CN218940967U - Piezoelectric positioning platform based on flexible hinge and industrial camera - Google Patents
Piezoelectric positioning platform based on flexible hinge and industrial camera Download PDFInfo
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- CN218940967U CN218940967U CN202222972967.9U CN202222972967U CN218940967U CN 218940967 U CN218940967 U CN 218940967U CN 202222972967 U CN202222972967 U CN 202222972967U CN 218940967 U CN218940967 U CN 218940967U
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Abstract
The utility model discloses a piezoelectric positioning platform based on a flexible hinge and an industrial camera, and relates to the field of micro-nano positioning platforms. The piezoelectric positioning platform comprises a platform substrate and a positioning platform fixed on the platform substrate, wherein a through hole is formed in the positioning platform, and a moving part and a pre-tightening pressing block are arranged in the through hole; the piezoelectric positioning platform also comprises piezoelectric ceramics, the piezoelectric ceramics are arranged between the moving part and the pre-pressing block, and the piezoelectric ceramics are used for pushing the moving part to move. Compared with the prior art that an external device or a screwing-in fastener is adopted, an elastic element is arranged and other pre-tightening strategies are adopted, the piezoelectric ceramic pre-tightening mechanism is integrated into the flexible hinge positioning platform, and the self-recovery trend of the flexible beam after elastic deformation is utilized to realize piezoelectric ceramic pre-tightening; the scheme can improve the dynamic performance of the system under high frequency, and meanwhile, the flexible hinge is provided with the displacement guiding mechanism, so that the coupling between multi-axis motions can be reduced, and the positioning precision is improved.
Description
Technical Field
The utility model relates to the field of micro-nano positioning platforms, in particular to a piezoelectric positioning platform based on a flexible hinge and an industrial camera.
Background
The precise positioning technology is a core technology in precise machining, precise measurement and precise driving, and is widely applied to the fields of micromachining, semiconductor technology, ultra-precise machining, bioengineering, life and medical technology and the like. As an important component in precision positioning systems, micro-nano positioning platforms are capable of providing micrometer-scale step displacements with nanometer-scale resolution. The fixed end of the micro-nano positioning platform is fixedly arranged on the equipment, and the moving end of the micro-nano positioning platform is provided with a mechanism for stepping displacement.
The flexible hinge is an elastic support designed by utilizing the local deformation of the component, and has the characteristics of no friction in motion, high response speed, high precision and the like. The piezoelectric ceramic is made of inverse piezoelectric effect of some materials, and is deformed under the excitation of external electric field, and is commonly used for micro-displacement driving and controlling. The piezoelectric positioning platform manufactured based on the flexible hinge has small displacement delay and high resolution, the precision of the piezoelectric positioning platform can reach the nanometer level, and the piezoelectric positioning platform is widely applied to the precision positioning fields of ultra-precision machining, bioengineering, microelectronic packaging and the like.
In the prior art, screw holes are reserved on a flexible positioning platform, the piezoelectric ceramic is pre-tightened by screwing in screws and matching with a cushion block, and other means are that a screw device is matched with a wedge block, an elastic element is arranged in the opposite direction of the movement of the mechanism, and the like.
In the piezoelectric pre-tightening strategy, the mode that the pre-tightening screw compresses the piezoelectric ceramic is characterized in that the screw and the cushion block are in a mass-spring system when in high-frequency use, so that the vibration reduction effect is achieved, the bandwidth of system response is reduced, in the mode, the pre-tightening screw is required to be subjected to anti-loosening treatment, and the washer-type device is usually used for transmitting pre-tightening force, so that the screw is prevented from applying concentrated force to the piezoelectric ceramic, damage is caused, and inconvenience is brought to disassembly. The mode of the screw device matched with the wedge block is easy to generate lateral force, and the piezoelectric ceramics are also easy to damage when bearing the lateral force, and multiaxial motion coupling is easy to cause. The way in which the elastic element is arranged in the opposite direction of the movement of the mechanism may cause resonance problems.
Disclosure of Invention
Aiming at the technical problems, the utility model provides a novel piezoelectric ceramic pre-tightening mechanism which is integrated to a flexible hinge positioning platform, so that the dynamic performance of the system under high frequency can be improved, and meanwhile, the flexible hinge is provided with a displacement guiding mechanism, so that the coupling between multi-axis motions can be reduced, and the positioning precision of the piezoelectric positioning platform can be improved.
In order to achieve the above purpose, the present utility model adopts the following technical scheme:
a flexible hinge-based piezoelectric positioning platform, comprising:
a platform base;
the positioning platform is fixed on the platform substrate, a through hole is formed in the positioning platform, a moving part and a pre-tightening pressing block are arranged in the through hole, and the moving part is positioned above the pre-tightening pressing block; a gap exists between the moving part and the platform substrate;
the piezoelectric ceramic is arranged between the moving part and the pre-pressing block and is used for pushing the moving part to move along the vertical direction; a gap exists between the piezoelectric ceramic and the platform substrate; the free length of the piezoelectric ceramic is larger than the distance between the moving part and the pre-pressing block;
the left side and the right side of the moving part are respectively provided with a plurality of flexible beams symmetrically distributed along the moving part, and the flexible beams are connected with the positioning platform so as to enable the moving part to maintain vertical displacement; the pre-compression block is fixed on the platform substrate; the left side and the right side of the pre-tightening pressing block are respectively provided with a plurality of pre-tightening beams symmetrically distributed along the pre-tightening pressing block, and the pre-tightening beams are connected with the positioning platform to pre-tighten and limit the piezoelectric ceramics.
Further, the through holes are formed in the upper surface of the positioning platform, and the through holes penetrate through the upper surface and the lower surface of the positioning platform.
Further, the pre-tightening beam is a deformable elastic beam, and the deformation direction of the pre-tightening beam is consistent with the driving direction of the piezoelectric ceramics.
Further, flexible hinges are arranged at two ends of the pre-tightening beam and the flexible beam, and the pre-tightening beam, the pre-tightening block and the positioning platform are respectively connected through the flexible hinges; the pre-tightening beam and the flexible beam are respectively connected with the pre-tightening block and the positioning platform and the moving part and the positioning platform through flexible hinges.
Further, the positioning platform further comprises a displacement sensor, and the displacement sensor is arranged between the positioning platform and the moving part and used for detecting the displacement of the moving part.
Further, the pre-compression block is fixed to the platform base, comprising: the platform substrate is provided with a threaded hole, the pre-tightening pressing block is provided with a fixing hole corresponding to the threaded hole, and the pre-tightening pressing block is fixedly connected with the platform substrate through a screw.
Further, the flexible hinge is one of a right angle type flexible hinge, a round angle type flexible hinge, a semicircular type flexible hinge, an elliptic type flexible hinge, a hyperbolic type flexible hinge, a cycloid type flexible hinge and a polynomial type flexible hinge.
Further, the positioning platform further comprises an elastic element for increasing the pretightening force, and the elastic element is arranged between the pretightening pressing block and the positioning platform.
Further, the moving part comprises a moving part bottom plate and a groove, wherein the groove is arranged on the moving part bottom plate; the groove is internally provided with a second pre-tightening beam, a second flexible beam, a moving block, a second displacement sensor, a second pre-tightening pressing block and second piezoelectric ceramics, and gaps are reserved between the second pre-tightening beam, the second flexible beam, the moving block, the second displacement sensor, the second pre-tightening pressing block and the second piezoelectric ceramics and a bottom plate of the moving part; connecting the moving block and the moving part through the second flexible beam; and the second pre-tightening pressing block is connected with the moving part through the second pre-tightening beam.
Further, the second piezoelectric ceramic is arranged between the moving block and the second pre-pressing block, and the free length of the second piezoelectric ceramic is larger than the distance between the moving block and the second pre-pressing block; the second piezoelectric ceramic is used for pushing the moving block to move along the horizontal direction.
Further, the second pre-tightening pressing block is fixedly connected with the moving part bottom plate, so that the second pre-tightening pressing block and the moving part are synchronously displaced.
In another aspect, the present utility model also provides an industrial camera, including:
the piezoelectric positioning platform is arranged in the shell;
the piezoelectric positioning platform is fixedly arranged on the inner side of the shell and used for driving the imaging assembly to move;
the imaging component is arranged on a moving part or a moving block inside the shell; and the imaging component performs pixel-level step displacement along with the moving part or the moving block, and is used for acquiring a pixel displacement image sequence, and super-resolution images are obtained through image super-resolution reconstruction.
According to the technical scheme, the beneficial effects of the utility model are as follows:
(1) In the prior art, the realization of the piezoelectric ceramic pretension is realized by means of a screw device matched with a cushion block or a wedge block, and the piezoelectric ceramic pretension mechanism is integrated into the flexible hinge platform body without additional devices or devices.
(2) The prior art needs to set up the pretension screw specially, and screw pretension is because the existence of screw clearance, needs locking processing, needs to assist with gasket class device simultaneously, prevents that the screw from exerting concentrated force to piezoceramics, causes the damage, disassembles inconveniently. The scheme uses the self-recovery trend of the deformation of the elastic beam to pre-tighten the piezoelectric ceramics, and the pre-tightening load is applied according to different principles; meanwhile, the technical scheme of the scheme is convenient for mounting and dismounting the piezoelectric ceramics.
(3) In the scheme, the piezoelectric ceramic is directly contacted with the moving part, the contact rigidity is high, the high-frequency dynamic response speed of the moving platform is high, and the mass formed by the screw and the cushion block in the prior art, namely the spring system, plays a role in vibration reduction when in high-frequency use, reduces the response bandwidth of the system, and reduces the response speed of the system.
Description of the drawings:
FIG. 1 is a schematic diagram of the overall structure of a piezoelectric positioning platform according to embodiment 1 of the present utility model;
FIG. 2 is a cross-sectional view of a piezoelectric positioning stage according to embodiment 1 of the present utility model;
FIG. 3 is a schematic view of a piezoelectric ceramic mounted on a positioning platform according to embodiment 1 of the present utility model;
FIG. 4 is an enlarged view of the utility model at A of FIG. 3;
FIG. 5 is a schematic view of a positioning platform according to embodiment 1 of the present utility model displaced vertically;
FIG. 6 is a schematic diagram of the overall structure of a piezoelectric positioning platform according to embodiment 2 of the present utility model;
FIG. 7 is a schematic diagram of the overall structure of a piezoelectric positioning platform according to embodiment 3 of the present utility model;
fig. 8 is a sectional view of a piezoelectric positioning stage according to embodiment 3 of the present utility model.
In the figure:
1. a platform base; 2. positioning a platform; 2-1, a fixing part; 2-2, outside mounting holes; 2-3, pre-tightening the beam; 2-4, a first pre-tightening pressing block; 2-5, a first pre-compressed block fixing hole; 2-6, flexible beams; 2-7, a moving part; 2-8, a first displacement sensor mounting hole; 3. an outer fixing screw; 4. a first piezoelectric ceramic; 5. an inner fixing screw; 6. a first displacement sensor; 7. an elastic element; 2-7-1, a second displacement sensor mounting hole; 2-7-2, a second flexible beam; 2-7-3, a second pre-tightening pressing block; 2-7-4, a second pre-tightening beam; 2-7-5, a second pre-compressed block fixing hole; 2-7-6, a movable part bottom plate; 2-7-7, moving block; 8. and a second piezoelectric ceramic.
The specific embodiment is as follows:
for the purpose of making the objects, technical solutions and advantages of the embodiments of the present utility model more apparent, the technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model, and it is apparent that the described embodiments are some embodiments of the present utility model, but not all embodiments of the present utility model.
Aiming at the problems in the prior art, the utility model provides a novel piezoelectric ceramic pre-tightening mechanism, integrates the mechanism into a flexible hinge positioning platform, and simultaneously sets a displacement guide mechanism on the flexible hinge, so as to improve the dynamic performance of the positioning platform under high frequency, reduce the coupling between multi-axis motions, improve the output performance of the piezoelectric positioning platform and realize the precise positioning of the piezoelectric positioning platform.
Example 1
As shown in fig. 1 to 5, a piezoelectric positioning platform according to embodiment 1 of the present utility model includes a platform base 1 and a positioning platform 2 fixed on the platform base 1, wherein the positioning platform 2 is a vertical single-axis positioning platform.
The platform base 1 is usually a precision vibration isolation platform for bearing the positioning platform 2; when the positioning platform 2 is displaced step by step, the platform substrate 1 isolates external environment vibration so as to reduce the influence of environment noise on positioning accuracy.
As shown in fig. 1, the positioning platform 2 is externally provided with a fixing portion 2-1, four corners of the fixing portion 2-1 are respectively provided with an outer side mounting hole 2-2, and the outer side fixing screws 3 are fixedly connected with the outer side of the platform base 1, so that the platform base 1 does not move along with the displacement of the positioning platform 2, and the relative movement between the platform base 1 and the positioning platform 2 is avoided, and the positioning accuracy is further affected.
As shown in fig. 2, a through hole is formed on the upper surface of the positioning platform 2, and the through hole penetrates through the upper surface and the lower surface of the positioning platform 2. The through hole is internally provided with a moving part 2-7 and a first pre-compression block 2-4, and the moving part 2-7 is positioned above the first pre-compression block 2-4; the gap exists between the moving part 2-7 and the platform substrate 1, so that friction between the moving part 2-7 and the platform substrate 1 in the moving process is avoided, and further relative movement is generated, and the positioning accuracy is influenced.
As shown in fig. 3, the first piezoelectric ceramic 4 is mounted between the moving part 2-7 and the first pre-pressing block 2-4, and the distance between the moving part 2-7 and the first pre-pressing block 2-4 represents a reserved mounting space of the first piezoelectric ceramic 4, and the distance between the moving part 2-7 and the first pre-pressing block 2-4 is smaller than the free length of the first piezoelectric ceramic 4. When the first piezoelectric ceramic 4 is placed in a preset installation space of the positioning platform 2, the first piezoelectric ceramic is used for pushing the moving part 2-7 to move along the vertical direction.
The specific process of installing the first piezoelectric ceramic 4 on the positioning platform 2 is as follows: when the platform substrate 1 is fixed by the constraint fixing part 2-1 through the outer fixing screw 3; meanwhile, when the external force drives the first pre-compression block 2-4 to displace along the vertical downward direction, the pre-compression beam 2-3 will elastically deform, the installation space of the reserved first piezoelectric ceramic 4 is increased, the first piezoelectric ceramic 4 is placed in the reserved installation space at the moment, the external force is removed, the first piezoelectric ceramic 4 is compressed between the first pre-compression block 2-4 and the moving part 2-7 by utilizing the self-recovery trend of the elastic deformation of the pre-compression beam 2-3, and the installation and pre-compression of the first piezoelectric ceramic 4 are completed. After the first piezoelectric ceramic 4 is installed, the first pre-compression block 2-4 is fixedly connected with the platform substrate 1 by the aid of the first pre-compression block fixing holes 2-5 and the inner side fixing screws 5, so that no relative movement exists between the platform substrate 1 and the first pre-compression block 2-4, and influences on positioning accuracy are avoided.
The left side and the right side of the moving part 2-7 are respectively provided with a plurality of flexible beams 2-6 symmetrically distributed along the moving part 2-7, and the flexible beams 2-6 are connected with the positioning platform 2, so that the moving part 2-7 maintains vertical displacement. Because the flexible beams 2-6 are symmetrically distributed on the two sides of the moving part 2-7, when the moving part 2-7 is driven by the first piezoelectric ceramic 4 in the vertical direction, the flexible beams 2-6 which are symmetrical on the two sides of the moving part 2-7 always keep the horizontal stress symmetry on the moving part 2-7, and the horizontal stress on the two sides of the moving part 2-7 are mutually offset; that is, the moving part 2-7 is always kept moving in the vertical direction when it is acted on by the first piezoelectric ceramic 4.
The first pre-compression block 2-4 is provided with a first pre-compression block fixing hole 2-5 corresponding to the threaded hole on the platform base 1, and the first pre-compression block 2-4 is fixedly connected with the platform base 1 through an inner side fixing screw 5. The left side and the right side of the first pre-tightening pressing block 2-4 are respectively provided with a pre-tightening beam 2-3 which is symmetrically distributed along the first pre-tightening pressing block 2-4 and is used for pre-tightening and limiting the first piezoelectric ceramic 4 by connecting the pre-tightening beams 2-3 with the positioning platform 2.
The flexible beams 2-6 are deformable elastic beams, and the deformation direction of the flexible beams is consistent with the driving direction of the first piezoelectric ceramics 4. The flexible beam 2-6 may define the displacement of the moving part 2-7 in the set direction, and referring to fig. 5, if a certain excitation voltage is applied to the first piezoelectric ceramic 4, the first piezoelectric ceramic 4 will elongate, the flexible beam 2-6 will bend and deform, and the moving part 2-7 will displace in the vertical direction. The bending deformation of the flexible beams 2-6 allows a certain displacement space of the moving part 2-7 in the vertical direction on the one hand, and on the other hand, the flexible beams 2-6 hinder the deflection and displacement of the moving part 2-7 in other directions, since axial deformation is more difficult than bending deformation.
The two ends of the flexible beam 2-6 are provided with flexible hinges, and the flexible beam 2-6 is connected with the moving part 2-7 and the positioning platform 2 respectively through the flexible hinges.
The pre-tightening beam 2-3 is a deformable elastic beam, flexible hinges are arranged at two ends of the pre-tightening beam 2-3, and the pre-tightening beam 2-3 is connected with the first pre-tightening pressing block 2-4 and the positioning platform 2 respectively through the flexible hinges; referring to fig. 4 (enlarged view at a of fig. 3), the first pretensioning block 2-4 is flexibly connected with the pretensioning beam 2-3, and the connection is a semicircular flexible hinge.
The flexible hinge can be replaced by any one of a right-angle flexible hinge, a round-angle flexible hinge, a semicircular flexible hinge, an elliptic flexible hinge, a hyperbolic flexible hinge, a cycloid flexible hinge and a polynomial flexible hinge, and the number can be changed according to actual requirements.
The design of the pre-tightening beam 2-3 meets the following conditions: (1) Pretightening force
Is not smaller than the maximum inertia force applied to the first piezoelectric ceramic 4 in the dynamic use process
，
Is effective massThe amount of the product is calculated,
for maximum acceleration during movement, the first piezoelectric ceramic 4 is prevented from being damaged by inertial tension, i.e. the difference between the free length of the first piezoelectric ceramic 4 and the length of the installation space of the reserved first piezoelectric ceramic 4
The elastic self-restoring force of the pre-tightening beam 2-3 is large enough because the pre-tightening beam cannot be too small; (2) Maximum stress intensity of pre-tightening beam 2-3 during deformation
Should be in the safe use range of materials
In the method, one or more of the first, second, third and fourth strength theories can be selected for checking according to the difference of the material and the working state of the pre-tightening beam 2-3,
to pre-tighten the yield strength of the beam 2-3 material,
is a safety coefficient; (3) The allowance of the installation space of the first piezoelectric ceramics 4 is reserved
To facilitate assembly of the first piezoelectric ceramic 4.
Taking the pretension beam 2-3 as a straight beam as an example, an optimization design method taking the minimum use stress as a criterion comprises the following steps:
wherein the method comprises the steps of
Respectively the length, the height and the thickness of the pre-tightening beams 2-3, when
When determining, pretightening force
And (3) with
Related to maximum stress intensity
Maximum deformation with pretensioned beam 2-3
And (5) correlation.
The positioning platform 2 further includes a first displacement sensor 6, where the first displacement sensor 6 may be a capacitive sensor, an inductive sensor, or the like. The first displacement sensor 6 is arranged between the positioning platform 2 and the moving part 2-7, and the first displacement sensor 6 is arranged in the first displacement sensor mounting hole 2-8 and is used for detecting the displacement of the moving part 2-7 along the vertical direction; and the excitation voltage of the first piezoelectric ceramic 4 is controlled in this way, so that quick and high-precision positioning is realized. Under the practical application condition, the first displacement sensor 6 can be added or removed, and the first displacement sensor mounting holes 2-8 can be added or removed accordingly.
Example 2
As shown in fig. 6, the embodiment 2 of the present utility model is based on the embodiment 1, and an elastic member 7 is additionally provided. The elastic element 7 is arranged between the first pre-tightening pressing block 2-4 and the positioning platform 2, and the elastic element 7 can be a spring.
The elastic element 7 has an adjusting function on the distance between the first pre-pressing block 2-4 and the moving part 2-7, and when the distance between the first pre-pressing block 2-4 and the moving part 2-7 is too large to limit the first piezoelectric ceramic 4, the elastic element 7 can increase the pre-tightening function of the first pre-pressing block 2-4 on the first piezoelectric ceramic 4 to realize the limiting and pre-tightening functions of the first pre-pressing block 2-4 on the first piezoelectric ceramic 4; when the distance between the first pre-pressing block 2-4 and the moving part 2-7 is too small, after the first piezoelectric ceramic 4 is installed, the pre-pressing beam 2-3 always keeps a tensioning state on the first pre-pressing block 2-4, acting force of the pre-pressing beam 2-3 on the first pre-pressing block 2-4 is dispersed through the elastic element 7, the tensioning state of the pre-pressing beam 2-3 is buffered, elastic fatigue of the pre-pressing beam 2-3 is avoided, and the service life of the pre-pressing beam 2-3 is shortened.
Example 3
In order to embody the piezoelectric positioning platform, the motion and displacement detection in the horizontal direction and the vertical direction which are perpendicular to each other can be realized. As shown in fig. 7 to 8, the positioning stage 2 of the present embodiment 3 is a horizontal, vertical biaxial positioning stage.
In embodiment 3 of the present utility model, on the basis of embodiment 1, a groove is formed in the moving part 2-7, and the groove is formed in the moving part bottom plate 2-7-6; the groove is internally provided with a moving block 2-7-7, a second pre-tightening pressing block 2-7-3 and a second piezoelectric ceramic 8, and the moving block 2-7-7, the second pre-tightening pressing block 2-7-3 and the second piezoelectric ceramic 8 are all arranged on the moving part bottom plate 2-7-6. Gaps exist between the moving blocks 2-7-7 and the second piezoelectric ceramics 8 and the moving part bottom plates 2-7-6 respectively, so that friction between the moving blocks 2-7-7 and the second piezoelectric ceramics 8 and the moving part bottom plates 2-7-6 in the moving process is avoided, and positioning accuracy is influenced.
The second piezoelectric ceramic 8 is installed between the moving block 2-7-7 and the second pre-tightening block 2-7-3 for driving the moving block 2-7-7 to move in the horizontal direction. When the second piezoelectric ceramic 8 is not installed, the distance between the second pre-tightening pressing block 2-7-3 and the moving block 2-7-7 is smaller than the free length of the second piezoelectric ceramic 8, namely the reserved installation space of the second piezoelectric ceramic 8 is smaller than the free length of the second piezoelectric ceramic 8.
The specific process of installing the second piezoelectric ceramic 8 on the moving part 2-7 is as follows: when the platform substrate 1 is fixed by the constraint fixing part 2-1 of the outer side fixing screw 3 and the first pre-tightening pressing block 2-4 is constrained by the inner side fixing screw 5, the fixation of the positioning platform 2 and the platform substrate 1 is completed. Meanwhile, when the external force drives the second pre-tightening pressing block 2-7-3 to move rightwards along the horizontal direction, the second pre-tightening beam 2-7-4 is elastically deformed, the installation space of the reserved second piezoelectric ceramic 8 is increased, the second piezoelectric ceramic 8 is placed in the reserved installation space, the self-recovery trend of the elastic deformation of the second pre-tightening beam 2-7-4 is removed by the external force, the second piezoelectric ceramic 8 is tightly pressed between the second pre-tightening beam 2-7-4 and the moving block 2-7-7, and therefore the installation and pre-tightening of the second piezoelectric ceramic 8 are completed. After the second piezoelectric ceramic 8 is installed, the second pre-tightening block fixing holes 2-7-5 are matched with fixing bolts to fixedly connect the second pre-tightening block 2-7-3 with the moving part bottom plate 2-7-6, so that the second pre-tightening block 2-7-3 synchronously moves along with the moving part 2-7.
The second flexible beams 2-7-2 are symmetrically distributed on two sides of the moving block 2-7, and are connected with the moving part 2-7 through the second flexible beams 2-7-2, so that the moving block 2-7-7 maintains horizontal displacement. Because the second flexible beams 2-7-2 are symmetrically distributed on the two sides of the moving block 2-7, when the moving block 2-7-7 is driven by the second piezoelectric ceramics 8 in the horizontal direction, the second flexible beams 2-7-2 which are symmetrical on the two sides of the moving block 2-7-7 always keep the vertical stress symmetry on the moving block 2-7, and the horizontal stress on the two sides of the moving block 2-7-7 are mutually offset; i.e. the moving mass 2-7-7 remains moving in the horizontal direction all the time when it is subjected to the action of the second piezo-ceramic 8.
The second flexible beam 2-7-2 is a deformable elastic beam, and the deformation direction of the second flexible beam is consistent with the driving direction of the second piezoelectric ceramic 8; the second flexible beam 2-7-2 may define a displacement of the moving block 2-7-7 in a set direction. Specifically, if the second piezoelectric ceramic 8 is given a certain excitation voltage, the second piezoelectric ceramic 8 will elongate, the second flexible beam 2-7-2 will bend and deform, and the moving block 2-7-7 will displace in the horizontal direction. The bending deformation of the second flexible beam 2-7-2 allows a certain displacement space of the movable block 2-7-7 in the horizontal direction on the one hand, and on the other hand, the second flexible beam 2-7-2 hinders the deflection and displacement of the movable block 2-7-7 in other directions because the axial deformation is more difficult than the bending deformation.
And flexible hinges are arranged at two ends of the second flexible beam 2-7-2, and the connection between the second flexible beam 2-7-2 and the moving block 2-7 and the moving part 2-7 is realized through the flexible hinges.
The second pre-tightening beams 2-7-4 are symmetrically distributed on two sides of the second pre-tightening pressing block 2-7-3, and the second pre-tightening pressing block 2-7-3 and the moving part 2-7 are connected through the second pre-tightening beams 2-7-4 to pre-tighten and limit the second piezoelectric ceramics 8. The design requirements of the second pre-tightening beam 2-7-4 are consistent with the design requirements of the pre-tightening beam 2-3. The second pre-tightening beam 2-7-4 is a deformable elastic beam, flexible hinges are arranged at two ends of the second pre-tightening beam 2-7-4, and connection between the second pre-tightening beam 2-7-4 and the second pre-tightening pressing block 2-7-3 and the moving part 2-7 is achieved through the flexible hinges.
The flexible hinge can be replaced by any one of a right-angle flexible hinge, a round-angle flexible hinge, a semicircular flexible hinge, an elliptic flexible hinge, a hyperbolic flexible hinge, a cycloid flexible hinge and a polynomial flexible hinge, and the number can be changed according to actual requirements.
The second displacement sensor mounting hole 2-7-1 is arranged between the moving block 2-7-7 and the moving part 2-7 and is used for mounting a displacement sensor to detect the displacement of the moving block 2-7-7 along the horizontal direction and control the excitation voltage of the second piezoelectric ceramic 8 so as to realize quick and high-precision positioning. Under the practical application condition, the displacement sensor can be added or removed, and the second displacement sensor mounting hole 2-7-1 can be added or removed.
The working principle of the utility model is as follows:
according to the scheme, piezoelectric ceramics are integrated into the flexible hinge positioning platform, the piezoelectric ceramics are preloaded by utilizing the self-recovery trend after the flexible beam is elastically deformed, the piezoelectric ceramics are in direct contact with the moving part 2-7 or the moving block 2-7-7, and the moving part 2-7 or the moving block 2-7-7 can quickly respond and provide displacement so as to realize the precise positioning of the piezoelectric positioning platform. The method comprises the following steps:
if the first piezoelectric ceramic 4 is given a certain excitation voltage, the first piezoelectric ceramic 4 will elongate, the flexible beams 2-6 symmetrically distributed on both sides of the moving part 2-7 will bend, and the bending deformation of the flexible beams 2-6 allows a certain displacement space of the moving part 2-7 along the vertical direction on one hand, and blocks the deflection and displacement of the moving part 2-7 along other directions on the other hand. The first displacement sensor 6 arranged at the first displacement sensor mounting hole 2-8 is used for detecting the displacement of the moving part 2-7 along the vertical direction, and controlling the excitation voltage of the first piezoelectric ceramic 4 according to the displacement, so as to realize the rapid and high-precision positioning of the displacement of the moving part 2-7 along the vertical direction. In addition, if the second piezoelectric ceramic 8 is given a certain excitation voltage, the second piezoelectric ceramic 8 will elongate, and the second flexible beams 2-7-2 distributed on both sides of the moving block 2-7-7 are bent and deformed, and the bending and deformation of the second flexible beams 2-7-2 allow a certain displacement space of the moving block 2-7-7 along the horizontal direction on one hand, and prevent the deflection and displacement of the moving block 2-7-7 along other directions on the other hand. And the displacement sensor arranged in the second displacement sensor mounting hole 2-7-1 is used for detecting the displacement of the movable block along the horizontal direction, and the excitation voltage of the second piezoelectric ceramic 8 is controlled according to the displacement, so that the displacement of the movable block 2-7-7 along the horizontal direction can be rapidly and accurately positioned. In conclusion, the piezoelectric positioning platform can realize motion and displacement detection in two directions of horizontal direction and vertical direction which are perpendicular to each other.
The piezoelectric ceramic is pre-tensioned by utilizing the self-recovery trend of the deformation of the elastic beam, so that the piezoelectric ceramic is convenient to install and disassemble, the phenomenon that the screw applies concentrated force to the piezoelectric ceramic to cause damage is avoided, and the piezoelectric ceramic is inconvenient to disassemble; in the scheme, the piezoelectric ceramic is directly contacted with the moving part 2-7 or the moving block 2-7-7, so that the contact rigidity is high, the response speed of the piezoelectric positioning platform is high under high-frequency dynamic, the coupling between multi-axis motions in the piezoelectric positioning platform is reduced, and the positioning precision of the piezoelectric positioning platform is improved.
The utility model also provides an industrial camera which comprises a shell, an imaging component and the piezoelectric positioning platform. The piezoelectric positioning platform is fixedly arranged in the shell and used for driving the imaging assembly to move; the imaging component comprises an image sensor, and is arranged on the moving part 2-7 of the piezoelectric positioning platform, and pixel displacement is realized along with the displacement of the moving part 2-7, so that an industrial camera can sequentially collect a pixel displacement image sequence, process the series of images through an image fusion algorithm, and further obtain a super-resolution image.
Taking 1/2 pixel displacement as an example, the process of driving the imaging component to realize pixel displacement by the displacement of the moving part 2-7 is described below; the single pixel is set as square with the size of pxp, four images are shot in sequence according to relative coordinates (0, 0) - (p/2, 0) - (0, p/2) - (p/2 ), and then a super-resolution image with the resolution four times that of the original image can be obtained through an image fusion algorithm.
Image Fusion (Image Fusion) refers to the process of integrating information of multiple input images to obtain a higher quality output Image, and the fused Image should be more suitable for further observation or processing than the multiple images before Fusion.
The above embodiments are only for illustrating the technical solution of the present utility model, and are not limiting; although the utility model has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present utility model.
Claims (12)
1. A piezoelectric positioning platform based on flexible hinges, comprising:
a platform base;
the positioning platform is fixed on the platform substrate, a through hole is formed in the positioning platform, a moving part and a pre-tightening pressing block are arranged in the through hole, and the moving part is positioned above the pre-tightening pressing block; a gap exists between the moving part and the platform substrate;
the piezoelectric ceramic is arranged between the moving part and the pre-pressing block and is used for pushing the moving part to move along the vertical direction; a gap exists between the piezoelectric ceramic and the platform substrate; the free length of the piezoelectric ceramic is larger than the distance between the moving part and the pre-pressing block;
the left side and the right side of the moving part are respectively provided with a plurality of flexible beams symmetrically distributed along the moving part, and the flexible beams are connected with the positioning platform so as to enable the moving part to maintain vertical displacement; the pre-compression block is fixed on the platform substrate; the left side and the right side of the pre-tightening pressing block are respectively provided with a plurality of pre-tightening beams symmetrically distributed along the pre-tightening pressing block, and the pre-tightening beams are connected with the positioning platform to pre-tighten and limit the piezoelectric ceramics.
2. The flexible hinge-based piezoelectric positioning platform according to claim 1, wherein the through holes are formed in the upper surface of the positioning platform, and the through holes penetrate through the upper and lower surfaces of the positioning platform.
3. The flexible hinge-based piezoelectric positioning platform according to claim 1, wherein the pre-tightening beam is a deformable elastic beam, and the deformation direction of the pre-tightening beam is consistent with the driving direction of the piezoelectric ceramic.
4. The piezoelectric positioning platform based on the flexible hinge according to claim 1, wherein the two ends of the pre-tightening beam and the flexible beam are provided with the flexible hinge; the pre-tightening beam and the flexible beam are respectively connected with the pre-tightening block and the positioning platform and the moving part and the positioning platform through flexible hinges.
5. The flexible hinge-based piezoelectric positioning platform of claim 1, further comprising a displacement sensor disposed between the positioning platform and the moving portion for detecting displacement of the moving portion.
6. The flexible hinge-based piezoelectric positioning platform of claim 1, wherein the pre-compression block is secured to the platform base, comprising: the platform substrate is provided with a threaded hole, the pre-tightening pressing block is provided with a fixing hole corresponding to the threaded hole, and the pre-tightening pressing block is fixedly connected with the platform substrate through a screw.
7. The flexible hinge-based piezoelectric positioning platform according to claim 4, wherein the flexible hinge is one of a right angle type flexible hinge, a rounded angle type flexible hinge, a semicircular type flexible hinge, an elliptical type flexible hinge, a hyperbolic type flexible hinge, a cycloidal type flexible hinge, and a polynomial type flexible hinge.
8. The flexible hinge-based piezoelectric positioning platform of any one of claims 1-6, further comprising a resilient element for increasing the preload force, the resilient element disposed between the preload block and the positioning platform.
9. The flexible hinge-based piezoelectric positioning platform of claim 1, wherein the moving part comprises a moving part base and a groove, the groove being provided on the moving part base; the groove is internally provided with a second pre-tightening beam, a second flexible beam, a moving block, a second displacement sensor, a second pre-tightening pressing block and second piezoelectric ceramics, and gaps are reserved between the second pre-tightening beam, the second flexible beam, the moving block, the second displacement sensor, the second pre-tightening pressing block and the second piezoelectric ceramics and a bottom plate of the moving part; connecting the moving block and the moving part through the second flexible beam; and the second pre-tightening pressing block is connected with the moving part through the second pre-tightening beam.
10. The flexible hinge-based piezoelectric positioning platform of claim 9, wherein the second piezoelectric ceramic is mounted between the moving mass and the second pre-compression mass, and wherein the free length of the second piezoelectric ceramic is greater than the distance between the moving mass and the second pre-compression mass; the second piezoelectric ceramic is used for pushing the moving block to move along the horizontal direction.
11. The flexible hinge-based piezoelectric positioning platform of claim 9, wherein the second pre-tightening pressure block is fixedly connected with the moving part bottom plate.
12. An industrial camera, comprising:
a housing within which is mounted a piezoelectric positioning platform as claimed in any one of claims 1 to 11;
an imaging assembly mounted inside the housing on the moving part according to any one of claims 1-11 or the moving block according to any one of claims 9-11.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222972967.9U CN218940967U (en) | 2022-11-09 | 2022-11-09 | Piezoelectric positioning platform based on flexible hinge and industrial camera |
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| CN202222972967.9U CN218940967U (en) | 2022-11-09 | 2022-11-09 | Piezoelectric positioning platform based on flexible hinge and industrial camera |
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