CN218824179U - Gas instrument calibrating device under sub-vacuum environment - Google Patents
Gas instrument calibrating device under sub-vacuum environment Download PDFInfo
- Publication number
- CN218824179U CN218824179U CN202222691783.5U CN202222691783U CN218824179U CN 218824179 U CN218824179 U CN 218824179U CN 202222691783 U CN202222691783 U CN 202222691783U CN 218824179 U CN218824179 U CN 218824179U
- Authority
- CN
- China
- Prior art keywords
- gas
- sub
- vacuum
- pitcher
- vacuum environment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
- Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
Landscapes
- Sampling And Sample Adjustment (AREA)
Abstract
The utility model relates to a gas analysis instrument technical field indicates a gas instrument calibrating device under sub-vacuum environment very much, including gas pitcher, gas analysis appearance and gas concentration probe, gas analysis appearance with gas concentration probe connection, gas concentration probe with the inside switch-on of gas pitcher, the gas pitcher is external to have intake pipe, blast pipe, vacuum pump, circulating pump, manometer, the gas pitcher with be equipped with the admission valve between the intake pipe, the gas pitcher with be equipped with first discharge valve between the blast pipe, the gas pitcher with be equipped with second discharge valve between the vacuum pump. The utility model discloses can provide the environment of a sub-vacuum for gas analyzer's gas concentration probe, make it can calibrate under this sub-vacuum environment, accomplish the gas concentration probe of calibration and can accurately monitor gas concentration under the sub-vacuum environment.
Description
Technical Field
The utility model relates to a gas analysis instrument technical field indicates a gas instrument calibrating device under sub-vacuum environment very much.
Background
Oxygen content in the production environment is a key parameter in various links of semiconductor production, and oxygen concentration needs to be monitored in a sub-vacuum environment in some processes.
Therefore, there is a need in the art for a simple device for calibrating an instrument that can measure oxygen concentration in a sub-vacuum environment.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to foretell current problem, provide a simple structure, the gas meter calibrating device under the sub-vacuum environment of the oxygen concentration probe calibration of the oxygen analysis appearance of being convenient for under the sub-vacuum environment.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
a gas instrument calibrating device under sub-vacuum environment, including gas pitcher, gas analysis appearance and gas concentration probe, gas analysis appearance with gas concentration probe connection, gas concentration probe with the inside switch-on of gas pitcher, the gas pitcher is external to have intake pipe, blast pipe, vacuum pump, circulating pump, manometer, the gas pitcher with be equipped with the admission valve between the intake pipe, the gas pitcher with be equipped with first discharge valve between the blast pipe, the gas pitcher with be equipped with second discharge valve between the vacuum pump.
According to above scheme, gas concentration probe is equipped with a plurality of, be equipped with a plurality of installation department on the gas pitcher, the installation department with gas concentration probe one-to-one and zonulae occludens.
According to above scheme, the installation department with gas concentration probe adopts KF vacuum clamp fixed connection.
According to the above solution, the intake valve is a three-way valve.
According to the scheme, the air inlet end and the air outlet end of the circulating pump are both connected with the air tank.
According to the scheme, the gas flowmeter is arranged on the gas inlet pipe.
According to the scheme, the air inlet pipe is communicated with the left end of the air tank, and the exhaust pipe is communicated with the right end of the air tank.
According to the scheme, the gas analyzer is a vacuum oxygen analyzer, and the gas concentration probe is an oxygen concentration probe.
The utility model discloses can be applied to the calibration of the oxygen concentration probe of vacuum oxygen analysis appearance and the monitoring of oxygen concentration under the sub-vacuum environment with it during specifically using. When the oxygen concentration probe is calibrated, the oxygen concentration probe to be calibrated is firstly communicated with a gas tank through an installation part, then the oxygen concentration probe to be calibrated is connected with a vacuum oxygen analyzer, a second exhaust valve is closed, a first exhaust valve is opened, the control air inlet valve is introduced into a 99.999% nitrogen gas inlet tank, a circulating pump is opened, the oxygen concentration in the gas tank is reduced at the moment, the oxygen concentration displayed in the vacuum oxygen analyzer is observed at the same time, when the oxygen concentration in the gas tank reaches a set value, the first exhaust valve is closed immediately and the air inlet valve is operated to prevent the nitrogen gas from entering the gas tank, then the second exhaust valve and the vacuum pump are opened, vacuumizing is started, a pressure gauge is observed at the same time, when the vacuum degree reaches a preset value, the second exhaust valve and the vacuum pump are closed, finally the reading of the vacuum oxygen analyzer is observed, and after the reading is stable, the oxygen concentration probe to be calibrated can be calibrated by using the reading value.
The utility model discloses can provide the environment of a sub-vacuum for gas analyzer's gas concentration probe, make it can calibrate under this sub-vacuum environment, accomplish the gas concentration probe of calibration and can accurately monitor gas concentration under the sub-vacuum environment.
Drawings
Fig. 1 is a connection diagram of each component of the present invention.
In the figure: 1. a gas tank; 2. a gas analyzer; 3. a gas concentration probe; 4. a vacuum pump; 5. a circulation pump; 6. a pressure gauge; 7. an intake valve; 8. a first exhaust valve; 9. a second exhaust valve; 10. an installation part; 11. a gas flow meter.
Detailed Description
The technical solution of the present invention will be described below with reference to the accompanying drawings and examples.
As shown in fig. 1, a gas instrument calibrating device under sub-vacuum environment, including gas pitcher 1, gas analysis appearance 2 and gas concentration probe 3, gas analysis appearance 2 with gas concentration probe 3 is connected, gas concentration probe 3 with 1 inside switch-on of gas pitcher, gas pitcher 1 is external to have intake pipe, blast pipe, vacuum pump 4, circulating pump 5, manometer 6, gas pitcher 1 with be equipped with admission valve 7 between the intake pipe, gas pitcher 1 with be equipped with first exhaust valve 8 between the blast pipe, gas pitcher 1 with be equipped with second exhaust valve 9 between the vacuum pump 4, specific when carrying out calibration operation, let in a certain amount of measured gas from the intake pipe earlier, then let in the gas that does not influence the measured gas concentration from the intake pipe again, make in the gas pitcher measured gas concentration reach the setting value, circulating pump 5 is used for the gas circulation mixing in the gas pitcher 1, improve the accuracy that detects, when being surveyed gas concentration in the gas pitcher 1 when being in the default, vacuum pump 4 takes out the vacuum to gas pitcher 1, make the interior vacuum of gas pitcher reach the default, the gas pitcher, the gas concentration that sets up like this sets up can provide 3 for gas analysis appearance 2, this sub-vacuum environment calibration accuracy under the sub-vacuum environment, this can carry out the calibration accuracy under the sub-vacuum environment.
Gas concentration probe 3 is equipped with a plurality of, be equipped with a plurality of installation department 10 on the gas pitcher 1, installation department 10 with 3 one-to-one of gas concentration probe and zonulae occludens adopt to set up like this, can be in order to utilize the utility model discloses calibrate a plurality of gas concentration probe, increased the utility model discloses an applicability.
The air inlet valve 7 is a three-way valve, specifically the three-way valve is a shunting three-way valve, and the three-way valve is arranged in such a way that when air is prevented from entering the air tank 1, the three-way valve is operated to enable air in the air inlet pipe to flow away from the other channel of the three-way valve, so that the air is turned to reduce impact on the air tank 1.
The inlet end of circulating pump 5 with give vent to anger the end all with 1 internal connection of gas pitcher adopts and sets up like this, makes the abundant mixing of gas in the gas pitcher 1, improves and detects the precision.
Be equipped with gas flowmeter 11 in the intake pipe, adopt to set up like this, can control gas flow through observing gas flowmeter 11, prevent that the admission speed is too big.
The intake pipe with the left end intercommunication of gas pitcher 1, the blast pipe communicates with 1 right-hand member of shown gas pitcher, adopts and sets up like this, does benefit to gaseous gas pitcher 1 and mixing of being full of.
The gas analyzer 2 is a vacuum oxygen analyzer, and the gas concentration probe 3 is an oxygen concentration probe.
The utility model discloses can be applied to the calibration of the oxygen concentration probe of vacuum oxygen analyzer and the monitoring of oxygen concentration under the sub-vacuum environment with it during specifically using. When the oxygen concentration probe is calibrated, the oxygen concentration probe to be calibrated is firstly communicated with the gas tank 1 through the installation part 10, then the oxygen concentration probe is connected with the vacuum oxygen analyzer, the second exhaust valve 9 is closed, the first exhaust valve 8 is opened, the control air inlet valve 7 is used for introducing 99.999% of nitrogen into the gas tank 1, the circulating pump 5 is opened, the oxygen concentration in the gas tank 1 is reduced, the oxygen concentration displayed in the vacuum oxygen analyzer is observed at the same time, when the oxygen concentration in the gas tank 1 reaches a set value, the first exhaust valve 8 is closed immediately, the air inlet valve 7 is operated to prevent the nitrogen from entering the gas tank 1, then the second exhaust valve 9 and the vacuum pump 4 are opened, vacuumizing is started, the pressure gauge 6 is observed at the same time, when the vacuum degree reaches a preset value, the second exhaust valve 9 and the vacuum pump 4 are closed, finally, the reading of the vacuum oxygen analyzer is observed, and after the reading is stable, the reading value can be used for calibrating the oxygen concentration probe to be calibrated.
The above is only the preferred embodiment of the present invention, so all the equivalent changes or modifications made by the structure, features and principles in accordance with the claims of the present invention are included in the claims of the present invention.
Claims (8)
1. The utility model provides a gas instrument calibrating device under sub-vacuum environment, its characterized in that, includes gas pitcher (1), gas analysis appearance (2) and gas concentration probe (3), gas analysis appearance (2) with gas concentration probe (3) are connected, gas concentration probe (3) with the inside switch-on of gas pitcher (1), gas pitcher (1) is external to have intake pipe, blast pipe, vacuum pump (4), circulating pump (5), manometer (6), gas pitcher (1) with be equipped with admission valve (7) between the intake pipe, gas pitcher (1) with be equipped with first exhaust valve (8) between the blast pipe, gas pitcher (1) with be equipped with second discharge valve (9) between vacuum pump (4).
2. The gas instrument calibration device in the sub-vacuum environment according to claim 1, wherein a plurality of gas concentration probes (3) are provided, a plurality of installation parts (10) are provided on the gas tank (1), and the installation parts (10) are in one-to-one correspondence with and tightly connected to the gas concentration probes (3).
3. The calibration device for gas meter under sub-vacuum environment as claimed in claim 2, wherein said mounting portion (10) and said gas concentration probe (3) are fixedly connected by KF vacuum clamp.
4. Gas meter calibration device in a sub-vacuum environment according to claim 1, characterized in that the gas inlet valve (7) is a three-way valve.
5. The gas meter calibration device under a sub-vacuum environment according to claim 1, wherein the gas inlet end and the gas outlet end of the circulation pump (5) are both connected with the inside of the gas tank (1).
6. The calibration device for gas meter under sub-vacuum environment as claimed in claim 1, wherein a gas flow meter (11) is provided on the gas inlet pipe.
7. The gas meter calibration device under sub-vacuum environment according to claim 1, wherein the intake pipe is communicated with a left end of the gas tank (1), and the exhaust pipe is communicated with a right end of the gas tank (1).
8. The calibration device for a gas meter under a sub-vacuum environment according to claim 1, wherein the gas analyzer (2) is a vacuum oxygen analyzer and the gas concentration probe (3) is an oxygen concentration probe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222691783.5U CN218824179U (en) | 2022-10-13 | 2022-10-13 | Gas instrument calibrating device under sub-vacuum environment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222691783.5U CN218824179U (en) | 2022-10-13 | 2022-10-13 | Gas instrument calibrating device under sub-vacuum environment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218824179U true CN218824179U (en) | 2023-04-07 |
Family
ID=87257223
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222691783.5U Active CN218824179U (en) | 2022-10-13 | 2022-10-13 | Gas instrument calibrating device under sub-vacuum environment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218824179U (en) |
-
2022
- 2022-10-13 CN CN202222691783.5U patent/CN218824179U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105675224B (en) | The detection method of encapsulating package sealing propertytest system | |
| CN103837215B (en) | Commutation valve type p.V.T.t method gas flow meter | |
| CN111272341A (en) | Battery box electrolyte leakage detection device and electrolyte leakage detection method | |
| CN208060103U (en) | A kind of exhaust system quantity of gas leakage detection device | |
| US20080087107A1 (en) | Particulate sampler and dilution gas flow device arrangement for an exhaust sampling system | |
| CN211263289U (en) | Trace oxygen analyzer calibrating device | |
| CN111239091A (en) | Dissolved oxygen sensor calibration device and calibration method based on fluorescence quenching principle | |
| CN218824179U (en) | Gas instrument calibrating device under sub-vacuum environment | |
| CN101561382B (en) | Aluminum alloy melt hydrogen partial pressure dynamic measuring method | |
| CN117805212A (en) | Ozone sensor calibration device and calibration method thereof | |
| CN106841482B (en) | A kind of application process of gas chromatograph vacuum sampling device | |
| CN210293526U (en) | On-line measuring device for gas partial pressure | |
| CN208098008U (en) | Dynamic dilution instrument | |
| CN107422754B (en) | Trace gas flow rate control device and control method | |
| CN215811476U (en) | Flow type air tightness testing device | |
| CN106706816A (en) | Vacuum sampling device for gas chromatograph | |
| CN115015476A (en) | Automatic copper ammonia solution oxygen measuring instrument based on integrated gas-liquid flow passage module and testing method | |
| CN213600659U (en) | Gas measuring instrument calibrating device and gas buffer tank thereof | |
| CN112834240A (en) | Leakage desorption flow test detection system | |
| CN219084874U (en) | Dynamic gas dilution device for malodor determination and malodor dynamic sniffing instrument | |
| CN116008487A (en) | Multi-concentration greenhouse gas calibration device with vacuum purging function | |
| CN110849946A (en) | Calibration device and calibration method for oxygen detection alarm | |
| CN217605652U (en) | Calibration device of ocean atmosphere carbon dioxide concentration sensor | |
| CN220490130U (en) | Flow calibration pressure measuring instrument for fluoride sampler | |
| CN219891034U (en) | Real-time testing device for gas permeability of concrete in low-pressure environment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |