CN218947254U

CN218947254U - Dust collection type quartz cavity polishing equipment

Info

Publication number: CN218947254U
Application number: CN202320123689.1U
Authority: CN
Inventors: 闫宝福
Original assignee: Donghai County Tuoneng Semiconductor Materials Co ltd
Current assignee: Donghai County Tuoneng Semiconductor Materials Co ltd
Priority date: 2023-02-06
Filing date: 2023-02-06
Publication date: 2023-05-02
Anticipated expiration: 2033-02-06

Abstract

The utility model discloses dust collection type quartz cavity polishing equipment which comprises a fixing frame, wherein a processing frame is arranged on the upper end face of the fixing frame, a mechanical arm arranged on the upper end face of the fixing frame is arranged on the right side of the processing frame, a motor is arranged at one end of the mechanical arm, a polishing wheel is arranged at the output end of the motor, a screen plate is arranged on the bottom end face inside the processing frame in a penetrating mode, a mounting groove is formed in the upper end face of the fixing frame, a drawer positioned below the screen plate is arranged inside the mounting groove, two fans are started in the process of polishing the quartz cavity, dust generated by polishing can be sucked into a collecting box through two ventilation pipes respectively, then a plurality of dust collection bags can be used for filtering and collecting the dust, and meanwhile the dust falling on the bottom of the processing frame can be collected in the drawer through the screen plate, so that the dust generated by polishing can be conveniently collected, and the dust is effectively prevented from being mixed into air and polluting the air.

Description

Dust collection type quartz cavity polishing equipment

Technical Field

The utility model relates to the field of quartz cavity machining, in particular to dust collection type quartz cavity polishing equipment.

Background

The quartz cavity is widely applied to the semiconductor manufacturing technology because the quartz cavity contains less metal impurities, the main substance of the quartz cavity is high-purity silicon dioxide and can bear higher temperature, and the highest temperature can reach 1200 ℃, and flammable gas such as hydrogen, methane and the like is required to be introduced into the quartz cavity spliced up and down in the epitaxial process of the integrated circuit. In order to avoid the potential safety hazard, the quartz cavity used needs to have good sealing performance, pressure resistance, light transmittance, heat insulation and the like.

In order to improve the light transmittance of the quartz cavity, the manufactured quartz cavity is generally required to be polished, when a small amount of quartz cavity is generally polished, the manufactured quartz cavity is often polished manually, and when a large amount of quartz cavity is processed in batches, polishing equipment is adopted for polishing.

In the prior art, no matter manual polishing or mechanical equipment polishing is adopted, dust can be generated on the surface of a quartz cavity in the polishing process, the generated dust is mixed into the air, the workshop environment can be polluted, and the health of other people is influenced, so that the dust collection type quartz cavity polishing equipment is necessary to solve the problem.

Disclosure of Invention

The utility model aims to provide dust collection type quartz cavity polishing equipment which has the characteristics of being convenient for collecting dust generated by polishing, and effectively preventing the dust from being mixed into air and polluting the air.

In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a dust collection type quartz cavity polishing equipment, includes the mount, processing frame is installed to the up end of mount, processing frame's right side is provided with the arm of installing in the mount up end, the motor is installed to the one end of arm, the grinding wheel is installed to the output of motor, the inside bottom surface of processing frame runs through and installs the otter board, the mounting groove has been seted up to the up end of mount, the internally mounted of mounting groove has the drawer that is located the otter board below;

the dust collection device is characterized in that dust collection covers are respectively communicated with the front side wall and the rear side wall of the processing frame, two dust collection covers are respectively communicated with one end, far away from each other, of each dust collection cover, a fan is respectively installed at the other end of each ventilation pipe, two air outlets of the fans are communicated with a collection box located below a fixing frame, a fixing frame is installed inside the collection box, and a plurality of dust collection cloth bags are installed inside the fixing frame.

In order to clamp and fix the quartz cavity, the dust collection type quartz cavity polishing equipment is preferable in the utility model, two electric push rods distributed left and right are arranged in the processing frame, and clamping plates are arranged at the output ends of the two electric push rods.

In order to facilitate fixing the position of the fixing frame, the dust collecting type quartz cavity polishing device is preferable, sealing grooves are formed in the front side wall and the rear side wall of the inside of the collecting box, sealing gaskets are arranged in the two sealing grooves, and the fixing frame is arranged between the two sealing grooves.

In order to exhaust the air in the collecting box, the dust collecting type quartz cavity polishing device is preferably adopted, the bottom of the outer side wall of the collecting box is communicated with an exhaust pipe, and a filter screen is arranged in the exhaust pipe.

In order to enable the ventilation pipes to be telescopic and facilitate the drawer to move, the dust collection type quartz cavity polishing device is preferable, and the two ventilation pipes are corrugated pipes.

In order to facilitate the opening of the collecting box, dust on the dust collecting cloth bag is treated, and the right side wall of the collecting box is provided with a sealing door plate as a preferable dust collecting type quartz cavity polishing device.

Compared with the prior art, the utility model has the following beneficial effects:

when the device is used, a quartz cavity to be polished is placed in a processing frame, then two electric pushing rods are started, so that the quartz cavity is clamped and fixed by two clamping plates, then a mechanical arm is operated, the surface of the quartz cavity is polished by a polishing wheel, in the polishing process, two fans are started, dust generated by polishing can be sucked into a collecting box through two ventilation pipes respectively, then a plurality of dust collecting cloth bags can be used for filtering and collecting the dust, and meanwhile, the dust falling at the bottom of the processing frame can be collected in a drawer through a screen plate, so that the dust generated by polishing is conveniently collected, and the dust is effectively prevented from being mixed into air and polluting the air.

Drawings

FIG. 1 is an overall block diagram of the present utility model;

FIG. 2 is a cross-sectional block diagram of a process frame of the present utility model;

fig. 3 is a left side cross-sectional view of the collection box of the present utility model.

In the figure: 1. a fixing frame; 101. processing a frame; 102. a mechanical arm; 103. a motor; 104. grinding wheel; 2. an electric push rod; 201. a clamping plate; 3. a screen plate; 301. a mounting groove; 302. a drawer; 4. a dust hood; 401. a ventilation pipe; 402. a blower; 5. a collection box; 501. sealing the door plate; 6. sealing grooves; 601. a fixed frame; 602. a dust collecting cloth bag; 7. an exhaust pipe; 701. and (5) a filter screen.

Description of the embodiments

Referring to fig. 1 to 3, a dust collecting type quartz cavity polishing device comprises a fixing frame 1, wherein a processing frame 101 is installed on the upper end face of the fixing frame 1, a mechanical arm 102 installed on the upper end face of the fixing frame 1 is arranged on the right side of the processing frame 101, a motor 103 is installed at one end of the mechanical arm 102, a polishing wheel 104 is installed at the output end of the motor 103, a screen plate 3 is installed at the bottom end face inside the processing frame 101 in a penetrating manner, a mounting groove 301 is formed in the upper end face of the fixing frame 1, and a drawer 302 located below the screen plate 3 is installed inside the mounting groove 301;

the front and back both sides wall of processing frame 101 all communicates there is suction hood 4, and the one end that two suction hoods 4 kept away from relatively all communicates there is ventilation pipe 401, and fan 402 is all installed to the other end of two ventilation pipes 401, and the air outlet intercommunication of two fans 402 has the collection box 5 that is located mount 1 below, and collection box 5 internally mounted has fixed frame 601, and fixed frame 601's internally mounted has a plurality of dust collection sack 602.

In this embodiment: when the device is used, the quartz cavity to be polished is placed in the processing frame 101, then two electric push rods 2 are started, the two clamping plates 201 are moved to clamp and fix the quartz cavity, then the mechanical arm 102 is operated, the polishing wheel 104 polishes the surface of the quartz cavity, in the polishing process, two fans 402 are started, dust generated by polishing can be sucked into the collecting box 5 through the two ventilating pipes 401 respectively, then the dust can be filtered and collected through the plurality of dust collecting bags 602, and meanwhile, the dust falling at the bottom of the processing frame 101 can be collected in the drawer 302 through the screen plate 3, so that dust generated by polishing is conveniently collected, and dust is effectively prevented from being mixed into air to pollute the air.

As a technical optimization scheme of the utility model, two electric push rods 2 distributed left and right are arranged in the processing frame 101, and clamping plates 201 are arranged at the output ends of the two electric push rods 2.

In this embodiment: the quartz cavity to be polished is placed between the two clamping plates 201, and the two clamping plates 201 are moved to clamp and fix the quartz cavity by starting the two electric push rods 2, so that the quartz cavity is convenient to process.

As a technical optimization scheme of the utility model, sealing grooves 6 are formed in the front side wall and the rear side wall of the inside of the collecting box 5, sealing gaskets are arranged in the two sealing grooves 6, and a fixing frame 601 is arranged between the two sealing grooves 6.

In this embodiment: by installing the seal groove 6, the position of the fixing frame 601 can be fixed, and since the seal gasket is installed inside the seal groove 6, the joint between the seal groove 6 and the fixing frame 601 can be sealed, and dust is prevented from leaking from the joint between the seal groove 6 and the fixing frame 601.

As a technical optimization scheme of the utility model, the bottom of the outer side wall of the collecting box 5 is communicated with an exhaust pipe 7, and a filter screen 701 is arranged in the exhaust pipe 7.

In this embodiment: by providing the exhaust pipe 7, the dust collection bag 602 filters the dust in the collection box 5, and the filtered gas is discharged from the exhaust pipe 7, and the discharged air can be further filtered by installing the filter screen 701.

As a technical optimization scheme of the present utility model, both ventilation pipes 401 are corrugated pipes.

In this embodiment: by providing the ventilation pipe 401 as a corrugated pipe, the ventilation pipe 401 is telescopic, and the drawer 302 is convenient to move.

As a technical optimization scheme of the utility model, a sealing door plate 501 is arranged on the right side wall of the collecting box 5.

In this embodiment: by installing the sealing door plate 501, the collection box 5 is conveniently opened, and dust in the dust collection cloth bag 602 is treated.

Working principle: firstly, when the device is used, the device is connected with an external power supply, then a quartz cavity to be polished is placed in the processing frame 101, then two electric push rods 2 are started, the two clamping plates 201 are enabled to move to clamp and fix the quartz cavity, then the mechanical arm 102 is operated, the motor 103 drives the polishing wheel 104 to rotate to polish the surface of the quartz cavity, in the polishing process, two fans 402 are started, two dust suction hoods 4 can suck dust generated by polishing into the collecting box 5 through the two ventilation pipes 401 respectively, then a plurality of dust collection bags 602 can filter the dust, clean air is further filtered through the filter screen 701 and then is discharged from the exhaust pipe 7, the dust collection bags 602 can collect the dust after being filtered, the dust in the dust collection bags 602 can be processed by opening the sealing door plate 501, and the dust falling at the bottom of the processing frame 101 can fall into the drawer 302 through the screen plate 3 in the polishing process, and when the dust collection is cleaned, the drawer 302 can be directly taken out of the mounting groove 301.

The foregoing description of the preferred embodiments of the utility model is not intended to be limiting, but rather is intended to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the utility model.

Claims

1. The utility model provides a dust collection formula quartz cavity equipment of polishing, includes mount (1), processing frame (101) are installed to the up end of mount (1), the right side of processing frame (101) is provided with and installs in arm (102) of mount (1) up end, motor (103) are installed to the one end of arm (102), grinding wheel (104) are installed to the output of motor (103), its characterized in that: the bottom end surface inside the processing frame (101) is provided with a screen plate (3) in a penetrating manner, the upper end surface of the fixing frame (1) is provided with an installation groove (301), and the inside of the installation groove (301) is provided with a drawer (302) positioned below the screen plate (3);

the processing frame is characterized in that the front side wall and the rear side wall of the processing frame (101) are respectively communicated with a dust hood (4), two ends, far away from each other, of the dust hoods (4) are respectively communicated with a ventilation pipe (401), two ends of the ventilation pipes (401) are respectively provided with a fan (402), air outlets of the fans (402) are communicated with a collecting box (5) located below a fixing frame (1), a fixing frame (601) is arranged in the collecting box (5), and a plurality of dust collecting cloth bags (602) are arranged in the fixing frame (601).

2. A dust collecting type quartz cavity polishing apparatus as claimed in claim 1, wherein: two electric push rods (2) distributed left and right are installed in the processing frame (101), and clamping plates (201) are installed at the output ends of the two electric push rods (2).

3. A dust collecting type quartz cavity polishing apparatus as claimed in claim 1, wherein: sealing grooves (6) are formed in the front side wall and the rear side wall of the inside of the collecting box (5), sealing gaskets are arranged in the two sealing grooves (6), and the fixing frame (601) is arranged between the two sealing grooves (6).

4. A dust collecting type quartz cavity polishing apparatus as claimed in claim 1, wherein: the bottom of collecting box (5) lateral wall communicates has blast pipe (7), the internally mounted of blast pipe (7) has filter screen (701).

5. A dust collecting type quartz cavity polishing apparatus as claimed in claim 1, wherein: both ventilation pipes (401) are corrugated pipes.

6. A dust collecting type quartz cavity polishing apparatus as claimed in claim 1, wherein: the right side wall of the collecting box (5) is provided with a sealing door plate (501).