CN218941067U - Interdigital transducer and surface acoustic wave resonator thereof - Google Patents
Interdigital transducer and surface acoustic wave resonator thereof Download PDFInfo
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- CN218941067U CN218941067U CN202223059652.1U CN202223059652U CN218941067U CN 218941067 U CN218941067 U CN 218941067U CN 202223059652 U CN202223059652 U CN 202223059652U CN 218941067 U CN218941067 U CN 218941067U
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Abstract
The utility model discloses an interdigital transducer and a surface acoustic wave resonator thereof, and relates to the technical field of surface acoustic wave devices. The surface acoustic wave resonator comprises a substrate layer, wherein a temperature compensation layer is arranged on one side surface of the substrate layer, a piezoelectric film layer is arranged on one side surface of the temperature compensation layer, and the interdigital transducer is arranged on one side surface of the piezoelectric film layer. The surface acoustic wave resonator uses the interdigital transducer, and can effectively inhibit the generation of a transverse parasitic mode.
Description
Technical Field
The utility model relates to the technical field of surface acoustic wave devices, in particular to an interdigital transducer and a surface acoustic wave resonator thereof.
Background
The surface acoustic wave can be an elastic wave which propagates along the surface and has energy concentrated near the surface and is used widely in resonator, filter, sensor and other products due to the characteristics of high energy density, slow propagation speed and the like. Along with the development of acoustic wave device technology, the acoustic surface wave device is developed towards miniaturization, high frequency and broadband, and meanwhile, the requirement on the power bearing capacity of the acoustic surface wave device is also higher and higher, and because the acoustic surface wave is an acoustic wave, based on the characteristics of the acoustic surface wave device, the acoustic surface wave device inevitably generates more transverse parasitic modes. The specific structure of the present interdigital transducer is shown in fig. 1, and the interdigital transducer comprises a first bus bar and a second bus bar which are oppositely arranged, wherein the first bus bar and the second bus bar have the same structure, the first bus bar is connected with a plurality of first conductive bars and second conductive bars, the first conductive bars and the second conductive bars are mutually parallel to form a comb tooth shape, and the length of the first conductive bars is smaller than that of the second conductive bars; the corresponding second bus bar is connected with a plurality of third conducting bars and fourth conducting bars, the third conducting bars and the fourth conducting bars are mutually parallel to form a comb-tooth shape, and the length of the third conducting bars is smaller than that of the fourth conducting bars; the first conductive strip and the fourth conductive strip are collinear and have a distance therebetween, and the second conductive strip and the third conductive strip are collinear and have a distance therebetween. When the interdigital transducer works, different voltages are arranged between the first bus bar and the second bus bar, so that an electric signal is converted into mechanical vibration, waves generated by the mechanical vibration and generated energy are transmitted in the interdigital transducer, in the process, energy flow angles are generated between the wave transmission direction and the energy flow direction, so that a stray mode in the transverse direction is caused, a transverse parasitic mode is easy to occur, and the performance of the surface acoustic wave resonator manufactured by the interdigital transducer is reduced.
Disclosure of Invention
The technical problems to be solved by the utility model are as follows: an interdigital transducer is provided which can effectively suppress the generation of a lateral parasitic mode.
Another technical problem to be solved by the utility model is: provided is a surface acoustic wave resonator which uses the interdigital transducer described above and can effectively suppress the generation of a lateral parasitic mode.
In order to solve the first technical problem, the technical scheme of the utility model is as follows: the interdigital transducer comprises a first bus bar and a second bus bar which are oppositely arranged, wherein the first bus bar is connected with first electrode fingers which are arranged at intervals, the second bus bar is connected with second electrode fingers which are arranged at intervals, the first electrode fingers and the second electrode fingers are arranged in a staggered mode, an inter-finger gap is arranged between the first electrode fingers and the second bus bar, a first finger end area is arranged between the second electrode fingers and the first bus bar, a second finger end area is arranged between the second electrode fingers and the first bus bar, at least one first blocking conductive bar is arranged in the second finger end area on the first electrode fingers, and at least two first finger end blocking gaps are formed among the first blocking conductive bar, the end parts of the second electrode fingers and the first bus bar; at least one second blocking conducting bar is arranged on the second electrode finger and located in the first finger end area, and at least two second finger end blocking gaps are formed among the second blocking conducting bar, the end parts of the first electrode finger and the second bus bar.
As a preferable scheme, the first barrier conducting strips on the adjacent first electrode fingers are mutually independent, and a first barrier strip gap is arranged between the first barrier conducting strips, and the second barrier conducting strips on the adjacent second electrode fingers are mutually independent, and a second barrier strip gap is arranged between the second barrier conducting strips.
As a preferred solution, the corresponding first barrier conductive strips on adjacent first electrode fingers are connected to form first barrier conductive strips.
As a preferred solution, the number of the first barrier conductive strips is equal to the number of the second barrier conductive strips.
As a preferred scheme, the number of the first barrier conductive strips and the number of the second barrier conductive strips are three.
As a preferred solution, the width of each first barrier conducting strip is equal, or the width of each first barrier conducting strip increases or decreases from inside to outside.
As a preferred solution, the width of each second barrier conducting strip is equal, or the width of each second barrier conducting strip increases or decreases from inside to outside.
As a preferable scheme, the widths of the first finger end blocking gaps are equal, or the widths of the first finger end blocking gaps are gradually increased or decreased from inside to outside; the width of each second finger end blocking gap is equal, or the width of each second finger end blocking gap is gradually increased or decreased from inside to outside.
As a preferable scheme, the length extending direction of the first barrier conducting strip is perpendicular to the first electrode finger, and the length extending direction of the second barrier conducting strip is perpendicular to the second electrode finger.
After the technical scheme is adopted, the utility model has the following effects: because the first electrode finger is provided with at least one first blocking conducting bar in the second finger end area, at least two first finger end blocking gaps are formed among the first blocking conducting bar, the end parts of the second electrode finger and the first bus bar; the second electrode finger is provided with at least one second blocking conducting bar in the area of the first finger end, and at least two second finger end blocking gaps are formed among the second blocking conducting bars, the end parts of the first electrode finger and the second bus bars, so that the first finger end blocking gaps and the second finger end blocking gaps form a plurality of short circuit structures, the electric field intensity of the area can be weakened, the transverse propagation of sound waves in the area is restrained, the generation of transverse parasitic modes is restrained, burrs between resonance points and anti-resonance points are reduced, and the effect of transverse mode restraint is realized.
In order to solve the second technical problem, the technical scheme of the utility model is as follows: the surface acoustic wave resonator comprises a substrate layer, wherein a temperature compensation layer is arranged on one side surface of the substrate layer, a piezoelectric film layer is arranged on one side surface of the temperature compensation layer, an interdigital transducer is arranged on one side surface of the piezoelectric film layer, and the interdigital transducer is the interdigital transducer.
After the technical scheme is adopted, the utility model has the following effects: the interdigital transducer is adopted in the surface acoustic wave resonator, so that the electric field intensity of the area can be weakened, the transverse propagation of sound waves in the area is restrained, the generation of transverse parasitic modes is restrained, burrs between a resonance point and an anti-resonance point are reduced, the effect of transverse mode restraint is realized, and the temperature compensation layer can enable the surface acoustic wave resonator to have a better frequency temperature system and a better Q value.
Drawings
The utility model will be further described with reference to the drawings and examples.
FIG. 1 is a schematic diagram of a prior art interdigital transducer;
FIG. 2 is a schematic structural view of an interdigital transducer according to embodiment 1 of the present utility model;
FIG. 3 is an enlarged schematic view of FIG. 2 at A;
FIG. 4 is a schematic structural view of an interdigital transducer according to embodiment 2 of the present utility model;
FIG. 5 is a schematic structural view of an interdigital transducer according to embodiment 3 of the present utility model;
fig. 6 is a structural cross-sectional view of a surface acoustic wave resonator according to an embodiment of the present utility model;
FIG. 7 is an admittance curve of a prior art SAW resonator;
FIG. 8 is an admittance curve of a SAW resonator of an embodiment of the present utility model;
in fig. 1: 1-1, a first bus bar; 1-2 second bus bars; 1-3, a first conductive strip; 1-4, a second conductive strip; 1-5, a fourth conducting strip; 1-6, a third conducting strip;
fig. 2 to 8: 1. a first bus bar; 2. a second bus bar; 3. a first electrode finger; 4. a second electrode finger; 5. a first barrier conductive strip; 6. a second barrier conductive strip; 7. the first finger end blocks the gap; 8. the second finger end blocks the gap; 9. inter-finger gap; 10. a first spacer gap; 11. a second spacer gap; 12. a substrate layer; 13. a temperature compensation layer; 14. a piezoelectric thin film layer; 15. an interdigital transducer; C. a first finger tip region; B. a second finger end region.
Detailed Description
The present utility model will be described in further detail with reference to the following examples.
As shown in fig. 1, the interdigital transducer in fig. 1 is a current conventional interdigital transducer, and comprises a first bus bar 1-1 and a second bus bar 1-2 which are oppositely arranged, wherein the first bus bar 1-1 and the second bus bar 1-2 have the same structure and are arranged in parallel, the first bus bar 1-1 is connected with a plurality of first conductive bars 1-3 and second conductive bars 1-4, the first conductive bars 1-3 and the second conductive bars 1-4 are mutually parallel to form a comb-tooth shape, the first conductive bars 1-3 and the second conductive bars 1-4 are perpendicular to the first bus bar 1-1, and the length of the first conductive bars 1-3 is smaller than that of the second conductive bars 1-4; the corresponding second bus bar 1-2 is connected with a plurality of third conductive bars 1-6 and fourth conductive bars 1-5, the third conductive bars 1-6 and the fourth conductive bars 1-5 are mutually parallel to form a comb-tooth shape, the third conductive bars 1-6 and the fourth conductive bars 1-5 are perpendicular to the second bus bar 1-2, and the length of the third conductive bars 1-6 is smaller than that of the fourth conductive bars 1-5; the first conductive strip 1-3 and the fourth conductive strip 1-5 are collinear and have a space therebetween, and the second conductive strip 1-4 and the third conductive strip 1-6 are collinear and have a space therebetween.
Example 1
As shown in fig. 2 and 3, this embodiment discloses an interdigital transducer 15, which includes a first bus bar 1 and a second bus bar 2 that are oppositely disposed, the first bus bar 1 and the second bus bar 2 in this embodiment are parallel to each other and have equal widths, the first bus bar 1 is connected with first electrode fingers 3 that are arranged at intervals, the second bus bar 2 is connected with second electrode fingers 4 that are arranged at intervals, the first electrode fingers 3 and the second electrode fingers 4 are staggered with each other and are provided with inter-finger gaps 9 therebetween, the lengths of the first electrode fingers 3 and the second electrode fingers 4 are equal, a first finger end area C is disposed between the first electrode fingers 3 and the second bus bar 2, a second finger end area B is disposed between the second electrode fingers 4 and the first bus bar 1, at least one first blocking conductive bar 5 is disposed in the second finger end area B on the first electrode fingers 3, and at least two first finger end gaps 7 are formed between the ends of the first blocking conductive bar 5 and the second electrode fingers 4 and the first bus bar 1; at least one second blocking conductive strip 6 is arranged on the second electrode finger 4 and positioned in the first finger end region C, and at least two second finger end blocking gaps 8 are formed among the second blocking conductive strip 6, the end parts of the first electrode finger 3 and the second bus bar 2.
In this embodiment, the length extension direction of the first barrier conductive strip 5 is perpendicular to the first electrode finger 3, the length extension direction of the second barrier conductive strip 6 is perpendicular to the second electrode finger 4, the first electrode finger 3 is perpendicular to the first bus bar 1, and the second electrode finger 4 is perpendicular to the second bus bar 2.
In this embodiment, the corresponding first blocking conductive strips 5 on the adjacent first electrode fingers 3 are connected to form first blocking conductive strips, but in this embodiment, the number of the first blocking conductive strips is preferably three, the corresponding second blocking conductive strips 6 on the adjacent second electrode fingers 4 are connected to form second blocking conductive strips, and the number of the second blocking conductive strips is preferably three, so that four first finger end blocking gaps 7 and four second finger end blocking gaps 8 can be formed. In this embodiment, the widths of the first barrier ribs 5 are equal, the widths of the second barrier ribs 6 are equal, and the first barrier ribs 5 and the second barrier ribs 6 are equal.
Of course, the width of each first barrier conducting strip 5 can also be increased or decreased from inside to outside. In this embodiment, the widths of the three first barrier conductive strips 5 are D1, D2, and D3 from inside to outside, and in this embodiment, d1=d2=d3, or D1 > D2 > D3, or D1 < D2 < D3 is preferable. The width of each second barrier rib 6 increases or decreases from inside to outside. Wherein the inner side in the present embodiment is directed to the area between the first bus bar 1 and the second bus bar 2, and vice versa is the inner side.
The width of each first finger end blocking gap 7 is equal, or the width of each first finger end blocking gap 7 increases or decreases from inside to outside; the width of each second finger blocking gap 8 is equal, or the width of each second finger blocking gap 8 increases or decreases from inside to outside. Further preferably, the first finger end barrier gap 7 and the second finger end barrier gap 8 are equal. As shown in fig. 3, the width of the first finger end blocking gap 7 between the first blocking conductive strips 5 and the second electrode fingers 4 is W1, the widths of the first finger end blocking gaps 7 between adjacent first blocking conductive strips 5 from inside to outside are W2, W3, and the width of the first finger end blocking gap 7 between the first blocking conductive strips 5 and the first bus bar 1 is W4, wherein w1=w2=w3=w4, or W1 > W2 > W3 > W4, W1 < W2 < W3 < W4.
The interdigital transducer 15 has a plurality of first finger end blocking gaps 7 and second finger end blocking gaps 8, so that the electric field intensity of the region can be weakened, the propagation of sound waves in the region can be restrained, and the transverse parasitic mode of the surface acoustic wave device can be effectively reduced, as can be seen from the admittance curve in the prior art in fig. 7, a large number of burrs exist between the resonance point and the anti-resonance point, and the burrs are caused by the transverse parasitic mode (transverse mode), while in the embodiment, the admittance curve of the surface acoustic wave resonator in fig. 8 is very smooth and has no burrs, so that the transverse mode can be effectively restrained.
In the present embodiment, the material of the first bus bar 1, the second bus bar 2, the second electrode finger 4, the first electrode finger 3, the first barrier conductive bar 5, and the second barrier conductive bar 6 of the interdigital transducer 15 is at least one of Ti, al, cu, ag, ni, cr, pt, au, mo.
Example 2
The structure of this embodiment is basically the same as that of embodiment 1, except that in this embodiment, the first barrier conductive strips 5 on the adjacent first electrode fingers 3 are each independently provided with a first barrier rib gap 10 therebetween, and the second barrier conductive strips 6 on the adjacent second electrode fingers 4 are each independently provided with a second barrier rib gap 11 therebetween. Although the first barrier conductive strips 5 and the second barrier conductive strips 6 are independent of each other, a first finger end barrier gap 7 is still formed between the first barrier conductive strips 5 and the second electrode fingers 4, and a second finger end barrier gap 8 is formed between the second barrier conductive strips 6 and the first electrode fingers 3, in this embodiment, the number of the first barrier conductive strips 5 is equal to the number of the second barrier conductive strips 6. The number of the first barrier conductive strips 5 and the number of the second barrier conductive strips 6 are three. The length extending direction of the first barrier conducting strip 5 is perpendicular to the first electrode finger 3, and the length extending direction of the second barrier conducting strip 6 is perpendicular to the second electrode finger 4. The first barrier conductive strip 5 and the second barrier conductive strip 6 are both parallel to the first bus bar 1.
Example 3
The structure in this embodiment is the same as that of embodiment 2, and the first barrier conductive strips 5 on the adjacent first electrode fingers 3 are each independently provided with a first barrier strip gap 10 therebetween, and the second barrier conductive strips 6 on the adjacent second electrode fingers 4 are each independently provided with a second barrier strip gap 11 therebetween. In this embodiment, the length extending direction of the first barrier conductive strip 5 is not perpendicular to the first electrode finger 3, the length extending direction of the second barrier conductive strip 6 is not perpendicular to the second electrode finger 4, and the end portion of the first barrier conductive strip 5 covers the first electrode finger 3 and forms a first finger end barrier gap 7, and the end portion of the second barrier conductive strip 6 covers the second electrode finger 4 and forms a second finger end barrier gap 8.
The utility model also discloses a surface acoustic wave resonator, which comprises a substrate layer 12, wherein a temperature compensation layer 13 is arranged on one side surface of the substrate layer 12, a piezoelectric film layer 14 is arranged on one side surface of the temperature compensation layer 13, an interdigital transducer 15 is arranged on one side surface of the piezoelectric film layer 14, the interdigital transducer 15 adopts the interdigital transducer 15, and reflecting grids are arranged on two sides of the interdigital transducer 15.
The substrate layer 12 is made of piezoelectric material, the piezoelectric thin film layer 14 is made of piezoelectric material, and the temperature compensation layer 13 is made of dielectric material, such as oxide material including silicon oxide, etc., which can be formed by CVD, PVD, etcA material layer, wherein the piezoelectric material may be lithium tantalate or lithium niobate or quartz or aluminum nitride, for example, the material of the substrate layer 12 may be aluminum nitride (AlN), doped aluminum nitride, zinc oxide (ZnO), lead zirconate titanate (PZT), lithium niobate (LiNbO) 3 ) Quartz (Quartz), potassium niobate (KNbO) 3 ) Lithium tantalate (LiTaO) 3 ) Or an analog thereof, or a combination thereof.
Since the interdigital transducer 15 of the above embodiment is adopted in the surface acoustic wave resonator, the interdigital transducer 15 has the advantage of being capable of well suppressing the transverse mode.
The above examples are merely illustrative of the preferred embodiments of the present utility model, and are not intended to limit the scope of the present utility model, and various modifications and adaptations of the technical solution of the present utility model should and are intended to fall within the scope of the present utility model as defined in the claims.
Claims (10)
1. An interdigital transducer comprising first and second bus bars disposed opposite each other, characterized in that: the first bus bar is connected with first electrode fingers which are arranged at intervals, the second bus bar is connected with second electrode fingers which are arranged at intervals, the first electrode fingers and the second electrode fingers are arranged in a staggered mode, an inter-finger gap is formed between the first electrode fingers and the second bus bar, a first finger end area is formed between the second electrode fingers and the first bus bar, a second finger end area is formed between the second electrode fingers and the first bus bar, at least one first blocking conductive bar is arranged in the second finger end area on the first electrode fingers, and at least two first finger end blocking gaps are formed among the first blocking conductive bars, the end parts of the second electrode fingers and the first bus bar; at least one second blocking conducting bar is arranged on the second electrode finger and located in the first finger end area, and at least two second finger end blocking gaps are formed among the second blocking conducting bar, the end parts of the first electrode finger and the second bus bar.
2. An interdigital transducer as claimed in claim 1, wherein: the first barrier conducting strips on the adjacent first electrode fingers are mutually independent and are provided with first barrier strip gaps, and the second barrier conducting strips on the adjacent second electrode fingers are mutually independent and are provided with second barrier strip gaps.
3. An interdigital transducer as claimed in claim 1, wherein: corresponding first barrier conductive strips on adjacent first electrode fingers are connected to form first barrier conductive strips.
4. An interdigital transducer as claimed in claim 2 or 3, wherein: the number of the first barrier conductive strips is equal to the number of the second barrier conductive strips.
5. An interdigital transducer as defined in claim 4, wherein: the number of the first barrier conductive strips and the number of the second barrier conductive strips are three.
6. An interdigital transducer as defined in claim 5, wherein: the widths of the first barrier conducting strips are equal, or the widths of the first barrier conducting strips are gradually increased or decreased from inside to outside.
7. An interdigital transducer as defined in claim 6, wherein: the widths of the second barrier conducting strips are equal, or the widths of the second barrier conducting strips are gradually increased or decreased from inside to outside.
8. An interdigital transducer as defined in claim 7, wherein: the width of each first finger end blocking gap is equal, or the width of each first finger end blocking gap is gradually increased or decreased from inside to outside; the width of each second finger end blocking gap is equal, or the width of each second finger end blocking gap is gradually increased or decreased from inside to outside.
9. An interdigital transducer as claimed in claim 8, wherein: the length extending direction of the first barrier conducting strip is perpendicular to the first electrode finger, and the length extending direction of the second barrier conducting strip is perpendicular to the second electrode finger.
10. The utility model provides a surface acoustic wave resonator, includes the substrate layer, a side surface of substrate layer is provided with the temperature compensation layer, a side surface of temperature compensation layer is provided with the piezoelectric thin film layer, a side surface of piezoelectric thin film layer is provided with interdigital transducer, its characterized in that: the interdigital transducer according to any one of claims 1 to 9.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202223059652.1U CN218941067U (en) | 2022-11-17 | 2022-11-17 | Interdigital transducer and surface acoustic wave resonator thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202223059652.1U CN218941067U (en) | 2022-11-17 | 2022-11-17 | Interdigital transducer and surface acoustic wave resonator thereof |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116683885A (en) * | 2023-05-23 | 2023-09-01 | 无锡市好达电子股份有限公司 | Surface acoustic wave device with piston mode |
| CN116938183A (en) * | 2023-09-13 | 2023-10-24 | 锐石创芯(深圳)科技股份有限公司 | Elastic filter device, multiplexer and RF front-end module |
| CN117318662A (en) * | 2023-11-13 | 2023-12-29 | 深圳新声半导体有限公司 | Surface acoustic wave resonator and MEMS device |
| CN117526888A (en) * | 2023-10-07 | 2024-02-06 | 锐石创芯(重庆)科技有限公司 | Elastic wave device and radio frequency front end module |
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2022
- 2022-11-17 CN CN202223059652.1U patent/CN218941067U/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116683885A (en) * | 2023-05-23 | 2023-09-01 | 无锡市好达电子股份有限公司 | Surface acoustic wave device with piston mode |
| CN116683885B (en) * | 2023-05-23 | 2023-12-22 | 无锡市好达电子股份有限公司 | Surface acoustic wave device with piston mode |
| CN116938183A (en) * | 2023-09-13 | 2023-10-24 | 锐石创芯(深圳)科技股份有限公司 | Elastic filter device, multiplexer and RF front-end module |
| CN116938183B (en) * | 2023-09-13 | 2024-01-09 | 锐石创芯(深圳)科技股份有限公司 | Elastic filter device, multiplexer and RF front-end module |
| CN117526888A (en) * | 2023-10-07 | 2024-02-06 | 锐石创芯(重庆)科技有限公司 | Elastic wave device and radio frequency front end module |
| CN117318662A (en) * | 2023-11-13 | 2023-12-29 | 深圳新声半导体有限公司 | Surface acoustic wave resonator and MEMS device |
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