CN218853936U - Inert gas seal box - Google Patents
Inert gas seal box Download PDFInfo
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- CN218853936U CN218853936U CN202222845269.2U CN202222845269U CN218853936U CN 218853936 U CN218853936 U CN 218853936U CN 202222845269 U CN202222845269 U CN 202222845269U CN 218853936 U CN218853936 U CN 218853936U
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- inert gas
- seal box
- box body
- gas seal
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Abstract
The utility model provides an inert gas seal box, including sealed box, clean system, be connected through two pipelines between the two, be provided with air supplement valve and pressure relief valve on two pipelines respectively, sealed box is provided with observation window, glove hole, transmission cabin to and multiple gas sensor, clean system is provided with the circulation fan and the gas processing part that are connected, the gas processing part adopts physics filter component or chemical adsorption part. The utility model discloses can provide an inert gas environment's processing apparatus to through the gas content of each sensor monitoring seal box, through the clean system who is connected with seal box to humidity, oxygen, contain hydrogen and handle, thereby make seal box's inert gas accord with the experimental requirement. The utility model is simple in operation, it is convenient to handle.
Description
Technical Field
The utility model relates to a seal box especially relates to an inert gas seal box.
Background
Along with the application of novel materials and the requirements of scientific research and application such as precision semiconductor manufacturing, more and more requirements on an experimental environment and a production environment are improved, the experimental environment and the production environment are required to be carried out under the conditions of no water, no oxygen and no external interference, and thus, the requirements on experiment and production in a vacuum environment and an inert gas environment are met. However, although a vacuum environment can be easily realized by human beings, the vacuum environment cannot be used for manually operating the articles in the vacuum chamber, which is why the vacuum sealed cabin is not widely used. Therefore, the experiment platform of the inert gas sealed box is generated so that the experimenters can have a water-free and oxygen-free environment and can operate in the environment and the content of the experiment is operated.
SUMMERY OF THE UTILITY MODEL
The utility model provides an inert gas seal box has solved the device problem of carrying out the experiment in inert gas's environment, and its technical scheme is as follows:
the utility model provides an inert gas seal box, includes seal box, clean system, is connected through two pipelines between the two, is provided with tonifying qi valve and pressure relief valve on two pipelines respectively, seal box is provided with observation window, glove hole, transmission cabin to and multiple gas sensor, clean system is provided with the circulation fan and the gas processing part that are connected, the gas processing part adopts physics filter component or chemical adsorption part.
The multiple gas sensors comprise a humidity sensor, an oxygen sensor and a hydrogen sensor, and the gas treatment part of the purification system is correspondingly provided with a dewatering purification column, a deoxidizing purification column and a dehydrogenating purification column which are connected in sequence.
The multiple gas sensors also comprise a micro-pressure differential pressure sensor, and the control module controls the opening of the gas supplementing valve and the pressure relief valve according to signals of the micro-pressure differential pressure sensor.
The plurality of gas sensors further includes a temperature sensor.
And a filter is arranged at the part of the purification system, which is connected with the two pipelines.
The system is characterized by further comprising a control module and a monitoring system, wherein the various sensors are connected with the control module, the control module is connected with the monitoring system, and the monitoring system adopts a touch screen and is used for displaying data detected and monitored by the sensors in real time.
And an access door is arranged on the left side of the sealed box body.
The glove hole is provided with a corrosion-resistant glove, and the corresponding material is butyl rubber.
The material of the sealed box body is corrosion-resistant 304 stainless steel or 316 stainless steel.
The inert gas seal box can provide a processing device of an inert gas environment, monitors the gas content of the seal box body through each sensor, and processes humidity, oxygen and hydrogen through a purification system connected with the seal box body, so that the inert gas of the seal box body meets the experimental requirements. The utility model is simple in operation, it is convenient to handle.
Drawings
FIG. 1 is a schematic view of the structure of the inert gas seal box;
1-sealing the box body; 2-an observation window; 3-glove hole; 4-a transfer chamber; 5, an access door; 6-micro-pressure differential pressure sensor; 7-a humidity sensor; 8-an oxygen sensor; 9-a temperature sensor; a 10-hydrogen sensor; 11-a purification system; 12-dewatering and purifying column; 13-a deoxygenation purification column; 14-dehydrogenation purification column; 15-circulating fan; 16-a control module; 17-a filter; 18-a gas supplementing valve; 19-a pressure relief valve; 20-monitoring system.
Detailed Description
As shown in FIG. 1, the inert gas sealed box comprises a sealed box body 1 and a purification system 11 connected with the sealed box body through a pipeline. The material of the sealed box body 1 is corrosion-resistant 304 stainless steel or 316 stainless steel, and a welding mode or a splicing mode is adopted to enable the sealed box body to reach a completely sealed state, and the size and the shape of the sealed box body 1 can be customized according to actual equipment of a customer.
The front end of the sealed box body 1 is provided with an observation window 2 and a glove hole 3, an operator can watch specific use conditions in the sealed box body 1 through the observation window 2, corrosion-resistant gloves are arranged on the glove hole 3, the corresponding materials are butyl rubber, and the gloves connected through the glove hole 3 can be used for operating and maintaining experimental equipment inside the box body.
The right side of the sealed box body 1 is provided with a transfer cabin 4, an operator can pass through the transfer cabin 4 to pass in and out the articles inside the sealed box body 1 and the articles outside the box body, and the transfer process does not damage the atmosphere environment inside the box body. The left side of the sealing box body 1 is provided with an access door 5, and an operator can enter the sealing box body 1 through the access door 5 to overhaul the sealing box body 1 under the condition that equipment in the sealing box body 1 needs to be maintained and overhauled.
The sealed box body 1 is provided with a plurality of gas sensors for monitoring the atmosphere inside the sealed box body 1, and the sensor types comprise a micro-pressure differential pressure sensor 6, a humidity sensor 7, an oxygen sensor 8, a temperature sensor 9 and a hydrogen sensor 10. The micro-pressure differential pressure sensor 6 is used for detecting the pressure inside the sealed box body 1, so that the pressure is adjusted through the control module 16, and the pressure inside the box body is relative pressure, generally +/-10 mbar; the humidity sensor 7 is used for detecting the humidity inside the sealed box body 1; the oxygen sensor 8 is used for detecting the oxygen concentration in the sealed box body 1; the temperature sensor 9 is used for detecting the temperature in the sealed box body 1; the hydrogen sensor 10 is used to detect the hydrogen gas concentration inside the sealed case 1.
The sealed box body 1 and the purification system 11 are connected through two pipelines, wherein one pipeline is provided with an air supplement valve 18 for controlling air supplement into the sealed box body 1, and the other pipeline is provided with a pressure relief valve 19 for pressure relief of the sealed box body 1.
The air supply valve 18 and the pressure relief valve 19 are three-way valves, two interfaces of the three-way valves are respectively connected with the sealed box body 1 and the purification system 11 through pipelines, the third interface of the air supply valve 18 is connected to an inert gas conveying pipe, and the third interface of the pressure relief valve 19 is connected to the sealed cabin through a pipeline. After the experiment is finished, the gas in the sealed cabin is treated by using the purification system 11 in a way that the gas in the sealed cabin passes through the gas supplementing valve 18, passes through the first filter 17, sequentially passes through the water removal purification column 12, the oxygen removal purification column 13 and the hydrogen removal purification column 14 to be treated with humidity, oxygen and hydrogen, the gas flows through the circulating fan 15 to control the direction, and the gas is finally discharged through the second filter 17 and the pressure relief valve 19 to prevent air pollution.
The micro-pressure differential pressure sensor monitors the pressure in the box body, controls the two valves and realizes the pressure balance and regulation in the box body.
To the material of the atmosphere that needs the control in the clean system 11, be provided with the dewatering and purify post 12, the deoxidization purifies post 13, the dehydrogenation purifies post 14 and the circulating fan 15 that connect gradually, dewatering purifies post 12 and is connected with the gulp valve 18, circulating fan 15 is connected with pressure release valve 19, and is further, all be provided with filter 17 between dewatering and purifying post 12 and the gulp valve 18, between circulating fan 15 and the pressure release valve 19. The purification system 11 adopts a circulating fan to drive the gas in the sealed box body 1 to flow through physical filtration or chemical adsorption. The air supply valve 18 and the pressure relief valve 19 are used for adjusting the internal pressure of the box body.
The inert gas enclosure also includes a control module 16 and a monitoring system 20. The sensors are connected with a control module 16, the control module 16 is connected with a monitoring system 20, and the monitoring system 20 adopts a touch screen and is used for displaying data detected and monitored by the sensors in real time. The control module 16 monitors the content of the components of the atmosphere in the sealed box body 1 in real time according to the data of each sensor, and the control module 16 controls the operation of the circulating fan 15 and the opening and closing of the air supplementing valve 18 and the pressure relief valve 19. The control module 16 adopts an STM32F101C8 chip.
When the device is used, the gas components of the sealed box body 1 are monitored through various sensors, when the concentration of humidity, oxygen and hydrogen is found to be greater than a set value, the control module 16 controls the opening of the air replenishing valve 18 and the pressure relief valve 19 and controls the operation of the circulating fan 15, the gas in the sealed box body 1 passes through the air replenishing valve 18, passes through the first filter 17, sequentially passes through the water removal purification column 12, the oxygen removal purification column 13 and the hydrogen removal purification column 14 to be treated with humidity, oxygen and hydrogen, the gas flows through the circulating fan 15 to control the direction, and finally returns to the sealed box body 1 through the second filter 17 and the pressure relief valve 19. The filter is used for carrying out the dust and filters, removes and is the particulate matter in water purifying column 12, deoxidization purifying column 13, the dehydrogenation purifying column 14, and the time has long can produce the dust, also filters the dust here, prevents to get into inside the box.
The inert gas seal box can provide a processing device of an inert gas environment, monitors the gas content of the seal box body through each sensor, and processes humidity, oxygen and hydrogen through a purification system connected with the seal box body, so that the inert gas of the seal box body meets the experimental requirements. The utility model is simple in operation, it is convenient to handle.
Claims (9)
1. An inert gas seal box, its characterized in that: the device comprises a sealing box body and a purification system, wherein the sealing box body and the purification system are connected through two pipelines, an air supplementing valve and a pressure relief valve are respectively arranged on the two pipelines, the sealing box body is provided with an observation window, a glove hole, a transmission cabin and a plurality of gas sensors, the purification system is provided with a circulating fan and a gas treatment component which are connected, and the gas treatment component adopts a physical filtering component or a chemical adsorption component.
2. The inert gas seal box of claim 1, wherein: the multiple gas sensors comprise a humidity sensor, an oxygen sensor and a hydrogen sensor, and the gas treatment part of the purification system is correspondingly provided with a dewatering purification column, a deoxidizing purification column and a dehydrogenating purification column which are connected in sequence.
3. The inert gas seal box of claim 1, wherein: the multiple gas sensors also comprise a micro-pressure differential pressure sensor, and the control module controls the opening of the gas supplementing valve and the pressure relief valve according to signals of the micro-pressure differential pressure sensor.
4. The inert gas seal box of claim 1, wherein: the plurality of gas sensors further includes a temperature sensor.
5. The inert gas seal box of claim 1, wherein: and a filter is arranged at the part of the purification system connecting the two pipelines.
6. The inert gas seal box of claim 1, wherein: the monitoring system is characterized by further comprising a control module and a monitoring system, wherein the various sensors are connected with the control module, the control module is connected with the monitoring system, and the monitoring system adopts a touch screen and is used for displaying data detected and monitored by the sensors in real time.
7. The inert gas seal box of claim 1, wherein: and an access door is arranged on the left side of the sealed box body.
8. The inert gas seal box of claim 1, wherein: the glove hole is provided with a corrosion-resistant glove, and the corresponding material is butyl rubber.
9. The inert gas seal box of claim 1, wherein: the material of the sealed box body is corrosion-resistant 304 stainless steel or 316 stainless steel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222845269.2U CN218853936U (en) | 2022-10-26 | 2022-10-26 | Inert gas seal box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222845269.2U CN218853936U (en) | 2022-10-26 | 2022-10-26 | Inert gas seal box |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218853936U true CN218853936U (en) | 2023-04-14 |
Family
ID=87368169
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222845269.2U Active CN218853936U (en) | 2022-10-26 | 2022-10-26 | Inert gas seal box |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218853936U (en) |
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2022
- 2022-10-26 CN CN202222845269.2U patent/CN218853936U/en active Active
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