CN218786679U

CN218786679U - Charging butt-joint mechanism of single crystal furnace

Info

Publication number: CN218786679U
Application number: CN202222955044.2U
Authority: CN
Inventors: 蔡璋榕; 郑珠兰
Original assignee: Fujian Xinrui Crystal Science And Technology Co ltd
Current assignee: Fujian Xinrui Crystal Science And Technology Co ltd
Priority date: 2022-11-07
Filing date: 2022-11-07
Publication date: 2023-04-04
Anticipated expiration: 2032-11-07

Abstract

The utility model discloses a reinforced docking mechanism of single crystal growing furnace belongs to the single crystal growing furnace field, a reinforced docking mechanism of single crystal growing furnace, the induction cooker comprises a cooker bod, furnace inner wall fixedly connected with heat-preserving container, heat-preserving container inner wall fixedly connected with heating collar, the heating collar inboard is provided with the crucible, the crucible downside is provided with the backup pad, the furnace body lateral wall is close to top surface fixedly connected with inlet pipe of department, the inlet pipe runs through the furnace body, the inlet pipe sets up for the slope, the inlet pipe lateral wall is provided with seal assembly, the intraductal swing joint of inlet pipe has the drum, drum inner wall swing joint has the conveying pipe, be provided with the pay-off subassembly in the conveying pipe, the drum downside is provided with removal subassembly, and it can realize, carries out convenient fixing between the inlet pipe of reserving conveying pipe and furnace body, can play sealed effect when increasing stability again, utilizes remaining of the reducible silicon material of helical blade simultaneously.

Description

Charging butt-joint mechanism of single crystal furnace

Technical Field

The utility model relates to a single crystal growing furnace field, more specifically say, relate to a reinforced docking mechanism of single crystal growing furnace.

Background

The single crystal furnace is a device which melts polycrystalline materials such as polycrystalline silicon and the like by a graphite heater in an inert gas environment and grows dislocation-free single crystals by a Czochralski method; after the silicon material is heated at high temperature, the silicon material is grown to a proper length in a straight pulling way, and after the silicon material in a single crystal furnace is prepared, the unmelted silicon material is generally directly added in order to save energy consumption;

found through patent search, publication no: the Chinese patent CN212128337U discloses a single crystal furnace charging system, and the single crystal furnace can be used for conveniently and rapidly conveying silicon materials to a crucible in the single crystal furnace, so that a convenient charging function is realized;

however, in practical use, the feeding pipe is usually in contact with the feeding pipe reserved on the side wall of the single crystal furnace, the tightness is poor in the feeding process, on one hand, the leakage probability of the small silicon material exists, on the other hand, the temperature in the crucible can be dissipated through a gap, the constant temperature effect inside the single crystal furnace is influenced, certain energy consumption waste exists, and in the feeding process, the probability that part of the silicon material remains in the feeding pipe influences the accuracy of the next feeding.

SUMMERY OF THE UTILITY MODEL

1. Technical problem to be solved

To the problem that exists among the prior art, the utility model aims to provide a reinforced docking mechanism of single crystal growing furnace, it can realize, carries out convenient fixing between the inlet pipe that reserve with conveying pipe and furnace body, can play sealed effect again when increasing stability, utilizes the remaining of the reducible silicon material of helical blade simultaneously.

2. Technical scheme

In order to solve the above problems, the utility model adopts the following technical proposal.

The utility model provides a reinforced docking mechanism of single crystal growing furnace, includes the furnace body, furnace body inner wall fixedly connected with heat-preserving container, heat-preserving container inner wall fixedly connected with heating collar, the heating collar inboard is provided with the crucible, the crucible downside is provided with the backup pad, the furnace body lateral wall is close to top surface department fixedly connected with inlet pipe, the inlet pipe runs through the furnace body, the inlet pipe sets up for the slope, the inlet pipe lateral wall is provided with seal assembly, swing joint has the drum in the inlet pipe, drum inner wall swing joint has the conveying pipe, be provided with the pay-off subassembly in the conveying pipe, the drum downside is provided with the removal subassembly.

Furthermore, sealed group price includes the fixed plate, fixed plate fixed connection is close to top surface department at the furnace body lateral wall, fixed plate top surface fixed mounting has the telescopic link, the telescopic link output run through the fixed plate and rather than swing joint, telescopic link output fixedly connected with closing plate, the closing plate bottom surface runs through the inlet pipe and matches each other rather than.

Furthermore, the cylinder side wall is symmetrically and fixedly connected with two clamping blocks close to the left end, two clamping grooves are symmetrically formed in the end face of the right end of the feeding pipe, the clamping blocks are movably connected with the clamping grooves, the clamping groove side wall is provided with a chute in the clockwise direction, and the cylinder side wall is fixedly connected with a plurality of driving levers.

Furthermore, the feeding assembly comprises a rotating shaft, the rotating shaft is connected with the inner wall of the feeding pipe in a rotating mode, the rotating shaft side wall is fixedly connected with a helical blade, the right side wall of the feeding pipe is fixedly provided with a motor, the right end of the rotating shaft penetrates through the feeding pipe and is fixedly connected with an output shaft of the motor, and the side wall of the feeding pipe is close to a feed box fixedly connected with the right end.

Furthermore, the moving assembly comprises two support plates, the cylinder penetrates through the support plates and is movably connected with the support plates, the side wall of the furnace body is fixedly connected with a transverse plate, the left side of the support plate is in sliding connection with the transverse plate, the right side of the support plate is fixedly connected with the transverse plate, the side wall of the support plate is fixedly provided with an electric push rod, the output end of the electric push rod is fixedly connected with the left side of the support plate, the bottom surface of the transverse plate is fixedly connected with a reinforcing plate, and the reinforcing plate is fixedly connected with the furnace body.

Furthermore, a limiting groove is formed in the top surface of the transverse plate, and the support plate is connected with the limiting groove in a sliding mode on the left side.

3. Advantageous effects

Compared with the prior art, the utility model has the advantages of:

(1) This scheme passes through the furnace body, inlet pipe, drum, mutually supporting between fixture block and the draw-in groove etc. can carry out convenient connection with the conveying pipe through drum and inlet pipe, can play good sealed effect again when increasing stability, avoids appearing the condition that less silicon material leaked, can avoid the heat energy in the crucible to give off simultaneously again, and then can its result of use of effectual improvement.

(2) This scheme is through mutually supporting between furnace body, inlet pipe and the pay-off subassembly etc. and after silicon material preparation in the single crystal growing furnace finishes, usable pay-off subassembly silicon material in with the workbin is carried to the crucible in, carries through helical blade, can effectively avoid silicon material to appear remaining in the pay-off pipe, and then the accuracy when guaranteeing feeding next time.

(3) This scheme passes through furnace body, drum and removes mutually supporting between the subassembly etc. and can drive the drum and remove, makes it be connected and the separation with the inlet pipe, and when the drum inserted in the inlet pipe, rotatable driving lever drives the fixture block card through the drum and goes into to fix in the chute, has increased stability and the rate of accuracy when reinforced.

Drawings

Fig. 1 is a perspective view of the present invention;

FIG. 2 is a schematic view of the present invention;

FIG. 3 is an enlarged view of the point A of FIG. 2 according to the present invention;

fig. 4 is a schematic view of the side view of the part of the middle chute of the present invention.

The reference numbers in the figures illustrate:

1. a furnace body; 2. a heat-preserving barrel; 3. heating a ring; 4. a crucible; 5. a support plate; 6. a feed pipe; 7. a fixing plate; 8. a telescopic rod; 9. a sealing plate; 10. a feed pipe; 11. a cylinder; 12. a clamping block; 13. a card slot; 14. a chute; 15. a rotating shaft; 16. a helical blade; 17. a motor; 18. a material box; 19. a support plate; 20. a transverse plate; 21. an electric push rod; 22. a reinforcing plate; 23. a limiting groove; 24. a deflector rod.

Detailed Description

The technical solution in the embodiment of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiment of the present invention; obviously, the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and all other embodiments obtained by those skilled in the art without making creative efforts based on the embodiments of the present invention belong to the protection scope of the present invention.

Example 1:

referring to fig. 1-4, a charging butt-joint mechanism of a single crystal furnace comprises a furnace body 1, a heat preservation barrel 2 is fixedly connected to the inner wall of the furnace body 1, a heating ring 3 is fixedly connected to the inner wall of the heat preservation barrel 2, a crucible 4 is arranged on the inner side of the heating ring 3, a supporting plate 5 is arranged on the lower side of the crucible 4, a feeding pipe 6 is fixedly connected to the position, close to the top surface, of the side wall of the furnace body 1, the feeding pipe 6 penetrates through the furnace body 1, the feeding pipe 6 is obliquely arranged, a sealing assembly is arranged on the side wall of the feeding pipe 6, a cylinder 11 is movably connected into the feeding pipe 6, a feeding pipe 10 is movably connected to the inner wall of the cylinder 11, a feeding assembly is arranged in the feeding pipe 10, and a moving assembly is arranged on the lower side of the cylinder 11.

Referring to fig. 2 and 3, sealed group price includes fixed plate 7, fixed plate 7 fixed connection is close to top surface department at furnace body 1 lateral wall, fixed plate 7 top surface fixed mounting has

telescopic link

8, 8 output ends of telescopic link run through fixed plate 7 and rather than swing joint, 8 output end fixed connection of telescopic link have closing plate 9, closing plate 9 bottom surface runs through inlet pipe 6 and matches each other rather than, through being provided with seal assembly, when needs feeding, can rise closing plate 9, the material of being convenient for gets into, after the feeding finishes, closing plate 9 drops, seal furnace body 1.

Referring to fig. 2 and 3, two fixture blocks 12 of drum 11 lateral wall near left end department symmetry fixedly connected with, two draw-in grooves 13 have been seted up to inlet pipe 6 right-hand member terminal surface symmetry, fixture block 12 and draw-in groove 13 swing joint, chute 14 has been seted up according to clockwise to draw-in groove 13 lateral wall, drum 11 lateral wall fixedly connected with a plurality of driving lever 24, through furnace body 1, inlet pipe 6, drum 11, mutually support between fixture block 12 and the draw-in groove 13 etc., can carry out convenient connection with inlet pipe 6 through drum 11 with conveying pipe 10, can play good sealed effect when increasing stability again, avoid appearing the condition that less silicon material leaked, can avoid the heat energy in crucible 4 to distribute again simultaneously, and then can effectual improvement its result of use.

Referring to fig. 2, the feeding assembly includes a rotating shaft 15, the rotating shaft 15 is rotatably connected with the inner wall of the feeding pipe 10, a helical blade 16 is fixedly connected with the side wall of the rotating shaft 15, a motor 17 is fixedly mounted on the right side wall of the feeding pipe 10, the right end of the rotating shaft 15 penetrates through the feeding pipe 10 and is fixedly connected with an output shaft of the motor 17, a feed box 18 is fixedly connected with the side wall of the feeding pipe 10 close to the right end, through the furnace body 1, the feeding pipe 6 is matched with the feeding assembly and the like, after silicon materials in the single crystal furnace are prepared, silicon materials in the feed box 18 can be conveyed to the crucible 4 by the feeding assembly, and are conveyed by the helical blade 16, so that the silicon materials can be effectively prevented from being remained in the feeding pipe 10, and further the accuracy in the next feeding process is guaranteed.

Referring to fig. 2, the moving assembly includes two support plates 19, the cylinder 11 penetrates through the support plates 19 and is movably connected with the support plates 19, the lateral wall of the furnace body 1 is fixedly connected with a transverse plate 20, the left support plate 19 is slidably connected with the transverse plate 20, the top surface of the transverse plate 20 is provided with a limiting groove 23, the left support plate 19 is slidably connected with the limiting groove 23, the cylinder 11 is ensured to be in a stable state during movement, position deviation between the fixture block 12 and the clamping groove 13 is prevented, the right support plate 19 is fixedly connected with the transverse plate 20, the lateral wall of the right support plate 19 is fixedly provided with an electric push rod 21, the output end of the electric push rod 21 is fixedly connected with the left support plate 19, the bottom surface of the transverse plate 20 is fixedly connected with a reinforcing plate 22, and the reinforcing plate 22 is fixedly connected with the furnace body 1.

When in use: firstly, putting silicon materials into a feed box 18, after the silicon materials in a furnace body 1 are prepared, feeding the silicon materials into a crucible 4, starting an electric push rod 21, driving a cylinder 11 to move towards the left side by the electric push rod 21 through a left side support plate 19, rotating the cylinder 11 through a deflector rod 24 when the cylinder 11 is abutted against a feed pipe 6, and driving a clamping block 12 to be clamped into a clamping groove 13 by the cylinder 11, so that the butt joint of the feed pipe 6 and the feed pipe 10 is completed, the sealing effect of the feed pipe 10 can be increased while the stability is achieved, and the silicon materials are prevented from being leaked;

then the motor 17 is started, the output shaft of the motor 17 drives the helical blade 16 to rotate through the rotating shaft 15, the helical blade 16 conveys the silicon material in the material box 18, meanwhile, the telescopic rod 8 drives the sealing plate 9 to rise, when the silicon material is conveyed into the feeding pipe 6, the silicon material falls into the crucible 4 by utilizing the inclined arrangement of the feeding pipe 6 to be prepared again, then the telescopic rod 8 resets, the reversing cylinder 11 is reversed, and the electric push rod 21 resets.

The above description is only the preferred embodiment of the present invention; the scope of the present invention is not limited thereto. Any person skilled in the art should also be able to cover the technical scope of the present invention by replacing or changing the technical solution and the improvement concept of the present invention with equivalents and modifications within the technical scope of the present invention.

Claims

1. The utility model provides a reinforced docking mechanism of single crystal growing furnace, includes furnace body (1), furnace body (1) inner wall fixedly connected with heat-preserving container (2), heat-preserving container (2) inner wall fixedly connected with heating collar (3), heating collar (3) inboard is provided with crucible (4), crucible (4) downside is provided with backup pad (5), its characterized in that: the furnace body (1) lateral wall is close to top surface department fixedly connected with inlet pipe (6), inlet pipe (6) run through furnace body (1), inlet pipe (6) set up for the slope, inlet pipe (6) lateral wall is provided with seal assembly, swing joint has drum (11) in inlet pipe (6), drum (11) inner wall swing joint has conveying pipe (10), be provided with the feeding subassembly in conveying pipe (10), drum (11) downside is provided with the removal subassembly.

2. The charging butt joint mechanism of the single crystal furnace according to claim 1, characterized in that: the sealing assembly comprises a fixing plate (7), the fixing plate (7) is fixedly connected to the side wall of the furnace body (1) and close to the top surface, a telescopic rod (8) is fixedly mounted on the top surface of the fixing plate (7), the output end of the telescopic rod (8) penetrates through the fixing plate (7) and is movably connected with the fixing plate, a sealing plate (9) is fixedly connected with the output end of the telescopic rod (8), and the bottom surface of the sealing plate (9) penetrates through the feeding pipe (6) and is matched with the feeding pipe.

3. The charging butt joint mechanism of the single crystal furnace according to claim 1, characterized in that: two fixture blocks (12) of drum (11) lateral wall symmetry fixedly connected with near left end department, two draw-in grooves (13) have been seted up to inlet pipe (6) right-hand member terminal surface symmetry, fixture block (12) and draw-in groove (13) swing joint, chute (14) have been seted up according to clockwise to draw-in groove (13) lateral wall, drum (11) lateral wall fixedly connected with a plurality of driving lever (24).

4. The charging butt joint mechanism of the single crystal furnace according to claim 1, characterized in that: the feeding assembly comprises a rotating shaft (15), the rotating shaft (15) is rotatably connected with the inner wall of the feeding pipe (10), the side wall of the rotating shaft (15) is fixedly connected with a helical blade (16), the right side wall of the feeding pipe (10) is fixedly provided with a motor (17), the right end of the rotating shaft (15) penetrates through the feeding pipe (10) and is fixedly connected with an output shaft of the motor (17), and the side wall of the feeding pipe (10) is close to the right end and is fixedly connected with a material box (18).

5. The charging butt joint mechanism of the single crystal furnace according to claim 1, characterized in that: the moving assembly comprises two supporting plates (19), the cylinder (11) penetrates through the supporting plates (19) and is movably connected with the supporting plates, the side wall of the furnace body (1) is fixedly connected with a transverse plate (20), the left side of the supporting plates (19) is in sliding connection with the transverse plate (20), the right side of the supporting plates (19) is fixedly connected with the transverse plate (20), the right side of the supporting plates (19) is fixedly provided with an electric push rod (21), the output end of the electric push rod (21) is fixedly connected with the left side supporting plate (19), the bottom surface of the transverse plate (20) is fixedly connected with a reinforcing plate (22), and the reinforcing plate (22) is fixedly connected with the furnace body (1).

6. The charging butt joint mechanism of the single crystal furnace according to claim 5, characterized in that: the top surface of the transverse plate (20) is provided with a limiting groove (23), and the left side support plate (19) is in sliding connection with the limiting groove (23).