CN218884887U

CN218884887U - Calibrating device for zero position of quartz crucible electrode

Info

Publication number: CN218884887U
Application number: CN202223541899.7U
Authority: CN
Inventors: 周勇; 吴伟华; 方志远; 徐立涛; 刘涛
Original assignee: Ningxia Xinjing New Material Technology Co ltd
Current assignee: Ningxia Xinjing New Material Technology Co ltd
Priority date: 2022-12-29
Filing date: 2022-12-29
Publication date: 2023-04-18
Anticipated expiration: 2032-12-29

Abstract

The utility model discloses a calibrating device of quartz crucible electrode zero-bit, including setting up laser emitter and the laser receiver at the cooling plate upper surface, wherein, laser emitter laser receiver with the through-hole of cooling plate is located same straight line and is located the heterolateral of through-hole is used for detecting the electrode position and the output of the electrode of through-hole. Through set up laser emitter and laser receiver at the cooling plate, make laser emitter laser receiver with the through-hole of cooling plate is located same straight line and is located the different sides of through-hole, can detect the electrode position and the output of the electrode of through-hole through laser receiver whether the signal acquisition that laser emitter passes through, realize real-time supervision and output to the electrode position, go up and down to the top of water-cooling board when the electrode, the electrode end moves to be the electrode zero position when laser receiver can receive the signal, realizes the zero position calibration, improves efficiency and the quality that the crucible was made.

Description

Calibrating device for zero position of quartz crucible electrode

Technical Field

The utility model relates to a quartz crucible's processing technology field, more specifically says, relates to a calibrating device of quartz crucible electrode zero-bit.

Background

Quartz crucibles are processing tools used in the monocrystalline silicon industry. The usual method for manufacturing quartz crucibles is by arc processing: according to the electric arc method, a graphite electrode is used as a carrier, the electrode position needs to be extended into a crucible in the melting process, the electrode position is moved up and down on site according to a set program, the arc is broken after the crucible is produced every time, operating staff need to manually and visually lift the graphite electrode to a position 300mm below a water cooling plate, and the staff visually have deviation.

In addition, the position of the electrode needs to extend to a position 300mm below a water cooling plate before the melting of operation staff, the electrode moves up and down according to the program setting after the arc striking, a part of the electrode is corroded when one crucible electrode is produced, and one group of electrodes needs to be consumed when 3 crucibles are produced.

Therefore, the problem that the different starting positions cause the difference of the crucible quality is solved.

SUMMERY OF THE UTILITY MODEL

In view of this, the utility model provides a calibrating device of quartz crucible electrode zero-bit solves the different quality that also can bring the difference to the crucible in initial position, improves quartz crucible's quality and manufacturing efficiency.

In order to achieve the above purpose, the utility model provides a following technical scheme:

the calibrating device for the zero position of the quartz crucible electrode comprises a laser transmitter and a laser receiver which are arranged on the upper surface of a cooling plate, wherein the laser transmitter, the laser receiver and a through hole of the cooling plate are positioned on the same straight line and on the opposite side of the through hole, and are used for detecting and outputting the position of the electrode passing through the through hole.

Wherein the laser transmitter and the corresponding laser receiver are located on the same diameter of the cooling plate.

Wherein the laser transmitters and the corresponding laser receivers are located at the circumferential edge of the cooling plate.

The number of detection groups formed by the laser transmitters and the laser receivers is multiple.

Wherein a plurality of the detection groups are evenly distributed on the cooling plate.

Wherein the plurality of detection group installation heights sequentially increase in a circumferential direction of the cooling plate.

Wherein the height difference of two adjacent detection groups in the plurality of detection groups is equal.

The device also comprises a data processor connected with the laser receiver and used for calculating and outputting the current length of the electrode.

The device also comprises a display connected with the data processor and used for displaying the length and the position of the electrode.

The electrode length monitoring device further comprises an alarm connected with the data processor and the display, and is used for outputting alarm information after the length of the electrode is lower than a threshold value.

Compared with the introduction content of the prior art, the calibrating device for the zero position of the quartz crucible electrode has the following advantages:

the calibrating device for the zero position of the quartz crucible electrode is characterized in that the cooling plate is provided with the laser transmitter and the laser receiver, so that the laser transmitter, the laser receiver and the through hole of the cooling plate are positioned on the same straight line and on different sides of the through hole, the electrode position of the electrode passing through the through hole can be obtained and output by detecting whether the laser transmitter signal is detected by the laser receiver, the real-time monitoring and output of the electrode position are realized, when the electrode is lifted above the water cooling plate, the tail end of the electrode is moved to the zero position of the electrode when the laser receiver can receive the signal, the zero position calibration is realized, and the manufacturing efficiency and quality of the crucible are improved.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.

Fig. 1 is a schematic structural diagram of an embodiment of a calibration device for zero position of an electrode of a quartz crucible provided by an embodiment of the present invention;

the device comprises a cooling plate-10, a laser transmitter-20, a laser receiver-30, an electrode-40 and an electric control cabinet-50.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1, fig. 1 is a schematic structural diagram of an embodiment of a calibration device for zero position of a quartz crucible electrode according to an embodiment of the present invention.

A specific embodiment of the utility model provides a calibrating device of quartz crucible electrode zero-bit, including setting up laser emitter 20 and the laser receiver at cooling plate 10 upper surface, wherein, laser emitter 20 laser receiver with the through-hole of cooling plate 10 is located same straight line and is located the heterolateral of through-hole is used for detecting and passes through the electrode 40 position and the output of the electrode 40 of through-hole.

Through setting up laser emitter 20 and laser receiver at cooling plate 10 for laser emitter 20 laser receiver with the through-hole of cooling plate 10 is located same straight line and is located the heteropleural side of through-hole, can detect the electrode 40 position and the output of the electrode 40 through the through-hole through the signal acquisition of laser emitter 20 through laser receiver, realize real-time supervision and the output to the electrode 40 position, when electrode 40 goes up and down to the top of water-cooling board, the terminal zero position 40 that is electrode 40 when moving to laser receiver and can receive the signal that removes of electrode 40, realize the zero calibration, improve efficiency and the quality that the crucible was made.

The present application does not limit the arrangement position and arrangement manner of the laser transmitter 20 and the corresponding laser receiver, and in order to improve the convenience of arrangement, in one embodiment, the laser transmitter 20 and the corresponding laser receiver are located on the same diameter of the cooling plate 10.

By locating the laser transmitter 20 and the corresponding laser receiver on the same diameter of the cooling plate 10, only the electrode 40 can be detected through the exact center of the through hole, so that the accuracy of the use of the electrode 40 can be improved, and the manufacturing quality and efficiency of the crucible can be improved.

The specific locations of the laser transmitter 20 and the corresponding laser receiver and through hole are not limited in this application.

Preferably, the laser transmitters 20 and the corresponding laser receivers are located at the circumferential edge of the cooling plate 10.

The specific positions and numbers of the laser transmitters 20 and the laser receivers are not limited in this application, but in order to improve the detection efficiency and accuracy, the number of detection groups formed by the laser transmitters 20 and the laser receivers is generally multiple.

Preferably, a plurality of said detection groups are uniformly distributed on said cooling plate 10.

It should be noted that, the uniform distribution here means that in the circumferential direction, the similar included angles are equal, for example, 45-plate detection groups are arranged at intervals, or transverse detection groups are arranged, for example, a plurality of detection groups are uniformly installed.

Further, the detection group installation heights of the plurality increase sequentially in the circumferential direction of the cooling plate 10.

The heights of the detection groups arranged in the circumferential direction of the cooling plate 10 are sequentially increased, so that the setting difficulty can be reduced, the installation efficiency can be improved, the position detection can be performed on the electrode 40 at different heights, the position information can be obtained in real time, the position can be measured, the position of the whole part can be measured, if the electrode 40 is inclined or not, the detection efficiency can be improved, and the use efficiency of the electrode 40 can be improved.

Preferably, the height difference between two adjacent detection groups in the plurality of detection groups is equal.

Furthermore, to improve the calibration efficiency, in one embodiment, the calibration device for the zero position of the quartz crucible electrode 40 further includes a data processor connected to the laser receiver for calculating and outputting the current length of the electrode 40.

The length of the electrode 40 at present is calculated and output through the data processor, so that the size information and the position information of the electrode 40 can be obtained in real time, and the management efficiency is improved.

Furthermore, the device for calibrating the zero position of the quartz crucible electrode 40 further comprises a display connected with the data processor and used for displaying the length and the position of the electrode 40.

The length and the position of the electrode 40 are displayed through a display, and the use efficiency can be improved even by simulating the relative position of the electrode 40 and the cooling plate 10.

Furthermore, since the electrode 40 may be damaged and the use efficiency may be reduced after continuous calibration, in one embodiment, the calibration device for the zero position of the quartz crucible electrode 40 further comprises an alarm connected with the data processor and the display, and is used for outputting alarm information when the length of the electrode 40 is lower than a threshold value.

Alarm information is output through the alarm when the length of the electrode 40 is lower than the threshold value, so that maintenance personnel can perform rapid equipment maintenance, and the manufacturing efficiency and quality of the crucible are improved.

The figure is a schematic diagram of a calibrating device for the zero position of the electrode 40, and the calibrating device consists of a laser transmitting and receiving device and an electric control cabinet.

The method used in one embodiment of the zero position calibration device for the quartz crucible electrode 40 is as follows:

after the arc is broken, the tail end of the electrode 40 is gradually moved upwards to a position where the laser receiver can not receive signals, the electric control cabinet 50 calculates the position to be the zero position, the position of the zero position to be 300mm below the water cooling plate is measured, and the position of the electrode 40 before the arc is started can be reached by manually moving the measured distance from the zero position.

To sum up, what this application embodiment provided the calibrating device of quartz crucible electrode zero-bit is through setting up laser emitter and laser receiver at the cooling plate for laser emitter laser receiver with the through-hole of cooling plate is located same straight line and is located the different sides of through-hole can obtain the electrode position and the output of the electrode through the through-hole through laser receiver's signal acquisition that whether detects laser emitter, realizes real-time supervision and output to the electrode position, goes up and down to the top of water-cooling board when the electrode, and the electrode end is removed to laser receiver and is the electrode zero-bit when can receiving the signal, realizes the zero-bit calibration, improves efficiency and the quality that the crucible was made.

It should be noted that, in this specification, each embodiment is described in a progressive manner, and each embodiment focuses on differences from other embodiments, and portions that are the same as and similar to each other in each embodiment may be referred to.

It should be understood that the use of "system," "apparatus," "unit" and/or "module" herein, if any, is merely one way to distinguish between different components, elements, parts, portions or assemblies of different levels. However, other words may be substituted by other expressions if they accomplish the same purpose.

As used in this application and in the claims, the terms "a," "an," "the," and/or "the" are not intended to be inclusive in the singular, but rather are intended to include the plural, unless the context clearly dictates otherwise. In general, the terms "comprises" and "comprising" merely indicate that steps and elements are included which are explicitly identified, that the steps and elements do not form an exclusive list, and that a method or apparatus may include other steps or elements. An element defined by the phrase "comprising a … …" does not exclude the presence of additional like elements in a process, method, article, or apparatus that comprises the element.

In the description of the embodiments herein, "/" means "or" unless otherwise specified, for example, a/B may mean a or B; "and/or" herein is merely an association describing an associated object, and means that there may be three relationships, e.g., a and/or B, which may mean: a exists alone, A and B exist simultaneously, and B exists alone. In addition, in the description of the embodiments of the present application, "a plurality" means two or more than two.

In the following, the terms "first", "second" are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature.

If used herein, a flowchart is provided to illustrate operations performed by a system according to an embodiment of the present application. It should be understood that the preceding or following operations are not necessarily performed in the exact order in which they are performed. Rather, the steps may be processed in reverse order or simultaneously. Meanwhile, other operations may be added to the processes, or a certain step or several steps of operations may be removed from the processes.

The principles and embodiments of the present invention have been explained herein using specific examples, and the above descriptions of the embodiments are only used to help understand the core concepts of the present invention. It should be noted that, for those skilled in the art, without departing from the principle of the present invention, the present invention can be further modified and modified, and such modifications and modifications also fall within the scope of the appended claims.

Claims

1. The calibrating device for the zero position of the quartz crucible electrode is characterized by comprising a laser transmitter and a laser receiver which are arranged on the upper surface of a cooling plate, wherein the laser transmitter, the laser receiver and a through hole of the cooling plate are positioned on the same straight line and on different sides of the through hole, and are used for detecting and outputting the position of the electrode passing through the through hole.

2. The apparatus for calibrating the zero position of an electrode of a quartz crucible as set forth in claim 1, wherein said laser transmitter and said corresponding laser receiver are located on the same diameter of said cooling plate.

3. The apparatus for calibrating the zero position of an electrode of a quartz crucible as set forth in claim 2, wherein said laser transmitter and said corresponding laser receiver are located at the circumferential edge of said cooling plate.

4. The apparatus for calibrating the zero position of an electrode of a quartz crucible as claimed in claim 3, wherein the number of detection groups consisting of the laser transmitter and the laser receiver is multiple.

5. The apparatus for calibrating the zero position of an electrode of a quartz crucible as set forth in claim 4, wherein a plurality of said sensing units are uniformly distributed on said cooling plate.

6. The apparatus for calibrating the zero position of an electrode of a quartz crucible as set forth in claim 5, wherein the plurality of sensing units are arranged at heights which are sequentially increased in the circumferential direction of said cooling plate.

7. The apparatus for calibrating the zero position of an electrode of a quartz crucible as set forth in claim 6, wherein the height difference between two adjacent ones of said plurality of sensing groups is equal.

8. The quartz crucible electrode null position calibration device as set forth in claim 7, further comprising a data processor connected to said laser receiver for calculating and outputting a current length of said electrode.

9. The quartz crucible electrode null position calibration device of claim 8, further comprising a display connected to the data processor for displaying the length and position of the electrode.

10. A quartz crucible electrode null position calibration device as set forth in claim 9, further comprising an alarm connected to said data processor and said display for outputting an alarm message after the length of said electrode is below a threshold value.