CN218910494U - PVD equipment waterway system - Google Patents
PVD equipment waterway system Download PDFInfo
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- CN218910494U CN218910494U CN202223191158.0U CN202223191158U CN218910494U CN 218910494 U CN218910494 U CN 218910494U CN 202223191158 U CN202223191158 U CN 202223191158U CN 218910494 U CN218910494 U CN 218910494U
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- pipe
- water
- pressure relief
- waterway system
- outlet pipe
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 88
- 238000007493 shaping process Methods 0.000 claims description 17
- 238000004891 communication Methods 0.000 claims description 6
- 238000000429 assembly Methods 0.000 claims description 2
- 230000000712 assembly Effects 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 7
- 238000001816 cooling Methods 0.000 abstract description 5
- 238000005240 physical vapour deposition Methods 0.000 description 19
- 238000005516 engineering process Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
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Abstract
The application discloses PVD equipment waterway system relates to the technical field of PVD equipment, and comprises a water inlet pipe, a water outlet pipe and a pressure relief assembly; the pressure relief assembly is connected between the water inlet pipe and the water outlet pipe and is used for relieving pressure of the water inlet pipe. Through dispose the pressure release subassembly between inlet tube and outlet pipe in waterway system, utilize the pressure release subassembly to carry out the pressure release to the inlet tube to guarantee that the pressure of inlet tube is in steady state, avoid causing the influence to the system water route, and then guarantee the water-cooling effect, the water that the inlet tube pressure release was flowed out is direct together to discharge through the outlet pipe and is handled moreover, just need not go to increase the water that sets up new water route in order to handle the inlet tube pressure release and flow out again, reduce the change to waterway system, practice thrift the cost.
Description
Technical Field
The application relates to the technical field of PVD equipment, in particular to a waterway system of PVD equipment.
Background
PVD (physical vapor deposition) technology (Physical Vapor Deposition) refers to a technology that under vacuum conditions, a low-voltage and high-current arc discharge technology is adopted, a target material is evaporated by utilizing gas discharge, evaporated substances and gas are ionized, and the evaporated substances and reaction products thereof are deposited on a workpiece by utilizing the acceleration effect of an electric field to form a specific film.
Waterway systems are one of the important components in PVD devices, and the waterway systems of the current PVD devices still have some disadvantages: the water way system has the condition of overlong pipelines, so that the pressure fluctuation of the water supply end is large, the water pressure is too large, the water way is influenced, the water cooling effect is further influenced, and the water cooling effect is poor.
Disclosure of Invention
In view of this, the present application is directed to providing a waterway system of PVD apparatus, so as to solve the technical problems in the background art.
In order to achieve the technical purpose, the application provides a PVD equipment waterway system, which comprises a water inlet pipe, a water outlet pipe and a pressure relief assembly;
the pressure relief assembly is connected between the water inlet pipe and the water outlet pipe and is used for relieving pressure of the water inlet pipe.
Further, the pressure relief assembly comprises a communication pipeline and a pressure relief valve;
the communicating pipe consists of a plurality of hoses and is connected between the water inlet pipe and the water outlet pipe;
the pressure relief valve is arranged on the communicating pipeline.
Further, the pressure relief assembly further comprises a one-way valve;
the one-way valve is arranged on the communicating pipeline.
Further, the pressure relief assembly further comprises a plurality of shaping pieces;
the shaping piece is provided with a shaping cavity for the hose to pass through and for shaping the hose.
Further, the pressure relief assembly is at least two.
Further, the pressure relief assembly is connected to a middle position between the water inlet pipe and the water outlet pipe.
Further, a first branch pipe connected with the pressure relief component is arranged on the pipe wall of the water inlet pipe;
and a second branch pipe connected with the pressure relief assembly is arranged on the pipe wall of the water outlet pipe.
Further, the first branch pipe and the second branch pipe are both provided with switch valves.
Further, the switch valve is a manual switch valve.
Further, the end parts of the water inlet pipe and the water outlet pipe are respectively provided with a joint.
According to the technical scheme, the PVD equipment waterway system designed by the application is characterized in that the pressure relief assembly is arranged between the water inlet pipe and the water outlet pipe in the waterway system, the pressure of the water inlet pipe is relieved by the pressure relief assembly, so that the pressure of the water inlet pipe is ensured to be in a stable state, the influence on a waterway of the system is avoided, the water cooling effect is ensured, and the water discharged from the pressure relief of the water inlet pipe is directly discharged through the water outlet pipe together for treatment, so that the water discharged from the pressure relief of the water inlet pipe is not required to be additionally arranged for treating the water discharged from the pressure relief of the water inlet pipe, the change of the waterway system is reduced, and the cost is saved.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present application, and that other drawings may be obtained according to these drawings without inventive faculty for a person skilled in the art.
FIG. 1 is a schematic diagram of a PVD equipment waterway system provided in the present application;
FIG. 2 is a schematic diagram of a partial structure of a water inlet pipe and a water outlet pipe of a waterway system of PVD equipment;
in the figure: 1. a water inlet pipe; 11. a first branch pipe; 2. a water outlet pipe; 21. a second branch pipe; 3. a pressure relief assembly; 31. a pressure release valve; 32. a hose; 33. a one-way valve; 4. a switch valve; 5. and (3) a joint.
Detailed Description
The following description of the embodiments of the present application will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are some, but not all, of the embodiments of the present application. All other embodiments, which can be made by one of ordinary skill in the art without undue burden from the embodiments of the present application, are within the scope of the embodiments of the present application.
In the description of the embodiments of the present application, it should be noted that, directions or positional relationships indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., are based on directions or positional relationships shown in the drawings, are merely for convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific direction, be configured and operated in the specific direction, and thus should not be construed as limiting the embodiments of the present application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the embodiments of the present application, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, interchangeably connected, integrally connected, mechanically connected, electrically connected, directly connected, indirectly connected through an intermediary, or in communication between two elements. The specific meaning of the terms in the embodiments of the present application will be understood by those of ordinary skill in the art in a specific context.
The embodiment of the application discloses a PVD equipment waterway system.
Referring to fig. 1, an embodiment of a waterway system of a PVD apparatus provided in an embodiment of the present application includes:
The PVD equipment waterway system that this application designed, through dispose pressure release subassembly 3 between inlet tube 1 and outlet pipe 2 in waterway system, utilize pressure release subassembly 3 to carry out the pressure release to inlet tube 1, with guarantee that the pressure of inlet tube 1 is in steady state, avoid causing the influence to the system water route, and then guarantee the water-cooling effect, the water that inlet tube 1 pressure release was flowed out is direct together to discharge through outlet pipe 2 and handle, just need not go to increase again to set up new waterway in order to handle the water that the inlet tube pressure release was flowed out, reduce waterway system's change, save cost.
The first embodiment of the PVD device waterway system provided in the embodiments of the present application is the second embodiment of the PVD device waterway system provided in the embodiments of the present application, and refer to fig. 1 specifically.
Based on the scheme of the first embodiment:
further, in the case of the design of the pressure relief assembly 3, a communication line is included as well as a pressure relief valve 31. The relief valve 31 may be a commercially available water relief valve or a safety valve, and is not particularly limited.
The communicating pipe consists of a plurality of hoses 32 and is connected between the water inlet pipe 1 and the water outlet pipe 2; the hose 32 is more adaptable and more convenient to connect than rigid tubes, and the hose 32 may be any commercially available industrial hose, and is not limited. The number of hoses 32 may be determined according to the actual needs, and is not limited.
The pressure release valve 31 is installed on the communicating pipe, and the number of the hoses 32 is one, so that one end of the pressure release valve 31 can be directly connected and communicated with the water inlet pipe 1, and the other end is connected with the water outlet pipe 2 through the hoses 32. Taking two hoses 32 as an example, two ends of the pressure release valve 31 can be connected with the water inlet pipe 1 and the water outlet pipe 2 through the hoses 32 respectively. Those skilled in the art can make appropriate changes and designs based thereon without limitation.
Further, in order to prevent water from flowing back to the water inlet pipe 1 from the water outlet pipe 2, the pressure relief assembly 3 further includes a check valve 33, and the check valve 33 is installed on the communicating pipe. Specifically, the pressure release valve 31 and the check valve 33 may be sequentially arranged along the pressure release and circulation direction, and the check valve 33 is a common check valve for water in the market, which is not particularly limited.
Further, although the hose 32 has better connection convenience, the flexible characteristic of the hose 32 also makes the constructed communication pipeline easy to be continuously bent, which easily increases the water resistance of the communication pipeline, thereby reducing the water flow efficiency, and in order to better solve the problem, the pressure release assembly 3 of the present application is further designed to include a plurality of shaping members (not shown in the figure).
The shaping piece is provided with a shaping cavity for the hose 32 to pass through, and is used for shaping the hose 32, and the hose 32 can be shaped to a certain extent by utilizing the shaping piece, so that the continuous bending condition is avoided. The shaping piece can be a plastic pipe sleeve and is provided with a bayonet communicated with the internal shaping cavity, the shaping piece can be sleeved on the hose 32 through the bayonet, shaping of the hose 32 is achieved, and of course, other materials and structures can be adopted, and the shaping piece is not limited specifically.
Further, in order to better ensure the pressure relief effect, the pressure relief assembly 3 is preferably designed to be at least two.
Further, since the pressures at both ends of the waterway pipe are the same or similar, it is preferable that the pressure relief assembly 3 is disposed at the middle, and it is preferable that the pressure relief assembly 3 is connected at the middle between the water inlet pipe 1 and the water outlet pipe 2.
Further, in order to make the connection between the water inlet pipe 1, the water outlet pipe 2 and the pressure relief assembly 3 more convenient.
The first branch pipe 11 connected with the pressure relief component 3 is arranged on the pipe wall of the water inlet pipe 1, and the second branch pipe 21 connected with the pressure relief component 3 is arranged on the pipe wall of the water outlet pipe 2. The number of the first branch pipes 11 and the second branch pipes 21 is determined according to the number of the pressure relief assemblies 3, and is not limited.
Further, in order to facilitate the assembly and disassembly maintenance of the pressure relief assembly 3, the first branch pipe 11 and the second branch pipe 21 are respectively provided with the switch valve 4, so that the switch valves 4 on the first branch pipe 11 and the second branch pipe 21 can be closed when the assembly and disassembly maintenance of the pressure relief assembly 3 is performed.
Further, the switch valve 4 may be a manual switch valve, or may be an electric control switch valve, which is not limited in particular.
Further, the end parts of the water inlet pipe 1 and the water outlet pipe 2 are respectively provided with a joint 5, so that the connection between the water inlet pipes 1 or the water outlet pipes 2 is convenient to realize.
In addition, in the present application, the connection between the hose 32 and the check valve 33, or the relief valve 31, or the first branch pipe 11, or the second branch pipe 21, or the on-off valve 4 may be fastened by a pipe clip, and for other combined connection, the connection may be performed by using a relative pipe connector according to actual needs, which is not particularly limited.
The foregoing describes a waterway system of PVD equipment provided in the present application in detail, and those skilled in the art, based on the ideas of the embodiments of the present application, will change the specific embodiments and application ranges, so the disclosure should not be construed as limiting the present application.
Claims (10)
1. The PVD equipment waterway system is characterized by comprising a water inlet pipe (1), a water outlet pipe (2) and a pressure relief assembly (3);
the pressure relief assembly (3) is connected between the water inlet pipe (1) and the water outlet pipe (2) and is used for relieving pressure of the water inlet pipe (1).
2. The PVD plant waterway system according to claim 1, characterized in that said pressure relief assembly (3) comprises a communication line and a pressure relief valve (31);
the communicating pipe consists of a plurality of hoses (32) and is connected between the water inlet pipe (1) and the water outlet pipe (2);
the pressure relief valve (31) is installed on the communicating pipeline.
3. The PVD plant waterway system according to claim 2, characterized in that said pressure relief assembly (3) further comprises a one-way valve (33);
the one-way valve (33) is mounted on the communicating pipe.
4. A PVD plant waterway system according to claim 3, characterized in that said pressure relief assembly (3) further comprises a plurality of shaped pieces;
the shaping piece is provided with a shaping cavity for the hose (32) to pass through and for shaping the hose (32).
5. PVD plant waterway system according to claim 1, characterized in that said pressure relief assemblies (3) are at least two.
6. The PVD device waterway system according to claim 1, characterized in that the pressure relief assembly (3) is connected in a central position between the inlet pipe (1) and the outlet pipe (2).
7. The waterway system of PVD equipment according to claim 1, characterized in that the pipe wall of the water inlet pipe (1) is provided with a first branch pipe (11) connected with the pressure relief assembly (3);
the pipe wall of the water outlet pipe (2) is provided with a second branch pipe (21) connected with the pressure relief assembly (3).
8. The waterway system of PVD apparatuses according to claim 7, characterized in that the first branch pipe (11) and the second branch pipe (21) are provided with on-off valves (4).
9. The PVD plant waterway system according to claim 8, characterized in that said on-off valve (4) is a manual on-off valve (4).
10. The waterway system of PVD equipment according to claim 1, characterized in that the ends of the water inlet pipe (1) and the water outlet pipe (2) are provided with connectors (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223191158.0U CN218910494U (en) | 2022-11-30 | 2022-11-30 | PVD equipment waterway system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223191158.0U CN218910494U (en) | 2022-11-30 | 2022-11-30 | PVD equipment waterway system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218910494U true CN218910494U (en) | 2023-04-25 |
Family
ID=86043510
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223191158.0U Active CN218910494U (en) | 2022-11-30 | 2022-11-30 | PVD equipment waterway system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218910494U (en) |
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2022
- 2022-11-30 CN CN202223191158.0U patent/CN218910494U/en active Active
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