CN218913723U - Sealing device for preventing reverse leakage of low-temperature pump pressure release valve - Google Patents
Sealing device for preventing reverse leakage of low-temperature pump pressure release valve Download PDFInfo
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- CN218913723U CN218913723U CN202223497599.3U CN202223497599U CN218913723U CN 218913723 U CN218913723 U CN 218913723U CN 202223497599 U CN202223497599 U CN 202223497599U CN 218913723 U CN218913723 U CN 218913723U
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- pressure release
- release valve
- relief valve
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Abstract
The utility model relates to a sealing device of a cryogenic pump, in particular to a sealing device for preventing a relief valve of the cryogenic pump from reversely leaking, which comprises a sealing cap, a sealing gasket and a fastening piece, wherein the sealing cap is arranged at the relief valve of the cryogenic pump through the fastening piece and completely covers the relief valve; the seal cap has a sealing surface sized to match the covered relief valve sealing surface size. By using the sealing device on the pressure release valve of the low-temperature pump, the reverse leakage of gas from the pressure release valve into the pump body and the vacuum system in the pumping process of the low-temperature pump can be effectively prevented, so that the vacuum degree and the vacuum cleanliness of the low-temperature pump and the vacuum system are greatly improved; the utility model has low cost, simple structure, on-line disassembly and assembly, obviously prolongs the maintenance period of the low-temperature pump, and does not influence the function and use of the pressure release valve.
Description
Technical Field
The utility model relates to a sealing device of a low-temperature pump, in particular to a sealing device for preventing a pressure release valve of the low-temperature pump from reversely leaking.
Background
The cryopump is a vacuum pump that condenses a gas by using a low-temperature surface, also called a condensing pump. The cryopump has advantages over other products in terms of obtaining clean and oil-free vacuum. The vacuum pump can be used as a standard for researching the vacuum pollution degree of other vacuum pumps, and has a larger pumping speed in the aspect of pumping out water vapor and other moist mixed gas. The cryopump has no moving parts in vacuum, high stability, no need of other electronic materials, no fluctuation, no sealing problem, and wide application in research and production of semiconductors and integrated circuits, vacuum coating equipment, vacuum surface analysis instruments, ion implanters, space simulation devices and the like. However, in some fields requiring extremely high vacuum cleaning, such as MBE (molecular beam epitaxy), MOCVD (metal organic chemical vapor deposition) equipment, etc., N in the system is found by on-line monitoring when using a cryopump 2 、O 2 、H 2 Residual gas components such as O are higher, and the detection equipment is used for checking, so that the pressure release valve of the low-temperature pump cannot be sufficiently fastened and sealed due to the special structure, and gas is reversely leaked into the system from the pressure release valve, so that the vacuum cleanliness in the system is seriously affected.
Disclosure of Invention
Aiming at the problem that the pressure release valve of the cryopump cannot be sealed firmly enough to cause reverse leakage of gas into the system, the utility model aims to provide a sealing device for preventing the pressure release valve of the cryopump from reverse leakage.
The aim of the utility model is realized by the following technical scheme:
the utility model comprises a sealing cap, a sealing gasket and a fastening piece, wherein the sealing cap is arranged at a pressure release valve of a cryogenic pump through the fastening piece, and the sealing cap completely covers the pressure release valve; the seal cap has a sealing surface sized to match the covered relief valve sealing surface size.
Wherein: the sealing cap is a flat head sealing cap, the sealing gasket is a fluororubber ring with a framework, the fastener is a quick-release clamp, the flat head sealing cap is arranged at the pressure release valve through the quick-release clamp, and the fluororubber ring is positioned between the flat head sealing cap and the pressure release valve.
The open end of the flat head sealing cap extends outwards to form a flat head sealing cap sealing surface for sealing with the pressure relief valve, and the fluorine rubber ring is placed between the flat head sealing cap sealing surface and the pressure relief valve sealing surface.
The sealing cap is a round head sealing cap with a flange, the sealing gasket is a copper gasket or a fluororubber ring with a framework, the fastening piece is a fastening bolt, the flange is arranged at the pressure release valve through the fastening bolt, and the copper gasket or the fluororubber ring is positioned between the flange and the pressure release valve.
The flange is located the periphery of button head sealing cap open end, the lower surface of flange is sealed face, copper gasket or fluororubber circle set up in the lower surface of flange.
The outer edge of the flange is fixedly connected with the pressure release valve through a plurality of fastening bolts.
The utility model has the advantages and positive effects that:
1. by using the utility model on the pressure release valve of the low-temperature pump, the reverse leakage of the gas from the pressure release valve into the pump body and the vacuum system in the pumping process of the low-temperature pump can be effectively prevented, thereby greatly improving the vacuum degree and the vacuum cleanliness of the low-temperature pump and the vacuum system; and the sealing device can be detached at any time under the working conditions of low-temperature pump regeneration and the like or low requirements on vacuum cleanliness, and the functions and the use of the low-temperature pump are not affected.
2. The utility model has the advantages of low cost, simple structure, on-line disassembly and assembly, and remarkably prolonged maintenance period of the cryopump.
Drawings
FIG. 1 is a schematic overall structure of a first embodiment of the present utility model;
FIG. 2 is a cross-sectional view showing the internal structure of a first embodiment of the present utility model;
FIG. 3 is a schematic overall structure of a second embodiment of the present utility model;
FIG. 4 is a cross-sectional view showing the internal structure of a second embodiment of the present utility model;
wherein: the sealing device comprises a flat head sealing cap 1, a quick-release clamp 2, a fluororubber ring 3, a round head sealing cap 4, a fastening bolt 5, a copper gasket 6, a flat head sealing cap sealing surface 7 and a flange 8.
Detailed Description
The utility model is described in further detail below with reference to the accompanying drawings.
The utility model comprises a sealing cap, a sealing gasket and a fastening piece, wherein the sealing cap is arranged at a pressure release valve of a cryogenic pump through the fastening piece and completely covers the pressure release valve; the sealing cap has a sealing surface, the sealing surface size of the sealing cap is matched with the size of the sealing surface of the covered pressure relief valve.
Example 1
As shown in fig. 1 and 2, the sealing device of the embodiment is in a KF25 rubber ring mouth shape, the sealing cap is a flat head sealing cap 1, the sealing gasket is a fluororubber ring 3 with a framework, the fastening piece is a quick-release clamp 2, the flat head sealing cap 1 is installed at a pressure release valve through the quick-release clamp 2, and the fluororubber ring 3 with the framework is positioned between the flat head sealing cap 1 and the pressure release valve.
The open end of the flat head sealing cap 1 of this embodiment extends outwards to form a flat head sealing cap sealing surface 7 for sealing with a pressure relief valve, and the fluororubber ring 3 is placed between the flat head sealing cap sealing surface 7 and the pressure relief valve sealing surface.
If the sealing surface of the pressure release valve on the pressure release valve of the low-temperature pump is suitable for sealing by a rubber ring, the corresponding sealing device for preventing the reverse leakage of the pressure release valve can be selected from the structure of the sealing device of the embodiment. In the low-temperature air pumping process, the sealing device of the embodiment is arranged, so that the vacuum cleanliness in a vacuum system can be greatly improved, and H is measured by a quadrupole mass spectrometer 2 For example, the peak value was reduced from 8E-11Torr to 8E-12Torr after using the sealing device of the present example, and the sealing device was optionally removed on line at any time.
Example two
As shown in fig. 3 and 4, the sealing device of the embodiment is a CF25 knife edge type seal, the sealing cap is a round head sealing cap 4 with a flange 8, the sealing gasket is a copper gasket 6 or a fluororubber ring 3 with a framework, the fastening piece is a fastening bolt 5, the flange 8 is installed at the pressure release valve through the fastening bolt 5, and the copper gasket 6 or the fluororubber ring 3 is positioned between the flange 8 and the pressure release valve.
The flange 8 of the embodiment is positioned at the periphery of the opening end of the round head sealing cap 4, and the outer edge of the flange 8 is fixedly connected with the pressure release valve through a plurality of fastening bolts 5; the lower surface of the flange 8 is a sealing surface of a sealing cap, and the copper gasket 6 or the fluororubber ring 3 is arranged on the lower surface of the flange 8.
If the sealing surface of the pressure release valve on the pressure release valve of the cryopump is sealed by a copper gasket, the corresponding sealing device for preventing the reverse leakage of the pressure release valve can be selected from the structure of the sealing device of the embodiment. In the low-temperature air pumping process, the sealing device of the embodiment is arranged, so that the vacuum cleanliness in a vacuum system can be greatly improved, the H2O component measured by a quadrupole mass spectrometer is taken as an example, after the sealing device of the embodiment is used, the peak value is reduced from 8E-11Torr to 8E-12Torr, and the sealing device can be selected to be disassembled on line at any time.
Claims (6)
1. A sealing device for preventing reverse leakage of a pressure release valve of a cryopump is characterized in that: the low-temperature pump pressure relief valve comprises a sealing cap, a sealing gasket and a fastening piece, wherein the sealing cap is arranged at the pressure relief valve of the low-temperature pump through the fastening piece and completely covers the pressure relief valve; the seal cap has a sealing surface sized to match the covered relief valve sealing surface size.
2. The sealing device for preventing reverse leakage of a cryopump pressure relief valve of claim 1, wherein: the sealing cap is a flat head sealing cap (1), the sealing gasket is a fluororubber ring (3) with a framework, the fastener is a quick-release clamp (2), the flat head sealing cap (1) is installed at a pressure release valve through the quick-release clamp (2), and the fluororubber ring (3) is located between the flat head sealing cap (1) and the pressure release valve.
3. The sealing device for preventing reverse leakage of a cryopump pressure relief valve according to claim 2, wherein: the open end of the flat head sealing cap (1) extends outwards to form a flat head sealing cap sealing surface (7) for sealing with the pressure release valve, and the fluorine rubber ring (3) is placed between the flat head sealing cap sealing surface (7) and the pressure release valve sealing surface.
4. The sealing device for preventing reverse leakage of a cryopump pressure relief valve of claim 1, wherein: the sealing cap is a round head sealing cap (4) with a flange (8), the sealing gasket is a copper gasket (6) or a fluororubber ring (3) with a framework, the fastening piece is a fastening bolt (5), the flange (8) is installed at a pressure release valve through the fastening bolt (5), and the copper gasket (6) or the fluororubber ring (3) is located between the flange (8) and the pressure release valve.
5. The sealing device for preventing reverse leakage of a cryopump pressure relief valve of claim 4, wherein: the flange (8) is arranged on the periphery of the opening end of the round head sealing cap (4), the lower surface of the flange (8) is a sealing surface, and the copper gasket (6) or the fluororubber ring (3) is arranged on the lower surface of the flange (8).
6. The sealing device for preventing reverse leakage of a cryopump pressure relief valve of claim 4, wherein: the outer edge of the flange (8) is fixedly connected with the pressure release valve through a plurality of fastening bolts (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223497599.3U CN218913723U (en) | 2022-12-27 | 2022-12-27 | Sealing device for preventing reverse leakage of low-temperature pump pressure release valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223497599.3U CN218913723U (en) | 2022-12-27 | 2022-12-27 | Sealing device for preventing reverse leakage of low-temperature pump pressure release valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218913723U true CN218913723U (en) | 2023-04-25 |
Family
ID=86016309
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223497599.3U Active CN218913723U (en) | 2022-12-27 | 2022-12-27 | Sealing device for preventing reverse leakage of low-temperature pump pressure release valve |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218913723U (en) |
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2022
- 2022-12-27 CN CN202223497599.3U patent/CN218913723U/en active Active
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