CN218785015U

CN218785015U - Semiconductor processing is with wasing drying equipment

Info

Publication number: CN218785015U
Application number: CN202223051077.0U
Authority: CN
Inventors: 翁晓升
Original assignee: Nantong Jiejing Semiconductor Technology Co ltd
Current assignee: Nantong Jiejing Semiconductor Technology Co ltd
Priority date: 2022-11-16
Filing date: 2022-11-16
Publication date: 2023-04-04
Anticipated expiration: 2032-11-16

Abstract

The utility model discloses a semiconductor processing is with wasing drying equipment relates to material processing technology field, including liquid reserve tank and fixed connection in the washing stoving case at liquid reserve tank top, the liquid reserve tank is linked together with washing stoving case, horizontal spout has all been seted up to the left and right sides wall of liquid reserve tank, the inside of liquid reserve tank is equipped with the filter screen frame, both ends respectively with the inner wall sliding connection of two horizontal spouts about the filter screen frame, the front end of filter screen frame extend to the place ahead of liquid reserve tank and with the positive sliding contact of liquid reserve tank, the internally mounted of filter screen frame has the filter screen. The utility model discloses a cooperation setting between centre gripping frame, electric putter B, arc splint, booster pump, hose, liquid reserve tank, shower nozzle, motor, bull stick, electric putter A and the slider can carry out the omnidirectional washing to semiconductor material, has higher cleaning efficiency.

Description

Semiconductor processing is with wasing drying equipment

Technical Field

The utility model relates to a material processing technology field specifically is a semiconductor processing is with wasing drying equipment.

Background

Semiconductor material includes silicon polycrystal, silicon single crystal, the silicon chip, silicon epitaxial wafer, amorphous silicon film etc, can be directly or indirectly used for preparing semiconductor device, before processing granular body silicon polycrystalline material, need cleaning equipment to wash it, with impurity wherein reducing as far as possible, because granular body silicon polycrystalline material texture is more fragile, very fragile and generate tiny granule at the abluent in-process of stirring, be unfavorable for the drainage operation in later stage, not only waste time and energy but also cleaning efficiency is low, in addition, current cleaning equipment mostly uses the filter screen to filter the washing liquid after the washing, reach the purpose of practicing thrift the washing liquid, but the inside filter screen of equipment is difficult to dismantle washing and installation, influence the filter effect of equipment. Therefore, the cleaning and drying equipment for semiconductor processing is provided to solve the problems.

SUMMERY OF THE UTILITY MODEL

One) technical problem to be solved

The utility model aims at providing a semiconductor processing is with wasing drying equipment in order to compensate prior art not enough.

II) technical scheme

In order to achieve the above purpose, the utility model provides a following technical scheme: a cleaning and drying device for semiconductor processing comprises a liquid storage tank and a cleaning and drying tank fixedly connected to the top of the liquid storage tank, wherein the liquid storage tank is communicated with the cleaning and drying tank, transverse sliding grooves are formed in the left side wall and the right side wall of the liquid storage tank, a filter screen frame is arranged inside the liquid storage tank, the left end and the right end of the filter screen frame are respectively connected with the inner walls of the two transverse sliding grooves in a sliding mode, the front end of the filter screen frame extends to the front of the liquid storage tank and is in sliding contact with the front surface of the liquid storage tank, a filter screen is arranged inside the filter screen frame, a first clamping component is arranged on the right side of the filter screen frame, bearings are fixedly embedded in the left side wall and the right side wall of the cleaning and drying tank, rotating rods are fixedly connected with the inner rings of the two bearings, clamping frames are arranged inside the cleaning and drying tank, one ends, close to the two rotating rods, are respectively fixedly connected with the left side surface and the right side surface of the clamping frames, a motor is fixedly connected with the right side surface of the cleaning and the drying tank, the output end of the motor extends to the inner rings of the bearing and is fixedly connected with the rotating rods;

the shower nozzle is installed to the inner bottom wall of liquid reserve tank, the inner bottom wall fixed mounting of liquid reserve tank has booster water pump, booster water pump's the fixed intercommunication of input has the inlet tube, booster water pump's the fixed intercommunication of output has the hose, booster water pump's one end is kept away from to the hose runs through the left surface of liquid reserve tank and the upper surface of slider in proper order and is linked together with the shower nozzle, it has the chamber door through a set of hinge to wash the front of stoving case, it has the air heater to fix on the chamber door to inlay, wash the back of stoving case and set up the bar exhaust vent corresponding with the air heater position.

It is foretell, a joint subassembly includes card hole and slide pipe, the right flank of screen frame is seted up in the card hole, the slide pipe is fixed to be inlayed in the right flank of liquid reserve tank, the inner wall sliding connection of slide pipe has the limiting plate, the inside of limiting plate is fixed to be inlayed and is had the card post, the left end of card post run through the left surface of slide pipe and with the left surface sliding connection of slide pipe, the left end of card post and the inner wall looks joint in card hole, the right-hand member of card post run through the right flank of slide pipe and with the right flank sliding connection of slide pipe, the right-hand member fixedly connected with pull ring of card post, the right flank fixedly connected with spring of limiting plate, the right-hand member fixed connection of spring is in the right side wall of slide pipe.

Foretell, no. two joint subassemblies include two electric putter B and two sliding trays, two electric putter B difference fixed connection is in the left and right sides wall of centre gripping frame, two the sliding tray is seted up respectively in the interior roof of centre gripping frame and the interior diapire of centre gripping frame, two the equal fixedly connected with arc splint of electric putter B's output, every the upper and lower both ends of arc splint respectively with the inner wall sliding connection of two sliding trays, two the equal fixedly connected with foam-rubber cushion in a side that the arc splint is close to each other.

Foretell, the strip spout has been seted up to the upper surface of wasing the stoving case, the inner wall sliding connection of strip spout has the slider, shower nozzle fixed mounting is in the bottom surface of slider, the inside wall fixedly connected with electric putter A of wasing the stoving case, electric putter A's output and the right flank fixed connection of slider.

The liquid level meter is fixedly mounted on the front face of the liquid storage tank and communicated with the inside of the liquid storage tank.

The air heater, the electric push rod A, the electric push rod B, the motor and the booster water pump are all electrically connected with an external power supply through the controller.

Thirdly), the beneficial effects are that:

compared with the prior art, this semiconductor processing is with wasing drying equipment possesses following beneficial effect:

1. the utility model discloses a centre gripping frame, electric putter B, the arc splint, booster water pump, the hose, the liquid reserve tank, a spray nozzle, including a motor, an end cap, a controller, and a cover plate, the bull stick, cooperation setting between electric putter A and the slider, when wasing semiconductor material, at first pack into the pocket to graininess semiconductor material and tie up, then open the chamber door and place the inside at the centre gripping frame to the pocket that is equipped with semiconductor material, start two electric putter B, can drive two arc splint relative motion, it is fixed to treat abluent semiconductor material and carry out the centre gripping, motor work can drive two bull sticks and centre gripping frame and rotate, can drive semiconductor material and rotate, it can drive the shower nozzle and remove to start electric putter A simultaneously, can carry out the omnidirectional washing to semiconductor material, higher cleaning efficiency has.

2. The utility model discloses a filter screen, the liquid reserve tank, the pull ring, the card post, the card hole, the filter screen frame, a spring, the limiting plate, cooperation setting between slide pipe and the horizontal spout, outside pulling pull ring can drive the card post and outwards remove, can make the left end of card post break away from the inner wall in card hole, can accomplish the dismantlement to the filter screen, with the inside of filter screen frame propelling movement to horizontal spout, under the spring action of spring, can make the left end of card post and the inner wall joint in card hole, can accomplish the installation to the filter screen, can be more convenient when dismantling and installing the filter screen, can guarantee the filter effect of this equipment.

Drawings

Fig. 1 is a schematic perspective view of the present invention;

fig. 2 is a cross-sectional view of a front view of the present invention;

FIG. 3 is an enlarged schematic view of the structure A in FIG. 2 according to the present invention;

FIG. 4 is an enlarged schematic view of the structure at B in FIG. 2 according to the present invention;

fig. 5 is an electrical connection diagram according to the present invention.

In the figure:

1. a liquid storage tank; 2. cleaning and drying the box; 3. a transverse chute; 4. a screen frame; 5. a filter screen;

6. a first clamping component; 601. a clamping hole; 602. a slide pipe; 603. a limiting plate; 604. clamping the column; 605. a spring;

7. a bearing; 8. a rotating rod; 9. a clamping frame; 10. a motor;

11. a second clamping component; 111. an electric push rod B; 112. a sliding groove; 113. an arc-shaped splint; 114. a sponge cushion;

12. a liquid level meter; 13. a strip-shaped chute; 14. a slider; 15. an electric push rod A; 16. a spray head; 17. pressurizing the water pump; 18. a water inlet pipe; 19. a hose; 20. a box door; 21. a handle; 22. a strip-shaped air outlet; 23. an air heater.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

As shown in fig. 1-5, the utility model provides a technical solution: a cleaning and drying device for semiconductor processing comprises a liquid storage box 1 and a cleaning and drying box 2 fixedly connected to the top of the liquid storage box 1, wherein the liquid storage box 1 is communicated with the cleaning and drying box 2, the left side wall and the right side wall of the liquid storage box 1 are respectively provided with a transverse sliding chute 3, a filter screen frame 4 is arranged inside the liquid storage box 1, the left end and the right end of the filter screen frame 4 are respectively in sliding connection with the inner walls of the two transverse sliding chutes 3, the front end of the filter screen frame 4 extends to the front of the liquid storage box 1 and is in sliding contact with the front surface of the liquid storage box 1, a filter screen 5 is arranged inside the filter screen frame 4, a clamping assembly 6 is arranged on the right side of the filter screen frame 4, bearings 7 are fixedly embedded in the left side wall and the right side wall of the cleaning and drying box 2, rotary rods 8 are fixedly connected to inner rings of the two bearings 7, a clamping frame 9 is arranged inside the cleaning and drying box 2, one end, close to each other, is respectively fixedly connected to the left side surface and the right side surface of the clamping assembly 9, a motor 10 is fixedly connected to the right side surface of the cleaning and the motor 10, the output end of the motor 10 extends to the inner ring of the bearing 7 and is fixedly connected to the right side surface of the rotary rod 8, and is fixedly connected to the handle 21 of the clamping assembly;

shower nozzle 16 is installed to the inner bottom wall of liquid reserve tank 1, inner bottom wall fixed mounting of liquid reserve tank 1 has booster water pump 17, the fixed intercommunication of input of booster water pump 17 has inlet tube 18, the fixed intercommunication of output of booster water pump 17 has hose 19, the one end that booster water pump 17 was kept away from to hose 19 runs through the left surface of liquid reserve tank 1 and the upper surface of slider 14 in proper order and is linked together with shower nozzle 16, it has chamber door 20 to wash the front of stoving case 2 through a set of hinge articulated, fixed the inlaying has air heater 23 on chamber door 20, wash the back of stoving case 2 and seted up the bar exhaust vent 22 corresponding with air heater 23 position.

The first clamping assembly 6 includes a clamping hole 601 and a sliding tube 602, the clamping hole 601 is disposed on the right side of the screen frame 4, the sliding tube 602 is fixedly embedded on the right side of the liquid storage tank 1, the inner wall of the sliding tube 602 is slidably connected with a limiting plate 603, a clamping column 604 is fixedly embedded inside the limiting plate 603, the left end of the clamping column 604 penetrates through the left side of the sliding tube 602 and is slidably connected with the left side of the sliding tube 602, the left end of the clamping column 604 is clamped with the inner wall of the clamping hole 601, the right end of the clamping column 604 penetrates through the right side of the sliding tube 602 and is slidably connected with the right side of the sliding tube 602, the right end of the clamping column 604 is fixedly connected with a pull ring, the right side of the limiting plate 603 is fixedly connected with a spring 605, and the right end of the spring 605 is fixedly connected with the right side of the sliding tube 602. In this scheme, through the cooperation setting between the above structure, can be more convenient when dismantling and installing filter screen 5, improve the result of use of this equipment.

Foretell, no. two joint Assembly 11 includes two electric putter B111 and two sliding tray 112, two electric putter B111 are fixed connection in the left and right sides wall of centre gripping frame 9 respectively, the interior roof of centre gripping frame 9 and the interior diapire of centre gripping frame 9 are seted up respectively to two sliding tray 112, the equal fixedly connected with arc splint 113 of output of two electric putter B111, the upper and lower both ends of every arc splint 113 respectively with the inner wall sliding connection of two sliding tray 112, the equal fixedly connected with foam-rubber cushion 114 of a side that two arc splint 113 are close to each other. Through this scheme, when wasing semiconductor material, at first pack granular semiconductor material into the pocket and tie up, then open chamber door 20 and place the pocket that is equipped with semiconductor material in the inside of centre gripping frame 9, start two electric putter B111, can drive two arc splint 113 and move in opposite directions, treat that abluent semiconductor material carries out the centre gripping fixed.

Foretell, the upper surface of washing stoving case 2 has seted up bar spout 13, and the inner wall sliding connection of bar spout 13 has slider 14, and shower nozzle 16 fixed mounting is in slider 14's bottom surface, washs stoving case 2's inside wall fixedly connected with electric putter A15, and electric putter A15's output and slider 14's right flank fixed connection. When the electric push rod a15 is extended or shortened, the position of the ejection head 16 can be changed to further improve the cleaning effect on the semiconductor material.

In the above, the liquid level meter 12 is fixedly mounted on the front surface of the liquid storage tank 1, and the liquid level meter 12 is communicated with the inside of the liquid storage tank 1. Through this scheme, can be more audio-visual the capacity of observing the inside washing liquid of liquid reserve tank 1, convenient in time add the washing liquid.

Referring to fig. 5 again, the air heater 23, the electric push rod a15, the electric push rod B111, the motor 10 and the booster pump 17 are all electrically connected to an external power source through a controller, and the controller is used to control the working states of the air heater 23, the electric push rod a15, the electric push rod B111, the motor 10 and the booster pump 17 according to the functional requirements.

When semiconductor materials are cleaned, firstly, granular semiconductor materials are loaded into a net bag and tightly tied, then the box door 20 is opened, the net bag with the semiconductor materials is placed inside the clamping frame 9, the two electric push rods B111 are started, the two arc-shaped clamping plates 113 can be driven to move oppositely, the semiconductor materials to be cleaned can be clamped and fixed, then the booster water pump 17 is started, the booster water pump 17 can pressurize cleaning liquid inside the liquid storage box 1 and spray the cleaning liquid to the semiconductor materials through the spray head 16, the semiconductor materials are cleaned, meanwhile, the motor 10 is started, the motor 10 can drive the two rotating rods 8 and the clamping frame 9 to rotate so as to drive the semiconductor materials to rotate, the electric push rods A15 are started to drive the spray head 16 to move left and right, the semiconductor materials can be cleaned in an all-directional mode, and the hot air fan 23 is started to dry the semiconductor materials after cleaning. In the process, the cleaning liquid after cleaning is filtered through the filter screen 5 and flows into the internal recycling of the liquid storage tank 1, when the filter screen 5 needs to be disassembled and cleaned, firstly, the pull ring is pulled outwards, the pull ring can drive the clamping column 604 to move outwards, so that the left end of the clamping column 604 can be separated from the inner wall of the clamping hole 601, then, the filter screen frame 4 is pulled outwards, the filter screen 5 can be disassembled to be cleaned, when the filter screen 5 is installed, the filter screen frame 4 is pushed to the inside of the transverse sliding groove 3, under the elastic action of the spring 605, the left end of the clamping column 604 can be clamped with the inner wall of the clamping hole 601 again, the installation of the filter screen 5 can be completed, the filter screen 5 can be disassembled and installed more conveniently, and the filtering effect of the device can be ensured.

It should be noted that, in this document, the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention; the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance, and furthermore, unless otherwise explicitly stated or limited, the terms "fixedly," "mounted," "connected," and "connected" are to be construed broadly, e.g., "mounted" may be fixedly connected, or detachably connected, or integrally connected; "connected" may be mechanically or electrically connected; "connected" may be directly connected or indirectly connected through an intermediate member, or may be internal or external to two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a semiconductor processing is with wasing drying equipment, includes liquid reserve tank (1) and fixed connection in washing stoving case (2) at liquid reserve tank (1) top, its characterized in that: the cleaning and drying device is characterized in that the liquid storage box (1) is communicated with the cleaning and drying box (2), transverse sliding grooves (3) are formed in the left side wall and the right side wall of the liquid storage box (1), a filter screen frame (4) is arranged in the liquid storage box (1), the left end and the right end of the filter screen frame (4) are respectively in sliding connection with the inner walls of the two transverse sliding grooves (3), the front end of the filter screen frame (4) extends to the front of the liquid storage box (1) and is in sliding contact with the front surface of the liquid storage box (1), a filter screen (5) is arranged in the filter screen frame (4), a clamping assembly (6) is arranged on the right side of the filter screen frame (4), bearings (7) are fixedly embedded in the left side wall and the right side wall of the cleaning and drying box (2), rotating rods (8) are fixedly connected to the inner rings of the two bearings (7), a clamping frame (9) is arranged in the cleaning and drying box (2), one end, close to each other, of the two rotating rods (8) is respectively fixedly connected with the left side surface of the clamping assembly (9), and an output end of a motor (10) extends to the clamping assembly (11);

shower nozzle (16) are installed to the inner bottom wall of liquid reserve tank (1), the inner bottom wall fixed mounting of liquid reserve tank (1) has booster pump (17), the fixed intercommunication of input of booster pump (17) has inlet tube (18), the fixed intercommunication of output of booster pump (17) has hose (19), the one end that booster pump (17) was kept away from in hose (19) runs through the left surface of liquid reserve tank (1) and the upper surface of slider (14) in proper order and is linked together with shower nozzle (16), the front of wasing stoving case (2) articulates through a set of hinge has chamber door (20), fixed the inlaying has air heater (23) on chamber door (20), the back of wasing stoving case (2) is seted up and is put corresponding bar exhaust vent (22) with air heater (23) position.

2. The cleaning and drying apparatus for semiconductor processing according to claim 1, wherein: a joint subassembly (6) is including card hole (601) and slide tube (602), the right flank of screen frame (4) is seted up in card hole (601), slide tube (602) fixed the inlaying in the right flank of liquid reserve tank (1), the inner wall sliding connection of slide tube (602) has limiting plate (603), the fixed inlaying in inside of limiting plate (603) has calorie post (604), the left end of calorie post (604) run through the left flank of slide tube (602) and with the left flank sliding connection of slide tube (602), the left end of calorie post (604) and the inner wall looks joint of card hole (601), the right-hand member of calorie post (604) run through the right flank of slide tube (602) and with the right flank sliding connection of slide tube (602), the right-hand member fixedly connected with of calorie post (604), the right-hand member fixedly connected with spring (605) of limiting plate (603), the right-hand member fixed connection in the right side wall of slide tube (602) of spring (605).

3. The cleaning and drying apparatus for semiconductor processing according to claim 1, wherein: no. two joint Assembly (11) include two electric putter B (111) and two sliding tray (112), two electric putter B (111) is fixed connection respectively in the left and right sides wall of centre gripping frame (9), two sliding tray (112) are seted up respectively in the interior roof of centre gripping frame (9) and the interior diapire of centre gripping frame (9), two the equal fixedly connected with arc splint (113) of output of electric putter B (111), every the upper and lower both ends of arc splint (113) respectively with the inner wall sliding connection of two sliding tray (112), two the equal fixedly connected with foam-rubber cushion (114) in a side that arc splint (113) are close to each other.

4. The cleaning and drying apparatus for semiconductor processing according to claim 1, wherein: the right side surface of the liquid storage tank (1) is fixedly connected with a handle (21).

5. The cleaning and drying apparatus for semiconductor processing according to claim 1, wherein: wash the upper surface of stoving case (2) and seted up bar spout (13), the inner wall sliding connection of bar spout (13) has slider (14), shower nozzle (16) fixed mounting is in the bottom surface of slider (14), the inside wall fixedly connected with electric putter A (15) of washing stoving case (2), the output of electric putter A (15) and the right flank fixed connection of slider (14).

6. The cleaning and drying apparatus for semiconductor processing according to claim 1, wherein: the liquid level meter is characterized in that a liquid level meter (12) is fixedly mounted on the front face of the liquid storage box (1), and the liquid level meter (12) is communicated with the inside of the liquid storage box (1).