CN218827047U

CN218827047U - Rotating mechanism of plating pot

Info

Publication number: CN218827047U
Application number: CN202223196750.XU
Authority: CN
Inventors: 柳华军; 肖乾; 蔡群海
Original assignee: Xiamen Jiexi Automation Technology Co ltd
Current assignee: Xiamen Jiexi Automation Technology Co ltd
Priority date: 2022-11-30
Filing date: 2022-11-30
Publication date: 2023-04-07
Anticipated expiration: 2032-11-30

Abstract

The utility model discloses a plating pot rotating mechanism, which comprises a rotating component and a pressing component, wherein the rotating component is used for supporting and rotating a plating pot, and the pressing component is used for pressing the plating pot on the rotating component; the rotating component comprises a supporting piece and a first rotating mechanism, the first rotating mechanism drives the supporting piece to rotate, and the supporting piece comprises a plurality of supporting columns which are vertically arranged upwards; the pressing part comprises a second rotating mechanism, a lifting mechanism and a pressing mechanism, the pressing mechanism is arranged on the lifting mechanism, the lifting mechanism is arranged on the second rotating mechanism, the second rotating mechanism drives the lifting mechanism and the pressing mechanism to rotate, and the lifting mechanism drives the pressing mechanism to lift. The plating pot rotating mechanism is controlled by a circuit, the pressing part can automatically press and keep the plating pot in a rotating state on the jig, equipment does not need to be stopped for manual operation, potential safety hazards are avoided, and production efficiency is improved; the pressing part is provided with a lifting mechanism, so that the electroplating device is suitable for the electroplating pots with different sizes and different center heights, and has good universality.

Description

Rotating mechanism of plating pot

Technical Field

The utility model relates to a semiconductor equipment field, concretely relates to plate pot rotary mechanism.

Background

After the semiconductor wafer is polished and wax-removed and cleaned, the DBR coating operation is performed, before the coating operation, the wafer is mounted on a coating pot, and when one wafer is mounted, the coating pot needs to rotate by a certain angle to mount the next wafer, so that a pressing and holding action is required to prevent the coating pot from shifting relative to a jig due to centrifugal force. This press-and-hold action is currently performed manually by personnel using quick clamps, and the personnel need to stop the entire apparatus before the intervention of the action can take place. Equipment is shut down and can influence production efficiency, and secondly personnel need the invasion operation, have certain security hidden danger, and whether manual pressing targets in place also is difficult to guarantee.

SUMMERY OF THE UTILITY MODEL

Aiming at the defects of the prior art, the utility model aims to provide a plating pot rotating mechanism which is suitable for different plating pot sizes and has high automation degree.

In order to achieve the purpose, the utility model is realized by the following technical proposal:

a rotary mechanism of a plating pot comprises a rotary component and a pressing component, wherein the rotary component is used for supporting and rotating the plating pot, and the pressing component is used for pressing the plating pot on the rotary component; the rotating component comprises a supporting piece and a first rotating mechanism, the first rotating mechanism drives the supporting piece to rotate, and the supporting piece comprises a plurality of supporting columns which are vertically arranged upwards; the pressing part comprises a second rotating mechanism, a lifting mechanism and a pressing mechanism, the pressing mechanism is arranged on the lifting mechanism, the lifting mechanism is arranged on the second rotating mechanism, the second rotating mechanism drives the lifting mechanism and the pressing mechanism to rotate, and the lifting mechanism drives the pressing mechanism to lift.

Furthermore, the pressing mechanism comprises a first cylinder, a supporting seat and a plurality of connecting rod assemblies which are vertically arranged, a push rod of the first cylinder is fixedly connected with the supporting seat, and the connecting rod assemblies are distributed around the upper end of the first cylinder;

each connecting rod assembly comprises a first connecting rod, a second connecting rod and a support block, one end of the first connecting rod is hinged with the supporting seat, the other end of the first connecting rod is hinged with one end of the second connecting rod, the middle part of the second connecting rod is hinged with the support block, and the first cylinder drives each second connecting rod to rotate around the corresponding support block; the push rod of the first cylinder is lifted to enable the free end of each second connecting rod to press down the plating pot, and the push rod of the first cylinder is retracted to enable the free end of each second connecting rod to move upwards to leave the plating pot.

Furthermore, a threaded hole is formed in the free end of each second connecting rod, a bolt is screwed in the threaded hole, the head of the bolt is used for pressing the plating pot, and the screwing-out length of the bolt relative to the second connecting rods can be adjusted according to the size of the plating pot.

Further, the supporting seat comprises a top block, a bottom block and a plurality of stand columns, the top block is arranged above the bottom block and connected with the bottom block through the stand columns, the top block is fixedly connected above a push rod of the first air cylinder, the bottom block is provided with a through hole penetrating through the top block and the bottom block, a cylinder body of the first air cylinder is located in the through hole, and one end of each first connecting rod is hinged to the bottom block.

Furthermore, each support block is distributed outside the hinged connection point of the corresponding first connecting rod and the bottom block, each second connecting rod comprises a first section and a second section which are connected, the included angle between the first section and the second section is an obtuse angle and is smaller than 180 degrees, a corner formed at the connection part of the first section and the second section is hinged with the support block, the first section is hinged with one end of the corresponding first connecting rod, and the push rod of the first air cylinder retracts to enable the second section to rotate around the support block to be vertical or close to vertical.

Furthermore, the lifting mechanism comprises two vertically arranged slide rails and a second air cylinder vertically arranged between the two slide rails, an installation block is arranged at the upper end of a push rod of the second air cylinder, the first air cylinder is fixed above the installation block, a connecting block is fixedly connected to each slide block of the two slide rails, the two connecting blocks are respectively connected with the two ends of the installation block, and the second air cylinder drives the first air cylinder to lift.

Furthermore, the second rotating mechanism comprises a second motor and a hollow rotating platform, the second cylinder is fixed with the rotating platform of the hollow rotating platform, the second motor is connected with a motor connector of the hollow rotating platform, and a rotating shaft of the second motor is parallel to the axis of the hollow rotating platform.

Furthermore, the first rotating mechanism comprises a first motor, a first gear and a second gear, the output end of the first motor is connected with the first gear, the first gear is meshed with the second gear, and the supporting piece is fixedly connected with the end face of the second gear.

Furthermore, a through hole which is abdoment for the second rotating mechanism is arranged in the middle of the second gear, and the second rotating mechanism is positioned in the through hole in the middle of the second gear.

Furthermore, each support column is uniformly distributed along the circumferential direction by taking the central shaft of the second gear as a center, and a transverse support block protruding outwards is fixedly connected to the upper end of each support column close to the end part.

Compared with the prior art, the utility model provides a plating pot rotary mechanism has following advantage:

1. through circuit control, the pressing component can automatically press and keep the plating pot in a rotating state on the jig, equipment does not need to be stopped for manual operation, potential safety hazards are avoided, and production efficiency is improved; the pressing part is provided with a lifting mechanism, so that the electroplating device is suitable for the electroplating pots with different sizes and different center heights, and has good universality.

2. The second rotating mechanism, the lifting mechanism and the pressing mechanism of the pressing component are vertically connected, the output shaft of the second motor is parallel to the axis of the hollow rotating platform, and the circumferential size of the whole pressing component is small; each connecting rod component of the pressing mechanism is overlapped with the stroke of the first cylinder part, so that the height is saved, and the pressing component is compact in structure.

3. The rotating part adopts a structure that the first motor drives the two meshed gears to drive the supporting part to rotate, a through hole is formed in the middle of the second gear, and the second rotating mechanism of the pressing part is located in the through hole in the middle of the second gear, so that the whole pressing part is located on the rotation central line of the rotating part, the whole plating pot rotating mechanism is compact in structure, the circumferential size of the whole plating pot rotating mechanism is smaller than that of the plating pot, and the equipment installation space is saved.

Drawings

FIG. 1 is a schematic view of a plating pot placed on a jig;

FIG. 2 is a schematic view of the jig and the plating pot of FIG. 1 being placed on a plating pot rotating mechanism;

FIG. 3 is a schematic perspective view of a rotation mechanism of a plating pot according to an embodiment of the present invention;

FIG. 4 is a schematic perspective view of a rotation mechanism of a plating pot according to an embodiment of the present invention;

FIG. 5 is a perspective view of a pressing member according to an embodiment of the present invention;

fig. 6 is an assembly diagram of the supporting seat and each connecting rod assembly according to the embodiment of the present invention.

Description of the reference symbols: 1. plating a pot; 2. a jig; 3. a convex ring; 4. a support column; 5. a transverse support block; 6. a first cylinder; 7. a supporting seat; 8. a connecting rod assembly; 9. a first link; 10. a second link; 11. supporting a block; 12. a top block; 13. a bottom block; 14. a column; 15. a first stage; 16. a second stage; 17. a slide rail; 18. a slider; 19. a second cylinder; 20. mounting blocks; 21. connecting blocks; 22. a second motor; 23. a hollow rotating platform; 24. a first motor; 25. a first gear; 26. a second gear.

Detailed Description

The present invention will be further described with reference to the accompanying drawings and examples.

In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.

In the figure 1, a plating pot 1 is placed on an annular jig 2, and a convex ring 3 is arranged on the inner wall of the jig 2 and used for placing the edge of the plating pot 1. The plating pot rotating mechanism provided by the embodiment is used for placing the jig 2 with the plating pot 1, and as shown in fig. 2, the plating pot rotating mechanism is arranged below the plating pot 1.

As shown in fig. 3 to 6, the plating pot rotating mechanism includes a rotating member for supporting and rotating the plating pot 1 and a pressing member for pressing the plating pot 1 on the rotating member, and the jig 2 is placed directly above the rotating member.

As shown in fig. 3 and 4, the rotating component includes a support and a first rotating mechanism, the first rotating mechanism drives the support to rotate, and the support includes a plurality of support columns 4 vertically arranged upwards. The first rotating mechanism comprises a first motor 24, a first gear 25 and a second gear 26, wherein the output end of the first motor 24 is connected with the first gear 25, the first gear 25 is meshed with the second gear 26, the supporting piece is fixedly connected with the end face of the second gear 26, and the supporting columns 4 are uniformly distributed along the circumferential direction by taking the central shaft of the second gear 26 as the center.

Tool 2 is supported to the upper end of each support column 4, specifically, every 4 upper ends of support columns are close to tip department rigid coupling and have outside convex horizontal supporting shoe 5, and horizontal supporting shoe 5 butt bulge loop 3 of tool 2, the 3 inner walls of 3 upper end butt bulge loops of support column 4. In order to balance the stress of the plating pot 1 in the rotation process, the support columns 4 are uniformly distributed by taking the center of the plating pot 1 as the center of a circle. In this embodiment, the number of the supporting columns 4 is four, and may also be set to 3, 5, 6, and so on, and if necessary, for a plating pot with a large diameter, each supporting column 4 may also be distributed into more than two concentric circles.

As shown in fig. 5, the pressing member includes a second rotating mechanism, a lifting mechanism and a pressing mechanism, the pressing mechanism is disposed on the lifting mechanism, the lifting mechanism is disposed on the second rotating mechanism, the second rotating mechanism drives the lifting mechanism and the pressing mechanism to rotate, and the lifting mechanism drives the pressing mechanism to lift.

As shown in fig. 5 and 6, the pressing mechanism includes a first cylinder 6, a supporting seat 7, and a plurality of connecting rod assemblies 8, the first cylinder 6 is vertically disposed, a push rod of the first cylinder is fixedly connected to the supporting seat 7, and each connecting rod assembly 8 is distributed around the upper end of the first cylinder 6. Each connecting rod assembly 8 comprises a first connecting rod 9, a second connecting rod 10 and a support block 11, one end of each first connecting rod 9 is hinged to the supporting seat 7, the other end of each first connecting rod 9 is hinged to one end of each second connecting rod 10, the middle of each second connecting rod 10 is hinged to the support block 11, and the first air cylinder 6 drives each second connecting rod 10 to rotate around the corresponding support block 11. The push rod of the first cylinder 6 is raised so that the free end of each second link 10 presses down on the plating pot 1, and the push rod of the first cylinder 6 is retracted so that the free end of each second link 10 moves up away from the plating pot 1.

In order to adapt to the plating pans 1 with different sizes, the pressing component needs to be adjusted properly, preferably, a threaded hole is arranged at the free end of each second connecting rod 10, a bolt 27 is screwed in the threaded hole, the head of the bolt 27 is used for pressing the plating pan 1, the bolt 27 can adjust the screwing-out length relative to the second connecting rod 10 according to the size of the plating pan 1, and the pressing of the plating pans 1 with different sizes is ensured.

In order to make the structure compact, the structure of the pressing mechanism is further optimized. Specifically, as shown in fig. 6, the supporting seat 7 includes a top block 12, a bottom block 13 and a plurality of columns 14, the top block 12 is disposed above the bottom block 13 and connected to the bottom block 13 through the columns 14, the top block 12 is fixedly connected to the top of the push rod of the first cylinder 6, the bottom block 13 is provided with a through hole penetrating vertically, the cylinder body of the first cylinder 6 is located in the through hole, and one end of each first connecting rod 9 is hinged to the bottom block 13. By the design, the height can be saved.

The pushing mechanism lifts the height of the second connecting rod 10 through the first air cylinder 6 and enables the free end of the second connecting rod 10 to extend out of the central hole of the plating pot 1 and then rotate to perform pushing action, and the circumferential size of the pushing mechanism needs to be designed to be compact due to the fact that the size of the central hole of the plating pot 1 is limited. As an advantageous scheme, as shown in FIG. 6, each support block 11 is distributed outside the hinged connection point of the corresponding first connecting rod 9 and the bottom block 13, each second connecting rod 10 comprises a first section 15 and a second section 16 which are connected, the included angle between the first section 15 and the second section 16 is an obtuse angle and is less than 180 degrees, the corner formed at the connection position of the first section 15 and the second section 16 is hinged with the support block 11, the first section 15 is hinged with one end of the corresponding first connecting rod 9, and the push rod of the first air cylinder 6 retracts to enable the second section 16 to rotate around the support block 11 to be vertical or close to vertical.

In order to better adapt to the plating pots 1 with different sizes, a lifting mechanism is arranged. As shown in fig. 5, the lifting mechanism includes two vertically arranged slide rails 17, and a second cylinder 19 vertically arranged between the two slide rails 17, an installation block 20 is arranged at the upper end of a push rod of the second cylinder 19, the first cylinder 6 is fixed above the installation block 20, a connection block 21 is respectively fixedly connected to the slide blocks 18 of the two slide rails 17, the two connection blocks 21 are respectively connected to two ends of the installation block 20, and the second cylinder 19 drives the first cylinder 6 to lift.

Since the plating pot 1 needs to be rotated once per wafer mounting, accordingly, the pressing mechanism needs to be able to rotate synchronously with the plating pot 1 by providing the second rotating mechanism. The middle part of the second gear 26 is provided with a through hole for abdicating the second rotating mechanism, and the second rotating mechanism is positioned in the through hole at the middle part of the second gear 26. As shown in fig. 5, the second rotating mechanism includes a second motor 22 and a hollow rotating platform 23, the second cylinder 19 is fixed to the rotating platform of the hollow rotating platform 23, the second motor 22 is connected to a motor connecting port of the hollow rotating platform 23, and a rotating shaft of the second motor 22 is parallel to an axis of the hollow rotating platform 23.

Pressing and holding: according to the production operation flow, the PLC triggers the electromagnetic valve through a program to control the retraction of the first air cylinder 6, and the pressing mechanism is in a multi-connecting-rod type, so that the simultaneous action in four directions can be realized, and the pressing maintenance is completed. After the product operation is finished, according to the production operation flow, the PLC triggers the electromagnetic valve to control the first air cylinder 6 to ascend through a program, and each connecting rod assembly 8 loosens the plating pot 1.

The above-mentioned embodiments are only used for illustrating the technical solution of the present invention, and not for limiting the same; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art will understand that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; these modifications and substitutions do not depart from the spirit and scope of the embodiments of the present invention, and therefore all other embodiments obtained by those skilled in the art without making creative efforts fall within the protection scope of the present invention.

Claims

1. A plating pot rotating mechanism, which is characterized in that: the device comprises a rotating component and a pressing component, wherein the rotating component is used for supporting and rotating the plating pot, and the pressing component is used for pressing the plating pot on the rotating component;

the rotating component comprises a supporting piece and a first rotating mechanism, the first rotating mechanism drives the supporting piece to rotate, and the supporting piece comprises a plurality of supporting columns which are vertically arranged upwards;

the pressing part comprises a second rotating mechanism, a lifting mechanism and a pressing mechanism, the pressing mechanism is arranged on the lifting mechanism, the lifting mechanism is arranged on the second rotating mechanism, the second rotating mechanism drives the lifting mechanism and the pressing mechanism to rotate, and the lifting mechanism drives the pressing mechanism to lift.

2. The plating pot rotating mechanism according to claim 1, wherein: the pressing mechanism comprises a first air cylinder, a supporting seat and a plurality of connecting rod assemblies which are vertically arranged, a push rod of the first air cylinder is fixedly connected with the supporting seat, and the connecting rod assemblies are distributed around the upper end of the first air cylinder;

3. The plating pot rotation mechanism according to claim 2, wherein: the free end of each second connecting rod is provided with a threaded hole, a bolt is screwed in the threaded hole, the head of the bolt is used for pressing the plating pot, and the bolt can adjust the screwing-out length relative to the second connecting rods according to the size of the plating pot.

4. The plating pot rotating mechanism according to claim 2, wherein: the supporting seat comprises a top block, a bottom block and a plurality of stand columns, the top block is arranged above the bottom block and connected with the bottom block through the stand columns, the top block is fixedly connected above a push rod of the first air cylinder, a through hole penetrating through the bottom block is formed in the bottom block, a cylinder body of the first air cylinder is located in the through hole, and one end of each first connecting rod is hinged to the bottom block.

5. The plating pot rotating mechanism according to claim 4, wherein: each support block is distributed outside the hinged connection point of the corresponding first connecting rod and the bottom block, each second connecting rod comprises a first section and a second section which are connected, the included angle between the first section and the second section is an obtuse angle and is smaller than 180 degrees, the corner formed at the connection part of the first section and the second section is hinged with the support block, the first section is hinged with one end of the corresponding first connecting rod, and the push rod of the first air cylinder retracts to enable the second section to rotate around the support block to be vertical or close to vertical.

6. The plating pot rotating mechanism according to claim 2, wherein: the lifting mechanism comprises two vertically arranged slide rails and a second air cylinder vertically arranged between the two slide rails, an installation block is arranged at the upper end of a push rod of the second air cylinder, the first air cylinder is fixed above the installation block, a connecting block is fixedly connected to each slide block of the two slide rails, the two connecting blocks are respectively connected with the two ends of the installation block, and the second air cylinder drives the first air cylinder to lift.

7. The plating pot rotating mechanism according to claim 6, wherein: the second rotating mechanism comprises a second motor and a hollow rotating platform, the second cylinder is fixed with the rotating platform of the hollow rotating platform, the second motor is connected with a motor connector of the hollow rotating platform, and a rotating shaft of the second motor is parallel to the axis of the hollow rotating platform.

8. The plating pot rotating mechanism according to claim 1, wherein: the first rotating mechanism comprises a first motor, a first gear and a second gear, the output end of the first motor is connected with the first gear, the first gear is meshed with the second gear, and the supporting piece is fixedly connected with the end face of the second gear.

9. The plating pot rotating mechanism according to claim 8, wherein: the middle part of the second gear is provided with a through hole for the abdicating of the second rotating mechanism, and the second rotating mechanism is positioned in the through hole at the middle part of the second gear.

10. The plating pot rotation mechanism of claim 8, wherein: the supporting columns are uniformly distributed along the circumferential direction by taking the central shaft of the second gear as a center, and a transverse supporting block protruding outwards is fixedly connected to the upper end of each supporting column close to the end part.