CN218951489U - Chemical vapor deposition reactor capable of protecting shaft seal - Google Patents
Chemical vapor deposition reactor capable of protecting shaft seal Download PDFInfo
- Publication number
- CN218951489U CN218951489U CN202320130729.5U CN202320130729U CN218951489U CN 218951489 U CN218951489 U CN 218951489U CN 202320130729 U CN202320130729 U CN 202320130729U CN 218951489 U CN218951489 U CN 218951489U
- Authority
- CN
- China
- Prior art keywords
- zone
- shaft seal
- heat insulation
- area
- vapor deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
The utility model relates to a chemical vapor deposition reactor capable of protecting a shaft seal, which comprises a reaction zone, an enlarged heat dissipation zone, a heat insulation zone and a sealing flange from bottom to top, wherein the cross sectional areas of the reaction zone and the heat insulation zone are smaller than the cross sectional area of the enlarged heat dissipation zone, and the cross sectional area of the sealing flange is not smaller than the cross sectional area of the heat insulation zone; the motor of the stirring device is arranged above the sealing flange, and the stirring paddle connected with the motor sequentially penetrates through the sealing flange, the heat insulation area and the enlarged heat dissipation area and enters the reaction area to stir materials in the reaction area; the stirring paddle is provided with a shaft seal at a position penetrating through the sealing flange.
Description
Technical Field
The utility model belongs to the technical field of chemical vapor deposition reactors, and particularly relates to a chemical vapor deposition reactor capable of protecting a shaft seal.
Background
The chemical vapor deposition reaction requires a high-temperature gas-phase reaction environment, so that the reactor has high heat preservation requirements. Most chemical vapor deposition reactors are provided with stirring devices inside so as to promote mass transfer and heat transfer inside the reactor and improve the reaction efficiency. The driving motor of the stirring device is generally arranged outside the reactor, so that the normal work of the driving motor is prevented from being influenced by high temperature and vapor deposition solids. The stirring paddle needs to penetrate through the wall of the reactor to enter the reactor, and a shaft seal is arranged at the position of the stirring paddle penetrating through the wall of the reactor, so that the reactor is ensured to be airtight, and the stirring paddle can be ensured to rotate freely.
However, the shaft seal is required to be frequently replaced to influence the production progress under the conditions of high temperature, sealing and rotation. The utility model aims to solve the technical problem that the shaft seal is easy to age due to the fact that the temperature of the shaft seal is high at present.
Disclosure of Invention
The utility model provides a chemical vapor deposition reactor capable of protecting a shaft seal, which comprises a reaction zone, an enlarged heat dissipation zone, a heat insulation zone and a sealing flange from bottom to top, wherein the cross sectional areas of the reaction zone and the heat insulation zone are smaller than the cross sectional area of the enlarged heat dissipation zone, and the cross sectional area of the sealing flange is not smaller than the cross sectional area of the heat insulation zone;
the motor of the stirring device is arranged above the sealing flange, and the stirring paddle connected with the motor sequentially penetrates through the sealing flange, the heat insulation area and the enlarged heat dissipation area and enters the reaction area to stir materials in the reaction area; the stirring paddle is provided with a shaft seal at a position penetrating through the sealing flange.
Optionally, an air inlet and a feed inlet are arranged at the bottom of the reaction zone and used for inputting reaction raw materials; a discharge hole is arranged at the top or bottom of the reaction zone and is used for outputting products; the side wall of the expansion heat dissipation area is provided with an air outlet for outputting the reacted waste gas.
Optionally, a stirring blade is arranged at the part of the stirring paddle, which is positioned in the reaction zone, and is used for promoting mass and heat transfer.
Optionally, the reaction zone, the enlarged heat dissipation zone and the heat insulation zone are integrally formed.
Optionally, a cooling interlayer is arranged above the sealing flange and below the motor, and the cooling interlayer is provided with a medium inlet and a medium outlet for introducing cooling medium; the stirring paddle is provided with a shaft seal at a position penetrating through the sealing flange.
Optionally, the heat insulation area is filled with heat insulation materials, and the heat insulation materials are one or more selected from heat insulation cotton, refractory bricks and high-alumina bricks.
Optionally, the thickness of the heat insulating material is not less than 50mm.
Preferably, the bottom of the heat insulation area is provided with a load-bearing net for supporting the heat insulation material.
Optionally, the cross-sectional area of the cooling interlayer is not smaller than the cross-sectional area of the sealing flange; the cold medium input into the cooling interlayer is selected from cold water and cold air.
The chemical vapor deposition reactor capable of protecting the shaft seal has the following beneficial effects:
(1) The cross-sectional area of the enlarged heat dissipation area is larger than that of the reaction area, so that the flow velocity of the air flow entering the enlarged heat dissipation area is reduced, the sedimentation of solids is facilitated, meanwhile, the heat dissipation area of the enlarged heat dissipation area is also larger, a lower-temperature area is formed above the high-temperature reaction area, and the temperature of the discharged waste gas can be lower;
(2) The cross section area of the heat insulation area is smaller than that of the enlarged heat dissipation area, and the heat load of the heat insulation area is reduced through the heat dissipation effect of the enlarged heat dissipation area, so that the shaft seal is protected, and the area of the heat insulation area is not required to be large.
Drawings
FIG. 1 is a schematic structural view of a chemical vapor deposition reactor capable of protecting a shaft seal.
In the drawing, a reaction zone 1, an enlarged heat dissipation zone 2, a heat insulation zone 3, a sealing flange 4, a cooling interlayer 5, a medium inlet 6, a medium outlet 7, a motor 8, a stirring paddle 9, a shaft seal 10, an air inlet 11, a feed inlet 12, a discharge outlet 13, an air outlet 14, a heat insulation material 15 and a bearing net 16.
Detailed Description
The embodiment provides a chemical vapor deposition reactor capable of protecting a shaft seal 10, as shown in fig. 1, comprising a reaction zone 1, an enlarged heat dissipation zone 2, a heat insulation zone 3 and a sealing flange 4 from bottom to top, wherein the cross sectional areas of the reaction zone 1 and the heat insulation zone 3 are smaller than the cross sectional area of the enlarged heat dissipation zone 2, and the cross sectional area of the sealing flange 4 is not smaller than the cross sectional area of the heat insulation zone 3;
a motor 8 of the stirring device is arranged above the sealing flange 4, and a stirring paddle 9 connected with the motor 8 sequentially penetrates through the sealing flange 4, the heat insulation area 3 and the enlarged heat dissipation area 2, enters the reaction area 1 and is used for stirring materials in the reaction area 1; the stirring paddle 9 is provided with a shaft seal 10 at a position penetrating the sealing flange 4.
Optionally, an air inlet 11 and a feed inlet 12 are arranged at the bottom of the reaction zone 1 and used for inputting reaction raw materials; a discharge hole 13 is arranged at the top or bottom of the reaction zone 1 and is used for outputting products; the side wall of the enlarged heat dissipation area 2 is provided with an air outlet 14 for outputting the reacted waste gas.
Optionally, a stirring blade is arranged at the part of the stirring paddle 9 in the reaction zone 1, so as to promote mass and heat transfer.
Optionally, the reaction zone 1, the enlarged heat dissipation zone 2 and the heat insulation zone 3 are integrally formed, so that good air tightness is ensured.
Optionally, a cooling interlayer 5 is arranged above the sealing flange 4 and below the motor 8, and the cooling interlayer 5 is provided with a medium inlet 6 and a medium outlet 7 for introducing cooling medium; the stirring paddle 9 is provided with a shaft seal 10 at a position penetrating the cooling jacket 5 and the sealing flange 4. The upper part of the sealing flange 4 is provided with a cooling interlayer 5, a cooling medium is input and matched with the heat insulation zone 3, the heat insulation is cooled from the upper part and the lower part of the shaft seal 10, and the service life of the shaft seal 10 is prolonged.
Optionally, the heat insulation area 3 is filled with a heat insulation material 15 for improving the heat insulation performance of the heat insulation area 3, and the heat insulation material 15 is one or more selected from heat insulation cotton, refractory bricks and high-alumina bricks and used for blocking heat between the enlarged heat dissipation area 2 and the sealing flange 4 and protecting the shaft seal 10.
Optionally, the thickness of the insulating material 15 is not less than 50mm.
Preferably, the bottom of the heat-insulating zone 3 is provided with a load-bearing web 16 for supporting the heat-insulating material 15 from falling down on the reaction zone 1 and expanding the heat-dissipating zone 2.
Optionally, the cross-sectional area of the cooling interlayer 5 is not smaller than the cross-sectional area of the sealing flange 4, so that the cooling interlayer can sufficiently cool to provide cold for the heat insulation area 3; the cold medium fed into the cooling interlayer 5 is selected from cold water and cold air, and the heat transferred to the sealing flange 4 is further taken away.
The chemical vapor deposition reactor can be used for the chemical vapor deposition processes such as the production of carbon nanotubes, the surface carbon coating of silicon/silicon oxide and silicon carbon materials, the surface coating modification of nickel cobalt lithium manganate materials and the like.
The non-disclosed parts of the utility model are all prior art, and the specific structure, materials and working principle thereof are not described in detail. It will be evident to those skilled in the art that the utility model is not limited to the details of the foregoing illustrative embodiments, and that the present utility model may be embodied in other specific forms without departing from the spirit or essential characteristics thereof; the above-described embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein.
Claims (9)
1. The chemical vapor deposition reactor capable of protecting a shaft seal is characterized by comprising a reaction zone, an enlarged heat dissipation zone, a heat insulation zone and a sealing flange from bottom to top, wherein the cross sectional areas of the reaction zone and the heat dissipation zone are smaller than the cross sectional area of the enlarged heat dissipation zone, and the cross sectional area of the sealing flange is not smaller than the cross sectional area of the heat dissipation zone;
the motor of the stirring device is arranged above the sealing flange, and the stirring paddle connected with the motor sequentially penetrates through the sealing flange, the heat insulation area and the enlarged heat dissipation area and enters the reaction area to stir materials in the reaction area; the stirring paddle is provided with a shaft seal at a position penetrating through the sealing flange.
2. The chemical vapor deposition reactor capable of protecting a shaft seal according to claim 1, wherein a cooling interlayer is arranged above the sealing flange and below the motor, and the cooling interlayer is provided with a medium inlet and a medium outlet for introducing a cooling medium; the stirring paddle penetrates through the cooling interlayer.
3. The chemical vapor deposition reactor capable of protecting a shaft seal according to claim 1, wherein the heat insulation area is filled with heat insulation materials, and the heat insulation materials are one or more selected from heat insulation cotton, refractory bricks and high-alumina bricks.
4. The chemical vapor deposition reactor capable of protecting a shaft seal according to claim 3, wherein the thickness of the heat insulating material is not less than 50mm.
5. The chemical vapor deposition reactor capable of protecting a shaft seal according to claim 3, wherein the bottom of the heat insulation zone is provided with a load-bearing web for supporting the heat insulation material.
6. The chemical vapor deposition reactor capable of protecting a shaft seal according to claim 2, wherein the cross-sectional area of the cooling interlayer is not greater than the cross-sectional area of the sealing flange, and the cold medium inputted into the cooling interlayer is selected from cold water and cold air.
7. The chemical vapor deposition reactor capable of protecting a shaft seal according to claim 1, wherein the bottom of the reaction zone is provided with an air inlet and a feed inlet for inputting reaction raw materials; a discharge hole is arranged at the top or bottom of the reaction zone and is used for outputting products; the side wall of the expansion heat dissipation area is provided with an air outlet for outputting the reacted waste gas.
8. The chemical vapor deposition reactor capable of protecting a shaft seal according to claim 1, wherein the part of the stirring paddle located in the reaction zone is provided with stirring blades for promoting mass and heat transfer.
9. The chemical vapor deposition reactor capable of protecting a shaft seal according to claim 1, wherein the reaction zone, the enlarged heat dissipation zone and the heat insulation zone are integrally formed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320130729.5U CN218951489U (en) | 2023-01-11 | 2023-01-11 | Chemical vapor deposition reactor capable of protecting shaft seal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320130729.5U CN218951489U (en) | 2023-01-11 | 2023-01-11 | Chemical vapor deposition reactor capable of protecting shaft seal |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218951489U true CN218951489U (en) | 2023-05-02 |
Family
ID=86141095
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320130729.5U Active CN218951489U (en) | 2023-01-11 | 2023-01-11 | Chemical vapor deposition reactor capable of protecting shaft seal |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218951489U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117802575A (en) * | 2024-02-29 | 2024-04-02 | 深圳市美格真空科技有限公司 | Deposition furnace, production equipment and vapor deposition preparation method |
-
2023
- 2023-01-11 CN CN202320130729.5U patent/CN218951489U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117802575A (en) * | 2024-02-29 | 2024-04-02 | 深圳市美格真空科技有限公司 | Deposition furnace, production equipment and vapor deposition preparation method |
| CN117802575B (en) * | 2024-02-29 | 2024-06-11 | 深圳市美格真空科技有限公司 | Deposition furnace, production equipment and vapor deposition preparation method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN218951489U (en) | Chemical vapor deposition reactor capable of protecting shaft seal | |
| CN102749949B (en) | Experimental apparatus suitable for realizing oxygen-controlled reaction | |
| CN100543113C (en) | Vibrating mixed flow formula complete-alternation granule wax shale destructive distillation method and device | |
| CN104650990B (en) | Pressurized circulating fluidized bed slag-draining device | |
| CN108217599B (en) | Reaction device suitable for preparing hydrogen fluoride from calcium fluoride | |
| CN117101589A (en) | Chemical industry reation kettle | |
| CN205886874U (en) | Water -bath heating reaction unit | |
| CN216756387U (en) | Novel fin vortex jacket reactor | |
| CN207324830U (en) | A kind of biological respinse kettle for preventing over-temp and over-pressure | |
| CN106732290A (en) | A kind of reactor of continuous production nitromethane | |
| CN102703099A (en) | Vertical moving bed rice hull carbonization furnace and rice hull carbonizing method thereof | |
| CN215627704U (en) | Combined utilization system for condensate waste heat of carbon four and aromatic hydrocarbon device | |
| CN113587653A (en) | Vacuum furnace for scraping powder type continuous production of silicon monoxide and method for continuously producing silicon monoxide | |
| CN117367121B (en) | Vertical graphite purification integrated furnace and purification method thereof | |
| CN112844284A (en) | Preparation equipment and production process of diethyl aluminum chloride mineral oil | |
| CN2542662Y (en) | Pyrolyzer for preparing fuel by pyrolyzing waste rubber | |
| CN112370947A (en) | Energy-concerving and environment-protective type nitrile rubber reforms transform waste gas waste heat recovery and utilizes device | |
| CN206996521U (en) | A kind of combined type fixed bed reactors | |
| CN109282558A (en) | A kind of reactant quickly cooling device | |
| CN110358569A (en) | Waste plastic oil-refining equipment | |
| CN205635893U (en) | Carbon fiber continuous production activation furnace | |
| CN114653313B (en) | Organosilicon fluidized bed reactor | |
| CN206435214U (en) | A kind of reactor with refrigerating function | |
| CN211936895U (en) | Polyester resin polymerization cauldron | |
| CN219567590U (en) | Silicon wafer purifying operation machine |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |