CN218867031U

CN218867031U - Plane etching machine

Info

Publication number: CN218867031U
Application number: CN202223189073.9U
Authority: CN
Inventors: 王迪杏; 王宁; 王金裕
Original assignee: Wuxi Diyuante Technology Co ltd
Current assignee: Wuxi Diyuante Technology Co ltd
Priority date: 2022-11-30
Filing date: 2022-11-30
Publication date: 2023-04-14
Anticipated expiration: 2032-11-30

Abstract

The utility model discloses a plane etching machine, which comprises a bod, two double-shaft motor of bottom fixedly connected with of organism, two the equal fixedly connected with threaded rod of one end of double-shaft motor output shaft, the outside swing joint of threaded rod has the screwed pipe, a plurality of spouts have been seted up, and is a plurality of equal swing joint has the slide bar in the spout, one side fixedly connected with connecting rod of slide bar, the bottom swing joint of organism has a plurality of connecting plates, and is a plurality of the equal swing joint in bottom of connecting plate has the backup pad. The utility model discloses not only can increase gyro wheel pivoted resistance, solved after the friction pad is lost, the etching machine just is not being fixed, the problem of the condition of rotation still can appear in the runner when leading to the etching machine to use has improved the result of use of plane etching machine, can further increase gyro wheel pivoted resistance moreover, avoids the appearance of gyro wheel rotation condition, can also reduce the consumption of biax motor kinetic energy, has saved the energy.

Description

Plane etching machine

Technical Field

The utility model relates to an etching machine technical field especially relates to a plane etching machine.

Background

The plane etcher is a process test instrument used in the technical field of electronics and communication, and is of various types, among which a plasma plane etcher is the most common form in dry etching.

Through retrieval, the granted publication number CN216719867U discloses a semiconductor processing plasma etcher, which makes a friction pad closely contact with the surface of a moving wheel by the movement of a cross bar, so that the moving wheel is fixed, and the problem that the rotating wheel can rotate is solved.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving the defects existing in the prior art and providing a plane etching machine.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

the utility model provides a plane etching machine, includes the organism, two double-shaft motor of bottom fixedly connected with of organism, two the equal fixedly connected with threaded rod of one end of double-shaft motor output shaft, the outside swing joint of threaded rod has the screwed pipe, a plurality of spouts have been seted up to the bottom of organism, and is a plurality of equal swing joint has the slide bar in the spout, one side fixedly connected with connecting rod of slide bar, the bottom swing joint of organism has a plurality of connecting plates, and is a plurality of the equal swing joint in bottom of connecting plate has the backup pad, the opposite side fixedly connected with clutch blocks of slide bar, the bottom swing joint of organism has a plurality of gyro wheels, a plurality of mounts of fixedly connected with in bottom of organism, and the screwed pipe passes the mount.

As the utility model discloses further scheme again, it is a plurality of equal fixedly connected with extension spring in the spout, and extension spring and slide bar are fixed mutually.

As a further scheme of the utility model, the bottom fixedly connected with slipmat of backup pad, and slipmat and backup pad are isometric.

As the utility model discloses further scheme again, the mounting groove has been seted up to the one end of connecting rod, and swing joint has the auxiliary wheel in the mounting groove.

As a further proposal, one side of the machine body is movably connected with a box door, and one side of the box door is movably connected with a handle.

As the utility model discloses further scheme again, the installing port has been seted up to one side of chamber door, fixedly connected with observation window in the installing port.

As a further proposal of the utility model, two keep away the position groove have all been seted up to the both sides of organism, keep away the inslot swing joint and have the card frame.

As the utility model discloses the scheme of furthering again, one side fixedly connected with dead lever of gyro wheel, and dead lever and card frame swing joint.

The beneficial effects of the utility model are that:

1. the cooperation through clutch blocks and backup pad is used, and the motor can drive the threaded rod and rotate, and the threaded rod passes through the screwed pipe and promotes the connecting plate and rotate, makes the connecting plate become vertical state, increases the area of contact of organism through the backup pad, has increased gyro wheel pivoted resistance, has solved when the friction pad has been lost after, and the sculpture machine is just not fixed, and the problem of the condition of rotation still can appear in the runner when leading to the sculpture machine to use has improved the result of use of plane etching machine.

2. Through the setting of slipmat, when the area of contact of backup pad increase organism, the slipmat can contact with ground, and the slipmat can increase the frictional force between organism and the ground this moment, further increases gyro wheel pivoted resistance, avoids the appearance of gyro wheel rotation condition.

3. Through the setting of auxiliary wheel, when the connecting plate rotated, the connecting plate can promote the connecting rod and remove, and the auxiliary wheel can reduce the frictional force between connecting plate and the connecting rod this moment, reduces the consumption of biax motor kinetic energy, has saved the energy.

Drawings

Fig. 1 is a schematic perspective view of a planar etching machine according to the present invention;

fig. 2 is a schematic view of a partial cross-sectional structure of a plane etching machine according to the present invention;

fig. 3 is a schematic view of a local enlarged structure of a plane etching machine according to the present invention.

In the figure: 1. a body; 2. a box door; 3. an observation window; 4. a handle; 5. a clamping frame; 6. fixing the rod; 7. a roller; 8. a double-shaft motor; 9. a threaded rod; 10. a threaded pipe; 11. a fixed mount; 12. a connecting plate; 13. a support plate; 14. a chute; 15. a slide bar; 16. a tension spring; 17. a friction block; 18. a connecting rod; 19. a non-slip mat; 20. an auxiliary wheel.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and the described embodiments are only some embodiments, not all embodiments, of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by those skilled in the art without creative efforts all belong to the protection scope of the present invention.

Referring to fig. 1-3, a plane etcher includes a machine body 1, two double-shaft motors 8 are fixed at the bottom of the machine body 1 through bolts, a threaded rod 9 is fixed at one end of each of output shafts of the two double-shaft motors 8 through bolts, a threaded pipe 10 is connected to the outer side of the threaded rod 9 in a threaded manner, a plurality of sliding grooves 14 are formed at the bottom of the machine body 1, sliding rods 15 are connected to the sliding grooves 14 in a sliding manner, a connecting rod 18 is welded at one side of each of the sliding rods 15, a plurality of connecting plates 12 are connected to the bottom of the machine body 1 in a rotating manner, the threaded pipe 10 contacts the connecting plates 12, a supporting plate 13 is connected to the bottom of each of the connecting plates 12 in a rotating manner, a friction block 17 is welded at the other side of the sliding rod 15, a plurality of rollers 7 are connected to the bottom of the machine body 1 in a rotating manner, the friction block 17 can contact with the rollers 7, the threaded pipe 10 cannot rotate, the threaded pipe 10 passes through the fixing frame 11, when the plane etcher needs to limit, the plane etcher starts the double-shaft motor 8 drives the double-shaft motor 9 to rotate, when the friction block 11 needs to increase the friction force generated when the rotating movement of the connecting plates 12, the supporting plate 12, thereby, the supporting plate can prevent the contact with the roller 7, and the roller 7, when the roller 7 can be damaged, the roller 7, the roller 7 can be damaged, the rotating mechanism can be removed, and the rotating mechanism can be removed, the rotating mechanism, the supporting plate can be removed, the damage can be prevented, the use effect of the plane etching machine is improved.

The utility model discloses in, all weld in a plurality of spouts 14 has extension spring 16, and extension spring 16 is fixed mutually with slide bar 15, the bottom of backup pad 13 bonds there is slipmat 19, and slipmat 19 is isometric with backup pad 13, when backup pad 13 increases organism 1's area of contact, slipmat 19 can contact with ground, slipmat 19 can increase the frictional force between organism 1 and the ground this moment, thereby increase gyro wheel 7 pivoted resistance, further avoid the appearance of gyro wheel 7 rotation condition, the mounting groove has been seted up to connecting rod 18's one end, the mounting groove internal rotation is connected with auxiliary wheel 20, and auxiliary wheel 20 contacts with connecting plate 12, when connecting plate 12 rotates, connecting plate 12 can promote connecting rod 18 to remove, auxiliary wheel 20 can reduce the frictional force between connecting plate 12 and connecting rod 18 this moment, reduce the consumption of 8 kinetic energy of biax motor, the energy has been saved, one side of organism 1 is rotated and is connected with chamber door 2, one side of chamber door 2 rotates and is connected with handle 4, the staff can open chamber door 2 through handle 4, the installing port has been seted up to one side of chamber door 2, there is observation window 3 in the installation, the worker can be connected with dead lever 5 dead lever that the dead lever is avoided the dead lever 5 joint, the dead lever that all seted up through observation window 3, the dead lever 5.

The working principle is as follows: when the plane etching machine is required to limit, the double-shaft motor 8 is started, the double-shaft motor 8 drives the threaded rod 9 to rotate, at the moment, the fixing frame 11 limits the threaded pipe 10, the threaded pipe 10 cannot rotate, the threaded rod 9 can extend the threaded pipe 10 in the rotating process, the threaded pipe 10 extends to push the connecting plate 12 to rotate, meanwhile, the connecting plate 12 can drive the supporting plate 13 to move and rotate with the supporting plate 13, the connecting plate 12 can push the connecting rod 18 to move in the rotating process, the connecting rod 18 drives the sliding rod 15 to move along the sliding groove 14 and stretch the tension spring 16, when the connecting plate 12 rotates to a vertical state, the supporting plate 13 can support the machine body 1, the contact area of the machine body 1 is increased, meanwhile, the friction block 17 on the sliding rod 15 can be in contact with the roller 7, the friction force of the roller 7 is increased, the rotation of the roller 7 is prevented, the problem that after the friction pad is worn out, the etching machine is not fixed, and the condition that the rotating wheel still can rotate when the etching machine is used is caused is solved, and the use effect of the plane etching machine is improved.

Finally, it should be noted that: it will be apparent to those skilled in the art that modifications may be made to the embodiments described above, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. The utility model provides a plane etching machine, includes organism (1), its characterized in that, two double-shaft motor (8) of bottom fixedly connected with of organism (1), two equal fixedly connected with threaded rod (9) of one end of double-shaft motor (8) output shaft, the outside swing joint of threaded rod (9) has screwed pipe (10), a plurality of spouts (14) have been seted up to the bottom of organism (1), and are a plurality of equal swing joint has slide bar (15) in spout (14), one side fixedly connected with connecting rod (18) of slide bar (15), the bottom swing joint of organism (1) has a plurality of connecting plates (12), and is a plurality of the equal swing joint in bottom of connecting plate (12) has backup pad (13), opposite side fixedly connected with clutch blocks (17) of slide bar (15), the bottom swing joint of organism (1) has a plurality of gyro wheels (7), a plurality of mounts (11) of bottom fixedly connected with of organism (1), and screwed pipe (10) pass mount (11).

2. The plane etching machine according to claim 1, wherein a plurality of the sliding grooves (14) are fixedly connected with tension springs (16), and the tension springs (16) are fixed with the sliding rods (15).

3. The plane etching machine according to claim 1, wherein the bottom of the supporting plate (13) is fixedly connected with a non-slip mat (19), and the non-slip mat (19) has the same length as the supporting plate (13).

4. The plane etching machine according to claim 1, wherein one end of the connecting rod (18) is provided with an installation groove, and an auxiliary wheel (20) is movably connected in the installation groove.

5. The plane etching machine according to claim 1, wherein one side of the machine body (1) is movably connected with a box door (2), and one side of the box door (2) is movably connected with a handle (4).

6. The plane etching machine according to claim 5, wherein one side of the box door (2) is provided with an installation opening, and an observation window (3) is fixedly connected in the installation opening.

7. The plane etching machine according to claim 5, wherein two avoiding grooves are formed in both sides of the machine body (1), and clamping frames (5) are movably connected in the avoiding grooves.

8. The plane etching machine according to claim 1, wherein a fixing rod (6) is fixedly connected to one side of the roller (7), and the fixing rod (6) is movably connected with the clamping frame (5).