CN218820290U

CN218820290U - Steam generating device for utilizing high-temperature-difference waste heat of heat treatment furnace

Info

Publication number: CN218820290U
Application number: CN202222961620.4U
Authority: CN
Inventors: 梁苗椿; 梁丁浩; 梁雷军; 石伟伟; 王益锋; 王德君
Original assignee: Zhejiang Dibei Zhikong Technology Co ltd
Current assignee: Zhejiang Dibei Zhikong Technology Co ltd
Priority date: 2022-10-27
Filing date: 2022-10-27
Publication date: 2023-04-07
Anticipated expiration: 2032-10-27

Abstract

The utility model discloses a steam generator that heat treatment furnace high temperature difference waste heat utilized, including the pure water tank, gas-water separator, high temperature difference absorbs heat formula heat exchanger and distribution gas package slowly, this heat exchanger is including the flange and the casing that link firmly, snakelike heat transfer coil and adiabatic stopping, adiabatic stopping is sealed at the casing port through high temperature sealed glue, the pure water tank passes through the pure water feed pipe with gas-water separator lower part separately, a water pump, the check valve connects gradually, gas-water separator lower part is taken over through intaking and is connected with its lower extreme that stretches out the flange outside with snakelike heat transfer coil, its upper end that stretches out the flange outside of snakelike heat transfer coil is taken over the connection on gas-water separator's upper portion through air water output, the steam admission valve that gas-water separator established is linked to each other by the steam connecting pipe with the steam admission valve that the distribution gas package. The steam finally generated by the high-temperature difference heat which is slowly absorbed by the device is distributed to steam users through the distribution gas bag, and the furnace temperature of the heat treatment furnace is reduced according to the annealing slow cooling working condition.

Description

Steam generating device for utilizing high-temperature-difference waste heat of heat treatment furnace

[ technical field ] A method for producing a semiconductor device

The utility model relates to a steam generator of heat treatment furnace high temperature difference waste heat utilization, utilize the pure water recovery high temperature difference waste heat to produce steam when needing the cooling among the metal material heat treatment process belongs to small-size steam boiler technical field.

[ background of the invention ]

In the heat treatment process of the metal material, the metal material workpiece needs to be placed in a heat treatment furnace to be heated, the temperature is required to be above the critical temperature of the metal material, the stress of the metal material workpiece is eliminated, the physical performance of the metal material workpiece is improved, the furnace temperature needs to be increased, kept warm and slowly cooled according to the requirement of treating the metal material in the heat treatment process, and high temperature difference waste heat in the slowly cooling process is difficult to recycle.

Therefore, how to recycle the waste heat is a subject of urgent research and effort for those skilled in the art.

[ Utility model ] content

The utility model aims at providing a steam generator for utilizing the high-temperature difference waste heat of a heat treatment furnace.

Therefore, the utility model provides a following technical scheme:

a steam generating device for utilizing high-temperature difference waste heat of a heat treatment furnace comprises a purified water tank, a gas-water separator, a high-temperature difference slow heat absorption type heat exchanger and a distribution gas bag, wherein the high-temperature difference slow heat absorption type heat exchanger and the distribution gas bag are installed in the heat treatment furnace, the high-temperature difference slow heat absorption type heat exchanger comprises a flange fixed on the outer wall of the heat treatment furnace, a shell with a port fixed towards the flange, a snakelike heat exchange coil positioned in the shell and heat insulation filling materials used for fixing the snakelike heat exchange coil positioned in the shell, the heat insulation filling materials are sealed at the position, close to the port, of the shell through high-temperature sealing glue, the lower portion of the purified water tank and the water inlet side of the lower portion of the gas-water separator are sequentially connected through a purified water feed pipe, a water pump and a check valve, the water outlet side of the lower portion of the gas-water separator is connected with the lower end, extending out of the flange, of the snakelike heat exchange coil is connected to the upper portion of the gas-water separator through a gas outlet pipe, a steam inlet valve and a steam inlet valve are arranged on the upper portion of the distribution gas bag, and connected through a steam connecting pipe.

The side wall of the gas-water separator is provided with a liquid level observing and liquid level controller which controls the water pump to supply water to the gas-water separator or stop supplying water according to the water level value in the gas-water separator.

The utility model discloses following beneficial effect has:

the heat exchanger adopts a high-temperature-difference slow heat absorption type heat exchanger, carrier purified water is used as a heat exchange medium, high-temperature-difference waste heat generated by slow cooling of a heat treatment furnace is continuously and slowly absorbed by purified water flowing in a snake-shaped heat exchange coil pipe, the heat outside the pipe and inside the furnace is slowly absorbed, the temperature of the furnace is reduced according to the requirement of a slow cooling working condition, the flowing purified water is heated and evaporated by the transferred heat to generate steam, the steam enters a gas-water separator through the snake-shaped heat exchange coil pipe, and the separated steam is conveyed to a distribution gas bag to be distributed to steam users for use, so that the waste of industrial energy is greatly reduced, and the purpose of waste heat recycling is achieved.

[ description of the drawings ]

FIG. 1 is a schematic view of the present invention;

FIG. 2 isbase:Sub>A cross-sectional view A-A of FIG. 1;

FIG. 3 is a cross-sectional view B-B of FIG. 1;

fig. 4 is a cross-sectional view C-C of fig. 1.

[ detailed description ] embodiments

Referring to fig. 1 to 4, a steam generator for utilizing high temperature difference waste heat of a heat treatment furnace comprises a pure water tank 1, a gas-water separator 2, a high temperature difference slow heat absorption type heat exchanger and a distribution gas bag 4, wherein the high temperature difference slow heat absorption type heat exchanger is installed in the heat treatment furnace and is used for recovering high temperature difference heat generated by slow cooling of the heat treatment furnace, the high temperature difference slow heat absorption type heat exchanger comprises a flange 3a fixed on the outer wall of the heat treatment furnace, a shell 3b with a port welded and fixed towards the flange, a serpentine heat exchange coil 31 positioned in the shell and a heat insulation filling material 3c positioned in the shell and used for fixing the serpentine heat exchange coil, the heat insulation filling material is sealed close to the port of the shell through a high temperature sealant 3d, the water inlet side of the lower part of the pure water tank 1 and the lower part of the gas-water separator 2 is sequentially connected through a pure water feed pipe 10, a water pump 11 and a check valve 12, the water outlet side of the lower part of the serpentine heat exchange coil 31 is connected with the lower part of the heat exchange coil 31 through a water inlet pipe 30 and the lower part of the heat exchange coil 3a steam inlet pipe 300 connected to the upper part of the gas-water separator 2, the gas-water inlet pipe 20 and the steam inlet valve 400 of the steam distribution gas-water inlet pipe 400 are connected to the steam inlet pipe of the steam distribution gas-water inlet valve 50.

As further improvement and perfection, the utility model discloses still be equipped with the liquid level at 2 lateral walls of deareator and observe and liquid level controller 21, this liquid level is observed and liquid level controller 21 supplies water or stops supplying water for deareator 2 with control water pump 11 according to the water level value in monitoring deareator 2.

The water-gas conversion process is as follows: the purified water supplied by the purified water supply pipe 10 from the purified water tank 1 flows into the water inlet side of the lower part of the gas-water separator 2 through the water pump 11 and the check valve 12 in sequence, the purified water flows out of the water outlet side of the lower part of the gas-water separator 2 and flows into the serpentine heat exchange coil 31 through the water inlet connecting pipe 30, so that the purified water in the serpentine heat exchange coil is heated and boiled to generate steam, the steam is continuously flowed towards the upper part of the serpentine heat exchange coil 31 in a temperature difference state, the purified water flows into the upper part of the gas-water separator 2 through the gas-water output connecting pipe 300 and is separated, water drops drop on the lower part of the gas-water separator 2 under the action of gravity, the steam is upwards stored and is positioned on the upper part of the gas-water separator 2, the steam flows into the steam connecting pipe 50 through the steam outlet valve 20 and flows into the distribution gas bag 4 through the steam inlet valve 40, and is finally connected to a steam user through the steam supply valve 400 for use.

The check valve is used for preventing the stored water in the gas-water separator from flowing back to the purified water supply pipe when the water pump stops supplying water; the upper part of the gas-water separator is provided with a safety valve 21 and a release valve 22, and the bottom of the gas-water separator is connected with a water discharge blow-down valve 23; the upper pipe section of the gas-water output connecting pipe connected to the upper part of the gas-water separator is provided with a pressure sensor 32; the shell 3b adopts a stainless steel seamless large round pipe, the serpentine heat exchange coil 31 adopts a stainless steel seamless small round pipe, the heat insulation filler 3c adopts magnesium oxide, the magnesium oxide is uniformly distributed in the shell by adopting a vibration filling mode, and the magnesium oxide has heat insulation performance and can also slowly transfer heat, so that the serpentine heat exchange coil 31 can slowly absorb slow cooling heat in the furnace in a high temperature difference environment; the distribution air bag 4 is provided at an upper portion thereof with a thermometer 41 and a pressure gauge 42 for pressure, and at a bottom thereof with a drain and blowdown valve 43.

After the device is adopted, the furnace temperature of the heat treatment furnace can be slowly cooled from 800 ℃ to 450-500 ℃, and the high temperature difference heat generated in the slow cooling process is absorbed by purified water.

The utility model is suitable for various heat treatment furnaces including tunnel furnaces.

Claims

1. The utility model provides a steam generator that heat treatment furnace high temperature difference waste heat utilized which characterized in that: comprises a purified water tank, a gas-water separator, a high-temperature difference slow heat absorption type heat exchanger arranged in a heat treatment furnace and a distribution gas bag,

the high-temperature-difference slow heat absorption type heat exchanger comprises a flange fixed on the outer wall of the heat treatment furnace, a shell with a port fixed towards the flange, a snakelike heat exchange coil pipe positioned in the shell and heat insulation filling materials positioned in the shell and used for fixing the snakelike heat exchange coil pipe, wherein the heat insulation filling materials are sealed at the position, close to the port, of the shell through high-temperature sealing glue,

the lower part of the purified water tank is connected with the water inlet side of the lower part of the gas-water separator in turn through a purified water feed pipe, a water pump and a check valve, the water outlet side of the lower part of the gas-water separator is connected with the lower end of the serpentine heat exchange coil which extends out of the flange through a water inlet connecting pipe, the upper end of the serpentine heat exchange coil which extends out of the flange is connected with the upper part of the gas-water separator through a gas-water output connecting pipe,

the upper part of the gas-water separator is provided with a steam outlet valve, the upper part of the distribution gas bag is provided with a steam inlet valve and a steam supply valve, and the steam outlet valve is connected with the steam inlet valve through a steam connecting pipe.

2. The steam generating apparatus for heat treatment furnace high temperature difference waste heat utilization according to claim 1, wherein: and the side wall of the gas-water separator is provided with a liquid level observation and liquid level controller which controls the water pump to supply water to the gas-water separator or stop supplying water according to the water level value in the gas-water separator.