CN218884750U - Cooling mechanism and chip testing device - Google Patents

Abstract

The utility model provides a cooling body and chip testing arrangement relates to refrigeration plant technical field. The cooling mechanism includes a cooling housing; the cooling shell is provided with a liquid inlet flow passage, a liquid outlet flow passage and a flow guide structure, wherein the liquid inlet flow passage and the liquid outlet flow passage rotate around the central axis of the cooling shell along the same direction and are communicated with the central area of the cooling shell; the flow directing structure is located at the end of the inlet channel and is configured to direct the flow of fluid towards the central region. The utility model provides a cooling body has solved the cooling module runner central flow rate that exists among the prior art and has low, the poor technical problem of heat transfer performance.

Description

Cooling mechanism and chip testing device

Technical Field

The utility model belongs to the technical field of the refrigeration plant technique and specifically relates to a cooling body and chip testing arrangement is related to.

Background

The refrigerating system is a refrigerating system in the manufacture of integrated circuits, and is widely applied to the temperature control link in the testing and sorting process of the semiconductor industry. A refrigerating machine mainly comprises four parts, namely a compressor, a throttling device, a condenser and an evaporator, forms a refrigerating or heating cycle to meet the requirements of high and low temperatures in the testing and sorting process, and is mainly applied to links such as a pressure head crimping test, a preheating disc, socket blowing and the like. The heat exchange device is mainly represented as a flow channel process, a refrigerant and refrigeration oil are introduced into a flow channel, and the three-temperature requirement is realized through the heat exchange performance of the flow channel.

The existing flow channel process adopts an Archimedes double-spiral channel, a liquid inlet flow channel and a liquid outlet flow channel are in the same direction, and a reinforcing column is arranged in the central area. In the flow channel process, most of fluid flows into the liquid outlet flow channel directly after flowing out of the liquid inlet flow channel and does not flow in the central area, so that the central area of the flow channel is a low-speed area, more oil is accumulated in the central area, and the efficient heat exchange performance of the center is weakened.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a cooling body and chip testing device to it is low to alleviate the runner central flow rate that exists among the prior art, technical problem that heat transfer performance is poor.

In order to solve the technical problem, the utility model provides a technical scheme lies in:

in a first aspect, the present invention provides a cooling mechanism comprising a cooling housing;

the cooling shell is provided with a liquid inlet flow passage, a liquid outlet flow passage and a flow guide structure, the liquid inlet flow passage and the liquid outlet flow passage rotate around the central axis of the cooling shell along the same direction and are communicated with the central area of the cooling shell;

the flow guide structure is positioned at the tail end of the liquid inlet flow channel and is configured to guide the fluid to flow to the central area.

Further, the flow guiding structure comprises a first flow guiding hole and/or a flow guiding plate;

the first diversion hole is formed in the side wall, close to the central area, of the liquid inlet flow channel so as to communicate the liquid inlet flow channel with the central area;

one end of the guide plate extends into the tail end of the liquid inlet flow channel.

Furthermore, when the water conservancy diversion structure includes first water conservancy diversion hole, first water conservancy diversion hole is provided with a plurality ofly, and is a plurality of first water conservancy diversion hole is followed the extending direction interval setting of feed liquor runner.

Further, at least two of the first flow guide holes have different widths.

Still further, the guide plate comprises a first guide plate, and the first guide plate is bent from the tail end of the liquid inlet flow channel to the central area.

Furthermore, the first guide plate is provided with a second guide hole, and the second guide hole penetrates through the first guide plate along the thickness direction of the first guide plate.

Furthermore, the second flow guide holes are provided in a plurality, and the second flow guide holes are arranged at intervals along the extending direction of the first flow guide plate.

Still further, the baffle further comprises a second baffle; the first guide plate and the second guide plate are arranged at intervals along the extending direction of the liquid inlet flow channel and are respectively used for guiding fluid to flow to one side and the other side of the central area.

Still further, the second baffle includes a first arced segment, a second arced segment, and a third arced segment;

the first arc-shaped section and the third arc-shaped section are positioned on the same side of the second arc-shaped section and are connected with the second arc-shaped section;

the end, close to the side wall of the central area, of the liquid inlet flow channel is inserted into an area formed by the first arc-shaped section, the second arc-shaped section and the third arc-shaped section.

Still further, the cooling mechanism further comprises a cover plate, an inlet pipe and an outlet pipe;

the cover plate is covered on the surfaces of the liquid inlet channel and the liquid outlet channel of the cooling shell, the inlet pipe penetrates through the cover plate to be communicated with the liquid inlet channel, and the outlet pipe penetrates through the cover plate to be communicated with the liquid outlet channel;

the cover plate and the cooling shell are detachably connected or integrally formed; when the cover plate is detachably connected with the cooling shell, a central column is further arranged in the central area of the cooling shell, and the cooling shell is detachably connected with the cover plate through the central column.

In a second aspect, the present invention provides a chip testing apparatus comprising a cooling mechanism as defined in any one of the above, wherein the chip testing apparatus utilizes the cooling mechanism to control the temperature of the chip.

Synthesize above-mentioned technical scheme, the utility model discloses the technological effect analysis that can realize as follows:

the cooling mechanism provided by the utility model comprises a cooling shell; the cooling shell is provided with a liquid inlet flow passage, a liquid outlet flow passage and a flow guide structure, the liquid inlet flow passage and the liquid outlet flow passage rotate around the central axis of the cooling shell along the same direction and are intersected in the central area of the cooling shell; the flow directing structure is located at the end of the inlet channel and is configured to direct the flow of fluid towards the central region. The cooling liquid flows in from the inlet of the liquid inlet flow channel and flows to the outlet of the liquid inlet flow channel along the liquid inlet flow channel; the flow guide structure guides the cooling liquid flowing out from the outlet of the liquid inlet flow channel to flow to the central area, so that the flow speed of the cooling liquid in the central area is accelerated; the cooling liquid flows from the central area into the inlet of the liquid outlet channel and flows along the liquid outlet channel to the outlet of the liquid outlet channel. The liquid inlet flow channel and the liquid outlet flow channel are in a double-spiral form which rotates around the central axis of the cooling shell along the same direction, so that the flow path of cooling liquid is increased, and the cooling shell has good heat exchange performance and temperature uniformity; and the central area is provided with the flow guide structure, so that the fluid speed of the central area is improved, the oil accumulation of the central area is avoided, and the heat exchange performance is further improved.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the prior art descriptions will be briefly described below, it is obvious that the drawings in the following descriptions are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

Fig. 1 is a first schematic structural diagram of a cooling mechanism according to an embodiment of the present invention;

fig. 2 is a schematic structural diagram ii of a cooling mechanism according to an embodiment of the present invention;

fig. 3 is a schematic structural diagram three of a cooling mechanism according to an embodiment of the present invention;

fig. 4 is a schematic structural diagram of a cooling mechanism according to an embodiment of the present invention;

fig. 5 is a schematic structural diagram of a second flow guide plate in the cooling mechanism according to the embodiment of the present invention;

fig. 6 is a schematic structural diagram five of the cooling mechanism according to the embodiment of the present invention.

Icon:

100-cooling the housing; 110-a liquid inlet flow channel; 120-liquid outlet flow channel; 130-a central column; 140-a first flow directing hole; 151-a first baffle; 152-second flow guide holes; 153-a second baffle; 154-a first arc segment; 155-a second arc segment; 156-third arc segment.

Detailed Description

To make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the attached drawings in the embodiments of the present invention are combined to clearly and completely describe the technical solution in the embodiments of the present invention, and obviously, the described embodiments are part of the embodiments of the present invention, rather than all embodiments. The components of the embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments of the present invention, all other embodiments obtained by a person skilled in the art without making creative efforts belong to the protection scope of the present invention.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined or explained in subsequent figures.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate the position or positional relationship based on the position or positional relationship shown in the drawings, or the position or positional relationship which is usually placed when the product of the present invention is used, and are only for convenience of description and simplification of the description, but do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.

Furthermore, the terms "horizontal", "vertical", "overhang" and the like do not imply that the components are required to be absolutely horizontal or overhang, but may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.

In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

Some embodiments of the present invention will be described in detail below with reference to the accompanying drawings. The embodiments described below and the features of the embodiments can be combined with each other without conflict.

Example one

As shown in fig. 1 to 5, the cooling mechanism provided by the embodiment of the present invention includes a cooling housing 100; the cooling shell 100 is provided with a liquid inlet flow passage 110, a liquid outlet flow passage 120 and a flow guide structure, wherein the liquid inlet flow passage 110 and the liquid outlet flow passage 120 rotate around the central axis of the cooling shell 100 along the same direction and are communicated with the central area of the cooling shell 100; a flow directing structure is located at the end of the inlet channel 110 and is configured to direct the flow of fluid towards the central region. The cooling liquid flows in from the inlet of the liquid inlet flow channel 110 and flows to the outlet of the liquid inlet flow channel 110 along the liquid inlet flow channel 110; the flow guide structure guides the cooling liquid flowing out from the outlet of the liquid inlet flow channel 110 to flow to the central area, so that the flow speed of the cooling liquid in the central area is accelerated; the cooling liquid flows from the central area into the inlet of the outlet channel 120 and along the outlet channel 120 to the outlet of the outlet channel 120. The liquid inlet flow channel 110 and the liquid outlet flow channel 120 are respectively formed in the shape of double spirals from the center of the cooling shell 100 outwards along the same rotating direction, so that the flowing path of the cooling liquid is increased, and the cooling shell 100 has good heat exchange performance and temperature uniformity; and the central area is provided with a flow guide structure, so that the fluid speed of the central area is improved, the oil accumulation of the central area is avoided, and the heat exchange performance is further improved.

The shape and structure of the cooling mechanism are explained in detail below:

in an alternative aspect of the embodiment of the present invention, the flow guiding structure includes a first flow guiding hole 140 and/or a flow guiding plate; the first guiding hole 140 is disposed on the sidewall of the liquid inlet channel 110 close to the central column 130, so as to communicate the liquid inlet channel 110 with the central region; one end of the baffle extends into the end of the inlet channel 110.

Specifically, referring to fig. 1, the cooling housing 100 is a rectangular parallelepiped, and the upper surface of the cooling housing is provided with two grooves which both rotate around the central axis of the cooling housing 100 along the same direction, wherein the two grooves are a liquid inlet channel 110 and a liquid outlet channel 120; the liquid inlet flow channel 110 and the liquid outlet flow channel 120 are both in the shape of a spiral line, and the shape of the spiral line refers to that the trend of the center line of a certain section of the liquid inlet flow channel 110 or the liquid outlet flow channel 120 is approximately in the shape of a spiral line, but does not mean that the liquid inlet flow channel 110 or the liquid outlet flow channel 120 is in a two-dimensional linear structure, and the liquid inlet flow channel 110 and the liquid outlet flow channel 120 are flow channels with a certain depth; further, the depth of the liquid inlet flow passage 110 and the liquid outlet flow passage 120 is slightly smaller than the thickness of the cooling casing 100. The liquid inlet flow passage 110 and the liquid outlet flow passage 120 are arranged in the form of a spiral line, so that the cooling liquid can rapidly and uniformly flow into the cooling shell 100 or rapidly and uniformly flow out of the cooling shell 100, and the flow resistance is reduced. In one embodiment, the liquid inlet flow channels 110 and the liquid outlet flow channels 120 are alternately arranged, that is, the liquid inlet flow channels 110 spirally inward and the liquid outlet flow channels 120 spirally outward from the center of the cooling housing 100 are alternately arranged, so that the temperature of the cooling liquid in the liquid inlet flow channels 110 is lower than that of the cooling liquid in the liquid outlet flow channels 120, the alternative arrangement of the cold flow channels and the hot flow channels enables the temperature gradient to be more uniformly distributed, and the liquid inlet flow channels 110 and the liquid outlet flow channels 120 which are alternately arranged can perform sufficient heat exchange, so that the heat exchange performance is better. In another embodiment, the liquid inlet channel 110 and the liquid outlet channel 120 are arranged at equal intervals. With such arrangement, the temperature distribution in the flow channel is uniformly distributed in a gradient manner at the center of the cooling housing 100, and relatively uniform heat transfer can occur between the cooling liquid in the liquid inlet flow channel 110 and the cooling liquid in the liquid outlet flow channel 120. The cooling case 100 may be provided with only the first guide holes 140, or only the guide plates, or with both the first guide holes 140 and the guide plates.

Referring to fig. 1, the first guiding holes 140 are disposed at the end of the liquid inlet flow channel 110 to divide the coolant flowing out from the liquid inlet flow channel 110, and a portion of the coolant flows to the central area through the first guiding holes 140, so as to prevent the coolant from directly flowing into the liquid outlet flow channel 120 from the liquid inlet flow channel 110 to accumulate oil in the central area, thereby increasing the flow rate of the coolant in the central area. Referring to fig. 2, the flow guide plate is disposed in the central area, and guides the coolant flowing out from the liquid inlet channel 110 to the central area, so as to prevent the coolant from directly flowing into the liquid outlet channel 120 from the liquid inlet channel 110 to accumulate oil in the central area, thereby increasing the flow rate of the coolant in the central area.

When the guiding structure includes the first guiding hole 140, the first guiding hole 140 is provided in a plurality of numbers, and the first guiding holes 140 are arranged at intervals along the extending direction of the liquid inlet channel 110.

Referring to fig. 1, in the present embodiment, two first diversion holes 140 are provided; of course, other numbers of the first diversion holes 140, such as three, four, or five, should also be within the scope of the embodiments of the present invention.

The first flow guide holes 140 are provided in a plurality of numbers, so that the flow dividing effect of the coolant flowing out from the liquid inlet flow channel 110 is improved, the flow rate of the coolant in the central area is further improved, and the heat exchange performance of the cooling mechanism is further improved.

At least two first flow guide holes 140 of the plurality of first flow guide holes 140 have different widths.

In this embodiment, the widths of the two first guiding holes 140 are different, so that the flow velocities of the cooling liquid flowing out of the two first guiding holes 140 are different, thereby increasing the turbulent state of the cooling liquid and contributing to the improvement of the heat transfer efficiency.

The utility model discloses in the alternative, the guide plate includes first guide plate 151, and the one end of first guide plate 151 stretches into the end of feed liquor runner 110, and first guide plate 151 is terminal crooked to central region by feed liquor runner 110.

The first guide plate 151 plays a role in guiding and shunting the cooling liquid, so that the flow velocity of the cooling liquid in the central area is improved, the oil accumulation in the central area is avoided, and the heat exchange performance of the cooling mechanism is improved.

The first guide plate 151 is provided with a second guide hole 152, and the second guide hole 152 penetrates the first guide plate 151 along the thickness direction of the first guide plate 151.

Specifically, referring to fig. 3 and 4, the depth direction of the second baffle hole 152 is the same as the thickness direction of the first baffle 151. Further, referring to fig. 3, in the present embodiment, the width of the first diversion holes 140 is set to be 14mm, and the width of the second diversion holes 152 is set to be 4mm.

Referring to fig. 3, the second flow guiding holes 152 divide the coolant flowing into the right side of the first flow guiding plate 151, so that part of the coolant flows to the central area, thereby improving the flow guiding effect of the first flow guiding plate 151, further improving the flow velocity of the coolant in the central area, and further improving the heat exchange performance of the cooling mechanism.

The second guide holes 152 are provided in plural, and the second guide holes 152 are arranged at intervals along the extending direction of the first guide plate 151.

Specifically, referring to fig. 4, at least two second flow guiding holes 152 of the plurality of second flow guiding holes 152 have different widths.

The second guide holes 152 are provided in plural, and may divide the coolant flowing into the right side of the first guide plate 151 for a plurality of times, so that a part of the coolant flows toward the central region, thereby further improving the guide effect of the first guide plate 151.

The baffles further include a second baffle 153; the first and second guide plates 151 and 153 are spaced apart from each other in the extending direction of the inlet channel 110, and guide the fluid to flow toward one side and the other side of the central region, respectively.

When the guide plate includes the first guide plate 151 and the second guide plate 153, the first guide plate 151 and the second guide plate 153 are spaced apart from each other in the extending direction of the inlet channel 110. One end of the second guide plate 153 extends into the end of the inlet channel 110, and the first guide plate 151 is located downstream of the second guide plate 153 in the flowing direction of the coolant.

The first guide plate 151 and the second guide plate 153 both have guiding and shunting functions on the cooling liquid, so that the flow speed of the cooling liquid in a central area is improved, and oil accumulation in the central area is avoided, so that the heat exchange performance of the cooling mechanism is improved.

Further, the second baffle 153 includes a first arcuate segment 154, a second arcuate segment 155, and a third arcuate segment 156; the first arc-shaped segment 154 and the third arc-shaped segment 156 are located on the same side of the second arc-shaped segment 155 and are connected to the second arc-shaped segment 155; the ends of the side walls of the inlet channel 110 near the central region are inserted into the region formed by the first arcuate section 154, the second arcuate section 155 and the third arcuate section 156.

Specifically, referring to fig. 4 and 5, in the present embodiment, the first arc-shaped segment 154, the second arc-shaped segment 155 and the third arc-shaped segment 156 are integrally formed, so as to ensure the matching precision among the three segments.

Referring to fig. 4, the second guide plate 153 divides the coolant flowing out from the inlet channel 110 into two parts, one part is directly guided to the left portion of the central region, and the other part is guided to the side of the second arc-shaped segment 155 away from the first arc-shaped segment 154 and is again branched to the left portion and the right portion of the central region, so as to guide the coolant to the central region and improve the heat exchange performance of the central region.

In the alternative of the embodiment of the utility model, the widths of the liquid inlet channel 110 and the liquid outlet channel 120 are set to 4.495 +/-0.25 mm; and/or the total length of the liquid inlet flow channel 110 and the liquid outlet flow channel 120 is set to 930 +/-0.5 mm.

Specifically, in the prior art, the widths of the liquid inlet flow channel 110 and the liquid outlet flow channel 120 are set to be 3.096mm, the total length is 1215mm, eight circles are provided, the wall thickness of the spiral flow channel is 1.5mm, the flow channel is too long and narrow, the on-way resistance is large, and a large amount of refrigeration oil is adhered to the wall, so that the problems that the heat exchange performance of the flow channel is low and the compressor is lack of oil and is stuck to the cylinder are solved. In the embodiment, referring to fig. 6, the widths of the liquid inlet channel 110 and the liquid outlet channel 120 are 4.495 ± 0.25mm, the total length of the liquid inlet channel 110 and the liquid outlet channel 120 is 930 ± 0.5mm, six circles are provided, but no flow guide structure is provided, and through simulation verification, the overall pressure drop is reduced by 30% and the oil storage amount is reduced by 63% compared with the pressure drop in the prior art. Referring to fig. 3, the widths of the liquid inlet flow channel 110 and the liquid outlet flow channel 120 are 4.495 ± 0.25mm, the total length of the liquid inlet flow channel 110 and the liquid outlet flow channel 120 is 930 ± 0.5mm, and a flow guide structure is provided, through simulation verification, the heat exchange amount is increased by 1.2% compared with the prior art, the influence of the oil storage amount on the heat exchange capacity is synthesized, and the heat exchange amount of the flow channel of the embodiment after oil is spread is increased by 21% compared with the prior art.

The total length of the flow channel is shortened and/or the width of the flow channel is increased, and the resistance of the flow channel is reduced, so that the frozen oil is prevented from being adhered to the wall surface of the flow channel, the heat exchange performance of a cooling mechanism is improved, and the problem that the compressor is blocked due to oil shortage is solved.

The cooling mechanism also comprises a cover plate, a connecting piece, an inlet pipe and an outlet pipe; the cover plate is covered on the surface of the cooling shell 100 provided with the liquid inlet flow channel 110 and the liquid outlet flow channel 120, the inlet pipe penetrates through the cover plate to be communicated with the liquid inlet flow channel 110, and the outlet pipe penetrates through the cover plate to be communicated with the liquid outlet flow channel 120; the connector is mounted on the side of the cooling housing 100 remote from the cover plate.

Specifically, the cover plate is configured as a rectangular parallelepiped, and the cover plate is configured to cover and seal one surface of the cooling casing 100 where the liquid inlet flow passage 110 and the liquid outlet flow passage 120 are disposed. The cover plate is provided with avoidance holes for avoiding the inlet pipe and the outlet pipe, and the inlet pipe and the outlet pipe are respectively used for connecting the liquid inlet channel 110 and the liquid outlet channel 120 to external cooling or liquid storage equipment. The connecting piece is arranged in a flat plate shape.

The cover plate is used for covering and sealing the cooling shell 100; the inlet pipe and the outlet pipe are used for connecting the liquid inlet channel 110 and the liquid outlet channel 120 of the cooling shell 100 with corresponding external equipment; the connector enables heat transfer to cool the housing 100.

A center post 130 may also be provided in a center region of the cooling housing 100. Specifically, referring to fig. 1 to 4, the axis of the center post 130 is collinear with the axis of the center shaft of the cooling housing 100. The central column 130 is arranged to improve the turbulence effect in the central region, thereby improving the heat exchange performance in the central region. In addition, when the cover plate and the cooling housing 100 are detachably connected, the center post 130 can stably connect the cover plate and the cooling housing 100, and reduce deformation of the cooling mechanism. In other embodiments, the cover plate and the cooling housing 100 may be integrally formed, and the center post 130 may be selectively retained or removed.

Example two

The embodiment of the utility model provides a chip testing device has included the cooling body who mentions in embodiment one, and chip testing device utilizes cooling body to control the temperature to the chip, consequently, has also possessed all beneficial effects in embodiment one, no longer gives unnecessary details here.

Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; such modifications or substitutions do not depart from the scope of the invention in its corresponding aspects.

Claims (11)

1. A cooling mechanism, comprising: a cooling housing (100);

the cooling shell (100) is provided with a liquid inlet flow channel (110), a liquid outlet flow channel (120) and a flow guide structure, wherein the liquid inlet flow channel (110) and the liquid outlet flow channel (120) rotate around the central axis of the cooling shell (100) along the same direction and are communicated with the central area of the cooling shell (100);

the flow directing structure is located at the end of the inlet channel (110) and is configured to direct fluid flow towards the central region.

2. The cooling mechanism according to claim 1, wherein the flow directing structure comprises a first flow directing hole (140) and/or a flow directing plate;

the first diversion hole (140) is arranged on the side wall of the liquid inlet flow channel (110) close to the central area so as to communicate the liquid inlet flow channel (110) with the central area;

one end of the guide plate extends into the tail end of the liquid inlet flow channel (110).

3. The cooling mechanism according to claim 2, wherein when the flow guiding structure includes a first flow guiding hole (140), the first flow guiding hole (140) is provided in a plurality, and the first flow guiding holes (140) are spaced apart from each other along the extending direction of the liquid inlet flow channel (110);

at least two of the first flow guide holes (140) among the plurality of first flow guide holes (140) have different widths.

4. A cooling mechanism according to claim 2, wherein the flow guide plate comprises a first flow guide plate (151), and the first flow guide plate (151) is bent from the end of the inlet flow channel (110) to the central region.

5. The cooling mechanism according to claim 4, wherein the first baffle (151) is provided with second baffle holes (152), and the second baffle holes (152) penetrate the first baffle (151) in a thickness direction of the first baffle (151).

6. The cooling mechanism according to claim 5, wherein the second guide holes (152) are provided in plural, and the second guide holes (152) are provided at intervals in an extending direction of the first guide plate (151).

7. The cooling mechanism according to claim 4, wherein the baffle further comprises a second baffle (153); the first guide plate (151) and the second guide plate (153) are arranged at intervals along the extending direction of the liquid inlet flow channel (110) and are respectively used for guiding the fluid to flow to one side and the other side of the central area.

8. The cooling mechanism of claim 7, wherein the second baffle (153) comprises a first arcuate segment (154), a second arcuate segment (155), and a third arcuate segment (156);

the first arc-shaped segment (154) and the third arc-shaped segment (156) are located on the same side of the second arc-shaped segment (155) and are connected with the second arc-shaped segment (155);

the end, close to the side wall of the central region, of the liquid inlet flow channel (110) is inserted into a region formed by the first arc-shaped section (154), the second arc-shaped section (155) and the third arc-shaped section (156).

9. The cooling mechanism according to any one of claims 1 to 8, wherein the liquid inlet channel (110) and the liquid outlet channel (120) are respectively formed in a double spiral line shape outwardly from the center of the cooling housing (100) along the same rotation direction.

10. The cooling mechanism according to any one of claims 1 to 8, wherein the cooling mechanism further comprises a cover plate, an inlet pipe and an outlet pipe;

the cover plate is covered on the surfaces of the liquid inlet channel (110) and the liquid outlet channel (120) of the cooling shell (100), the inlet pipe penetrates through the cover plate to be communicated with the liquid inlet channel (110), and the outlet pipe penetrates through the cover plate to be communicated with the liquid outlet channel (120); the cover plate and the cooling shell (100) are detachably connected or integrally formed; when the cover plate is detachably connected with the cooling shell (100), a central column (130) is further arranged in the central area of the cooling shell (100), and the cooling shell (100) is detachably connected with the cover plate through the central column (130).

11. A chip testing apparatus, comprising the cooling mechanism according to any one of claims 1 to 10, wherein the chip testing apparatus controls the temperature of a chip by using the cooling mechanism.

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