CN218917213U

CN218917213U - Fixed bolster, cylinder subassembly and check out test set

Info

Publication number: CN218917213U
Application number: CN202223151654.3U
Authority: CN
Inventors: 王赢; 张龙; 陈鲁; 张嵩
Original assignee: Shenzhen Zhongke Feice Technology Co Ltd
Current assignee: Shenzhen Zhongke Feice Technology Co Ltd
Priority date: 2022-11-25
Filing date: 2022-11-25
Publication date: 2023-04-25
Anticipated expiration: 2032-11-25

Abstract

The embodiment of the utility model discloses a fixing bracket which comprises: the fixing part is fixedly connected with a piece to be fixed; the fixing part is provided with a through hole penetrating in a first direction; the adjusting gasket is arranged in the through hole and can rotate around the axis of the through hole; the adjusting gasket is provided with a through groove penetrating in the first direction. The adjusting bracket disclosed by the embodiment of the utility model can reduce the difficulty of accurately positioning the parts of the detection equipment.

Description

Fixed bolster, cylinder subassembly and check out test set

Technical Field

The utility model relates to the technical field of wafer detection, in particular to a fixed support, a cylinder assembly and detection equipment.

Background

When the detection device is fixed in the wafer detection process, higher positioning accuracy is generally required for fixing parts, but the mounting holes cannot be accurately positioned in the actual mounting process. Therefore, the positions of the parts need to be continuously adjusted in the installation process of the detection equipment, the screws for fixing the parts need to be repeatedly disassembled and assembled in the installation process of the existing detection equipment, and the positioning difficulty is high and not accurate enough.

Therefore, it is needed to provide a solution to the problem of the positioning difficulty of the parts of the detecting device.

Disclosure of Invention

Therefore, in order to overcome at least part of the defects in the prior art, the embodiment of the utility model provides a fixing bracket, a cylinder assembly and detection equipment, which can reduce the difficulty of accurately positioning parts of the detection equipment.

Specifically, in one aspect, an embodiment of the present utility model provides a fixing bracket, including: the fixing part is fixedly connected with a piece to be fixed; the fixing part is provided with a through hole penetrating in a first direction; the adjusting gasket is arranged in the through hole and can rotate around the axis of the through hole; the adjusting gasket is provided with a through groove penetrating in the first direction.

In one embodiment, the through groove is a circular through groove, and the through groove is arranged eccentrically to the through hole.

In one embodiment, the through groove includes a first sub groove including two groove side walls respectively extending in a direction from a center of the adjustment pad toward a periphery of the adjustment pad and disposed opposite to each other, and a groove bottom wall connected between the two groove side walls, the groove bottom wall being located on a side of the two groove side walls adjacent to the periphery of the adjustment pad.

In one embodiment, the through groove comprises a plurality of first sub grooves, and one sides of the plurality of first sub grooves, which are close to the center of the adjusting gasket, are mutually communicated.

In one embodiment, a first channel is formed between the two groove side walls, and a plurality of second sub-grooves are respectively arranged on the two groove side walls in sequence along the direction from the center of the adjusting gasket to the periphery of the adjusting gasket; the plurality of second subslots are in communication with the first channel, respectively.

In one embodiment, an annular step protruding toward the center near the center is formed in the through hole; the annular step supports one side of the adjustment shim.

In one embodiment, the adjusting pad is provided with a second annular step protruding towards the direction away from the center; the second annular step abuts against the fixing portion.

Another embodiment of the present utility model provides a cylinder assembly including: a cylinder; the stationary barrier of any preceding embodiment, fixedly coupled to the cylinder.

Another embodiment of the present utility model provides a detection apparatus including: a cylinder; a fixed bracket, comprising: the fixed part is fixedly connected with the air cylinder; the fixing part is provided with a through hole penetrating in a first direction; the adjusting gasket is arranged in the through hole and can rotate around the axis of the through hole; the adjusting gasket is provided with a through groove penetrating in the first direction; the fixing base plate is provided with a screw hole, the fixing part is arranged on the fixing base plate, and the through groove is communicated with the screw hole; the screw penetrates through the through groove and is connected with the screw hole in a matched mode.

In one embodiment, the through groove includes a first sub groove including two groove side walls respectively extending in a direction from a center of the adjustment shim toward a periphery of the adjustment shim and disposed opposite to each other, and a groove bottom wall connected between the two groove side walls, the groove bottom wall being located on a side of the two groove side walls adjacent to the periphery of the adjustment shim; the distance between the two groove side walls is greater than the diameter of the screw.

As can be seen from the above, the above embodiments of the present utility model can achieve one or more of the following advantages: through the rotatable setting of adjusting washer that is provided with logical groove in the fixed part for when fixing a position to spare part on the check out test set, through rotating adjusting washer and adjusting the position between fixed part and the screw, can increase the range of motion and the tolerance of waiting to fix the part. And can adjust the position of mounting under the condition of incompletely dismantling the fixed screw, convenient operation fixes a position more accurately.

Other aspects and features of the present utility model will become apparent from the following detailed description, which refers to the accompanying drawings. It is to be understood, however, that the drawings are designed solely for the purposes of illustration and not as a definition of the limits of the utility model. It should be further understood that the drawings are not necessarily drawn to scale and that, unless otherwise indicated, they are merely intended to conceptually illustrate the structures and procedures described herein.

Drawings

The following detailed description of specific embodiments of the utility model refers to the accompanying drawings.

Fig. 1 is an exploded view of a detection apparatus according to an embodiment of the present utility model.

Fig. 2 is a schematic structural view of a cylinder assembly according to an embodiment of the present utility model.

Fig. 3 is a top view of fig. 2.

Fig. 4 is a schematic structural view of a fixing portion in a fixing bracket according to an embodiment of the present utility model.

Fig. 5 isbase:Sub>A sectional viewbase:Sub>A-base:Sub>A of fig. 4.

Fig. 6 is a schematic top view of an adjusting shim in a fixing bracket according to an embodiment of the present utility model.

Fig. 7 is a schematic top view of an adjusting shim in a fixing bracket according to another embodiment of the present utility model.

Fig. 8 is a schematic top view of an adjusting shim in a fixing bracket according to another embodiment of the present utility model.

Fig. 9 is a schematic top view of an adjusting shim in a fixing bracket according to another embodiment of the present utility model.

Fig. 10 is a schematic cross-sectional view of a fixing bracket according to another embodiment of the present utility model.

[ reference numerals description ]

300: a detection device; 200: a cylinder assembly; 100: a fixed bracket; 10: a fixing part; 11: a through hole; 111: an annular step; 20: adjusting the gasket; 21: a through groove; 211: a first subslot; 2111: a groove sidewall; 2112: a bottom wall of the tank; 2113: a first channel; 2114: a second subslot; 212: a second annular step; 30: a cylinder; 40: a fixed bottom plate; 41: screw holes; 50: and (5) a screw.

Detailed Description

In order that the above objects, features and advantages of the utility model will be readily understood, a more particular description of the utility model will be rendered by reference to the appended drawings.

In order that those skilled in the art will better understand the technical solutions of the present utility model, the technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model, and it is apparent that the described embodiments are only some embodiments of the present utility model, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present utility model without making any inventive effort, shall fall within the scope of the present utility model.

It should be noted that the terms "first," "second," and the like in the description and the claims of the present utility model and the above figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the terms so used are interchangeable under appropriate circumstances such that the embodiments of the utility model described herein are capable of operation in sequences other than those illustrated or otherwise described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.

It should be further noted that the division of the embodiments in the present utility model is only for convenience of description, and should not be construed as a specific limitation, and features in the various embodiments may be combined and mutually referenced without contradiction.

As shown in fig. 1, one embodiment of the present utility model provides a detection apparatus 300 including a stationary support 100. Specifically, the fixing bracket 100 includes, for example, a fixing portion 10 and an adjustment washer 20. The fixing portion 10 is provided with a through hole 11 penetrating in the first direction. The adjustment washer 20 is disposed in the through-hole 11 and is rotatable about the axis of the through-hole 11. The adjustment washer 20 is provided with a through groove 21 penetrating in the first direction. For example, referring to the orientation shown in fig. 1, the first orientation is a vertical orientation and the adjustment washer 20 is rotatable in a horizontal orientation.

The fixing portion 10 of the fixing bracket 100 is fixedly connected with a to-be-fixed member, for example. The detecting device 300 further includes a cylinder 30, and the to-be-fixed member may be, for example, the cylinder 30, or may be other parts of the detecting device 300. For example, the cylinder 30 may be fixed to the fixing portion 10 such that the cylinder 30 and the fixing bracket 100 constitute a cylinder assembly 200 as shown in fig. 2 and 3. Further, the detecting device 300 further includes a fixing base plate 40, and screw holes 41 are formed in the fixing base plate 40. The fixing portion 10 of the fixing bracket 100 is provided on the fixing base plate 40, and the through groove 21 communicates with the screw hole 41. The detecting device 300 further comprises a screw 50, and the screw 50 penetrates through the through groove 21 and is connected with the screw hole 41 in a matching way.

It should be noted that fig. 1 only shows a partial area of the inspection apparatus 300, and the inspection apparatus 300 further includes, for example, a carrier device, a lens module, and the like, which are configured to implement the wafer inspection function of the conventional wafer inspection apparatus. The to-be-fixed member fixed on the fixing support 100 may be, for example, a cylinder in the lens module. The fixing base plate 40 may be any plate on the inspection apparatus 300 that can be used to fix the piece to be fixed.

The principle of this embodiment is as follows: the fixing part to be fixed which needs to be positioned is fixed on the fixing part 10 of the fixing support 100, the screw rod of the screw 50 passes through the through groove 21 of the adjusting gasket 20, the screw head of the screw 50 is abutted with the adjusting gasket 20, and one end far away from the screw head is matched and connected with the screw hole 41, so that the fixing support 100 is locked on the fixing bottom plate 40, and the fixing part to be fixed is arranged on the fixing bottom plate 40 along with the fixing support 100. When fine adjustment of the mounting position of the piece to be fixed is required, the screw 50 may not be completely detached, and only the screw 50 needs to be unscrewed several times to the rotatable adjustment washer 20. The adjustment of the position of the fixing member to be fixed can be achieved by rotating the adjustment washer 20 and synchronously moving the position of the fixing portion 10 with respect to the screw hole 41. The screw is not required to be completely detached in the adjusting process, and the operation is simple and convenient. Through the adjustable setting of the fixing bracket 100, compared with the traditional fixing mode, the embodiment provides a certain movable range and a certain allowable error of the to-be-fixed piece, and can realize more accurate positioning of the to-be-fixed piece.

In one embodiment, referring to fig. 4,base:Sub>A schematic structural view of the fixing portion 10 of the fixing bracket 100 according to one embodiment of the present utility model is shown, and fig. 5 isbase:Sub>A sectional viewbase:Sub>A-base:Sub>A of fig. 4. In which a step protruding toward the center of the through hole 11 is formed in the through hole 11, for example, specifically, the through hole 11 is a circular through hole, the adjustment washer 20 is a cylinder having an outer diameter substantially the same as the diameter of the through hole 11, for example, a step such as an annular step 111 surrounding the inner wall of the through hole 11, the annular step 111 supporting one side of the adjustment washer 20 so that the adjustment washer 20 can be fixed when the screw 50 is locked, and can be rotated in the through hole 11 when the screw 50 is loosened to some extent. The adjusting shim 20 not only serves the cushioning function of a conventional shim, but also achieves the effect of being adjustable in position. More specifically, the tuning washer 20 has a first thickness in a first direction. The through hole 11 has a first depth in the first direction, which is the distance between the step surface of the annular step 111 supporting the adjustment washer 20 to the end surface of the through hole 11 near the adjustment washer 20. Wherein the first thickness is equal to the first depth. That is, when the adjustment washer 20 is placed on the annular step 111, the surface of the adjustment washer 20 away from the annular step 111 is just flush with the end face of the through hole 11 near the adjustment washer 20.

In another embodiment, reference is made to a cross-sectional view of the fixed bracket 100 shown in fig. 10, for example. Wherein the adjustment washer 20 is formed with a second annular step 212 protruding in a direction away from its center. The second annular step 212 abuts against the fixing portion 10. In the present embodiment, the intermediate portion of the adjustment washer 20 is located in the through-hole 11, and the fixing portion 10 supports the adjustment washer 20 through the second annular step 212, so that the adjustment washer 20 can be rotated in the through-hole 11 while being not easily disengaged from the through-hole 11. As shown in fig. 10, the second annular step 212 is formed at one end of the adjusting pad 20, the lower side surface of the second annular step 212 abuts against the fixing portion 10, in other embodiments, for example, the second annular step 212 may be formed in the middle of the adjusting pad 20, the adjusting pad 20 is embedded in the through hole 11 through the second annular step 212, and the upper and lower surfaces of the second annular step 212 abut against the fixing portion 10, which also can achieve the effect that the adjusting pad 20 can rotate in the through hole 11 and is not easy to separate from the through hole 11.

More specifically, in one embodiment, the through groove 21 on the adjusting washer 20 is a circular through groove as shown in fig. 6, and the through groove 21 is disposed eccentrically from the through hole 11, that is, the axial center of the through groove 21 is different from the axial center of the through hole 11. The diameter of the through-slot 21 may be equal to the diameter of the screw 50, for example, wherein the diameter of the screw 50 refers to the nominal diameter of the screw 50, for example, the screw 50 has a gauge M5 and a diameter of 5 mm. The diameter of the through slot 21 may be greater than the nominal diameter of the screw 50 and less than the diameter of the screw head of the screw 50, for example, 6 mm.

In another embodiment, the through groove 21 on the adjustment washer 20 includes a first sub-groove 211, the first sub-groove 211 including two groove side walls 2111 extending from the center of the adjustment washer 20 toward a direction near the periphery of the adjustment washer 20 and disposed opposite each other, and a groove bottom wall 2112 connected between the two groove side walls 2111. With the channel bottom wall 2112 being located on one side of the two channel side walls 2111 adjacent the perimeter of the adjustment shim 20. It will be appreciated that the first sub-groove 211 is recessed in a direction from the center of the adjustment shim 20 toward the periphery of the adjustment shim 20. The distance between the two slot sidewalls 2111 may be equal to the diameter of the screw 50, or greater than the diameter of the screw 50 less than the diameter of the screw head.

For example, in a more specific embodiment, a first channel 2113 is formed between two groove side walls 2111 of the first sub-groove 211, and a plurality of second sub-grooves 2114 are provided on the two groove side walls 2111, respectively, in order from the center of the adjustment shim 20 toward the direction approaching the periphery of the adjustment shim 20. The plurality of second sub-grooves 2114 are respectively communicated with the first passages 2113. It is understood that the two groove sidewalls 2111 of the first sub-groove 211 are wavy.

In one embodiment, the number of the first sub-grooves 211 may be one or more, and when the number of the first sub-grooves 211 is plural, the plurality of first sub-grooves 211 are each recessed in a direction from the center of the adjustment shim 20 toward the periphery of the adjustment shim 20. The plurality of first sub grooves 211 communicate with each other at a side near the center of the adjustment washer 20. For example, the through groove 21 is a cross-shaped through groove shown in fig. 7, and the cross shape (or "X" shape) is understood to be formed by four first sub-grooves 211 recessed from the center of the adjustment shim 20 toward the periphery. Alternatively, referring to fig. 8, the through groove 21 is a "m" -shaped through groove, which may be understood as being formed by six first sub-grooves 211 recessed from the center toward the periphery of the adjustment pad 20 in communication. Alternatively, referring to fig. 9, the through groove 21 is a cross-shaped through groove formed by mutually communicating four first sub-grooves 211, and unlike fig. 7, a plurality of second sub-grooves 2114 are provided on two groove side walls 2111 of each first sub-groove 211. Of course, the above is only a part of the illustration of the present embodiment, and the present embodiment is not limited thereto, and the through groove 21 may be formed by three, five or other numbers of first sub grooves 211 communicating with each other. The three, five or other number of first sub-grooves 211 may also be provided in a wave-like shape like that of fig. 9.

The present utility model is not limited to the above-mentioned embodiments, but is intended to be limited to the following embodiments, and any modifications, equivalent changes and variations in the above-mentioned embodiments can be made by those skilled in the art without departing from the scope of the present utility model.

Claims

1. A fixing bracket (100), characterized by comprising:

the fixing part (10) is fixedly connected with a piece to be fixed; the fixing part (10) is provided with a through hole (11) penetrating in a first direction;

an adjusting washer (20) arranged in the through hole (11) and rotatable around the axis of the through hole (11); the adjusting gasket (20) is provided with a through groove (21) penetrating in the first direction.

2. The fixing bracket (100) according to claim 1, characterized in that the through slot (21) is a circular through slot (21), the through slot (21) being arranged eccentrically to the through hole (11).

3. The fixing bracket (100) according to claim 1, wherein the through groove (21) includes a first sub groove (211), the first sub groove (211) including two groove side walls (2111) extending in directions from a center of the adjustment washer (20) toward a periphery of the adjustment washer (20) and disposed opposite each other, and a groove bottom wall (2112) connected between the two groove side walls (2111), the groove bottom wall (2112) being located on a side of the two groove side walls (2111) adjacent to the periphery of the adjustment washer (20).

4. A fixing bracket (100) according to claim 3, wherein the through groove (21) comprises a plurality of the first sub grooves (211), and the plurality of first sub grooves (211) communicate with each other on a side near the center of the adjustment pad (20).

5. A fixing bracket (100) according to claim 3, wherein a first channel (2113) is formed between the two groove side walls (2111), and a plurality of second sub-grooves (2114) are respectively arranged on the two groove side walls (2111) in sequence; the plurality of second sub-slots (2114) are respectively in communication with the first channel (2113).

6. The fixing bracket (100) according to claim 1, wherein a first annular step (111) protruding toward the center thereof is formed in the through hole (11); the first annular step (111) supports one side of the adjustment washer (20).

7. The fixing bracket (100) according to claim 1, wherein the adjusting shim (20) is formed with a second annular step (212) protruding in a direction away from the center thereof; the second annular step (212) abuts against the fixing portion (10).

8. A cylinder assembly (200), comprising:

a cylinder (30);

the stationary support (100) according to any one of claims 1 to 7, being fixedly connected to the cylinder (30).

9. A detection apparatus (300), characterized by comprising:

a cylinder (30);

a fixed bracket (100) comprising: a fixing part (10) fixedly connected with the cylinder (30); the fixing part (10) is provided with a through hole (11) penetrating in a first direction; an adjusting washer (20) arranged in the through hole (11) and rotatable around the axis of the through hole (11); the adjusting gasket (20) is provided with a through groove (21) penetrating in the first direction;

a fixed bottom plate (40), wherein a screw hole (41) is formed in the fixed bottom plate (40), the fixed part (10) is arranged on the fixed bottom plate (40), and the through groove (21) is communicated with the screw hole (41);

and the screw (50) penetrates through the through groove (21) and is connected with the screw hole (41) in a matching way.

10. The detection apparatus (300) according to claim 9, wherein the through groove (21) includes a first sub groove (211), the first sub groove (211) including two groove side walls (2111) extending respectively in a direction from a center of the adjustment washer (20) toward a periphery of the adjustment washer (20) and disposed opposite to each other, and a groove bottom wall (2112) connected between the two groove side walls (2111), the groove bottom wall (2112) being located on a side of the two groove side walls (2111) adjacent to the periphery of the adjustment washer (20); the distance between the two groove side walls (2111) is greater than the diameter of the screw (50).