B of fig. 1.

Detailed Description

In order to make the objects, technical solutions and advantages of the present utility model more apparent, the present utility model will be described in detail with reference to the accompanying drawings and examples. It should be understood that the following specific examples are given by way of illustration only and are not intended to be limiting.

As shown in fig. 1 to 3, in order to achieve the above object, the present utility model provides a drying apparatus comprising:

a drying box 10 with an air inlet and an air outlet;

the fan is arranged on one side of the heating piece, which is close to the air outlet, and is used for blowing heated air flow into the drying box body 10;

a first temperature detecting member 20 provided in the impeller chamber 82 of the blower for detecting a temperature in the impeller chamber 82 of the blower; and

and a control unit 30 for starting or closing the drying box 10 according to the detection result of the first temperature detecting member 20.

Specifically, a drying device comprises a drying box 10, a heating element, a fan and a first temperature detecting element 20.

The drying box 10 is made of a metal material, such as an aluminum alloy material, an alloy steel material, or the like. The drying box 10 made of metal material has the advantages of strong supporting capability, abrasion resistance and the like. Of course, according to the design requirement, the drying box 10 can also be made of inorganic materials, and the drying box 10 made of inorganic materials has the advantages of strong supporting capability, low cost, easy manufacture and the like. Since the drying box 10 in the present application is used for drying silicon wafers, there is a high requirement on the cleanliness of the drying box 10, and therefore, the drying box 10 in the present application is preferably made of a metal material.

The drying box 10 is provided with a feed inlet 70 and a discharge outlet 40, the feed inlet 70 is used for conveying materials to be dried into the drying box 10, and the discharge outlet 40 is used for conveying the materials which are dried. The drying box 10 is provided with an air inlet and an air outlet. The air inlet of the drying box 10 is used for blowing air flow into the drying box 10, and the air outlet of the drying box 10 is used for discharging the air flow in the drying box 10. The air inlet of the drying box 10 is arranged on the side wall of the drying box 10, and the air outlet of the drying box 10 is opposite to the air inlet of the drying box 10, so that an air duct is formed conveniently. The line of the air inlet and the air outlet of the drying box 10 is perpendicular to the line of the feed inlet 70 and the discharge outlet 40 of the drying box 10, and the line of the air inlet and the air outlet of the drying box 10 is perpendicular to the line of the feed inlet 70 and the discharge outlet 40 of the drying box 10, so that the layout of the air inlet and the air outlet is convenient, and the drying efficiency of the workpiece to be dried can be improved.

The heating element adopts the heating wire commonly used in the prior art, adopts the heating wire to heat, has convenient control, and heating efficiency is high grade advantage. The heating element is arranged at the air inlet, and when the heating element works, the generated heat heats the cold air flow blown in by the air inlet, the cold air flow is changed into hot air flow, and the hot air flow is dried after entering the drying box 10. Simple structure and convenient implementation.

The fan adopts the volute fan commonly used in the prior art, and the fan is arranged on one side of the heating element close to the air outlet, so that the fan can conveniently convey hot air into the drying box 10. By adopting the volute fan, the motor 81 of the fan can be prevented from being in direct contact with hot air, so that the safety of the fan in use is improved.

When the fan is installed, the motor 81 part of the fan is arranged outside the air channel where the air inlet is, so that the motor 81 part of the fan is prevented from being in direct contact with hot air, and the safety of the motor 81 part of the fan is improved. The rotation axis of the motor 81 of the fan penetrates through the air channel where the air inlet is located, stretches into the air channel where the air inlet is located, the impeller of the fan is mounted on the rotation axis of the fan, and the heated air flow is blown into the drying box 10 through rotation of the impeller of the fan, so that the drying box is simple in structure and convenient to implement.

The first temperature detecting member 20 is a temperature detecting member commonly used in the art, and may be a thermocouple sensor or a thermal resistance sensor.

When the first temperature sensing member 20 is a thermocouple sensor, the thermocouple is composed of two wires of different materials welded together at the ends. And then the ambient temperature of the unheated part is measured, so that the temperature of the heating point can be accurately known. Thermocouples made of different materials are used in different temperature ranges, and the sensitivities of the thermocouples are different. The sensitivity of the thermocouple refers to the amount of change in the output potential difference when the temperature of the heating point changes by 1 ℃. For most metallic material supported thermocouples, this value is between about 5 and 70 microvolts/°c. Therefore, the thermocouple temperature sensor has the advantages of high sensitivity, high response speed and capability of measuring the rapid change process of the temperature change, and improves the accuracy of temperature detection.

When the first temperature detecting member 20 is a thermal resistance sensor, the thermal resistance is made of a semiconductor material, and most of the thermal resistance is a negative temperature coefficient, i.e., the resistance decreases with increasing temperature. The temperature change causes a large resistance change, so it is the most sensitive temperature sensor. The thermistor is very small in size and responds quickly to temperature changes.

The first temperature detecting member 20 is disposed in the impeller chamber 82 of the fan, and is configured to detect a temperature in the impeller chamber 82 of the fan, and the impeller chamber 82 of the fan means: a shield cavity for receiving the impeller. The first temperature detecting member 20 is connected with the impeller cavity 82 by a fixed connection manner, such as welding, and the first temperature detecting member 20 is connected with the impeller cavity 82 by a fixed connection manner, so that the stability of the first temperature detecting member 20 during operation can be improved. Of course, according to the design requirement, the first temperature detecting member 20 and the impeller cavity 82 may be further connected in a detachable manner, for example, the first temperature detecting member 20 and the impeller cavity 82 are fixed by a pressing member and a screw or a bolt, so that the first temperature detecting member 20 is conveniently installed and detached, and the later maintenance is convenient.

The control unit 30 adopts a central processing unit adopted in the prior art, and can also be a temperature inspection instrument, and the details are not repeated herein because the temperature inspection instrument is the prior art. The control unit 30 is in communication connection with the first temperature detecting member 20, and the control unit 30 obtains the detection result of the first temperature detecting member 20 to control the start or close of the drying box 10.

For example: when the first temperature detecting member 20 detects that the temperature in the impeller chamber 82 is greater than the preset threshold value, the abnormal temperature in the impeller of the current fan is indicated, which may be caused by the damage and stop of the fan, and the control unit 30 closes the operation of the drying box 10 and prompts an alarm signal. The safety of the drying box 10 during operation is improved.

When the first temperature detecting member 20 detects that the temperature in the impeller chamber 82 is less than the preset threshold, it indicates that the temperature abnormality in the current fan impeller is likely to be caused by the impeller reverse rotation of the fan, and at this time, the control unit 30 closes the operation of the drying box 10 and prompts an alarm signal. The safety of the drying box 10 during operation is improved.

By adopting the above technical scheme, through setting up the temperature in the impeller chamber 82 of first temperature detection spare 20 detection fan, avoid because the damage or the reversal of fan lead to stoving box 10 to appear temperature anomaly, avoid waiting to dry the quality problem appearing in the piece of drying in the stoving box 10 because of temperature anomaly, improved the stoving box 10 and treated the stoving quality of stoving piece, simple structure is convenient for implement.

In an embodiment of the present application, further includes:

a second temperature detecting member provided in the drying box 10 for detecting a temperature in the drying box 10; the control unit 30 adjusts the temperature in the drying box 10 according to the detection result of the second temperature detecting member.

Specifically, the drying box 10 is further provided with a second temperature detecting member, which is the same as the first temperature detecting member 20, and has the same advantages, and will not be described in detail herein. The second temperature detection piece is installed in the drying box 10 and is used for detecting the temperature of the drying box 10, and the control unit 30 adjusts the temperature in the drying box 10 according to the detection result of the second temperature detection piece, so that the temperature in the drying box 10 is always kept at the optimal drying temperature, the quality problem of the piece to be dried in the drying box 10 caused by abnormal temperature in the drying box 10 is avoided, the drying quality of the piece to be dried in the drying box 10 is further improved, and the drying box is simple in structure and convenient to implement.

For example, when the fan is stopped, since the fan cannot blow hot air into the drying box 10, the temperature in the drying box 10 may be reduced, so as to ensure that the temperature in the drying box 10 is at the optimal drying temperature of the workpiece to be dried, the control unit 30 may start the standby heating element to heat, or increase the output power of other heating elements.

By adopting the technical scheme, the device is simple in structure and convenient to implement.

In an embodiment of the present application, the first temperature detecting member 20 and/or the second temperature detecting member is a thermocouple.

Specifically, the first temperature detecting element 20 and/or the second temperature detecting element are thermocouples, which has the advantages of high sensitivity, high response speed, and the like. Meanwhile, the rapid change process of the temperature change can be measured, and the accuracy of temperature detection is improved.

In an embodiment of the present application, the fan is a volute fan.

In an embodiment of the present application, a first conveying assembly is disposed in the drying box 10, for conveying the carrier 90 loaded with the articles to be dried from the feed port 70 to the discharge port 40 of the drying box 10.

Specifically, the first conveying assembly is used for conveying the carrier 90 loaded with the to-be-dried objects, and conveying the carrier 90 from the feed port 70 to the discharge port 40 of the drying box 10. Realize the automatic transmission to the material, reduced the input of human cost, simple structure is convenient for implement.

at least two rotating shafts are respectively hoisted on the side wall of the drying box body 10, and each rotating shaft is provided with a gear and is in one-to-one linear correspondence with the position of the gear on the adjacent rotating shaft; and

at least one rack 50 is respectively engaged with different gears corresponding to each other in a linear manner, and drives the bearing member 90 loaded with the member to be dried to move along the direction from the feed inlet 70 to the discharge outlet 40 along with the movement of the rotating shaft.

Specifically, the first transfer assembly includes at least two rotational shafts and at least one rack 50.

When the number of the rotation shafts is two, a first rotation shaft 61 and a second rotation shaft 62 are respectively provided, both ends of the first rotation shaft 61 are respectively rotatably connected to the side wall of the drying box 10. Both ends of the second rotation shaft 62 are rotatably coupled to the sidewalls of the drying box 10, respectively.

It is conceivable that the first rotation shaft 61 may be provided as a self-powered drive shaft and the second rotation shaft 62 as a non-powered shaft for facilitating rotation of the rotation shaft. The first rotating shaft 61 may be a rotating shaft without power, and the second rotating shaft 62 may be a transmission shaft with power. Since rotational synchronization between the first rotational shaft 61 and the second rotational shaft 62 needs to be ensured, only one powered drive shaft is required between the first rotational shaft 61 and the second rotational shaft 62.

The first rotation shaft 61 is provided with gears, and the number of the gears may be one or a plurality of the gears. The plural references herein refer to two or more.

The second rotation shaft 62 is provided with gears, and the number of the gears may be one or a plurality of the gears.

The gear positions on the first rotation shaft 61 and the gear positions on the second rotation shaft 62 are in one-to-one linear correspondence.

The rack 50 is a rack 50 commonly used in the prior art, and is not described herein. The rack 50 is meshed with different gears corresponding to each other in a linear manner, and when the first rotating shaft 61 rotates, the gear on the first rotating shaft drives the rack 50 to rotate, and the rack 50 drives the gear on the driven wheel to rotate, so that the second rotating shaft 6242 is driven to rotate.

When the number of the rotating shafts is three, the rotating shafts are a third rotating shaft, a fourth rotating shaft and a fifth rotating shaft respectively, and two ends of the third rotating shaft are respectively and rotatably connected to the side wall of the drying box 10. Both ends of the third rotation shaft are rotatably connected to the side walls of the drying box 10, respectively. Both ends of the fourth rotation shaft are rotatably connected to the side walls of the drying box 10, respectively. The third rotation axis, the fourth rotation axis, and the fifth rotation axis are located at the same horizontal level.

The third rotating shaft, the fourth rotating shaft and the fifth rotating shaft can be self-powered rotating shafts, and only one powered driving shaft is needed among the third rotating shaft, the fourth rotating shaft and the fifth rotating shaft in order to ensure rotation synchronization among the third rotating shaft, the fourth rotating shaft and the fifth rotating shaft.

Gears are arranged on the third rotating shaft, the fourth rotating shaft and the fifth rotating shaft, the number of the gears on the third rotating shaft, the fourth transmission shaft and the fifth rotating shaft is equal, and the positions of the gears are in one-to-one correspondence.

The racks 50 are sequentially connected to gears corresponding to the third rotation shaft, the fourth rotation shaft, and the fifth rotation shaft one by one. A drive cycle of the rack 50 is achieved.

By adopting the technical scheme, through setting at least two rotating shafts, the rack 50 is sleeved on the two rotating shafts to realize synchronous motion between the two rotating shafts, complete transmission circulation is realized, and the device is simple in structure and convenient to implement.

In an embodiment of the present application, the rack 50 is covered with a rack 50 cover that can be fastened to the carrier 90.

Specifically, the rack 50 is covered with a rack 50 cover, the rack 50 cover is made of plastic material, and the rack 50 cover made of plastic material has the advantages of light weight, low cost, easy manufacture and the like. The rack 50 is provided with protrusions on its cover which can be snapped into engagement with the carrier 90. When the carrier 90 is placed on the rack 50 cover, the protrusions on the rack 50 cover snap-fit on the carrier 90, thereby improving the stability of the carrier 90 during transportation.

and the bearing shaft is hung on the side wall of the drying box body 10 and is used for bearing the rack 50.

Specifically, the first conveying assembly further comprises a bearing shaft, the bearing shaft is hoisted on the side wall of the drying box 10, the bearing shaft and the rotating shaft are at the same horizontal height, and the bearing shaft is arranged below the racks 50 in the direction of movement from the feed inlet 70 to the discharge outlet 40, so that the racks 50 are supported. Simple structure and convenient implementation. The stability of the rack 50 in transferring the support is improved.

In one embodiment of the present application, the support shaft is further provided with a guide for keeping the movement direction of the carrier 90 consistent with the movement direction of the rack 50.

Specifically, the bearing shaft is also provided with a guide piece.

The guide member is made of a metal material such as an aluminum alloy material, an alloy steel material, or the like. The guide piece made of metal materials has the advantages of strong supporting capability, abrasion resistance and the like. Of course, according to the design requirement, the guide piece can also be made of plastic materials, and the guide piece made of plastic materials has the advantages of light weight, low cost, easy manufacture and the like. Because the large heat can be generated in the application, in order to avoid deformation of the guide piece, the guide piece in the application is made of an aluminum alloy material.

The guide piece is two guide plates which are oppositely arranged, namely a first guide plate and a second guide plate, the first guide plate and the second guide plate are connected to the bearing shaft and are positioned on two sides of the moving direction of the bearing piece 90, so that the moving direction of the bearing piece 90 is kept consistent with the moving direction of the rack 50. Avoiding deflection of the carrier 90 during movement improves the stability of the carrier 90 during transport.

In one embodiment of the present application, the guide member is provided with a position detecting member for detecting the movement position of the carrier member 90 loaded with the member to be dried.

Specifically, the guide member is further provided with a position detecting member, the position detecting member is a photoelectric sensor, and the position of the bearing member 90 is detected by the photoelectric sensor, so that the movement of the bearing member 90 is conveniently controlled. Simple structure and convenient implementation.

The foregoing description is only of the preferred embodiments of the present utility model and is not intended to limit the scope of the utility model, and all equivalent structural changes made by the description of the present utility model and the accompanying drawings or direct/indirect application in other related technical fields are included in the scope of the utility model.

Claims

1. A drying apparatus, comprising:

the drying box body is provided with an air inlet and an air outlet;

2. The drying apparatus of claim 1, further comprising:

3. The drying apparatus according to claim 2, wherein the first temperature detecting member and/or the second temperature detecting member is a thermocouple.

4. The drying apparatus of claim 1, wherein the fan is a volute fan.

5. The drying apparatus of claim 1, wherein a first transfer assembly for transferring the carrier loaded with the items to be dried from the inlet to the outlet of the drying box is provided in the drying box.

6. The drying apparatus according to claim 5, wherein the first transfer assembly comprises:

7. The drying apparatus of claim 6, wherein said rack is covered with a rack cover which is snap-engageable with said carrier.

8. The drying apparatus of claim 6, wherein the first transfer assembly further comprises:

9. The drying apparatus according to claim 8, wherein the support shaft is further provided with a guide member for keeping the movement direction of the carrier member in conformity with the movement direction of the rack gear.

10. Drying apparatus according to claim 9, wherein the guide member is provided with a position detecting member for detecting the movement position of the carrier member loaded with the member to be dried.