CN218904047U

CN218904047U - ITO film etching device

Info

Publication number: CN218904047U
Application number: CN202320118040.0U
Authority: CN
Inventors: 柯滔; 周宇民
Original assignee: Hubei Bojing Guangxian Intelligent Technology Co ltd
Current assignee: Hubei Bojing Guangxian Intelligent Technology Co ltd
Priority date: 2023-02-06
Filing date: 2023-02-06
Publication date: 2023-04-25
Anticipated expiration: 2033-02-06

Abstract

The utility model relates to the technical field of etching devices, in particular to an ITO film etching device, which comprises a fixed bracket, wherein the top of the fixed bracket is fixedly connected with an etching machine case, the right end surface of the etching machine case is fixedly connected with a protection machine case, the top of the protection machine case is communicated with an air suction pipe, one end of the air suction pipe penetrates through the etching machine case and is communicated with an air suction cover, one side of the air suction pipe is fixedly connected with an air suction fan, the inner side of the protection machine case is provided with an air storage box, the upper part and the right part of the air storage box are respectively communicated with a connecting pipe, the connecting pipes positioned above the air storage box are connected to the other end of the air suction pipe through threads in a screwed manner, and one sides of the two connecting pipes are respectively fixedly connected with a control valve; the utility model can suck the smoke generated by etching, gradually increases the pressure inside the gas storage tank along with the collection of the smoke, has a good warning function, reduces the probability of accidents, and can timely alert staff to process the collected smoke.

Description

ITO film etching device

Technical Field

The utility model relates to an ITO film etching device, and belongs to the technical field of etching devices.

Background

An ITO thin film is an n-type semiconductor material having high conductivity, high visible light transmittance, high mechanical hardness, and good chemical stability, and is a thin film material most commonly used for transparent electrodes of Liquid Crystal Displays (LCDs), plasma Displays (PDPs), electroluminescent displays (EL/OLEDs), touch panels (TouchPanel), solar cells, and other electronic instruments, and an etching device is required when processing the same.

The prior art has the following problems:

most etching devices have a smoke removal function when in use, but have obvious defects, particularly the etching device described in patent number CN209608970U has the function of collecting smoke to prevent pollution, but cannot monitor the pressure in the smoke collection box in real time, and is difficult to ensure the stability and safety when the equipment is operated when the smoke is collected and the pressure in the box is too high.

Disclosure of Invention

To solve the problems set forth in the background art. The utility model provides an ITO film etching device.

In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides an ITO membrane etching device, includes the fixed bolster, the top fixedly connected with etching machine case of fixed bolster, the right-hand member face fixedly connected with protection machine case of etching machine case, the top intercommunication of protection machine case has the breathing pipe, the one end of breathing pipe runs through etching machine case intercommunication and has the cover of breathing in, one side fixedly connected with of breathing pipe breathes in the fan, the inboard of protection machine case is equipped with the gas receiver, the top and the right-hand all intercommunication of gas receiver have the connecting pipe, and are located the top the connecting pipe passes through screw thread screwed connection in the other end of breathing pipe, two the equal fixedly connected with control valve in one side of connecting pipe, the inboard fixedly connected with gaseous check valve of breathing pipe, the preceding terminal surface of protection machine case articulates there is sealed chamber door.

Preferably, the right end face of the protection case is communicated with a fixed case, and the connecting pipe positioned on the right is communicated with the fixed case through a vent pipe.

Preferably, the inner side of the bottom end surface of the fixed chassis is fixedly connected with a strong pull rope, and the other end of the strong pull rope is fixedly connected with a counterweight floating ball.

Preferably, a tact switch is fixedly connected to the inner side of the top end surface of the fixed case, and an alarm is fixedly connected to the front end surface of the protective case.

Preferably, a transparent observation window is fixedly connected to the inner side of the front end face of the fixed case, and a scale is fixedly connected to one side of the transparent observation window.

Preferably, a controller is fixedly connected to one side of the protective case, and the air suction fan and the alarm are electrically connected to the controller.

The beneficial effects of the utility model are as follows:

according to the utility model, through the set suction fan, the gas storage box, the counterweight floating ball, the alarm and the like, smoke is generated in the etching process when the gas storage box is used, the suction fan, the suction pipe and the suction cover suck the smoke and discharge the smoke into the gas storage box, so that the smoke pollution is reduced, the physical and mental health of workers is also ensured to be free from harm, the pressure in the gas storage box is increased along with the increase of the gas storage capacity, the pressure in the fixed box is small, the floating ball rising phenomenon can occur when the gas is introduced into the fixed box, the reading on the scale table is checked to know the rising height of the floating ball, so that the pressure in the gas storage box is accurately known, the collected smoke is required to be processed timely when the pressure is too high, accidents are avoided, in addition, after the floating ball rises to a certain position and props against a light touch switch, the alarm can be sent out by the alarm, the pressure in the gas storage box is indicated to reach the dangerous degree, and people can be alerted to timely process the smoke in the gas storage box.

Drawings

The accompanying drawings are included to provide a further understanding of the utility model, and are incorporated in and constitute a part of this specification, illustrate the utility model and together with the description serve to explain the utility model.

FIG. 1 is a schematic diagram of the overall structure of the present utility model;

FIG. 2 is a schematic diagram of the internal structure of the guard chassis according to the present utility model;

FIG. 3 is a schematic view of the mounting structure of the dial gauge of the present utility model;

in the figure: 1. a fixed bracket; 2. etching the chassis; 3. a protective chassis; 4. an air suction pipe; 5. an air suction cover; 6. an air suction fan; 7. a gas storage tank; 8. a connecting pipe; 9. a control valve; 10. a gas one-way valve; 11. sealing the box door; 12. fixing the case; 13. a strong pull rope; 14. a counterweight floating ball; 15. touching the switch; 16. an alarm; 17. a transparent viewing window; 18. a scale.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Examples

Referring to fig. 1-3, the present utility model provides the following technical solutions: the utility model provides an ITO membrane etching device, including fixed bolster 1, the top fixedly connected with etching machine case 2 of fixed bolster 1, the right-hand member face fixedly connected with protection machine case 3 of etching machine case 2, the top intercommunication of protection machine case 3 has breathing pipe 4, the one end of breathing pipe 4 runs through etching machine case 2 intercommunication has suction hood 5, one side fixedly connected with suction fan 6 of breathing pipe 4, the inboard of protection machine case 3 is equipped with gas receiver 7, the top and the right-hand all intercommunication of gas receiver 7 have connecting pipe 8, and the connecting pipe 8 that is located the top passes through screw thread screwed connection in the other end of breathing pipe 4, one side of two connecting pipes 8 all fixedly connected with control valve 9, the inboard fixedly connected with gaseous check valve 10 of breathing pipe 4, the preceding terminal surface of protection machine case 3 articulates there is sealed chamber door 11.

As a preferable technical scheme of the utility model, the right end face of the protective case 3 is communicated with a fixed case 12, a connecting pipe 8 positioned at the right is communicated with the fixed case 12 through a vent pipe, the inner side of the bottom end face of the fixed case 12 is fixedly connected with a strong pull rope 13, the other end of the strong pull rope 13 is fixedly connected with a counterweight floating ball 14, the inner side of the front end face of the fixed case 12 is fixedly connected with a transparent observation window 17, and one side of the transparent observation window 17 is fixedly connected with a scale 18; when the flue gas that will produce during the etching is absorbed and is stored by gas receiver 7, along with the increase of gas storage volume, inside pressure grow, and fixed quick-witted case 12 inside pressure is little, and the floater rises the phenomenon when gas lets in fixed quick-witted case 12, looks over the reading on the scale 18 in order to know the height that the floater risen to accurate pressure size in the gas receiver 7 of knowing need in time handle when the pressure is too big, avoid taking place the unexpected accident.

As a preferable technical scheme of the utility model, a controller is fixedly connected to one side of the protective case 3, and the air suction fan 6 and the alarm 16 are electrically connected to the controller; the control device is convenient to work.

Examples

Referring to fig. 1-3, the difference between the present embodiment and embodiment 1 is that:

the inner side of the top end surface of the fixed case 12 is fixedly connected with a tact switch 15, and the front end surface of the protective case 3 is fixedly connected with an alarm 16; after the pressure in the gas storage tank 7 reaches a certain degree, the floating ball props against the tact switch 15, and an alarm 16 can give an alarm so as to alert people to timely treat the smoke in the gas storage tank 7.

The working principle and the using flow of the utility model are as follows: when the gas storage box is used, smoke is generated in the etching process, the smoke is sucked by the air suction fan 6, the air suction pipe 4 and the air suction cover 5 and discharged into the gas storage box 7, smoke pollution is reduced, physical and mental health of workers is also guaranteed to be free from harm, as the gas storage capacity is increased, the pressure in the gas storage box 7 is increased, the pressure in the fixed machine box 12 is small, a floating ball rising phenomenon can occur when gas is introduced into the fixed machine box 12, reading on the scale table 18 is checked to know the rising height of the floating ball, so that the pressure in the gas storage box 7 is accurately known, the collected smoke needs to be processed in time when the pressure is overlarge, accidents are avoided, in addition, after the floating ball rises to a certain position, the light touch switch 15 is propped up, an alarm can be sent out by the alarm 16, the pressure in the gas storage box is indicated to reach the dangerous degree, and people can be alerted to process the smoke in the gas storage box 7 in time.

Finally, it should be noted that: the foregoing description is only a preferred embodiment of the present utility model, and the present utility model is not limited thereto, but it is to be understood that modifications and equivalents of some of the technical features described in the foregoing embodiments may be made by those skilled in the art, although the present utility model has been described in detail with reference to the foregoing embodiments. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.

In this document, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Claims

1. An ITO membrane etching device, includes fixed bolster (1), its characterized in that: the top fixedly connected with etching machine case (2) of fixed bolster (1), the right-hand member face fixedly connected with of etching machine case (2) protects quick-witted case (3), the top intercommunication of protecting machine case (3) has breathing pipe (4), the one end of breathing pipe (4) runs through etching machine case (2) intercommunication and has breathing mask (5), one side fixedly connected with of breathing pipe (4) inhales fan (6), the inboard of protecting machine case (3) is equipped with gas receiver (7), the top and the right-hand connecting pipe (8) that all communicate of gas receiver (7), and be located the top connecting pipe (8) pass through screw thread threaded connection in the other end of breathing pipe (4), two one side of connecting pipe (8) all fixedly connected with control valve (9), the inboard fixedly connected with gaseous check valve (10) of breathing pipe (4), the preceding terminal surface of protecting machine case (3) articulates there is sealed chamber door (11).

2. An ITO film etching apparatus according to claim 1, wherein: the right end face of the protection case (3) is communicated with a fixed case (12), and the connecting pipe (8) positioned on the right is communicated with the fixed case (12) through a vent pipe.

3. An ITO film etching apparatus according to claim 2, wherein: the inner side of the bottom end surface of the fixed case (12) is fixedly connected with a powerful pull rope (13), and the other end of the powerful pull rope (13) is fixedly connected with a counterweight floating ball (14).

4. An ITO film etching apparatus according to claim 3, wherein: the inner side of the top end surface of the fixed case (12) is fixedly connected with a tact switch (15), and the front end surface of the protective case (3) is fixedly connected with an alarm (16).

5. The apparatus for etching an ITO film according to claim 4, wherein: the inner side of the front end face of the fixed case (12) is fixedly connected with a transparent observation window (17), and one side of the transparent observation window (17) is fixedly connected with a scale (18).

6. The apparatus for etching an ITO film according to claim 4, wherein: one side of the protective case (3) is fixedly connected with a controller, and the air suction fan (6) and the alarm (16) are electrically connected to the controller.