CN218935300U - Thermal deformation preventing flap gate valve of vacuum chamber of Topcon equipment - Google Patents
Thermal deformation preventing flap gate valve of vacuum chamber of Topcon equipment Download PDFInfo
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- CN218935300U CN218935300U CN202223564560.9U CN202223564560U CN218935300U CN 218935300 U CN218935300 U CN 218935300U CN 202223564560 U CN202223564560 U CN 202223564560U CN 218935300 U CN218935300 U CN 218935300U
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- flap gate
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Abstract
The utility model discloses a thermal deformation prevention flap gate valve of a vacuum chamber of Topcon equipment, which comprises a valve body and a valve, wherein one side of the valve body is provided with a valve port, and the periphery of the valve port is provided with a cooling pipeline; the valve is rotationally arranged on the valve body through a plurality of swing arm rods and takes a first pin shaft as a swing center, the first pin shaft is close to the valve port and is arranged above the valve port, a rotating shaft is rotationally arranged in the valve body, a driving arm rod and a transmission connecting rod are arranged on the rotating shaft, the driving arm rod and the transmission connecting rod are used for driving the valve to swing between the valve port position and the valve port position, one end of the driving arm rod is fixed on the rotating shaft, the other end of the driving arm rod is hinged with the transmission connecting rod, and the free end of the transmission connecting rod is hinged with the valve through a second pin shaft. The utility model can effectively prevent the valve from thermal deformation caused by high temperature, effectively solves the technical problem of incomplete valve sealing caused by thermal deformation, has small volume cavity and saves space.
Description
[ field of technology ]
The utility model belongs to the technical field of coating equipment, and particularly relates to a flap gate valve for preventing a vacuum chamber of Topcon equipment from thermal deformation.
[ background Art ]
In the ultra-large-yield magnetic core inductance vacuum coating equipment, because of process requirements, a vacuum isolation door valve needs to be arranged between adjacent vacuum chambers, and further, the isolation between vacuum and atmosphere or the isolation between vacuum and different vacuum requirements are realized, so that the design of the vacuum door valve is indispensable in the vacuum coating equipment.
In the prior art, the structure of the vacuum gate valve is mainly divided into two types, one type is a gate valve, such as a gate valve disclosed in a patent publication No. CN209925653U, a valve of the gate valve moves along the direction of a parallel guide rail under the action of a telescopic cylinder, a sealing ring is arranged on the valve, after the sealing ring stretches into place under the action of the cylinder, the sealing ring contacts and extrudes with the valve body, the valve and the valve body are closed and sealed, and otherwise, the cylinder is contracted into place, and the valve is opened. The valve has the advantages of reliable use, good sealing even if the wall of the box body is deformed to a certain extent, complex structure and high manufacturing cost. Another type of valve is a flap valve, such as a vacuum valve disclosed in CN111188913a, which is rotated along a center line by a rotary tilt cylinder, and a seal ring is installed on the valve to open and close the flap valve by the rotation angle of the tilt cylinder. The valve occupies a large space, the valve body is easy to seal due to small deformation caused by high temperature, and the valve body is high in precision requirement on the whole product after being enlarged, so that the valve adjusting difficulty is increased.
In continuous line coating equipment, a plurality of vacuum valves are generally required to be arranged, the width of a line occupied by the width of a flap valve structure in the prior art is larger, and the valve body is easy to deform due to high temperature in the coating equipment, so that the valve is not sealed, and the sealing performance is affected.
Therefore, an additional design of a thermal deformation preventing flap gate valve for a vacuum chamber of Topcon equipment is needed to solve the above technical problems.
[ utility model ]
The utility model mainly aims to provide the flap gate valve for preventing the thermal deformation of the vacuum chamber of the Topcon equipment, which can effectively prevent the thermal deformation of the valve due to high temperature, effectively solve the technical problem of incomplete valve sealing caused by thermal deformation, and has small volume cavity and space saving.
The utility model realizes the aim through the following technical scheme: a thermal deformation prevention flap gate valve of a vacuum chamber of Topcon equipment comprises a valve body and a valve, wherein one side of the valve body is provided with a valve port, and the periphery of the valve port is provided with a cooling pipeline; the valve is rotationally arranged on the valve body through a plurality of swing arm rods and takes a first pin shaft as a swing center, the first pin shaft is close to the valve port and is arranged above the valve port, a rotating shaft is rotationally arranged in the valve body, a driving arm rod and a transmission connecting rod are arranged on the rotating shaft, the driving arm rod and the transmission connecting rod are used for driving the valve to swing between the valve port position and the valve port position, one end of the driving arm rod is fixed on the rotating shaft, the other end of the driving arm rod is hinged with the transmission connecting rod, and the free end of the transmission connecting rod is hinged with the valve through a second pin shaft.
Further, the valve body comprises a bottom plate, a surrounding and blocking vertical plate and a top cover, wherein the bottom plate and the surrounding and blocking vertical plate are welded together to form an integral structure, and the top cover is detachably arranged at the top of the surrounding and blocking vertical plate through screws.
Further, the top cover, the enclosure vertical plate and the bottom plate jointly surround to form a movable cavity, and the valve performs overturning movement in the movable cavity.
Further, driving parts for driving the rotating shaft to rotate are arranged at two ends of the outer portion of the valve body.
Further, a plurality of supporting blocks are arranged at intervals at the top in the valve body, the rotating shaft is rotatably arranged on the supporting blocks, and one end of the swinging arm rod is rotatably arranged on the supporting blocks through the first pin shaft.
Further, a plurality of connecting blocks are arranged on the valve at intervals, and the other end of the swing arm rod is hinged with the connecting blocks through the second pin shaft.
Further, a cooling interface is arranged on the valve body, and two ends of the cooling pipeline are communicated to the cooling interface and communicated with an external cooling device to form a circulating cooling system.
Further, a sealing groove is formed in the valve, and a sealing ring is arranged in the sealing groove.
Compared with the prior art, the flap gate valve for preventing the vacuum chamber of the Topcon equipment from thermal deformation has the beneficial effects that: the periphery of the valve port is provided with a cooling groove, a cooling pipeline is arranged in the cooling groove to cool the valve port, so that the problem of sealing failure caused by thermal deformation at the valve port is effectively prevented; the valve adopts the upset form, and its upset center is close to the valve port top to combine crank connecting rod structure, when valve in the open state shrink in the valve body, other drive assembly and the drive assembly of its drive valve all are located the width space that the valve took up, do not additionally occupy the width space, and the valve shrink in the valve body, have reduced the space occupation, have shortened the whole width of turning over the board door valve, to the whole line of coating film equipment, can shorten whole line length, save space.
[ description of the drawings ]
FIG. 1 is a schematic diagram of an embodiment of the present utility model;
FIG. 2 is a schematic view of a partial cross-sectional structure of an embodiment of the present utility model;
FIG. 3 is a schematic diagram of a valve flip drive in an embodiment of the present utility model;
the figures represent the numbers:
a flap gate valve for preventing the vacuum chamber of the 100-Topcon equipment from thermal deformation;
1-a valve body, 11-a movable cavity, 12-a valve port, 13-a cooling groove, 14-a bottom plate, 15-a surrounding baffle vertical plate and 16-a top cover; 2-a driving member; 3-valve, 31-connecting block, 32-sealing ring; 4-cooling pipes; 5-cooling interface; 6-rotating shaft; 7-supporting blocks; 8-transmission components, 81-swing arm levers, 82-driving arm levers, 83-transmission connecting rods, 84-first pin shafts, 85-second pin shafts and 86-third pin shafts.
[ detailed description ] of the utility model
Embodiment one:
referring to fig. 1-3, the present embodiment is a heat deformation preventing flap gate valve 100 of a vacuum chamber of a Topcon device, which includes a valve body 1 with a movable cavity 11 formed therein, a driving member 2 fixed at two ends of the outer portion of the valve body 1, and a valve 3 driven by the driving member 2 to perform a tilting motion in the movable cavity 11, wherein a valve port 12 is provided on a surface of one side of the valve body 1, the valve 3 performs a position switching between a position of closing the valve port 12 and a position of opening the valve port 12 under a driving action of the driving member 2, a cooling groove 13 is provided around the valve port 12, a cooling pipe 4 is embedded in the cooling groove 13, a cooling interface 5 is provided at a bottom of the valve body 1, two ends of the cooling pipe 4 are communicated to the cooling interface 5, and are communicated with an external cooling device to form a circulation cooling system. Through the design of the cooling pipeline 4, the periphery of the valve port 12 can be effectively cooled, and sealing failure caused by thermal deformation is prevented.
In this embodiment, a rotating shaft 6 is rotatably disposed in the valve body 1 near the top, two ends of the rotating shaft 6 are disposed at the movable end of the driving member 2, and are driven by the driving member 2 to perform a rotational movement. The top in the valve body 1 is provided with a plurality of supporting blocks 7, and pivot 6 rotates to set up on supporting block 7, sets up in the valve body 1 through supporting block 7.
In order to improve the stability of driving the valve 3, in this embodiment, a plurality of connecting blocks 31 are arranged on the valve 3 at intervals, a plurality of transmission assemblies 8 connected with the connecting blocks 31 one by one are arranged on the rotating shaft 6, and the rotating motion of the rotating shaft 6 is transmitted to the overturning motion of the connecting blocks 31 through the transmission assemblies 8, so that the overturning of the valve 3 is realized. The transmission assembly 8 comprises two sub-modules, the two sub-modules are symmetrically arranged on two sides of the connecting block 31, the connecting block 31 is driven to perform overturning motion, the sub-modules comprise a swinging arm rod 81, a driving arm rod 82 and a transmission connecting rod 83, one end of the swinging arm rod 81 is hinged on the supporting block 7 through a first pin shaft 84, the other end of the swinging arm rod is hinged on the connecting block 3 through a second pin shaft 85, one end of the driving arm rod 82 is fixed on the rotating shaft 6, the other end of the driving arm rod 82 is hinged with the transmission connecting rod 83 through a third pin shaft 86, and one end of the transmission connecting rod 83 is hinged on the third pin shaft 86 and the other end of the transmission connecting rod 83 is hinged on the second pin shaft 85.
In this embodiment, the first pin shaft 84 is disposed above the valve port 12, so that the turning radius of the valve 3 is as small as possible, and the valve 3 and the swing arm 81 with the turning radius can be retracted into a mutually attached state by the hinged arrangement of the second pin shaft 85, so that the space occupation of the valve core is reduced as much as possible, and the overall volume of the flap gate valve is reduced.
Through the design of the structure, the connecting block 31 swings around the first pin shaft 84 by taking the swing arm 81 as a rotation radius under the driving action of the driving arm 82 and the transmission connecting rod 83. When the driving arm 82 and the transmission link 83 are retracted and lifted, the valve 3 is turned upwards to be in an open state, and when the driving arm 82 and the transmission link 83 are extended and straightened, the valve 3 is turned downwards to be in a closed state. According to the embodiment, through the structural design of the transmission assembly 8, the crank mechanism is adopted, so that the valve 3 is in a vertical shrinkage state after being opened, the width space of the valve is reduced, the volume of the cavity is reduced, and when the whole line equipment uses a plurality of valves, the length of the whole line of the equipment is effectively reduced.
The valve 3 is provided with a sealing groove, and a sealing ring 32 is arranged in the sealing groove.
The valve body 1 comprises a bottom plate 14, a surrounding and blocking vertical plate 15 and a top cover 16, wherein the bottom plate 14 and the surrounding and blocking vertical plate 15 are welded together to form an integral structure, the top cover 16 is detachably arranged at the top of the surrounding and blocking vertical plate 15 through screws, and the top cover, the surrounding and blocking vertical plate 15 and the bottom plate 14 jointly surround to form a movable cavity 11. The top cover 16 is designed to be detachably connected, so that the valve core (such as the valve 3, the transmission assembly 8 and the like) is convenient to install and maintain.
When the valve is used, the driving piece 2 drives the rotating shaft 6 to rotate, the driving arm rod 82 synchronously rotates along with the rotating shaft 6, the valve 3 is pushed to the valve port 12 under the transmission action of the transmission connecting rod 83, so that the valve 3 is in a vertical state and is also in a closed state, and at the moment, the driving arm rod 82 and the transmission connecting rod 83 are in a completely stretched state, so that stable external supporting acting force can be provided to keep the valve 3 in a stable closed state; when the valve body 1 needs to be opened, the driving piece 2 drives the rotating shaft 6 to reversely rotate, the driving arm rod 82 and the transmission connecting rod 83 retract, the valve 3 is overturned and retracted from the valve port 12 to be in a horizontal state, the top of the valve 3 is clung to the bottom of the supporting block 7 in the retracted state, the transmission assembly 8 is clung to the height space where the supporting block 7 is positioned, therefore, the width of the whole valve body 1 can be smaller and is equivalent to the width of the valve 3, the height can also be shorter, the height of the whole valve body is equivalent to the height of the valve 3, the turning process of closing and opening of the valve 3 is essentially a swinging motion taking the first pin shaft 84 as a rotation center and taking the swinging arm rod 81 as a rotation radius, and the plate surface of the valve 3 can be always kept parallel or even attached to the swinging arm rod 81 in the swinging process, so that the occupied space of the valve 3 in the turning process is reduced as much as possible.
What has been described above is merely some embodiments of the present utility model. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit of the utility model.
Claims (8)
1. A Topcon equipment vacuum chamber heat distortion prevention flap gate valve which characterized in that: the valve comprises a valve body and a valve, wherein one side of the valve body is provided with a valve port, and the periphery of the valve port is provided with a cooling pipeline; the valve is rotationally arranged on the valve body through a plurality of swing arm rods and takes a first pin shaft as a swing center, the first pin shaft is close to the valve port and is arranged above the valve port, a rotating shaft is rotationally arranged in the valve body, a driving arm rod and a transmission connecting rod are arranged on the rotating shaft, the driving arm rod and the transmission connecting rod are used for driving the valve to swing between the valve port position and the valve port position, one end of the driving arm rod is fixed on the rotating shaft, the other end of the driving arm rod is hinged with the transmission connecting rod, and the free end of the transmission connecting rod is hinged with the valve through a second pin shaft.
2. The Topcon apparatus vacuum chamber heat distortion resistant flap gate valve of claim 1, wherein: the valve body comprises a bottom plate, a surrounding baffle vertical plate and a top cover, wherein the bottom plate and the surrounding baffle vertical plate are welded together into an integral structure, and the top cover is detachably arranged at the top of the surrounding baffle vertical plate through screws.
3. The Topcon apparatus vacuum chamber heat distortion resistant flap gate valve of claim 2, wherein: the top cover, the surrounding baffle vertical plate and the bottom plate jointly surround to form a movable cavity, and the valve performs overturning movement in the movable cavity.
4. The Topcon apparatus vacuum chamber heat distortion resistant flap gate valve of claim 1, wherein: and driving parts for driving the rotating shaft to rotate are arranged at two ends of the outer part of the valve body.
5. The Topcon apparatus vacuum chamber heat distortion resistant flap gate valve of claim 1, wherein: the top interval in the valve body is provided with a plurality of supporting blocks, the pivot rotates to be set up on the supporting block, the one end of swing arm pole is through first round pin axle rotates to be set up on the supporting block.
6. The Topcon apparatus vacuum chamber heat distortion resistant flap gate valve of claim 5, wherein: the valve is provided with a plurality of connecting blocks at intervals, and the other end of the swing arm rod is hinged with the connecting blocks through the second pin shaft.
7. The Topcon apparatus vacuum chamber heat distortion resistant flap gate valve of claim 1, wherein: the valve body is provided with a cooling interface, and two ends of the cooling pipeline are communicated to the cooling interface and communicated with an external cooling device to form a circulating cooling system.
8. The Topcon apparatus vacuum chamber heat distortion resistant flap gate valve of claim 1, wherein: and a sealing groove is formed in the valve, and a sealing ring is arranged in the sealing groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223564560.9U CN218935300U (en) | 2022-12-30 | 2022-12-30 | Thermal deformation preventing flap gate valve of vacuum chamber of Topcon equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223564560.9U CN218935300U (en) | 2022-12-30 | 2022-12-30 | Thermal deformation preventing flap gate valve of vacuum chamber of Topcon equipment |
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| Publication Number | Publication Date |
|---|---|
| CN218935300U true CN218935300U (en) | 2023-04-28 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223564560.9U Active CN218935300U (en) | 2022-12-30 | 2022-12-30 | Thermal deformation preventing flap gate valve of vacuum chamber of Topcon equipment |
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| CN (1) | CN218935300U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118391488A (en) * | 2024-07-01 | 2024-07-26 | 艾庞半导体科技(四川)有限公司 | Self-locking device of vacuum transmission valve |
-
2022
- 2022-12-30 CN CN202223564560.9U patent/CN218935300U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118391488A (en) * | 2024-07-01 | 2024-07-26 | 艾庞半导体科技(四川)有限公司 | Self-locking device of vacuum transmission valve |
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