CN218764573U

CN218764573U - Bearing heat insulation type furnace door mechanism and process furnace

Info

Publication number: CN218764573U
Application number: CN202222649366.4U
Authority: CN
Inventors: 梁浩; 刘思源; 吴云
Original assignee: Hunan Red Sun Photoelectricity Science and Technology Co Ltd
Current assignee: Hunan Red Sun Photoelectricity Science and Technology Co Ltd
Priority date: 2022-09-30
Filing date: 2022-09-30
Publication date: 2023-03-28
Anticipated expiration: 2032-09-30

Abstract

The utility model discloses a can bear thermal-insulated type furnace door mechanism and technology stove, furnace door mechanism includes the furnace gate, quartz boat and thermal-insulated package, thermal-insulated package one end can be dismantled with the furnace gate and be connected, the other end can be dismantled with the quartz boat and be connected, thermal-insulated package is close to quartz boat one end and is equipped with a plurality of support columns, be fixed with the backup pad on a plurality of support columns simultaneously, the one end that the quartz boat is close to thermal-insulated package is equipped with the reference column, be equipped with first locating hole in the backup pad, be equipped with the reinforcing plate between backup pad and the thermal-insulated package, be equipped with the second locating hole on the reinforcing plate, the reference column is connected with first locating hole and second locating hole simultaneously. The process furnace comprises a vertical reaction chamber and the bearing heat insulation type furnace door mechanism. The utility model discloses to insulate against heat package and quartz boat supporting part integration, cut apart the furnace gate body that will insulate against heat package and below simultaneously and adopt and to dismantle and be connected fixedly, so both improved the stability that the furnace gate bore, rocking when reducing the quartz boat delivery, the later stage maintenance of being convenient for again overhauls and maintains.

Description

Bearing heat insulation type furnace door mechanism and process furnace

Technical Field

The utility model relates to a technology stove field especially relates to a can bear thermal-insulated type furnace door mechanism and technology stove.

Background

The quartz boat (or graphite boat) of the diffusion furnace in the prior art is supported by a furnace door mechanism, and because the boat taking and placing times are frequent, and the quartz boat has heavy weight and is not easy to position, the quartz boat has high requirements on how to keep good positioning and bearing capacity of the furnace door for a long time under heavy load. When the furnace door mechanism of the furnace mouth is designed to support, a supporting rod, a heat insulation plate, a guiding and sealing device and the like are generally installed. However, the structure has certain limitation on the stable effect of taking and placing the boat, and the quartz boat has long stroke in the furnace tube, so that the support rod and the guide device are required to be arranged for a long time, and the bearing stability of the furnace door can be reduced. In addition, there are also higher requirements on the furnace door load-bearing means and the overall height dimensions of the plant, which results in higher plant production costs and a larger floor space.

SUMMERY OF THE UTILITY MODEL

The to-be-solved technical problem of the utility model is to overcome prior art's not enough, provide one kind and improve the furnace gate and bear thermal-insulated type furnace door mechanism and technology stove with bearing stability and heat-proof quality.

In order to solve the technical problem, the utility model discloses a following technical scheme:

the utility model provides a can bear thermal-insulated type furnace door mechanism, includes furnace gate body, quartz boat and thermal-insulated package, thermal-insulated package one end can be dismantled with the furnace gate body and be connected, and the other end can be dismantled with the quartz boat and be connected, thermal-insulated package is close to quartz boat one end and is equipped with a plurality of support columns, is fixed with the backup pad on a plurality of support columns simultaneously, the quartz boat is close to the one end that thermal-insulated package and is equipped with the reference column, be equipped with first locating hole in the backup pad, be equipped with the reinforcing plate between backup pad and the thermal-insulated package, be equipped with the second locating hole on the reinforcing plate, the reference column is connected with first locating hole and second locating hole simultaneously.

As a further improvement of the technical scheme, a fixing plate is arranged on the quartz boat, the positioning column is fixed on the fixing plate, and the supporting plate is located between the fixing plate and the reinforcing plate.

As a further improvement of the technical scheme, the heat insulation bag comprises a quartz cylinder and a heat insulation filling layer arranged in the quartz cylinder.

As a further improvement of the technical scheme, one end of the heat insulation bag, which is connected with the furnace door body, is provided with a first connecting flange, the first connecting flange is connected with the heat insulation bag through a plurality of reinforcing ribs, the inner side of the furnace door body is provided with a second connecting flange, the second connecting flange is connected with the furnace door body through a plurality of reinforcing ribs, and the first connecting flange is connected with the second connecting flange through a fastener.

As a further improvement of the technical scheme, the fastening piece is a fastening screw, and the fastening screw is provided with a Teflon coating.

As a further improvement of the technical scheme, the reinforcing plate is fixed on the supporting column.

A process furnace comprises a reaction cavity, a transmission module and the bearable heat-insulation furnace door mechanism, wherein the transmission module is used for sending a furnace door body, a quartz boat and a heat-insulation bag into or out of the vertical reaction cavity.

As a further improvement of the above technical solution:

the furnace door body is fixedly connected with a moving block of the linear electric cylinder through a connecting seat.

Compared with the prior art, the utility model has the advantages of:

the utility model discloses a can bear thermal-insulated type furnace door mechanism, to insulate against heat package and quartz boat supporting component integration, increase the support of reference column simultaneously, become two point supports by the single-point support, every reference column has two stress points, has improved the stability that the furnace gate bore, and the relative prior art of reference column has shortened, reduces equipment manufacturing cost and practiced thrift the occupation of land space to furnace gate bearing mechanism and equipment overall height dimension's requirement. In the structure, the quartz boat is adopted to act on the whole heat insulation package under the action of the gravity of the quartz boat so as to play roles in heat insulation, support and positioning; because furnace gate body, quartz boat, heat-insulating package are for dismantling the connection, when heat-insulating package damages or the location has the deviation to change, separate furnace gate body and heat-insulating package to realize split type can dismantle.

Drawings

Fig. 1 is a schematic structural view of a bearable heat insulation type furnace door mechanism according to embodiment 1 of the present invention.

Fig. 2 is a schematic structural view of the insulation pack in embodiment 1 of the present invention.

Fig. 3 is a schematic perspective view of the conveying module, the furnace door, the heat insulation bag, and the quartz boat in embodiment 2 of the present invention.

Fig. 4 is a schematic front view of the conveying module, the furnace door, the heat insulation bag, and the quartz boat in embodiment 2 of the present invention.

The reference numerals in the figures denote:

1. a furnace door body; 11. a second connecting flange; 2. a quartz boat; 21. a positioning column; 22. a fixing plate; 3. a heat insulation pack; 31. a support pillar; 32. a support plate; 33. a square hole; 34. a first positioning hole; 35. a reinforcing plate; 36. a second positioning hole; 37. a first connecting flange; 4. a transmission module; 5. reinforcing ribs; 6. fastening screws; 7. a connecting seat; 8. a vertical reaction cavity.

Detailed Description

The invention is described in further detail below with reference to the drawings and specific examples.

Example 1

As shown in fig. 1 to 4, the bearable heat insulation type furnace door mechanism of the present embodiment includes a furnace door body 1, a quartz boat 2 and a heat insulation pack 3, wherein one end of the heat insulation pack 3 is detachably connected to the furnace door body 1, and the other end is detachably and quickly connected to the quartz boat 2. Wherein, thermal-insulated package 3 is close to 2 one end of quartz boat and is equipped with four support columns 31, is fixed with backup pad 32 on four support columns 31 simultaneously, and quartz boat 2 is close to the one end that thermal-insulated package 3 and is equipped with reference column 21, is equipped with first locating hole 34 in the backup pad 32, is equipped with reinforcing plate 35 between backup pad 32 and the thermal-insulated package 3, is equipped with second locating hole 36 on the reinforcing plate 35, and in first locating hole 34 and second locating hole 36 were worn to locate simultaneously by reference column 21, the three formed the connection.

The furnace door mechanism is vertically installed, a furnace door body 1 is arranged below, a heat insulation bag 3 is arranged in the middle, and a quartz boat 2 is arranged above. Before quartz boat 2 installs, earlier furnace gate body 1 with thermal-insulated 3 fixed connection that wrap, thermal-insulated 3 supports on furnace gate body 1, when quartz boat 2 installs, reference column 21 on the quartz boat 2 passes first locating hole 34 and second locating hole 36 in proper order, quartz boat 2's tip leans on backup pad 32 simultaneously, quartz boat 2 self action of gravity is on thermal-insulated package 3, reference column 21 passes and is connected with first locating hole 34 and second locating hole 36, and then realize that quartz boat 2 supports and connects on thermal-insulated package 3.

During operation, connect furnace gate body 1, thermal-insulated package 3 and quartz boat 2 in proper order, later, send into vertical reaction cavity 8 through a conveying module 4 with the furnace gate mechanism in, carry out the technology, after the technology, conveying module 4 holds off the furnace gate mechanism from vertical reaction cavity 8, and the manipulator gets to change the boat 2.

This can bear thermal-insulated type furnace door mechanism, to insulate against heat package 3 and the integration of 2 bearing parts of quartz boat, increase reference column 21's support simultaneously, become two point supports by single-point support, every reference column 21 has two stress points, has improved the stability that the furnace gate bore, and reference column 21 has shortened compared prior art, reduces the requirement of furnace door mechanism and equipment overall height and dimension, has reduced equipment manufacturing cost and has practiced thrift the occupation of land space. The quartz boat 2 is adopted in the structure, the self gravity acts on the heat insulation package 3 integrally, and the heat insulation and supporting and positioning effects are achieved. Because furnace gate body 1, quartz boat 2, thermal-insulated package 3 are for dismantling the connection, when thermal-insulated package 3 damages or the location has the deviation to change, separate furnace gate body 1 and thermal-insulated package 3 to realize split type can dismantle.

In this embodiment, two positioning columns 21 are preferred, and four supporting columns 31 are preferred. The reinforcing plates 35 are preferably two. In addition to the present embodiment, the number of positioning columns 21, supporting columns 31, and reinforcing plates 35 may be increased or decreased.

In this embodiment, the quartz boat 2 is provided with a fixing plate 22, the positioning column 21 is fixed on the fixing plate 22, and the supporting plate 32 is located between the fixing plate 22 and the reinforcing plate 35. Through fixed plate 22 to the reference column 21 install, fixed plate 22, backup pad 32, reinforcing plate 35 form three point support to reference column 21, and reference column 21 not only can fix a position quartz boat 2 still supplementary effect of supporting quartz boat 2 that plays. Be equipped with the square hole 33 on the backup pad 32, the area of contact of quartz boat 2 end plate and backup pad 32 is reduced in the setting of square hole 33, reduces sheltering from of quartz boat 2 end plate, improves the heating effect.

In this embodiment, the thermal insulation pack 3 includes a quartz cylinder and a thermal insulation filling layer provided in the quartz cylinder. The heat insulation bag 3 is used for carrying out heat insulation blocking on the furnace door body 1 and reducing the influence of heat in the vertical reaction cavity 8 on the furnace door body 1. The heat insulation bag 3 is made of quartz and has enough bearing capacity.

In this embodiment, the one end that thermal-insulated package 3 and furnace gate body 1 are connected is equipped with flange one 37, and flange one 37 is connected with thermal-insulated package 3 through a plurality of strengthening ribs 5, and furnace gate body 1 inboard is equipped with flange two 11, and flange two 11 is connected with furnace gate body 1 through a plurality of strengthening ribs 5, and flange one 37 is connected through the fastener with flange two 11. The reinforcing ribs 5 are all provided with 6. The fastening piece is preferably a fastening screw 6, the fastening screw 6 is provided with a Teflon layer, the outer surface of the fastening screw 6 is coated with Teflon, corrosion is prevented, and the phenomenon that the metal chemical property of the fastening screw 6 is unstable due to high temperature and the vacuum environment in the vertical reaction cavity 8 is polluted is avoided.

In this embodiment, the reinforcing plate 35 is welded to the support column 31, and the support column 31 is welded to the heat insulating bag 3. The fixed plate 22 is welded with the quartz boat 2, and the positioning column 21 is welded with the fixed plate 22.

Example 2

As shown in fig. 3 and 4, the process furnace of the present embodiment includes a vertical reaction chamber 8 and a transfer module 4, and further includes the heat insulation type door mechanism of the above embodiment 1, wherein the transfer module 4 is used for sending the furnace door body 1, the quartz boat 2 and the heat insulation pack 3 into or out of the vertical reaction chamber 8.

In this embodiment, the transmission module 4 is a linear electric cylinder, and the furnace door body 1 is fixedly connected with a moving block of the linear electric cylinder through a connecting seat 7. The linear electric cylinder drives the furnace door body 1 to open and close with a furnace mouth flange of the vertical reaction cavity 8.

Although the present invention has been described with reference to the preferred embodiments, it is not intended to limit the present invention. The technical solution of the present invention can be used by anyone skilled in the art to make many possible variations and modifications, or to modify equivalent embodiments, without departing from the scope of the present invention, using the technical content disclosed above. Therefore, any simple modification, equivalent change and modification made to the above embodiments by the technical entity of the present invention should fall within the protection scope of the technical solution of the present invention.

Claims

1. The utility model provides a can bear thermal-insulated type furnace door mechanism which characterized in that: including furnace gate body (1), quartz boat (2) and thermal-insulated package (3), thermal-insulated package (3) one end can be dismantled with furnace gate body (1) and be connected, and the other end can be dismantled with quartz boat (2) and be connected, thermal-insulated package (3) are close to quartz boat (2) one end and are equipped with a plurality of support columns (31), are fixed with backup pad (32) on a plurality of support columns (31) simultaneously, quartz boat (2) are close to the one end of thermal-insulated package (3) and are equipped with reference column (21), be equipped with first locating hole (34) on backup pad (32), be equipped with reinforcing plate (35) between backup pad (32) and thermal-insulated package (3), be equipped with second locating hole (36) on reinforcing plate (35), reference column (21) are connected with first locating hole (34) and second locating hole (36) simultaneously.

2. The loadable insulating furnace door mechanism of claim 1, wherein: be equipped with fixed plate (22) on quartz boat (2), reference column (21) are fixed on fixed plate (22), backup pad (32) are located between fixed plate (22) and reinforcing plate (35).

3. The loadable insulating furnace door mechanism of claim 1, wherein: the heat insulation bag (3) comprises a quartz cylinder and a heat insulation filling layer arranged in the quartz cylinder.

4. A load bearable heat insulated type furnace door mechanism according to any one of claims 1 to 3, wherein: one end that heat-insulating package (3) and furnace door body (1) are connected is equipped with flange one (37), flange one (37) are connected with heat-insulating package (3) through a plurality of strengthening ribs (5), furnace door body (1) inboard is equipped with flange two (11), flange two (11) are connected with furnace door body (1) through a plurality of strengthening ribs (5), flange one (37) are connected through the fastener with flange two (11).

5. The loadable insulated furnace door mechanism of claim 4, wherein: the fastening piece is a fastening screw (6), and the fastening screw (6) is provided with a Teflon coating.

6. A load bearing and insulated type door mechanism according to any one of claims 1 to 3, wherein: the reinforcing plate (35) is fixed on the supporting column (31).

7. A process furnace, includes vertical reaction chamber (8) and conveying module (4), its characterized in that: the furnace door mechanism capable of bearing heat insulation of any one of claims 1 to 6 is further included, and the conveying module (4) is used for conveying the furnace door body (1), the quartz boat (2) and the heat insulation bag (3) into or out of the vertical reaction cavity (8).

8. The process furnace of claim 7, wherein: the conveying module (4) is a linear electric cylinder, and the furnace door body (1) is fixedly connected with a moving block of the linear electric cylinder through a connecting seat.