CN218803225U

CN218803225U - High-precision pressing mechanism for bonding solar crystal bars

Info

Publication number: CN218803225U
Application number: CN202223201193.6U
Authority: CN
Inventors: 赵科旭; 马敏
Original assignee: Individual
Current assignee: Individual
Priority date: 2022-12-01
Filing date: 2022-12-01
Publication date: 2023-04-07
Anticipated expiration: 2032-12-01

Abstract

The utility model belongs to the technical field of semiconductor processing, in particular to a high-precision pressing mechanism for bonding a solar crystal bar, which comprises a support frame and a cutting machine material plate, wherein the cutting machine material plate is provided with a special glue for bonding the crystal bar and a glass plate; the support frame is equipped with the first set and compresses tightly the subassembly, the first set compresses tightly the subassembly including the servo motor who takes the band-type brake, be equipped with the screw thread axle sleeve in the servo motor, screw thread axle sleeve is connected with the screw rod, be connected with pressure sensor on the screw rod, the last clamp plate that is used for compressing tightly the crystal bar that is connected of pressure sensor, the utility model discloses install the pressure sensor connection of high accuracy on the clamp plate, utilize the pressure data of the pressure sensor monitoring of high accuracy, the servo motor of band-type brake is taken in the cooperation, the degree that compresses tightly of control press plate for under the mating reaction of clamp plate and glass board, compress tightly the crystal bar and be unlikely to damage the crystal bar again, in order to improve production quality.

Description

High-precision pressing mechanism for bonding solar crystal bars

Technical Field

The utility model belongs to the technical field of the semiconductor processing, concretely relates to a high accuracy hold-down mechanism for bonding of solar energy crystal bar.

Background

Slicing of crystals is an essential component of semiconductor processing. In the process from the crystal bar growth to the cutting into the wafer, the crystal bar can be firmly bonded with the cutting machine material plate, the wafer is not dropped in the cutting process, the problem in the semiconductor processing process is solved, the crystal bar is required to be firmly bonded with the cutting machine material plate, and the crystal bar cannot be crushed or fractured. Therefore, the high-precision pressing mechanism for bonding the solar crystal bar is designed, the crystal bar is firmly bonded with a cutting machine material plate before cutting, the wafer cannot fall when the cutting machine processes the wafer, and meanwhile, the crystal bar cannot be crushed or fractured.

SUMMERY OF THE UTILITY MODEL

To the above-mentioned weak point that exists among the prior art, the utility model provides a high accuracy hold-down mechanism for solar energy crystal bar bonds for solve current crystal and in cutting process, compress tightly the problem that the dynamics was not mastered well, the dynamics is too big, causes the crushing damage to the crystal easily, and the dynamics undersize, the crystal bar drops easily, can not accomplish cutting process.

In order to solve the technical problem, the utility model discloses a following technical scheme:

a high-precision pressing mechanism for bonding a solar crystal bar comprises a support frame and a cutting machine material plate, wherein special glue for bonding the crystal bar and a glass plate are arranged on the cutting machine material plate; the support frame is equipped with first set and compresses tightly the subassembly, first set compresses tightly the subassembly and includes the servo motor of taking the band-type brake, be equipped with the screw thread axle sleeve in the servo motor, screw thread axle sleeve connection has the screw rod, be connected with pressure sensor on the screw rod, the last clamp plate that is used for compressing tightly the crystal bar that is connected with of pressure sensor.

Furthermore, the support frame is provided with a fixed seat, the fixed seat is provided with a first linear guide rail and a sliding block, and the pressing plate is connected with the sliding block through a switching plate.

The support frame is provided with a linear motion module and a second linear guide rail at intervals, one end of the cross beam is assembled on the linear motion module, and the other end of the cross beam is installed on a sliding block of the second linear guide rail.

Further, the pressing plate is arc-shaped to be suitable for bonding the crystal bar.

Furthermore, the pressing plate can be in a plane shape so as to be suitable for bonding a square crystal bar.

Furthermore, the support frame adopts a truss structure design

When specifically using, the crystal bar compresses tightly the piece and is connected with the pressure sensor of high accuracy, the size of measurement pressure, and pressure sensor connects the clamp plate and is used for compressing tightly the crystal bar. Special glue for sticking the crystal bar and a glass plate are arranged between the crystal bar and the glass plate. The glass plate plays a role of protecting the material plate in the cutting process. The first set of compression assembly screw is connected with the pressure sensor, and when the screw is rotated to move up and down, the pressure sensor is driven to move up and down. The high-precision pressure sensor gives a signal to a servo motor with a band-type brake, and an internal thread shaft sleeve of the servo motor rotates, so that the screw rod is screwed in and out to drive the pressure sensor to move up and down, and the pressing force is controlled. The two side fixing seats are provided with a high-precision first linear guide rail and a sliding block, and the pressing plate is connected to the sliding block through the adapter plate, so that the pressing mechanism is guaranteed to move along a straight line. The second set of pressing components are installed on the cross beam, one end of the cross beam is assembled on the linear motion module, and the other end of the cross beam is installed on the sliding block of the second linear guide rail. Under the drive of a motor of the linear motion module, the second set of pressing mechanisms can move back and forth, and the two sets of pressing mechanisms can realize the bonding of long crystal bars and can also bond a plurality of crystal bars. The pressing plate contacted with the crystal bar can be made into an arc shape suitable for bonding a round crystal bar, and can also be made into a plane suitable for bonding a square crystal bar. The support frame adopts the truss structural design, stable in structure, non-deformable. Therefore, the pressing degree of the pressing plate is reasonably controlled under the monitoring of the high-precision pressure sensor, the crystal bar is pressed and not damaged under the matching action of the pressing plate and the glass plate, and the production quality is improved.

Compared with the prior art, the utility model, following beneficial effect has: the high-precision pressure sensor is connected and installed on the pressing plate, the pressing degree of the pressing plate is controlled by utilizing pressure data monitored by the high-precision pressure sensor and matching with the servo motor with the band-type brake, so that the crystal bar is pressed without being damaged under the matching action of the pressing plate and the glass plate, and the production quality is improved; the second set of pressing mechanism is designed to move back and forth, and the two sets of pressing mechanisms can realize bonding of long crystal bars and also can bond a plurality of crystal bars.

Drawings

Fig. 1 is a schematic perspective view (view one) of an environment-friendly corrugated carton of the present invention;

fig. 2 is a schematic perspective view (view two) of an embodiment of an environmentally friendly corrugated carton convenient to disassemble according to the present invention;

FIG. 3 is a partial enlarged view of the upper part of the supporting frame in the embodiment of the high-precision pressing mechanism for bonding the solar ingot according to the present invention;

reference numerals in the drawings of the specification include:

the device comprises a pressure sensor 1, a pressing plate 2, a crystal bar 3, a cutting machine flitch 4, a glass plate 5, a servo motor 6, a sliding block 7, an adapter plate 8, a screw 9, a fixed seat 10, a linear motion module 11, a cross beam 12, a second set of pressing components 13, a second linear guide rail 14, a motor 15, a first set of pressing components 16 and a supporting frame 17.

Detailed Description

In order to make the present invention better understood by those skilled in the art, the technical solutions of the present invention are further described below with reference to the accompanying drawings and examples.

Wherein the showings are for the purpose of illustration only and not for the purpose of limiting the same, the same is shown by way of illustration only and not in the form of limitation; for a better understanding of the embodiments of the present invention, some parts of the drawings may be omitted, enlarged or reduced, and do not represent the size of an actual product; it will be understood by those skilled in the art that certain well-known structures in the drawings and descriptions thereof may be omitted.

The same or similar reference numerals in the drawings of the embodiments of the present invention correspond to the same or similar parts; in the description of the present invention, it should be understood that if the terms "upper", "lower", "left", "right", "inner", "outer", etc. are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, it is only for convenience of description and simplification of description, but it is not indicated or implied that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and therefore, the terms describing the positional relationship in the drawings are used only for illustrative purposes and are not to be construed as limiting the present patent, and the specific meaning of the terms will be understood by those skilled in the art according to the specific circumstances.

In the description of the present invention, unless otherwise explicitly specified or limited, the term "connected" or the like, if appearing to indicate a connection relationship between the components, is to be understood broadly, for example, as being either a fixed connection, a detachable connection, or an integral part; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or may be connected through one or more other components or may be in an interactive relationship with one another. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

The first embodiment is as follows:

as shown in fig. 1-3, the utility model discloses. Specifically, the high-precision pressing mechanism for bonding the solar crystal bar comprises a support frame 17 and a material plate 4 for a cutting machine, wherein the material plate 4 for the cutting machine is provided with a special glue for bonding the crystal bar and a glass plate 5; the support frame 17 is equipped with first set and compresses tightly subassembly 16, and first set compresses tightly subassembly 16 including taking the servo motor 6 of band-type brake, is equipped with the screw thread axle sleeve in the servo motor 6, and screw thread axle sleeve is connected with screw rod 9, is connected with pressure sensor 1 on the screw rod 9, is connected with the clamp plate 2 that is used for compressing tightly crystal bar 3 on the pressure sensor 1.

The support frame 17 is equipped with fixing base 10, is equipped with first linear guide and slider 7 on the fixing base 10, and clamp plate 2 passes through keysets 8 and slider 7 is connected. The device is characterized by further comprising a second set of pressing components 13 and a cross beam 12, wherein the second set of pressing components 13 are arranged on the cross beam 12, the support frame 17 is provided with a linear motion module 11 and a second linear guide rail 14 at intervals, one end of the cross beam 12 is assembled on the linear motion module 11, and the other end of the cross beam is installed on a sliding block of the second linear guide rail 14. The platen 2 is arc-shaped to fit the bonding of the boule. The pressing plate 2 may be formed in a flat shape so as to be suitable for bonding a square ingot. The support frame 17 is designed in a truss structure.

When specifically using, the crystal bar compressing part is connected with high-precision pressure sensor 1, measures the pressure, and pressure sensor 1 is connected with pressure plate 2 and is used for compressing crystal bar 3. Special glue for sticking the crystal bar and a glass plate 5 are arranged between the crystal bar 3 and the glue. The glass plate plays a role of a protective plate in the cutting process. The first set of pressing components 16 is connected with the screw 9 and the pressure sensor 1, and when the screw is rotated to move up and down, the pressure sensor 1 is driven to move up and down. The high-precision pressure sensor 1 gives a signal to a servo motor 6 with a band-type brake, and an internal thread shaft sleeve of the servo motor 6 rotates to drive the pressure sensor 1 to move up and down so as to control the pressing force. The two side fixing seats 10 are provided with a high-precision first linear guide rail and a sliding block 7, and the pressing plate 2 is connected to the sliding block through the adapter plate 8 to ensure that the pressing mechanism moves along a straight line. The second set of hold-down assemblies 13 are mounted on a beam 12, one end of the beam 12 is mounted on the linear motion module 11, and the other end is mounted on a slide of a second linear guide 14. Under the drive of a motor 15 of the linear motion module 11, the second set of pressing mechanisms 13 can move back and forth, and the two sets of pressing mechanisms can realize the bonding of long crystal bars and can also bond a plurality of crystal bars. The pressing plate 2 contacted with the crystal bar can be made into an arc shape suitable for bonding a round crystal bar, and also can be made into a plane suitable for bonding a square crystal bar. The supporting frame 17 is designed by adopting a truss structure, so that the structure is stable and is not easy to deform. Therefore, the pressing degree of the pressing plate 2 is reasonably controlled under the monitoring of the high-precision pressure sensor 1, the crystal bar 3 is pressed and cannot be damaged under the matching action of the pressing plate 2 and the glass plate 5, and the production quality is improved. The high-precision pressure sensor 1 is connected and installed on the pressing plate 2, the pressure data monitored by the high-precision pressure sensor 1 is utilized to cooperate with the servo motor 6 with the band-type brake to control the compression degree of the pressing plate 2, so that the crystal bar 3 is compressed and the crystal bar 3 is not damaged under the cooperation effect of the pressing plate 2 and the glass plate 5, and the production quality is improved.

The above are merely examples of the present invention, and common general knowledge of known specific structures and characteristics of the embodiments is not described herein, and those skilled in the art will know all the common technical knowledge in the technical field of the present invention before the application date or priority date, can know all the prior art in this field, and have the ability to apply the conventional experimental means before this date. It should be noted that, for those skilled in the art, without departing from the structure of the present invention, several modifications and improvements can be made, which should also be regarded as the protection scope of the present invention, and these will not affect the effect of the implementation of the present invention and the practicability of the patent.

Claims

1. A high-precision pressing mechanism for bonding a solar crystal bar comprises a support frame (17) and a material plate (4) for a cutting machine, and is characterized in that the material plate (4) for the cutting machine is provided with a glue special for bonding the crystal bar and a glass plate (5); support frame (17) are equipped with first set and compress tightly subassembly (16), first set compresses tightly subassembly (16) including servo motor (6) of taking the band-type brake, be equipped with the screw thread axle sleeve in servo motor (6), screw thread axle sleeve connection has screw rod (9), be connected with pressure sensor (1) on screw rod (9), be connected with clamp plate (2) that are used for compressing tightly crystal bar (3) on pressure sensor (1).

2. The high-precision pressing mechanism for bonding the solar crystal bar according to claim 1, wherein: the supporting frame (17) is provided with a fixing seat (10), the fixing seat (10) is provided with a first linear guide rail and a sliding block (7), and the pressing plate (2) is connected with the sliding block (7) through an adapter plate (8).

3. The high-precision pressing mechanism for bonding the solar crystal bar according to claim 2, wherein: still include second set and compress tightly subassembly (13) and crossbeam (12), second set compresses tightly subassembly (13) and sets up on crossbeam (12), interval is provided with linear motion module (11) and second linear guide (14) on support frame (17), crossbeam (12) one end assembly is on linear motion module (11), and the other end is installed on the slider of second linear guide (14).

4. The high-precision pressing mechanism for bonding the solar crystal bar according to claim 1, wherein: the pressing plate (2) is arc-shaped so as to be suitable for bonding the crystal bar.

5. The high-precision pressing mechanism for bonding the solar crystal bar according to claim 1, wherein: the pressing plate (2) can also be in a plane shape so as to be suitable for bonding a square crystal bar.

6. The high-precision pressing mechanism for bonding the solar crystal bar according to claim 1, wherein: the supporting frame (17) is designed by adopting a truss structure.