CN218797731U

CN218797731U - Automatic cleaning device for cleaning quartz boat

Info

Publication number: CN218797731U
Application number: CN202222846360.6U
Authority: CN
Inventors: 王万万; 陈欣; 赵辉; 王�华; 白帅
Original assignee: Qinghai Huanghe Hydropower Development Co Ltd; Huanghe Hydropower Development Co Ltd; Xian Solar Power Branch of Qinghai Huanghe Hydropower Development Co Ltd; Xining Solar Power branch of Qinghai Huanghe Hydropower Development Co Ltd
Current assignee: Qinghai Huanghe Hydropower Development Co Ltd; Huanghe Hydropower Development Co Ltd; Xian Solar Power Branch of Qinghai Huanghe Hydropower Development Co Ltd; Xining Solar Power branch of Qinghai Huanghe Hydropower Development Co Ltd
Priority date: 2022-10-27
Filing date: 2022-10-27
Publication date: 2023-04-07
Anticipated expiration: 2032-10-27

Abstract

The utility model discloses an automatic cleaning device for rinsing quartz boat locates the reaction tank and washs between the pond, include: the device comprises a mobile device, a support assembly and a carrier; each moving device comprises a sliding rail, a rack rail, a first module and a second module which are fixedly connected; the first modules are respectively arranged on the slide rails in a sliding manner; the second modules are fixed opposite to one side of the supporting component, a bearing space for containing the quartz boat is arranged in the carrier, and the carrier is hung on the supporting component; during the quartz boat is cleaned, the moving device drives the supporting component to move respectively along the moving directions of the first module and the second module to do circular reciprocating motion. The utility model discloses a first module and second module make supporting component can drive the carrier and remove between reaction tank and washing pond to make and soaking and cleaning process in, do not need the manual work to get and put the quartz boat and carry, and then reduced the probability that the quartz boat was damaged to the accident.

Description

Automatic cleaning device for cleaning quartz boat

Technical Field

The utility model belongs to the technical field of the quartz boat washs, especially, relate to an automatic cleaning device for rinsing quartz boat.

Background

The quartz boat is an extremely important bearing device in the production process of the crystalline silicon solar cell, and the silicon wafer is limited and fixed in the quartz boat, so that the solar cell is formed after the diffusion process is finished. Since the quartz boat has a main component of silicon dioxide, after the diffusion process is performed for many times, the surface of the quartz boat reacts with the diffusion gas and forms a layer of film. The film can affect the quality of the solar cell after the silicon wafer is subjected to the diffusion process, so that when the quartz boat reaches a certain number of times of use, the quartz boat needs to be cleaned.

At present, the quartz boat is usually manually placed into a cleaning tank one by one for cleaning, and the thin film on the surface of the quartz boat is removed in a way that the solution in the cleaning tank reacts with the thin film in the soaking process. The reaction solution in the reaction tank has certain corrosiveness. Therefore, during the cleaning process, corresponding protective equipment needs to be worn when the quartz boat is taken and placed manually, and reaction liquid on the surface of the quartz boat needs to be washed away through clean water after the quartz boat is taken out from the reaction tank. Because the quartz boat surface after soaking is more smooth, thereby operating personnel takes out the quartz boat after the washing completion from the cleaning tank and carries to and washs this in-process and take place accident damage quartz boat easily in the cleaning tank under the condition of wearing protective equipment.

SUMMERY OF THE UTILITY MODEL

In order to solve the background art in the quartz boat surface after soaking relatively smooth, thereby operating personnel takes out the quartz boat after the completion of washing and carries the problem of wasing this whole in-process accident damage quartz boat easily to the washing pond in from the washing pond under the condition of dressing protective equipment, the utility model provides a following technical scheme:

an automatic cleaning device for cleaning a quartz boat is arranged between a reaction tank and a cleaning tank; the automatic cleaning device includes: the device comprises a mobile device, a support assembly and a carrier; the moving devices are arranged in pairs, and each moving device comprises a sliding rail, a rack rail, a first module and a second module which are fixedly connected and have mutually vertical moving directions; the slide rails are fixedly arranged above the reaction tank and the cleaning tank in pairs, the rack rails are arranged on the raised walls on the two sides of the reaction tank and the cleaning tank in pairs, and each first module is slidably arranged on the slide rails; each second module is relatively fixed with one side of the supporting component; a bearing space for containing a quartz boat is arranged in the carrier, and two sides of the carrier are hung on the supporting assembly; when the quartz boat is cleaned, the moving device drives the supporting component to move and respectively reciprocate along the movement directions of the first module and the second module, so that the quartz boat in the carrier is driven to move between the reaction tank and the cleaning tank.

The first module comprises a first driving motor and a mounting frame; the first driving motor is fixed on the surface of the mounting rack, and a rotating shaft part of the first driving motor penetrates through the mounting rack and is meshed with the rack rail through a gear; the mounting rack is fixedly arranged on the surface of the second module, and a guide sliding block matched with the sliding rail is formed on one side of the mounting rack in a protruding mode; when the first driving motor rotates, the gear drives the second module to move on the rack rail.

Furthermore, one side of the mounting frame, which is far away from the guide sliding block, is provided with a limiting hole, and a sliding wheel is rotatably arranged in the limiting hole.

Further, the second module comprises: the second driving motor, the protective shell and the screw rod; the second driving motor is fixedly arranged on the surface of the mounting rack, and a rotating shaft of the second driving motor is relatively fixed with the screw rod; the protective shell is fixedly connected with the mounting frame, and a cavity for accommodating the supporting component is arranged in the protective shell; the screw rod is rotatably arranged in the cavity.

Further, the support assembly comprises support plates arranged in pairs and a connecting rod for connecting the two support plates; each supporting plate is arranged at one end of the connecting rod respectively, and each supporting plate is movably arranged on the screw rod in one protective shell respectively.

Furthermore, one side part of each supporting plate protrudes outwards to form a sliding seat, and the sliding seat is movably arranged on the rod body of one lead screw; and the other side of the supporting plate is forked to form a supporting arm for suspending one side of the carrier.

Further, the carrier includes: the baffle plate assembly and the bearing assembly; the baffle plate assembly is arranged around the bearing assembly in a surrounding manner, so that the bearing space is formed; the bearing components are arranged at intervals at different heights in the bearing space so as to layer the bearing space in the baffle plate component; when the carrier bears the quartz boats, the bearing assembly is simultaneously abutted to the plurality of quartz boats.

Further, the baffle plate assembly includes: a transverse plate and a vertical plate; the transverse plates are arranged in pairs, and each transverse plate is respectively positioned on one of two opposite end surfaces in the length direction of the bearing assembly; the vertical plates are arranged in pairs, and each vertical plate is respectively positioned on one of two opposite end surfaces in the width direction of the bearing component; every the diaphragm all with every riser fixed connection to form bearing space.

Further, the bearing assembly comprises an upper cross rod, a lower cross rod and a lower longitudinal rod; the upper cross rods are arranged between the two vertical plates in pairs, and each upper cross rod is parallel to each other; the lower cross rods are arranged between the vertical plates in pairs, and the lower cross rods and the upper cross rods are respectively positioned at different heights of the bearing space; the rod body of the lower longitudinal rod is vertically connected with the rod body of each lower cross rod, and two ends of the lower longitudinal rod are respectively connected with the end surfaces of one transverse plate.

Furthermore, hooks are respectively arranged on one side, far away from the bearing space, of each transverse plate in pairs.

Has the advantages that: the utility model discloses a first module and second module make supporting component can drive the carrier and remove between reaction tank and washing pond to make and soaking and cleaning process in, do not need the manual work to get and put the quartz boat and carry, and then reduced the probability that the quartz boat was damaged to the accident.

Drawings

FIG. 1 is a schematic diagram of a side view of a cleaning chamber of a quartz boat according to an embodiment of the present invention;

fig. 2 is another schematic side view of a quartz boat cleaning chamber according to an embodiment of the present invention;

fig. 3 is a schematic perspective view of an automatic cleaning device for cleaning quartz boats according to an embodiment of the present invention, wherein the slide rails and the rack rails are omitted;

fig. 4 is a schematic perspective view of a mobile device according to an embodiment of the present invention;

fig. 5 is a schematic perspective view of a carrier according to an embodiment of the present invention.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention clearer, the present invention will be described in further detail with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

It will be understood that the terms "center," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in an orientation or positional relationship indicated in the drawings for convenience in describing the patent and to simplify the description, and do not indicate or imply that the referenced device or element must have a particular orientation, be constructed in a particular orientation, and be constructed in a particular manner of operation, and are not to be considered limiting of the patent.

Fig. 1 is a schematic side view of a quartz boat cleaning chamber according to an embodiment of the present invention. Fig. 2 is another schematic side view of a cleaning chamber for a quartz boat according to an embodiment of the present invention.

Referring to fig. 1, the present invention provides an automatic cleaning device for cleaning quartz boat, which is provided to carry quartz boat movably disposed between a reaction tank 1 and a cleaning tank 2 in a quartz boat cleaning chamber, and washes away reaction liquid attached to the surface of the quartz boat in the cleaning tank 2 after completing the dissolution of surface film in the quartz boat re-reaction tank 1.

Referring to fig. 2, the automatic cleaning apparatus further includes a moving device 3, a support assembly 4, and a carrier 5. Wherein the moving devices 3 are arranged in pairs, each moving device 3 comprising a slide rail 31, a rack rail 32, and a first module 33 and a second module 34 fixedly connected and having mutually perpendicular directions of movement. The slide rails 31 are fixedly arranged above the reaction tank 1 and the cleaning tank 2 in pairs, and the rack rails 32 are arranged on the raised walls on the two sides of the reaction tank 1 and the cleaning tank 2 in pairs; each first module 33 is disposed between the slide rail 31 and the rack rail 32, and each first module 33 is slidably disposed on the slide rail 31. Each second module 34 is fixedly connected to one side of the support member 4. A bearing space 6 for accommodating a quartz boat is arranged in the carrier 5, and two sides of the carrier 5 are hung on the supporting component 4.

When the quartz boat is cleaned, the moving device 3 drives the supporting component 4 to move and respectively reciprocate along the moving directions of the first module 33 and the second module 34, so as to drive the quartz boat in the carrier 5 to move between the reaction tank 1 and the cleaning tank 2. When the carrier 5 is arranged in the reaction tank 1, the film generated by the reaction between the surface of the quartz boat and the diffusion gas is decomposed by the reaction of the liquid in the reaction tank 1. After the quartz boat is soaked in the reaction tank 1 for a period of time, the carrier 5 is lifted up from the reaction tank 1 by the moving device 3, and the carrier 5 is driven to move into the cleaning tank 2 for soaking, so that the reaction solution attached to the quartz boat is cleaned.

Fig. 3 is a schematic perspective view of an automatic cleaning device for cleaning a quartz boat according to an embodiment of the present invention, in which the slide rail 31 and the rack rail 32 are omitted. Fig. 4 is a schematic perspective view of a mobile device 3 according to an embodiment of the present invention.

Referring to fig. 3, in particular, each first module 33 comprises: a first driving motor 331, and a mounting bracket 332. The first driving motor 331 is fixedly disposed on the surface of the mounting bracket 332, and a rotating shaft portion of the first driving motor 331 passes through the mounting bracket 332 and is engaged with the rack rail 32 through the gear 7. The mounting rack 332 is fixedly arranged on the surface of the second module 34, wherein a guide slider 333 matched with the slide rail 31 is formed by protruding one side of the mounting rack 332. When the first driving motor 331 rotates, the gear 7 moves on the rack rail 32, thereby moving the guide slider 333 and the second module 34 in the axial direction of the slide rail 31. Preferably, in this embodiment, a surface of the mounting frame 332 on a side away from the guide slider 333 is provided with a limiting hole 3321, and the pulley 8 is rotatably disposed in the limiting hole 3321. When the guide slider 333 moves on the slide rail 31, the pulley 8 rolls on the surface of the wall where the rack rail 32 is located, thereby maintaining the balance of the mounting bracket 332 during movement.

Referring to fig. 4, each second module 34 includes: a second driving motor 341, a protective shell 343 and a screw 342. The second driving motor 341 is fixedly disposed on the surface of the mounting bracket 332, wherein a rotating shaft of the second driving motor 341 passes through the mounting bracket 332 and the protective shell 343 and is fixed relative to the screw rod 342. The surface of the protective shell 343 is fixedly connected with the mounting frame 332, wherein a cavity for accommodating the supporting component 4 and the screw rod 342 is arranged in the protective shell 343, and the screw rod 342 is rotatably arranged in the cavity of the protective shell 343.

The support assembly 4 includes two support plates 41 symmetrical to each other, and a connecting rod 42 connecting the two support plates 41. Each support plate 41 is fixedly arranged at one end port of the connecting rod 42, and each support plate 41 is movably arranged on one screw rod 342. In the present embodiment, one side of each support plate 41 is protruded outward to form a sliding seat 411. The slide holder 411 is movably provided on the shaft of one screw 342, and the other side of the support plate 41 is bifurcated to form a support arm 412 of the suspension vehicle 5. The carrier 5 is suspended at both ends between the two support plates 41 by support arms 412.

In the present embodiment, the carrier 5 is shaped like a basket as a whole. The carrier 5 includes a baffle assembly 51 and a carrier assembly 52. The baffle plate assembly 51 is arranged around the bearing assembly 52, so as to form the bearing space 6. The bearing assemblies 52 are spaced at different heights within the bearing space 6 to layer the bearing space 6. When the carrier 5 carries the quartz boats, the carrier assembly 52 simultaneously abuts against a plurality of quartz boats.

Fig. 5 is a schematic perspective view of a carrier 5 according to an embodiment of the present invention.

Referring to fig. 5, in particular, the baffle assembly 51 includes a cross plate 511 and a riser plate 512. The transverse plates 511 are arranged in pairs, each transverse plate 511 is parallel to the other transverse plate 511, and each transverse plate 511 is located on one of two end surfaces opposite to each other in the length direction of the bearing component 52. The vertical plates 512 are arranged in pairs, each vertical plate 512 is parallel to the other, and each vertical plate 512 is respectively positioned on one of two end surfaces of the bearing component 52 in the width direction. The opposite side edge of each horizontal plate 511 is fixedly connected with one end surface of a vertical plate 512, and a pair of hooks 5111 is fixedly arranged on one side of each horizontal plate 511 far away from the bearing space 6. In the process of cleaning the quartz boat, the carrier 5 is respectively hooked at the first support arm 412 and the second support arm through the hooks 5111 on the transverse plate 511, so that the carrier 5 is hung on the support assembly 4. Preferably, the surfaces of each transverse plate 511 and each vertical plate 512 are provided with a through hole 513, and in the cleaning process of the quartz boat, a dissolving liquid or clean water can enter the bearing space 6 through the through hole 513, so that the processes of soaking, dissolving and cleaning the quartz boat placed in the bearing space 6 are accelerated.

The carriage assembly 52 includes an upper crossbar 521, a lower crossbar 522, and a lower crossbar 523. The upper crossbars 521 are arranged between the two vertical plates 512 in pairs, and each upper crossbar 521 is parallel to each other. The lower cross bars 522 are arranged in pairs between the two vertical plates 512, the upper cross bars 521 and the lower cross bars 522 are respectively located at different heights in the bearing space 6, and the upper cross bars 521 and the lower cross bars 522 are parallel to each other, so that the bearing space 6 is divided into an upper layer and a lower layer. The lower vertical bar 523 is vertically connected with the body of the lower cross bar 522, and both ends of the lower vertical bar 523 are respectively fixed with the end surface of one transverse plate 511. In other embodiments, the number of the upper horizontal bar 521, the lower horizontal bar 522 and the lower vertical bar 523 may be three or more, so that the bearing space 6 is divided into three layers or more, thereby further improving the bearing capacity of the vehicle 5.

To sum up, the utility model discloses a first module and second module make supporting component can drive the carrier and remove between reaction tank and washing pond to make and soaking and cleaning process in, do not need the manual work to get and put the quartz boat and carry, and then reduced the probability that the quartz boat was damaged to the accident. Furthermore, the bearing components are arranged at different heights in the bearing space, so that the whole bearing space is divided into a plurality of layers, and the bearing capacity of the carrier on the quartz boat is improved.

The foregoing describes certain embodiments of the invention. Other embodiments are within the scope of the following claims.

The terms "exemplary," "example," and the like, as used throughout this specification, mean "serving as an example, instance, or illustration," and do not mean "preferred" or "advantageous" over other embodiments. The detailed description includes specific details for the purpose of providing an understanding of the described technology. However, the techniques may be practiced without these specific details. In some instances, well-known structures and devices are shown in block diagram form in order to avoid obscuring the concepts of the described embodiments.

The above describes in detail optional embodiments of the present invention with reference to the drawings, however, the embodiments of the present invention are not limited to the details in the above embodiments, and within the technical concept scope of the embodiments of the present invention, various simple modifications can be performed on the technical solution of the embodiments of the present invention, and these simple modifications all belong to the protection scope of the embodiments of the present invention.

The previous description of the specification is provided to enable any person skilled in the art to make or use the specification. Various modifications to the disclosure will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other variations without departing from the scope of the disclosure. Thus, the description is not intended to be limited to the examples and designs described herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An automatic cleaning device for cleaning a quartz boat is arranged between a reaction tank (1) and a cleaning tank (2); characterized in that the automatic cleaning device comprises: the device comprises a moving device (3), a supporting component (4) and a carrier (5); the moving devices (3) are arranged in pairs, and each moving device (3) comprises a sliding rail (31), a rack rail (32), a first module (33) and a second module (34) which are fixedly connected and have mutually perpendicular moving directions; the sliding rails (31) are fixedly arranged above the reaction tank (1) and the cleaning tank (2) in pairs, the rack rails (32) are arranged on the raised walls on the two sides of the reaction tank (1) and the cleaning tank (2) in pairs, and each first module (33) is slidably arranged on the sliding rails (31); each second module (34) is fixed relative to one side of the support component (4); a bearing space (6) for containing a quartz boat is arranged in the carrier (5), and two sides of the carrier (5) are hung on the supporting component (4); when the quartz boat is cleaned, the moving device (3) drives the supporting component (4) to move and respectively reciprocate along the moving directions of the first module (33) and the second module (34), so that the quartz boat in the carrier (5) is driven to move between the reaction tank (1) and the cleaning tank (2).

2. An automatic cleaning device for washing quartz boats as in claim 1, characterized in that said first module (33) comprises a first drive motor (331) and a mounting frame (332); the first driving motor (331) is fixed on the surface of the mounting frame (332), and a rotating shaft part of the first driving motor (331) penetrates through the mounting frame (332) and is meshed with the rack rail (32) through a gear (7); the mounting rack (332) is fixedly arranged on the surface of the second module (34), and a guide sliding block (333) matched with the sliding rail (31) is formed on one side of the mounting rack (332) in a protruding mode; when the first driving motor (331) rotates, the gear (7) drives the second module (34) to move on the rack rail (32).

3. The automatic cleaning device for cleaning quartz boats of claim 2, wherein a limiting hole (3321) is formed on a side of the mounting frame (332) away from the guide slider (333), and the limiting hole (3321) is rotatably provided with a pulley (8).

4. An automatic cleaning device for washing quartz boats as claimed in claim 2, characterized in that said second module (34) comprises: a second driving motor (341), a protective shell (343) and a screw rod (342); the second driving motor (341) is fixedly arranged on the surface of the mounting rack (332), and a rotating shaft of the second driving motor (341) is relatively fixed with the screw rod (342); the protective shell (343) is fixedly connected with the mounting frame (332), and a cavity (3421) for accommodating the supporting component (4) is arranged in the protective shell (343); the screw rod (342) is rotatably arranged in the cavity (3421).

5. An automatic cleaning device for washing quartz boats as claimed in claim 4, characterized in that said supporting assembly (4) comprises supporting plates (41) arranged in pairs, and a connecting rod (42) connecting two of said supporting plates (41); each support plate (41) is arranged at one end of the connecting rod (42), and each support plate (41) is movably arranged on the screw rod (342) in one protective shell (343).

6. The automatic cleaning device for cleaning quartz boats as claimed in claim 5, wherein a side portion of said supporting plate (41) is protruded outwardly to form a sliding seat (411), said sliding seat (411) is movably provided to a shaft of one of said lead screws (342); the other side of the supporting plate (41) is forked to form a supporting arm (412) for suspending one side of the carrier (5).

7. The automatic cleaning device for washing quartz boats according to any one of claims 1 to 6, characterized in that said carrier (5) comprises: a baffle assembly (51) and a carrier assembly (52); wherein the baffle plate assembly (51) is arranged around the bearing assembly (52) to form the bearing space (6); the bearing assemblies (52) are arranged at intervals at different heights in the bearing space (6) so as to layer the bearing space (6) in the baffle plate assembly (51); when the carrier (5) bears the quartz boats, the bearing assembly (52) is abutted to the plurality of quartz boats at the same time.

8. The automated quartz boat cleaning apparatus of claim 7, wherein the baffle assembly (51) comprises: a horizontal plate (511) and a vertical plate (512); the transverse plates (511) are arranged in pairs, and each transverse plate (511) is respectively positioned on one of two opposite end surfaces of the length direction of the bearing component (52); the vertical plates (512) are arranged in pairs, and each vertical plate (512) is respectively positioned on one of two opposite end surfaces in the width direction of the bearing component (52); each transverse plate (511) is fixedly connected with each vertical plate (512) to form the bearing space (6).

9. The automatic cleaning device for cleaning quartz boats of claim 8, wherein said carrying assembly (52) comprises an upper cross bar (521), a lower cross bar (522) and a lower longitudinal bar (523); the upper cross rods (521) are arranged between the two vertical plates (512) in pairs, and each upper cross rod (521) is parallel to each other; the lower cross rods (522) are arranged between the vertical plates (512) in pairs, and the lower cross rods (522) and the upper cross rods (521) are respectively positioned at different heights of the bearing space (6); the rod body of the lower vertical rod (523) is vertically connected with the rod body of each lower cross rod (522), and two ends of the lower vertical rod (523) are respectively connected with the end surface of one transverse plate (511).

10. An automatic cleaning device for cleaning quartz boats as claimed in claim 8, characterized in that each of said transverse plates (511) is provided with hooks (513) in pairs on the side remote from said loading space (6).