CN218848383U - Micro-fluidic optical switch based on multi-mode interference coupling - Google Patents
Micro-fluidic optical switch based on multi-mode interference coupling Download PDFInfo
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- CN218848383U CN218848383U CN202220688783.7U CN202220688783U CN218848383U CN 218848383 U CN218848383 U CN 218848383U CN 202220688783 U CN202220688783 U CN 202220688783U CN 218848383 U CN218848383 U CN 218848383U
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Abstract
The utility model provides a miniflow accuse photoswitch based on coupling is interfered to multimode, from top to bottom be the apron layer in proper order, waveguide layer and electrostatic drive layer, adopt the supplementary bonding mode of plasma to connect between each layer, the bottom center department of apron sets up short shape recess, the central point of waveguide layer puts and sets up the coupling converter is interfered to multimode, the coupling converter is interfered to multimode can inlay in the cell body of short shape recess, the both sides symmetrical arrangement of coupling converter is interfered to multimode is a pair of single mode strip waveguide that is parallel to each other, the coupling converter is interfered to multimode links to each other through cylindrical microtube and the liquid reserve tank on electrostatic drive layer, the electrostatic microactuator is installed to the bottom of liquid reserve tank, two terminals are installed in the outside on electrostatic drive layer. The switch realizes the switching function of the on and off of the microfluidic optical switch by driving liquid to enter or exit a chamber of the microfluidic multimode interference coupling converter through an electrostatic microactuator; the optical fiber has the advantages of simple structure and process, simple and convenient operation, low manufacturing cost, integration and good optical performance.
Description
Technical Field
The utility model belongs to the technical field of optical communication and optoelectronics, concretely relates to micro-flow accuse photoswitch based on coupling is interfered to multimode.
Background
The optical switch is a key device for implementing optical switching, and is also one of the main factors affecting the performance of the optical network system. The optical switch is mainly used for realizing the functions of routing selection, wavelength selection, optical cross connection, self-healing protection and the like on an optical layer surface, and is widely applied to optical communication and optoelectronic systems.
Existing optical switches are typically based on micro-electro-mechanical systems (MEMS), electro-optical effects, thermo-optical effects and magneto-optical effects. The MEMS optical switch has good optical performance, but has a complex structure, and the used micro-mirror has the problems of mirror surface jitter and the like. The latter types of optical switches are generally temperature sensitive, polarization sensitive and complex in construction.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problem that overcome prior art not enough, provide a miniflow accuse photoswitch based on coupling is interfered to multimode, advance or go out the cavity that the coupling converter was interfered to miniflow accuse photoswitch through static microactuator drive liquid and realize the conversion function of opening and closing of miniflow accuse photoswitch has structure and simple process, easy and simple to handle, low in manufacturing cost, can integrate and the advantage that optical property is good.
The utility model provides a micro-flow control photoswitch based on coupling is interfered to multimode, from top to bottom be apron layer (1) in proper order, waveguide layer (2) and electrostatic drive layer (3), adopt the supplementary bonding mode of plasma to connect between each layer, rectangle recess (4) are seted up to the bottom center department of apron (1), the central point of waveguide layer (2) puts and sets up multimode interference coupling converter (5), multimode interference coupling converter (5) can be inlayed in the cell body of rectangle recess (4), the bilateral symmetry of multimode interference coupling converter (5) arranges a pair of single mode strip waveguide (6) that are parallel to each other, multimode interference coupling converter (5) link to each other through liquid storage tank (8) of cylindrical microtube (7) with electrostatic drive layer (3), the bottom installation static microdriver of liquid storage tank (8), two terminals (13) of outside installation on electrostatic drive layer (3).
As the utility model discloses a further technical scheme, multimode interference coupling converter (5) are including the rectangle cavity, and bottom surface and single mode strip waveguide (6) lower surface are located same horizontal plane under the rectangle cavity, and the bottom surface is higher than the upper surface of single mode strip waveguide (6) on the rectangle cavity, and the length of rectangle cavity is 3L π Wherein, in the step (A),
W e is the chamber equivalent width, n eff The round hole is arranged at the bottom of the rectangular cavity and is connected with a liquid storage tank (8) of the electrostatic driving layer (3) through a cylindrical micro-tube (7).
Furthermore, the bottom of the liquid storage tank (8) is an elastic film, other surfaces of the liquid storage tank are made of hard materials, and the top of the liquid storage tank (8) is inserted with the cylindrical microtube (7).
Furthermore, the electrostatic micro-driver sequentially comprises an elastic film (9), an upper electrode (11) and a lower electrode (12) from top to bottom, the upper electrode (11) is adhered to the elastic film (9), insulating media (10) are arranged on two sides of the lower electrode (12), the size of the upper electrode (11) is larger than that of the lower electrode (12), and the thickness of the insulating media (10) is larger than that of the lower electrode (12).
Furthermore, the insides of the two binding posts (13) are respectively connected with the upper electrode (11) and the lower electrode (12) through electric wires, and the outsides of the binding posts (13) are connected with a power supply.
Furthermore, the waveguide layer (2) is filled with a cladding medium.
Furthermore, the multimode interference coupling converter (5) is embedded in the rectangular groove (4) in a sealing mode.
The utility model has the advantages of, combine multimode interference coupling theory and micro-fluidic technique, provide a 2X 2 miniflow accuse photoswitch, advance or go out the cavity that microfluidic multimode interfered the coupling converter through static microactuator drive liquid and realize the switching function of the opening and closing of miniflow accuse photoswitch, structure and simple process, it is easy and simple to handle, the cost of manufacture is low, can integrate, and optical property is good.
Drawings
Fig. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic diagram of the corresponding "on" operation of the optical switch of the present invention;
fig. 3 is a working principle diagram of the optical switch of the present invention corresponding to "off".
In the figure, 1, a cover plate layer, 2, a waveguide layer, 3, an electrostatic driving layer, 4, a rectangular groove, 5, a multi-mode interference coupling converter, 6, a single-mode strip waveguide, 7, a cylindrical micropipe, 8, a liquid storage tank, 9, an elastic film, 10, an insulator, 11, an upper electrode of an electrostatic micro-driver, 12, a lower electrode of the electrostatic micro-driver and 13, a binding post.
Detailed Description
Please refer to fig. 1, this embodiment provides the utility model relates to a micro-flow control photoswitch based on coupling is interfered to multimode, from top to bottom be apron layer 1 in proper order, waveguide layer 2 and electrostatic actuation layer 3, adopt the supplementary bonding mode of plasma to connect between each layer, rectangle recess 4 is seted up in the bottom center department of apron 1, the central point of waveguide layer 2 puts and sets up multimode interference coupling converter 5, multimode interference coupling converter 5 can inlay in the cell body of rectangle recess 4, multimode interference coupling converter 5's bilateral symmetry arranges a pair of single mode strip waveguide 6 that is parallel to each other, multimode interference coupling converter 5 links to each other with electrostatic actuation layer 3's liquid storage tank 8 through cylindrical microtube 7, electrostatic microactuator is installed to the bottom of liquid storage tank 8, two terminals 13 of electrostatic actuation layer 3's outside installation.
The multimode interference coupling converter 5 comprises a rectangular cavity, the lower bottom surface of the rectangular cavity and the lower surface of the single-mode strip waveguide 6 are positioned on the same horizontal plane, the upper bottom surface of the rectangular cavity is higher than the upper surface of the single-mode strip waveguide 6, and the length of the rectangular cavity is 3L π Wherein, in the step (A),
W e is the equivalent width of the chamber, n eff The bottom of the rectangular cavity is provided with a round hole which is used for providing the effective refractive index when the cavity is filled with liquid, and the round hole is connected with a liquid storage tank 8 of the electrostatic driving layer 3 through a cylindrical micro-tube 7.
The bottom of the liquid storage tank 8 is an elastic film, other surfaces are made of hard materials such as PMMA, and the top of the liquid storage tank 8 is inserted with a cylindrical micro-tube 7.
The electrostatic micro-driver comprises an elastic film 9, an upper electrode 11 and a lower electrode 12 from top to bottom in sequence, wherein the upper electrode 11 is adhered to the elastic film 9, insulating media 10 are arranged on two sides of the lower electrode 12, the size of the upper electrode 11 is larger than that of the lower electrode 12, and the thickness of the insulating media 10 is larger than that of the lower electrode 12.
The insides of the two terminals 13 are connected to the upper electrode 11 and the lower electrode 12, respectively, by electric wires, and the outsides of the terminals 13 are connected to a power source. When no voltage is applied to the upper electrode 11 and the lower electrode 12, the elastic film 9 and the upper electrode 11 droop, only air exists in a cavity of the multimode interference coupling converter 5, and all liquid is located in the liquid storage tank 8; if the same polarity voltage is applied to the upper electrode and the lower electrode through the binding post 13, the upper electrode 11 drives the elastic membrane 9 to move upwards due to electrostatic repulsion, and liquid is pushed to enter the cavity of the multimode interference coupling converter 5 through the cylindrical micro-tube 7 until the upper surface of the liquid is parallel to the upper surface of the single-mode strip waveguide 6.
The waveguide layer 2 is filled with a cladding medium to function as a cladding.
The multimode interference coupling converter 5 is embedded in the rectangular groove 4 in a sealing mode.
The working principle of the embodiment is as follows:
as shown in fig. 2, when the power supply is not connected externally, the upper electrode 11 of the electrostatic microactuator and the elastic membrane 9 sag due to the gravity effect of the liquid and the electrode, the liquid completely enters the liquid storage tank 8, and only air exists in the chamber of the multimode interference coupling transducer 5. At this time, the refractive index in the cavity is lower than that of the strip waveguide, so that the light input into the single-mode strip waveguide 6 is directly output, as shown in the figure, the end a enters, and the end a' exits, and the on of the micro-fluidic optical switch is realized.
As shown in fig. 3, a power supply is externally connected to apply voltages with the same polarity to the upper electrode and the lower electrode of the electrostatic microactuator, the upper electrode 11 drives the elastic membrane 9 to move upwards under the driving of electrostatic force due to electrostatic repulsion, liquid enters the cavity of the multimode interference coupling transducer 5 from the liquid storage tank 8 until the upper surface of the liquid is parallel to the upper surface of the single-mode strip waveguide 6, and the original air in the cavity is compressed at the upper part. At this time, because the refractive indexes of the liquid and the strip waveguide are the same, the part of the cavity with the liquid and the strip waveguides at the corresponding sections at two sides form a multi-mode interference coupler, light entering the single-mode strip waveguide 6 is output in a cross mode, the end a enters the end b ', and the end b' exits the end, so that the 'off' of the micro-fluidic optical switch is realized.
When the power supply is cut off, the electrostatic repulsion force disappears, the upper electrode 11 and the elastic film 9 move downwards due to gravity and restore to the state shown in figure 2, and the micro-fluidic optical switch is turned on.
The foregoing illustrates and describes the principles, general features, and advantages of the present invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are given by way of illustration only, and that various changes and modifications may be made without departing from the spirit and scope of the invention as defined by the appended claims. The scope of the invention is defined by the claims and their equivalents.
Claims (7)
1. The utility model provides a micro-flow accuse photoswitch based on coupling is interfered to multimode, its characterized in that is apron layer (1), waveguide layer (2) and electrostatic drive layer (3) from top to bottom in proper order, adopts the supplementary bonding mode of plasma to connect between each layer, rectangle recess (4) are seted up to the bottom center department of apron layer (1), the central point of waveguide layer (2) puts and sets up multimode interference coupling converter (5), multimode interference coupling converter (5) can inlay in the cell body of rectangle recess (4), the bilateral symmetry of multimode interference coupling converter (5) arranges a pair of single mode strip waveguide (6) that are parallel to each other, multimode interference coupling converter (5) through cylindrical microtube (7) with stock solution pool (8) on electrostatic drive layer (3) link to each other, the bottom installation static driver a little of stock solution pool (8), two terminals (13) are installed in the outside on electrostatic drive layer (3).
2. According to the rightThe microfluidic optical switch according to claim 1, wherein the multimode interference coupling converter (5) comprises a rectangular cavity, the lower bottom surface of the rectangular cavity and the lower surface of the single-mode strip waveguide (6) are located on the same horizontal plane, the upper bottom surface of the rectangular cavity is higher than the upper surface of the single-mode strip waveguide (6), and the length of the rectangular cavity is 3L π Wherein, in the process,
W e is the equivalent width of the chamber, n eff And a round hole is formed at the bottom of the rectangular cavity and is connected with a liquid storage tank (8) of the electrostatic driving layer (3) through the cylindrical micro-tube (7) for providing an effective refractive index when the cavity is filled with liquid.
3. The microfluidic optical switch according to claim 1, wherein the bottom of the liquid reservoir (8) is an elastic film, the other surfaces are made of rigid materials, and the top of the liquid reservoir (8) is inserted into the cylindrical micro-tube (7).
4. The micro-fluidic optical switch based on multimode interference coupling according to claim 1, wherein the electrostatic micro-actuator comprises an elastic film (9), an upper electrode (11) and a lower electrode (12) from top to bottom in sequence, the upper electrode (11) is adhered to the elastic film (9), insulating mediums (10) are disposed on two sides of the lower electrode (12), the size of the upper electrode (11) is larger than that of the lower electrode (12), and the thickness of the insulating medium (10) is larger than that of the lower electrode (12).
5. The micro-fluidic optical switch based on multi-mode interference coupling as claimed in claim 1, wherein the two terminals (13) are connected to the upper electrode (11) and the lower electrode (12) via wires, respectively, and the external parts of the terminals (13) are connected to a power supply.
6. A microfluidic optical switch according to claim 1, wherein the waveguide layer (2) is filled with a cladding medium.
7. The microfluidic optical switch according to claim 1, wherein the multimode interference coupling converter (5) is hermetically embedded in the rectangular groove (4).
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| Application Number | Priority Date | Filing Date | Title |
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| CN202220688783.7U CN218848383U (en) | 2022-03-28 | 2022-03-28 | Micro-fluidic optical switch based on multi-mode interference coupling |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202220688783.7U CN218848383U (en) | 2022-03-28 | 2022-03-28 | Micro-fluidic optical switch based on multi-mode interference coupling |
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| CN218848383U true CN218848383U (en) | 2023-04-11 |
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