CN218856617U - Headstock assembly and grinding machine comprising same - Google Patents

Abstract

The utility model relates to a grinding machine technical field specifically provides a headstock subassembly and contain grinding machine of this subassembly. The utility model discloses aim at can restrain under the prerequisite that the cost obviously increased, improve the headstock subassembly of grinding machine to make the grinding machine that is applicable to whole stick can be applicable to other structures such as half stick equally. Wherein the headgear assembly comprises: a headstock; and a collet including a fixed portion, a floating portion, and an adjusting portion; wherein the fixation portion is removably disposed to the headgear; wherein the floating portion is capable of generating a floating amount with respect to the fixed portion by means of the adjusting portion. With this configuration, grinding processing can be performed on workpieces of different specifications by replacing the chuck.

Description

Headstock assembly and grinding machine comprising same

Technical Field

The utility model relates to a grinding machine technical field specifically provides a headstock subassembly and contain grinding machine of this subassembly.

Background

The grinding machine is equipment for grinding hard and brittle materials. Such as grinding machines, typically include a loading device, a feed slide device, and a grinding device. Taking a hard and brittle material as a silicon rod as an example, for example, the cut silicon rod is firstly fixed to a feeding assembly, and after certain initial adjustment is performed on the position and posture of the feeding assembly, the silicon rod is sent to a position between two chucks of a feeding sliding table device, for example, both chucks can be movable chucks, or one of the two chucks is a movable chuck and the other chuck is a fixed chuck. And the silicon rod is conveyed to the grinding device through the axial movement of the silicon rod, so that the grinding processing including rough grinding and fine grinding is carried out on the first group of surfaces to be ground. Thereafter, the silicon rod is rotated to a second group of surfaces to be ground by rotating the silicon rod, and on this basis, the second group of surfaces to be ground is subjected to grinding work including rough grinding and finish grinding. And repeating the steps until all surfaces to be ground of the silicon rod are ground according to the set grinding standard. For example, the silicon rod typically comprises four sets of surfaces to be detected/ground (0 °, 90 °, 45 °, 135 ° chamfer/circle).

Still taking the hard and brittle material as an example of the silicon rod, along with the market demand of small-specification and N-type silicon wafers, the development of the silicon rod with a corresponding cross section (for example, the cross section should be rectangular) is required. In particular, the conventional silicon rod has a substantially square cross section (referred to as a whole rod), and in response to the new requirements mentioned above, the whole rod needs to be further sectioned (e.g. middle-sectioned) to be processed (e.g. referred to as a half rod). Thus, if the square silicon rod is ground by the grinding machine corresponding to the entire rod, interference between the grinding wheel and the chuck inevitably occurs. However, the development of a grinding machine that can be adapted to the size of the silicon rod inevitably increases the cost.

SUMMERY OF THE UTILITY MODEL

The utility model discloses aim at solving above-mentioned technical problem partly at least, particularly, aim at can restrain under the prerequisite that the cost obviously increased for the grinding machine that is applicable to whole stick can be applicable to half stick equally.

It should be noted that the term "half rod" herein does not refer to half of a full rod in mathematical terms, but rather broadly refers to various "small" gauge silicon rods that may potentially produce grinding interference assuming that a chuck of a full rod is still used. In this example, the cross section of the whole rod is square, and the cross section of the half rod is rectangular with the length equal to the side length of the square and the width half the length. Such as pentagons, hexagons and other shaped structures.

In a first aspect, the present invention provides a headgear assembly comprising: a headstock; and a collet including a fixed portion, a floating portion, and an adjusting portion; wherein the fixation portion is removably disposed to the headgear; wherein the floating portion is capable of generating a floating amount with respect to the fixed portion by means of the adjusting portion.

With this configuration, it is possible to perform grinding processing on workpieces of different specifications by replacing the chuck.

It will be appreciated that the specific form of the adjustment portion, such as any form of existing floating cartridge, can be determined by one skilled in the art according to actual requirements, provided that floating can be achieved.

It is understood that the person skilled in the art can determine the specific connection manner, such as screwing, clipping, etc., on which the removable connection manner depends according to actual needs.

It is understood that the person skilled in the art can set the detail parameters such as the size, the direction and the like of the floating amount according to the actual requirement.

With respect to the headgear assembly described above, in one possible embodiment, the adjustment portion includes a diaphragm and a support ball, wherein the diaphragm is connected to the fixed portion and the floating portion, respectively, so as to: allowing the floating portion to float with respect to the fixed portion with deformation of the diaphragm; wherein the support ball is received between the fixed portion and the floating portion to guide the floating portion to float relative to the fixed portion.

With this configuration, a specific configuration of the adjustment portion is given.

With respect to the above-described headgear assembly, in one possible embodiment, the adjustment portion further includes a ball seat disposed between the fixed portion and the floating portion, at least a portion of the support ball being freely received within the ball seat.

With this configuration, a manner in which the support ball constitutes the adjustment portion is given.

With the above-described headgear assembly, in one possible embodiment, the floating portion is formed with or provided with a collet ram at a side remote from the fixed portion.

By the structure, when the chuck and the other chuck on the headstock assembly clamp the workpiece to be machined, the chuck top block abuts against the workpiece to be machined, so that the clamping reliability is ensured.

With respect to the headgear assembly described above, in one possible embodiment, the collet top block is provided with an aperture.

With this configuration, the clamping reliability can be further ensured.

With respect to the above-described headgear assembly, in one possible embodiment, at least the fixed portion and/or the floating portion has an extension portion to: the fixed portion and/or the floating portion form an escape space with the headgear.

With this configuration, when grinding work is performed on a workpiece to be machined such as a half bar, since the radial dimension of the fixed portion and/or the floating portion is reduced (reduced) with respect to the full bar, interference between the rough/finish grinding wheel and the cartridge can be effectively prevented by the combination of reduction and extension.

It will be appreciated that the skilled person can determine the number, the structural form and the combination with the original structure (base part between non-extensions) of the extending parts of the fixed part and/or the floating part according to the actual requirements. For example, in case of a fixed portion having one or more extension portions, the base portion and the extension portions may be integrally formed or fixedly connected, and the structure of the two may be a uniform extension or a modified extension.

With the headgear assembly described above, in one possible embodiment, the fixed portion has the extension portion along a side away from the floating portion.

With this configuration, a specific arrangement position of the extension portion is given.

With the headgear assembly described above, in one possible embodiment, the extension portion is fixedly connected to or integrally formed with the fixation portion.

By this construction, a specific structural form of the extension portion is given.

With the headgear assembly described above, in one possible embodiment, the fixation portion is threadably disposed on the headgear.

By such a construction, a specific implementation of the detachable connection is given.

With the headgear assembly described above, in one possible embodiment, the collet has a mounting portion at a portion adjacent the headgear, the mounting portion having mounting holes formed therein that are adapted to threadably engage.

By such a construction, a specific realization of the screw connection is given.

If another set of mounting holes corresponding to the mounting holes provided on the mounting portion is also provided on the head, the connection between the head and the head is achieved by means of fasteners engaged with the corresponding two mounting holes.

It is understood that the structural form of the mounting portion, the structural form of the mounting holes, the number and the arrangement of the mounting holes on the mounting portion, etc. can be determined by those skilled in the art according to actual requirements. Illustratively, the mounting portion is generally disc-shaped in configuration, and the plurality of mounting holes are arranged in a uniformly distributed manner along a circumferential direction of the mounting portion.

In a second aspect, the present invention provides a grinding machine comprising a headstock assembly as claimed in any one of the preceding claims.

It will be appreciated that the grinding machine has all the technical effects of any one of the headstock assemblies described above, and the details thereof are not repeated herein.

In a possible embodiment, the grinding machine comprises a fixed chuck and a movable chuck, the workpiece to be machined is clamped between the fixed chuck and the movable chuck, and the chuck in the headstock assembly is the fixed chuck.

With this construction, a specific form of the grinding machine is given in which the head assembly constitutes the grinding machine.

With regard to the above-described grinding machine, in one possible embodiment, the grinding machine is a grinding machine capable of performing a grinding process on a workpiece to be machined of a full-bar specification and a workpiece to be machined of a half-bar specification.

By means of the structure, a specific application mode of the grinding machine with the replaceable chuck is given.

Drawings

Preferred embodiments of the invention are described below with reference to the silicon rod to be ground (hereinafter simply referred to as silicon rod) as a workpiece to be machined, and with reference to the accompanying drawings, in which:

fig. 1 is a schematic view showing a structure of a grinding machine according to an embodiment of the present invention;

fig. 2 is a schematic structural view of a driving slide table mechanism and a grinding mechanism of a grinding machine according to an embodiment of the present invention;

fig. 3 is a schematic view showing a floating chuck in the clamping mechanism of the grinding machine according to an embodiment of the present invention;

FIG. 4 shows an enlarged schematic view of detail A of FIG. 3;

fig. 5 is a schematic structural view illustrating a tailstock assembly in a clamping mechanism of a grinding machine according to an embodiment of the present invention;

FIG. 6 shows an enlarged schematic view of detail B of FIG. 5;

fig. 7 is a schematic view showing a state of rough grinding step 1 of the rough grinding wheel of the grinding mechanism;

FIG. 8 is a schematic view showing a state of rough grinding step 2 of the rough grinding wheel of the grinding mechanism

Fig. 9 is a schematic view showing a state of rough grinding step 2 of the rough grinding wheel of the grinding mechanism;

fig. 10 is a schematic view showing a state of the finish grinding step 1 of the finish grinding wheel of the grinding mechanism;

fig. 11 is a schematic diagram showing a state of the finish grinding step 2 of the finish grinding wheel of the grinding mechanism; and

fig. 12 is a schematic view showing a state of the finish grinding step 3 of the finish grinding wheel of the grinding mechanism.

List of reference numerals:

100. a grinding machine;

1. a bed body; 2. a column frame assembly; 3. a feeding and discharging mechanism; 4. a silicon rod;

5. a grinding mechanism;

51. roughly grinding a grinding wheel; 52. finely grinding the grinding wheel;

6. a feed slide table mechanism;

7. a clamping mechanism;

71. a head frame;

72. a floating chuck;

721. a fixed portion; 722. a floating portion; 723. a membrane; 724. a support ball; 725. a wear-resistant copper pad; 726. a floating chuck top block; 7261. an aperture; 727. a screw; 728. a floating cartridge mounting portion; 7281. mounting holes;

73. a tailstock;

74. a buffer chuck;

741. clamping the disc; 742. a chuck pressing plate; 743. an installation space; 744. a strip-shaped head; 745. a spring; 746. a buffer chuck mounting portion;

751. a movement driving mechanism; 752. a floating chuck rotating electrical machine; 753. buffer chuck rotating electrical machines.

Detailed Description

Preferred embodiments of the present invention will be described below with reference to the accompanying drawings. It should be understood by those skilled in the art that these embodiments are only for explaining the technical principle of the present invention, and are not intended to limit the scope of the present invention.

It should be noted that in the description of the present invention, the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate directions or positional relationships based on those shown in the drawings, which are merely for convenience of description, and do not indicate or imply that the device or element must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

Furthermore, it should be noted that, in the description of the present invention, unless otherwise explicitly specified or limited, the terms "mounted," "disposed," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; they may be directly connected or indirectly connected through intervening media, or may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

As shown in fig. 1 to 12, fig. 1 is a schematic structural diagram of a grinding machine according to an embodiment of the present invention; fig. 2 is a schematic structural view of a driving slide table mechanism and a grinding mechanism of a grinding machine according to an embodiment of the present invention; fig. 3 is a schematic structural view showing a floating chuck in a clamping mechanism of a grinding machine according to an embodiment of the present invention; FIG. 4 shows an enlarged schematic view of detail A of FIG. 3; fig. 5 is a schematic structural view illustrating a tailstock assembly in a clamping mechanism of a grinding machine according to an embodiment of the present invention; FIG. 6 shows an enlarged schematic view of detail B of FIG. 5; fig. 7 is a schematic view showing a state of rough grinding step 1 of the rough grinding wheel of the grinding mechanism;

fig. 8 is a schematic view showing a state of rough grinding step 2 of the rough grinding wheel of the grinding mechanism; fig. 9 is a schematic view showing a state of rough grinding step 2 of the rough grinding wheel of the grinding mechanism; fig. 10 is a schematic diagram showing a state of finish grinding step 1 of the finish grinding wheel of the grinding mechanism; fig. 11 is a schematic view showing a state of the finish grinding step 2 of the finish grinding wheel of the grinding mechanism; fig. 12 is a schematic view showing a state of the finish grinding step 3 of the finish grinding wheel of the grinding mechanism. The present invention will be described with reference to all or part of fig. 1 to 12.

The grinding machine is mainly used for grinding the silicon rod after being cut as a workpiece to be machined to a set specification. Specifically, in an ideal state, the entire rod is a rod (rectangular parallelepiped) having a square cross section. For the half-rod of the present example, the open (further cut in the middle) silicon rod is a rod with a rectangular cross-section. In practice, however, the surface of the cut silicon rod is not flat, as is usually the case: the middle part of the silicon rod is more convex than the two end parts, and the size of the knife outlet of the silicon rod is larger than that of the knife inlet (the side length of the square of the cut end surface of the diamond wire is larger than that of the square of the cut end surface of the diamond wire). Therefore, the cut silicon rod needs to be ground to an ideal cuboid with standard specification by a grinding machine, for example, a rod with a ground surface roughness less than 0.1 μm is produced.

Referring primarily to fig. 1 and 2, in one possible embodiment, a grinding machine 100 generally includes a bed body 1 and a column frame assembly 2 disposed on the bed body. The lathe bed main body and/or the upright post frame component are mainly used for bearing and supporting each actuating mechanism of the grinding machine, wherein the actuating mechanism mainly comprises the following groups:

1) And the feeding and discharging mechanism 3 mainly comprises a feeding component, a feeding and discharging supporting component, a discharging component and a centering component, and is mainly used for connecting feeding and discharging of the silicon rods and detecting the size of the silicon rods 4 to be processed before grinding.

2) And the grinding mechanism 5 mainly comprises a grinding assembly and a grinding detection assembly. Wherein the grinding assembly typically comprises a rough grinding wheel 51 and a finish grinding wheel 52, the rough/finish grinding wheels being mainly used for performing rough/finish grinding for obtaining a desired surface finish of the silicon rod. The grinding detection assembly is mainly used for detecting the size data and the feedback size information of the silicon rod in the grinding process, so that the control part of the grinding machine can calculate the operation parameters of the coarse/fine grinding wheel according to the feedback size information.

3) And a feed slide mechanism 6 including a feed slide capable of reciprocating in the feed direction of the silicon rod (and thus capable of feeding the silicon material to the grinding region) and a movement driving mechanism 751 driving the slide to move.

4) And a clamping mechanism 7 which is arranged on the feeding sliding table and is mainly used for clamping the rods in the feeding/grinding process.

It should be noted that while numerous specific details are set forth in the following detailed description for purposes of better illustrating the invention, it will be apparent to those skilled in the art that the invention may be practiced without some of these specific details. In some instances, specific principles of the loading and unloading mechanism, the grinding mechanism, and the feed slide mechanism of the grinding machine, etc. known to those skilled in the art are not described in detail so as to highlight the gist of the present invention.

In a possible embodiment, the clamping mechanism 7 essentially comprises:

41 A head frame 71 as a fixed end fixedly provided on the slide table housing of the feed slide table, and a floating chuck 72 (fixed chuck) capable of directly contacting the left end surface of the silicon rod is fixedly provided on the head frame.

42 A movable end of the tailstock 73 is provided on a feed slide plate of the feed slide table, and a buffer chuck 74 (movable chuck) capable of directly contacting the right end surface of the silicon rod is fixedly provided on the tailstock. Meanwhile, the tailstock is provided with a movement driving mechanism 751 which is arranged on the feeding sliding table and can drive the tailstock to slide along the feeding sliding plate through the driving mechanism, so that the tailstock moves along the direction (longitudinal feeding direction) close to/far from the headstock, and the silicon rod is clamped along the longitudinal feeding direction.

43 A head frame is provided with a floating chuck rotating motor 752 corresponding to a floating chuck, and a tail frame is provided with a buffer chuck rotating motor 753 corresponding to a buffer chuck, so that the bar can be driven to rotate to a position to be processed by synchronously rotating the two motors, and the bar is always in a clamping state.

It should be noted that the fixed chuck and the movable chuck are only one of the methods of forming the clamping mechanism, and for example, both the chucks may be provided as the movable chuck.

Referring mainly to fig. 3 and 4, in one possible embodiment, the floating collet 72 mainly comprises a fixed portion 721 and a floating portion 722, between which an adjustment portion is provided, which is mainly used to allow a certain floating amount of the floating portion with respect to the fixed portion, so that in case the floating collet and the buffer collet clamp the silicon rod, the floating collet can be subjected to a certain angular oscillation, thereby compensating for the influence on the clamping state, e.g. due to uneven end surfaces of the silicon rod.

In one possible embodiment, the adjustment portion includes a diaphragm 723 and a support ball 724, wherein the fixed portion is removably connected to the headgear and the fixed portion 721 and the movable portion 722 are connected via the diaphragm 723. As in this example, the adjustment portion also includes a ball seat 725, the support ball being a steel ball freely received in the ball seat. In this way, a certain amount of floating of the floating portion relative to the fixed portion is allowed along with the deformation of the diaphragm. And the floating amount can be better guided by the movement of the support ball in the ball seat.

In one possible embodiment, the floating portion is provided with a plurality of floating collet tips 726 on a side thereof remote from the fixed portion, such that the end of the silicon rod near the floating collet makes a facet contact with the plurality of floating collet tips in a state where the silicon rod is held by the floating collet and the buffer collet. For example, the number of floating cartridge tips is typically three or more.

In one possible embodiment, a plurality of holes 7261 are formed in the surface of the floating cartridge top piece, distributed along the axis thereof. Thus, in the case where the silicon rod clip is interposed between the floating clip and the buffer clip, since the friction coefficient on the contact surface corresponding to the floating clip is increased, the friction force between the silicon rod and the top block of the floating clip is increased, thereby ensuring the reliability of the clipping.

In one possible embodiment, the diaphragm 723 is connected to the fixed portion 721 and the movable portion 722 by: two sets of oppositely directed screws 727 (as referred to as first and second sets of screws, respectively) are provided on the diaphragm for securing the diaphragm to the fixed portion 721 and the movable portion 722, respectively. As in the present example, the diaphragm is of a generally hexagonal ring-like configuration, one screw being provided corresponding to each vertex of the hexagon, the screws corresponding to the (inner, outer) housings of the cartridge being spaced apart, i.e.: the first set of screws and the second set of screws each include three screws. Taking one set of screws as an example, the stud portion of the screw is fixedly connected to the movable portion, while the cap portion of the screw is freely received in a groove provided at a corresponding position on the fixed portion. In this way, under the condition that the diaphragm deforms, the stud part of the screw can keep the connection relation between the diaphragm and the movable part, and the nut part of the screw can move in the mounting groove in a mode matched with the deformation.

It is obvious that the skilled person can make a flexible choice of the structure of the membrane, the arrangement of the two sets of screws and the way of connecting the membrane and the fixed/movable part according to the actual requirements.

Referring mainly to fig. 5 and 6, in one possible embodiment, the buffer chuck 74 mainly includes a main body portion and a buffer portion, wherein the main body portion includes a clamping disk 741 disposed on the tailstock and a chuck pressure plate 742 disposed on the clamping disk, and a mounting space 743 corresponding to the buffer portion is formed on the main body portion, and in this example, the buffer portion includes a stripe head 744 and a spring 745, wherein the spring and at least a portion of the stripe head can be accommodated in the mounting space. In this way, in the case that the floating chuck and the buffer chuck clamp the silicon rod, the strip-shaped head of the buffer part can absorb a part of impact potential energy by means of elastic deformation of the spring, and meanwhile, the influence on the clamping state caused by the uneven end surface of the rod corresponding to the buffer chuck can be compensated based on the elastic deformation of the spring.

As in the present example, the buffer portions comprise five groups, so that, in the case where the end portions of the silicon rod corresponding to the buffer chucks are not flat, the bar heads of the five groups of buffer portions compensate for the difference in height between different portions of the silicon rod along the axial direction thereof by means of the elastic deformation of the springs corresponding to the respective groups of buffer portions, thereby ensuring that the surfaces to be processed of the silicon rod are in a parallel state in accordance with the grinding requirements.

Obviously, the structure, specification, number of the strip heads/springs and the distribution form of the strip heads/springs on the main body part can be flexibly selected by those skilled in the art according to actual requirements.

In addition, similar to the floating chuck top block, a plurality of holes are also formed on the surface of the end part of the strip-shaped head close to the silicon rod so as to improve the clamping reliability. In the case of a hole, this is understood to be the case of a strip-shaped head integrally formed with the top piece of the buffer chuck, it being obvious that the two can also be arranged in a fixed connection, similar to the floating chuck described above.

It will be apparent that the floating and buffer cartridge configurations may be reversed, with one of the two (e.g., both floating cartridges) or with one of the two cartridges being one of the two and the other being another type of cartridge present.

Based on the structure, the working process of the grinding machine is roughly as follows: after the silicon rod is clamped through the matching between the floating chuck and the buffer chuck, the silicon rod is conveyed to a grinding area corresponding to the grinding mechanism by the feeding sliding table mechanism, and different grinding surfaces (one pair of grinding surfaces at a time) of the silicon rod can be ground in a mode of rotating the silicon rod. After grinding is completed, the tail frame and the buffering chuck arranged on the tail frame move relative to the floating chuck to loosen the silicon rod, and then the silicon rod falls onto a platform in the upper blanking mechanism to complete blanking. Before grinding, a silicon rod can be detected by a grinding detection component in the grinding mechanism. Illustratively, the grinding machine is configured with three detection points, such as a fixed chuck end detection point, a middle detection point, and a movable chuck end detection point. When the silicon rod comes to a position corresponding to the first detection point (the movable chuck end detection point), the silicon rod stops moving, and if the air cylinder of the grinding detection component extends out to push the probe to move, the position of the probe is ahead of the rough grinding wheel. Then, the rough grinding wheel and the grinding detection assembly continue to move under the driving of the rough grinding motor until the probe is in contact with the silicon rod and detection is completed (point hitting and no grinding). The probe can detect the position of the knife inlet of the silicon rod, the middle position along the rod length and the position of the knife outlet of the silicon rod in sequence along with the movement of the silicon rod along the axial direction of the chuck. And determining whether the silicon rod is ground or not according to the detection result of the detection component. Specifically, if the maximum grinding size of the silicon rod is smaller than the standard size after grinding, the size of the rod is determined to be unqualified, the rod cannot be ground, and the rod needs to be withdrawn, namely, the silicon rod is withdrawn to the blanking platform, and then manual intervention with different degrees is performed. In the case that the silicon rod is qualified but the included angle between the axis of the silicon rod and the axis of the chuck needs to be adjusted, the angle difference between the axis of the chuck and the axis of the silicon rod is measured according to the measurement of the probe on three positions of the silicon rod, and the angle difference is adjusted based on the movable chuck with the eccentric structure, so that the angle difference is reduced or eliminated until the grinding precision is achieved. At this time, the pair of currently ground surfaces can be ground.

In particular, in the present invention, the grinding machine is configured with a plurality of floating cartridges and a buffer cartridge, specifically, any one of the plurality of floating cartridges is removably mountable to the headstock, and any one of the plurality of buffer cartridges is removably mountable to the tailstock. In this way, a clamping mechanism for clamping the current silicon rod to be processed can be configured by selecting a suitable floating chuck and/or buffer chuck according to actual requirements.

In combination with the present embodiment, by replacing the floating chuck and/or the buffer chuck, it is expected that the silicon rod with the specification of a half rod and a whole rod can be ground on the same grinding machine.

Referring primarily to fig. 2 and 3, in one possible embodiment, the floating/buffer cartridge that can be replaced on the headstock/tailstock for different specifications is by the structure: a floating cartridge mounting portion 728 is provided at a side of the floating cartridge fixing portion remote from the floating portion, a plurality of mounting holes 7281 are provided at the floating cartridge mounting portion, and accordingly, mounting positions are provided at corresponding positions of the head frame, so that replacement of floating cartridges of different specifications can be realized by means of cooperation of the screw coupling with a pair of mounting holes. A buffer chuck mounting portion 746 is provided on a side of the body portion of the buffer chuck away from the buffer portion, a plurality of mounting holes (not shown) are also provided on the buffer chuck mounting portion, and accordingly, mounting positions are provided at corresponding positions of the tail stock, so that replacement of buffer chucks of different specifications can be realized by cooperation of the screw member with a pair of mounting holes.

Obviously, the replacement of the chuck by using the threaded manner is only an exemplary description, and those skilled in the art can select other suitable manners according to actual needs on the premise that the replacement of the chuck can be ensured.

However, since the cross section of the whole bar is large and the radial dimension of the chuck of the clamping mechanism adapted thereto is also large, if the clamping mechanism corresponding to the whole bar is used to clamp the half bar having a small cross section, there is a problem that the floating chuck and the cushion chuck interfere with the rough/finish grinding wheel.

Referring mainly to fig. 7 to 9, it can be seen that the rough grinding work corresponding to the rough grinding wheel involves a large amount of cutting, and hence hip grinding is required. Namely, the rough grinding operation is completed according to rough grinding steps 1, 2 and 3 (the sequence numbers of the three steps only indicate the sequence of the rough grinding wheel reaching the corresponding position of the silicon rod). It can be seen that, before rough grinding starts, an avoidance space of about one rough grinding wheel size needs to be opened, and after rough grinding ends, an avoidance space of about half of the rough grinding wheel needs to be opened.

Referring primarily to fig. 10-12, it can be seen that the finish grinding operation corresponding to the finish grinding wheel requires a high degree of finish on the surface of the silicon rod, and therefore requires forward grinding, i.e. finish grinding in accordance with finish grinding steps 1, 2, 3 (the three steps being numbered only to indicate the order in which the finish grinding wheel reaches the respective position of the silicon rod). It can be seen that an avoidance space of about half the size of the finishing wheel needs to be left before finishing, and an avoidance space of about one size of the finishing wheel needs to be left after finishing.

Therefore, the avoidance space with the size of about half of the coarse/fine grinding wheel (if the sizes are different, the sizes are selected to be large) is arranged on the left side, and the avoidance space with the size of about one coarse/fine grinding wheel (if the sizes are different, the sizes are selected to be large) is arranged on the right side, so that the position of the grinding wheel can be ensured to be avoided by the chuck no matter the coarse grinding operation or the fine grinding operation is carried out on the semi-rod, namely the smooth grinding operation can be ensured as the chuck can not collide with the grinding wheel.

To achieve this, in one possible embodiment, the invention provides the measure of reducing the radial dimensions of the floating and buffer cartridges while simultaneously lengthening their axial dimensions. In particular, due to the reduction of the radial dimension, the end of the chuck close to the silicon rod does not interfere with the rough/fine grinding wheel and has better clamping adaptability with the cross-sectional dimension of the silicon rod. The aforementioned escape space can be constructed by elongation of the axial dimension. Specifically, an escape space allowing the rough/finish grinding wheel to operate without interference is constructed by the end face of the headstock/tailstock and the wall face of the floating cartridge/cushion cartridge.

In a possible embodiment, the fixed part is mainly lengthened while the length of the movable part remains substantially unchanged, provided that the overall radial dimension of the floating cartridge is reduced uniformly.

In one possible embodiment, the main body portion is primarily lengthened while the length of the buffer remains substantially constant, with a uniform reduction in the overall radial dimension of the buffer collet.

It is understood that the above-mentioned configuration of the avoiding space is only an exemplary description, and those skilled in the art can select other configurations according to actual requirements. Taking the floating clamp as an example, the floating clamp can be: the fixed part and the floating part are lengthened, and the lengthening proportion of the fixed part and the floating part can be the same or different; additionally adding a connecting part which meets the construction requirement of an avoiding space between the fixing part and the head frame, and then connecting the fixing part with reduced radial dimension to the connecting part; reducing a plurality of the floating portion, the fixed portion and the connecting portion; the diameter reduction treatment can adopt a uniform or non-uniform mode; and the like.

It can be seen that the utility model discloses an among the grinding machine, through floating chuck and the buffering chuck for the multiple specification of grinding machine configuration, be expected to just realize the grinding operation to the silicon rod of different specifications through the mode of only changing the chuck. The operation is flexible, and the change of the grinding machine is small, so that the cost increase is acceptable. In addition, through the structure of the avoiding space, the coarse/fine grinding wheel can perform corresponding coarse/fine grinding operation on silicon rods with different specifications without interference, and the reliability of the grinding machine is ensured.

So far, the technical solution of the present invention has been described with reference to the preferred embodiments shown in the drawings, but it is easily understood by those skilled in the art that the scope of the present invention is obviously not limited to these specific embodiments. Equivalent changes or substitutions can be made on the related technical features by those skilled in the art without departing from the principle of the invention, and the technical scheme after the changes or substitutions will fall into the protection scope of the invention.

Claims (12)

1. A headgear assembly, wherein said headgear assembly comprises:

a head frame; and

a collet including a fixed portion, a floating portion, and an adjusting portion;

wherein the fixation portion is removably disposed to the headgear;

wherein the floating portion is capable of generating a floating amount with respect to the fixed portion by means of the adjusting portion;

the adjustment part comprises a membrane and a support ball,

wherein the diaphragm is connected to the fixed portion and the floating portion, respectively, so as to:

allowing the floating portion to float with respect to the fixed portion with deformation of the diaphragm;

wherein the support ball is received between the fixed portion and the floating portion to guide the floating portion to float relative to the fixed portion.

2. A headgear assembly according to claim 1, wherein said adjustment portion further comprises a ball seat disposed between said fixed portion and said floating portion, at least a portion of said support ball being freely received within said ball seat.

3. The headgear assembly according to claim 1, wherein the floating portion is formed with or provided with a collet top block at a side remote from the fixed portion.

4. The headgear assembly according to claim 3, wherein the collet top block is provided with an aperture.

5. A headgear assembly according to any of claims 1-4, wherein at least said fixed portion and/or said floating portion has an extension portion so as to:

the fixed portion and/or the floating portion form an escape space with the headgear.

6. The headgear assembly according to claim 5, wherein the fixed portion has the extension portion along a side remote from the floating portion.

7. The headgear assembly according to claim 6, wherein the extension portion is fixedly connected or integrally formed with the fixation portion.

8. A headgear assembly according to claim 1, wherein said securing portion is threadably disposed to said headgear.

9. A headgear assembly according to claim 8, wherein said collet has a mounting portion at a portion adjacent said headgear, said mounting portion having mounting holes formed therein for mating with a threaded connection.

10. A grinding machine comprising a headstock assembly as claimed in any one of claims 1 to 9.

11. A grinding machine as claimed in claim 10 which includes a fixed jaw and a movable jaw between which a workpiece to be machined is held,

the chuck in the headstock assembly is the fixed chuck.

12. A grinding machine as claimed in claim 11 which is a grinding machine capable of grinding a workpiece to be machined of full bar gauge and a workpiece to be machined of half bar gauge.

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