CN218756149U - Transfer system suitable for built-in feeder of hard shaft single crystal furnace - Google Patents

Abstract

The utility model discloses a transfer system suitable for hard axle single crystal growing furnace embeds charging means, transfer system includes: the built-in feeder placing vehicle is used for overturning and transferring the built-in feeder and comprises a rack and an overturning mechanism, the overturning mechanism is rotationally connected to one side of the top of the rack, and a floating buffer piece is arranged on a bottom support; the transfer tool is used for transferring the built-in feeder into or out of the auxiliary furnace chamber of the single crystal furnace and comprises a main body support, a bearing mechanism, an attaching and clamping mechanism and a transmission mechanism, wherein the bearing mechanism is matched with the main body support in a sliding manner along the vertical direction; one end of each transmission mechanism is connected with the supporting plate, and the other end of each transmission mechanism is connected with the clamping mechanism; and the transfer trolley is used for transporting the transfer tool.

Description

Transfer system suitable for built-in feeder of hard shaft single crystal furnace

Technical Field

The utility model belongs to the technical field of hard axle single crystal growing furnace and specifically relates to a transfer system suitable for hard axle single crystal growing furnace embeds charging means.

Background

In the prior art, as shown in a patent of reference to a cart (publication number CN 217378093U) suitable for a built-in feeder of a hard-axis single crystal furnace, a transfer tool of the built-in feeder is separated from and combined with a cart body through a plug structure, and a turnover mechanism of the cart body can drive the transfer tool carrying the built-in feeder to turn over, that is, the cart can realize the functions of turning over and charging the built-in feeder and transferring the built-in feeder to an auxiliary furnace chamber. In order to realize turnover and transfer stability, the manual transfer device is relatively large in size and heavy in weight, so that the manual transfer process is difficult, and meanwhile, the built-in feeder and the transfer tool are relatively fixed due to the fact that the built-in feeder needs to be borne by the transfer tool in the charging process. However, the cooling and unloading of the material in the built-in feeder needs a long time, which needs to wait for the built-in feeder to return to the transfer tool and cart before the material can be loaded again, and thus, the single feeding time is greatly prolonged.

SUMMERY OF THE UTILITY MODEL

The utility model discloses aim at solving one of the technical problem that exists among the prior art at least. Therefore, the utility model provides a transfer system suitable for a hard shaft single crystal furnace built-in feeder.

According to the utility model discloses a transfer system suitable for hard axle single crystal growing furnace embeds charging means, transfer system includes:

the built-in feeder placing vehicle is used for overturning and transferring the built-in feeder and comprises a rack and an overturning mechanism, the overturning mechanism is rotatably connected to one side of the top of the rack and comprises a support frame, clamping mechanisms, a bottom support and a floating buffer piece, two sides of the support frame are rotatably connected with the rack, a plurality of clamping mechanisms are fixed on one end face of the support frame at intervals from top to bottom, the bottom of the support frame is vertically fixed with the bottom support, the bottom support is provided with the floating buffer piece, and the floating buffer piece floats when the built-in feeder is placed on the bottom support;

the transfer tool is used for transferring a built-in feeder into or out of a secondary furnace chamber of a single crystal furnace, and comprises a main body support, a bearing mechanism, an attaching and clamping mechanism and a transmission mechanism, wherein the bearing mechanism is in sliding fit with the main body support along the vertical direction; the left end and the right end of the main body support are symmetrically provided with a transmission mechanism, one end of each of the two transmission mechanisms is connected with the supporting plate, the other end of each of the two transmission mechanisms is connected with the holding and clamping mechanism, the supporting plate can move between a first position and a second position along the vertical direction, and when the supporting plate moves downwards to the second position, the first holding clamp and the second holding clamp move towards directions close to each other to be in a holding and clamping state under the driving of the transmission mechanisms;

and the transfer trolley is used for transporting the transfer tool.

In some embodiments of the utility model, the front end of layer board has the through hole one that the back shaft that is suitable for built-in charging means passes through, it is the open cylindric in upper end to articulate female seat, the inside of articulating female seat is injectd to form and is held the inner chamber of connector, articulate the bottom center of female seat seted up with through hole one corresponding through hole two.

The utility model discloses an in some embodiments, transfer system still include with articulate the joint frock that female seat cooperation was used, it includes connecting plate, pipe and connector to connect the frock, the lower surface center department vertical fixation of connecting plate the pipe, the lower part of pipe is cup jointed the connector, the connector has the spigot surface, the internal diameter of pipe with the external diameter of back shaft matches and suits, the top of back shaft is from down and stretching into in the pipe fixedly.

In some embodiments of the utility model, the bolster that floats includes fixed plate, floating plate, compression spring one and step screw, the fixed plate is fixed in the collet below, the fixed plate through a plurality of circumference set up the step screw with the floating plate is connected, the floating plate is located the top of fixed plate, and with fixed plate parallel arrangement, every the outside cover of step screw is equipped with compression spring one, the upper end of compression spring one with the floating plate lower surface is connected, its lower extreme with the collet is connected.

In some embodiments of the utility model, the built-in charging means placing vehicle further comprises a quartz cone holding mechanism, the quartz cone holding mechanism is fixed in the lower part of the supporting frame, the quartz cone holding mechanism has a tangent plane matched with the side wall of the built-in charging means, the quartz cone holding mechanism passes through the tangent plane with the bottom joint of the built-in charging means.

In some embodiments of the utility model, the fixture includes stationary half ring, movable half ring and base, the stationary half ring is fixed on the base, the base vertical fixation is in on the support frame, the one end of stationary half ring is articulated through the one end of rotating the connecting piece with the movable half ring, the movable half ring can be opened and close relative stationary half ring, when the relative stationary half ring of movable half ring is closed, the movable half ring with the stationary half ring is injectd and is formed the centre gripping the ring of built-in charging means, the one end middle part vertical fixation that the rotating connection spare was kept away from to the stationary half ring has the connecting axle, rotate on the connecting axle and connect the locking piece, the movable half ring is kept away from the one end of rotating the connecting piece seted up with the connecting axle matches the suitable recess.

In some embodiments of the present invention, two sleeves are symmetrically installed on the main body bracket, and a top corresponding to the two sleeves is vertically and upwardly installed on the transfer cart;

still be provided with elastic reset mechanism on the transfer tool, elastic reset mechanism includes bottom plate, compression spring two and guide bar, the bottom plate is fixed in through a plurality of adjusting bolt levels on the main part support upper end horizontal bar, it is a plurality of the guide bar from down and pass horizontal bar, bottom plate and layer board in proper order, it is a plurality of the bottom of guide bar is fixed on the horizontal bar, it is a plurality of compression spring two, a plurality of are established to the cover on the guide bar the top of guide bar is passed the layer board to with layer board fixed connection, it is a plurality of the upper end of compression spring two with the lower surface of layer board is connected, its lower extreme with the bottom plate is connected.

The utility model discloses an in some embodiments, it is in to shift the frock the fixed slide rail one of left and right ends symmetry on main part support upper portion, two the vertical setting of slide rail one, the perpendicular symmetry in both ends is fixed with and two about the layer board the corresponding slider one of slide rail, the layer board passes through slider one with the cooperation of sliding of slide rail one, the fixed horizontal slide rail of lower part level of main part support, first embrace press from both sides with the second is embraced and is pressed from both sides and install a horizontal slider, two respectively horizontal slider with the cooperation of sliding of horizontal slide rail.

The utility model discloses an in some embodiments, drive mechanism includes vertical connecting rod, slope connecting rod, connecting block one, connecting block two and connecting block three, two be fixed with connecting block one, two on the slider one respectively the one end symmetry that horizontal slider is close to each other is fixed with connecting block three, a slide rail two, two are fixed to the both ends symmetry about the main part support lower part the vertical setting of slide rail two, slide rail two is located slide rail one with between the horizontal slide rail, two slide rail two go up respectively and cooperate slider two, two the symmetry is fixed on the slider two connecting block two, the upper end of vertical connecting rod with one of connecting block rotates and connects, the lower extreme of vertical connecting rod with the one end of connecting block two rotates and connects, the upper end of slope connecting rod with connecting block two rotates and connects, the lower extreme of slope connecting rod with connecting block three rotates and connects.

The utility model discloses an in some embodiments, vertical connecting rod includes connecting rod one and connecting rod two, the one end of connecting rod one is equipped with the screw thread, the one end of connecting rod two is seted up threaded hole, the one end of connecting rod one with the screw hole threaded connection of connecting rod two to through fastening nut screw-thread fastening, so that vertical connecting rod's whole adjustable length.

Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.

Drawings

Fig. 1 is a schematic view of a transfer system for a rigid axis single crystal furnace built-in feeder according to an embodiment of the present invention when a transfer cart connects a transfer tool to a take-off arm;

fig. 2 is a schematic view of a transfer system for a built-in charger for a hard axis single crystal furnace according to an embodiment of the present invention when a built-in charger placing cart connects the built-in charger to a transfer tool;

fig. 3 is a schematic structural view of the transfer tool of the present invention;

fig. 4 is a top view of the transfer tool of the present invention;

FIG. 5 is a schematic view of the structure of the middle hanging female seat of the present invention;

fig. 6 is a schematic structural diagram of the transmission mechanism of the present invention;

fig. 7 is a schematic structural view of the elastic reset mechanism of the present invention;

fig. 8 is a schematic structural view of the vertical connecting rod of the present invention;

fig. 9 is a perspective view of a built-in feeder connected to a hard axis seed shaft after hiding a portion of the structure of the transfer tool according to one embodiment of the present invention;

fig. 10 is a partial cross-sectional view of a joint tooling connecting an inline feeder and a hook assembly according to one embodiment of the present disclosure;

fig. 11 is a schematic structural view of the internal feeder placing cart of the present invention when the clamping mechanism is closed;

FIG. 12 is a schematic structural view of the internal feeder placing cart of the present invention when the clamping mechanism is opened;

FIG. 13 is an enlarged view of the floating bumper and the quartz cone retaining mechanism of the present invention;

FIG. 14 is a cross-sectional view of FIG. 13;

fig. 15 is a schematic structural view of the middle clasping mechanism of the present invention;

fig. 16 is a schematic structural view of the transfer cart according to the present invention.

Reference numerals:

a transfer system 1000;

a built-in feeder placement cart 100;

the device comprises a frame 10, a bottom frame 11, an upper bracket 12, a bearing seat 13, a speed reducer 14, an angle encoder 15, a hand wheel 16, a handrail 17, a caster 18, a buckle 121, a laser positioner 111 and a ground brake 112;

the turnover mechanism 20, the support frame 21, the floating buffer 22, the bottom support 23, the fixing plate 221, the floating plate 222, the buffer cushion block 223, the first compression spring 224, the step screw 225, the protection plate 226 and the lightening hole 2261;

a quartz cone holding mechanism 30, a tangent plane 31;

a clamping mechanism 40; the fixed half ring 41, the movable half ring 42, the base 43, the rotating connector 44, the fastening assembly 45, the protective gasket 46, the connecting shaft 411, the locking member 412, the groove 421, the fastening male head 451, the fastening female head 452 and the channel 461;

transferring the tool 200;

the body support 210, the first support 211, the second support 212, the concentric adjustment structure 213, the clamping shaft 214, the sleeve 215, the first slide rail 216, the first slide block 2161, the second slide rail 217, the second slide block 2171, the horizontal slide rail 218, the horizontal slide block 2181, the semi-annular plate 219, and the horizontal rod 2111.

The supporting mechanism 220, the supporting plate 2201, the hanging female seat 2202, the inner cavity 2203, the first through hole 2204 and the second through hole 2205;

a clamp mechanism 230, a first clamp 231, a second clamp 232;

the device comprises a transmission mechanism 240, a vertical connecting rod 241, an inclined connecting rod 242, a first connecting block 243, a second connecting block 244, a third connecting block 245, a first connecting rod 2411, a second connecting rod 2412, a threaded hole 2413 and a fastening nut 2414;

the device comprises an elastic reset mechanism 250, a bottom plate 251, a second compression spring 252, a guide rod 253, an adjusting bolt 254, an anti-abrasion cushion block 255 and a step 256;

a transfer cart 300;

a body 310, a rectangular mounting frame 320, a tip 330;

a joint tool 400;

the connecting plate 410, a circular tube 420, a connector 430, a guide surface 431, a pin hole 421 and a pin shaft 422;

a feeder 500 is built in;

a material tube 510, a support shaft 520 and a quartz cone 530;

a U-joint assembly 600, a U-ring 610;

a hard shaft seed shaft 700, a rotating connection 710;

hook assembly 800, hook 810;

a crystal arm 900.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary and intended to be used for explaining the present invention, and should not be construed as limiting the present invention.

The following disclosure provides many different embodiments, or examples, for implementing different features of the invention. In order to simplify the disclosure of the present invention, the components and arrangements of specific examples are described below. Of course, they are merely examples and are not intended to limit the present invention. In addition, the present disclosure may repeat reference numerals and/or letters in the various examples. This repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, the present disclosure provides examples of various specific processes and materials, but one of ordinary skill in the art may recognize the applicability of other processes and/or the use of other materials.

A transfer system 1000 suitable for a built-in feeder of a hard axis single crystal furnace according to an embodiment of the present invention is described below with reference to fig. 1 to 16, the transfer system 1000 includes a built-in feeder placing cart 100, a transfer tooling 200, and a transfer cart 300, the built-in feeder placing cart 100 is used for turning and position transfer of the built-in feeder 500, the transfer tooling 200 is used for transferring the built-in feeder 500 into or out of a single crystal furnace sub-furnace chamber, and the transfer cart 300 is used for transportation of the transfer tooling 200. The transfer tool 200 is matched with a rotation and lifting mechanism (hereinafter referred to as a crystal taking arm 900) of the single crystal furnace for use, the crystal taking arm 900 is suitable for moving up and down and rotating the transfer tool 200 to transfer the built-in feeder 500 into the auxiliary furnace chamber, the built-in feeder 500 is connected with the hard shaft seed crystal shaft 700, the crystal taking arm 900 drives the transfer tool 200 to move into the auxiliary furnace chamber after feeding is completed, after the transfer tool 200 is connected with the built-in feeder 500, the built-in feeder 500 is separated from the hard shaft seed crystal shaft 700, and the crystal taking arm 900 drives the transfer tool 200 to exit from the auxiliary furnace chamber.

Referring to fig. 11 to 14, the internal feeder placing cart 100 includes a frame 10 and a turning mechanism 20, the turning mechanism 20 is rotatably connected to one side of the top of the frame 10, the turning mechanism 20 includes a support frame 21, clamping mechanisms 40, a bottom support 23 and a floating buffer 22, two sides of the support frame 21 are rotatably connected to the frame 10, a plurality of clamping mechanisms 40 are fixed to an end surface of the support frame 21 at intervals from top to bottom, the bottom of the support frame 21 is vertically fixed with the bottom support 23, the bottom support 23 is provided with the floating buffer 22, and the floating buffer 22 floats when the internal feeder 500 is placed on the bottom support 23 to buffer;

referring to fig. 3 and 4, the transfer tool 200 includes a main body support 210, a supporting mechanism 220, a clasping mechanism 230 and a transmission mechanism 240, wherein the supporting mechanism 220 is in sliding fit with the main body support 210 in the up-down direction, the supporting mechanism 220 includes a supporting plate 2201 and a hooking female seat 2202, the left end and the right end of the supporting plate 2201 are in sliding fit with the main body support 210 in the up-down direction, the hooking female seat 2202 is detachably fixed on the supporting plate 2201, the clasping mechanism 230 includes two first clasping clamps 231 and two second clasping clamps 232 which are symmetrically arranged, the first clasping clamps 231 and the second clasping clamps 232 are spaced apart in the horizontal direction, and the first clasping clamps 231 and the second clasping clamps 232 are in horizontal sliding fit with the main body support 210 respectively; the left end and the right end of the main body support 210 are symmetrically provided with a transmission mechanism 240, one end of each of the two transmission mechanisms 240 is connected with the supporting plate 2201, the other end of each of the two transmission mechanisms 240 is connected with the clamping mechanism 230, the supporting plate 2201 can move between a first position and a second position along the vertical direction, and the first position is the initial position of the supporting plate 2201 when the built-in feeder 500 is not placed, in other words, the first position is the highest point of the supporting plate 2201; the second position is the lowest position where the pallet 2201 moves downward after the built-in feeder 500 is placed, in other words, the second position is the lowest point of the pallet 2201. When the supporting plate 2201 moves downward to the second position, the first clasping clamp 231 and the second clasping clamp 232 move toward each other to be in the clasping state under the driving of the transmission mechanism 240. When the supporting plate 2201 is reset upwards to the first position, the first clasping clamp 231 and the second clasping clamp 232 move back to make the clasping mechanism 230 in an open initial state.

Referring to fig. 11 and 12, it can be understood that, when the built-in material feeder 500 is placed, the turnover mechanism 20 is turned to the vertical state, the clamping mechanism 40 is opened, the built-in material feeder 500 is placed into the clamping mechanism 40 of the turnover mechanism 20 from the top to the bottom, the built-in material feeder 500 is pressed against the floating buffer member 22, the floating buffer member 22 floats, and the clamping mechanism 40 is locked. Because tilting mechanism 20 adopts the stainless steel material, built-in charging means 500 is the quartz material, consequently is changed into the soft landing with the hard landing between built-in charging means 500 and the collet 23, and the impact to built-in charging means 500 that significantly reduces has reduced the broken risk of built-in charging means 500, prolongs the life that car 100 was placed to built-in charging means simultaneously.

When adding the silicon material toward built-in charging means 500, rotate tilting mechanism 20 earlier and make its slope to conveniently reinforced, because the setting of quartz awl hold mechanism 30, when built-in charging means 500 slopes, quartz awl hold mechanism 30 can hold up the bottom of built-in charging means 500 lateral wall, prevents that built-in charging means 500 bottom from removing, thereby guarantees the encapsulated situation between material pipe 510 and the quartz awl 530, prevents to leak the material.

Referring to fig. 3-8, the transfer tool 200 of the transfer system 1000 of the present invention will be described in detail.

In some embodiments of the present invention, referring to fig. 6, the front end of the supporting plate 2201 has a first through hole 2204 through which the supporting shaft 520 of the built-in feeder 500 passes, referring to fig. 5, the hanging female seat 2202 is cylindrical with an open upper end, an inner cavity 2203 for accommodating the connector 430 is defined inside the hanging female seat 2202, and a second through hole 2205 corresponding to the first through hole 2204 is provided in the center of the bottom of the hanging female seat 2202.

It can be understood that, during hooking, the wafer taking arm 900 clamps the transfer tool 200, the transfer tool 200 is moved to enable the supporting shaft 520 of the built-in feeder 500 to enter the first through hole 2204 and the second through hole 2205, the transfer tool 200 is moved upwards to enable the connecting head 430 at the top of the supporting shaft 520 to fall into the inner cavity 2203 of the hooking female seat 2202, the gravity of the built-in feeder 500 is pressed on the supporting plate 2201, the supporting plate 2201 moves downwards, the transmission mechanism 240 converts the descending motion of the supporting plate 2201 into the opposite motion of the first holding clamp 231 and the second holding clamp 232, so that the first holding clamp 231 and the second holding clamp 232 hold the built-in feeder 500 in a holding manner. The utility model discloses a fix connector 430 in articulating female seat 2202, only need a set of armful clamp mechanism 230 can realize the effect of holding tightly of built-in charging means 500, consequently shortened the length that shifts frock 200 greatly, the volume is reduced, simultaneously because connector 430 is fixed, built-in charging means 500 lateral wall is also fixed, consequently can avoid appearing the motion of similar simple pendulum, prevent that material pipe 510 from hitting object on every side at the transfer process, prolong built-in charging means 500's life.

Referring to fig. 3 and 6, two transmission mechanisms 240 are provided, the two transmission mechanisms 240 are symmetrically disposed at the left and right ends of the main body support 210, the upper end of the transmission mechanism 240 is connected to the supporting plate 2201, the lower end of the transmission mechanism 240 is connected to the clasping mechanism 230, when the internal feeder 500 is placed on the supporting plate 2201, the supporting plate 2201 descends, the supporting plate 2201 drives the first clasping clamp 231 and the second clasping clamp 232 to move towards each other through the transmission mechanism 240, so that the first clasping clamp 231 and the second clasping clamp 232 clasp the internal feeder 500, and the clasping mechanism 230 is in a clamping state.

In some embodiments of the present invention, referring to fig. 6, a first through hole 2204 is formed in the middle of the front end of the supporting plate 2201, the cross section of the first through hole 2204 is U-shaped, the first through hole 2204 penetrates through the upper and lower surfaces of the supporting plate 2201, the first through hole 2204 extends to the front end surface of the supporting plate 2201, two circular holes allowing the guide rod 253 to pass through are symmetrically formed in the rear end of the supporting plate 2201, and the rear sides of the left and right ends of the supporting plate 2201 are fixedly connected to a first slider 2161. The left and right sides of the support plate 2201 are connected with the transmission mechanism 240. The bottom of the inner cavity 2203 is in an inverted cone shape, a second through hole 2205 extends from the center of the bottom of the hanging female seat 2202 to the edge, and the cross section of the second through hole 2205 is in a U shape.

In some embodiments of the present invention, referring to fig. 3 and 7, the transfer tool 200 further includes an elastic resetting mechanism 250, the bottom of the elastic resetting mechanism 250 is fixed on the horizontal rod 2111 of the main body support 210, the top of the elastic resetting mechanism 250 is connected to the supporting plate 2201, when the connector 430 above the internal feeder 500 is placed on the supporting plate 2201, the supporting plate 2201 descends, the elastic resetting mechanism 250 compresses downward, so that the first clasping clamp 231 and the second clasping clamp 232 clasp the internal feeder 500, and when the connector 430 above the internal feeder 500 is separated from the supporting plate 2201, the elastic resetting mechanism 250 resets upward to drive the supporting plate 2201 and the transmission mechanism 240 to move upward, the first clasping clamp 231 and the second clasping clamp 232 move backward, so that the first clasping clamp 231 and the second clasping clamp 232 have an opening allowing the internal feeder 500 to pass through, and the clasping mechanism 230 is in an open state. The elastic reset mechanism 250 is arranged, so that when the connecting head 430 moves upwards to leave the supporting plate 2201, the elastic reset mechanism 250 automatically resets, and the clasping mechanism 230 is opened.

Specifically, in some embodiments of the present invention, referring to fig. 7, the elastic restoring mechanism 250 includes a bottom plate 251, two compression springs 252 and a guide rod 253, two ends of the bottom plate 251 are respectively screwed on a horizontal rod 2111 at the upper end of the main body bracket 210 through two adjusting bolts 254, the plurality of guide rods 253 sequentially pass through the horizontal rod 2111, the bottom plate 251 and the supporting plate 2201 from bottom to top, the bottoms of the plurality of guide rods 253 are fixed on the horizontal rod 2111, the plurality of guide rods 253 are sleeved with the two compression springs 252, the tops of the plurality of guide rods 253 pass through the supporting plate 2201, the upper ends of the plurality of two compression springs 252 are connected with the lower surface of the supporting plate 2201, and the lower ends of the plurality of two compression springs 252 are connected with the bottom plate 251. The number of the guide rods 253 can be 2-5, for example, 2, 3, 4 or 5, and in this embodiment, the number of the guide rods 253 and the number of the second compression springs 252 are 2. Preferably, the guide rod 253 is respectively sleeved with anti-abrasion cushion blocks 255 at the upper end and the lower end of the second compression spring 252, each anti-abrasion cushion block 255 is provided with a step 256, each step 256 is located at one end far away from the second compression spring 252, the upper anti-abrasion cushion block 255 and the lower anti-abrasion cushion block 255 respectively extend into the supporting plate 2201 through the step 256 and the corresponding hole of the bottom plate 251, the anti-abrasion cushion blocks 255 and the steps 256 are made of polytetrafluoroethylene, on one hand, metal powder can be prevented from being generated due to friction of the second compression spring 252 with the supporting plate 2201 and the bottom plate 251, on the other hand, a guide lubricating effect is exerted on the guide rod 253, and friction of the guide rod 253 with the supporting plate 2201 and the bottom plate 251 is prevented. The elastic reset mechanism 250 utilizes the elastic force of the second compression spring 252 to restore the supporting plate 2201 to the original position, the height position of the bottom plate 251 can be adjusted by adjusting the screwing-in and screwing-out of the four adjusting bolts 254, and the compression amount of the second compression spring 252 is further adjusted to achieve the purposes of adjusting the elastic force and adjusting the movement stroke of the supporting plate 2201. Because the horizontal rod 2111 is fixed, the guide rod 253 is fixedly connected with the horizontal rod 2111, the guide rod 253 is also fixed, when the built-in feeder 500 is not placed in the transfer tool 200, the supporting plate 2201 is also fixed, the four adjusting bolts 254 are screwed downwards, the adjusting bolts 254 jack the bottom plate 251, the compression spring two 252 is further compressed, and further the residual compression amount is reduced, so that the movement stroke of the built-in feeder 500 and the clamping degree of the clamping mechanism 230 can be controlled, and the built-in feeder 500 with different diameters can be adapted.

In some embodiments of the present invention, referring to fig. 6, a first slide rail 216 is symmetrically fixed to the left and right ends of the upper portion of the main body support 210, the two first slide rails 216 are vertically disposed, a first slider 2161 corresponding to the two first slide rails 216 is vertically and symmetrically fixed to the left and right ends of the support plate 2201, the two first sliders 2161 are respectively fixed to the left and right ends of the support plate 2201 by bolts, and the support plate 2201 is in sliding fit with the first slide rail 216 in the up and down direction through the first slider 2161.

In some embodiments of the present invention, referring to fig. 3 and 6, the lower horizontal fixed horizontal slide rail 218 of the main body bracket 210, the first clasping clamp 231 and the second clasping clamp 232 are respectively provided with a horizontal slider 2181, and the two horizontal sliders 2181 are slidably engaged with the horizontal slide rail 218.

In some embodiments of the present invention, referring to fig. 6, the transmission mechanism 240 includes a vertical connecting rod 241, an inclined connecting rod 242, a first connecting block 243, a second connecting block 244 and a third connecting block 245, the first connecting block 243 is symmetrically fixed on the first two sliders 2161, the third connecting block 245 is symmetrically fixed on one end of the two horizontal sliders 2181 close to each other, the second sliding rail 217 is symmetrically fixed on the left and right ends of the lower portion of the main body bracket 210, the two sliding rails 217 are vertically disposed, the second sliding rail 217 is located between the first sliding rail 216 and the horizontal sliding rail 218, the second sliding blocks 2171 slide on the two sliding rails 217 respectively, the second connecting block 244 is symmetrically fixed on the two sliding blocks 2171, the upper end of the vertical connecting rod 241 is rotationally connected with the first connecting block 243, the lower end of the vertical connecting rod 241 is rotationally connected with the one end of the second connecting block 244, the upper end of the inclined connecting rod 242 is rotationally connected with the second connecting block 244, and the lower end of the inclined connecting rod 242 is rotationally connected with the third connecting block 245. Taking the transmission mechanism 240 located at the left end of the main body bracket 210 as an example, the supporting plate 2201 moves up and down to sequentially drive the vertical connecting rod 241 and the first connecting block 243 to move up and down, and the first connecting block 243 moves up and down to drive the inclined connecting rod 242 to rotate clockwise or counterclockwise, so as to drive the first clasping clamp 231 to move back to back or towards the second clasping clamp 232.

In some embodiments of the present invention, referring to fig. 8, the vertical connecting rod 241 includes a first connecting rod 2411 and a second connecting rod 2412, one end of the first connecting rod 2411 is provided with a screw thread, one end of the second connecting rod 2412 is provided with a screw hole 2413, one end of the first connecting rod 2411 is in threaded connection with the screw hole 2413 of the second connecting rod 2412, and is fastened by a fastening nut 2414 through a screw thread. The whole length of the vertical connecting rod 241 is adjusted by adjusting the depth of the first connecting rod 2411 screwed into the threaded hole 2413, so that the first clasping clamp 231 and the second clasping clamp 232 are symmetrical, and the clasping degree of the first clasping clamp 231 and the second clasping clamp 232 can be finely adjusted.

In some embodiments of the present invention, referring to fig. 3, the bottom of the main body support 210 is vertically fixed to the half-ring 41 shaped plate, and the half-ring 219 has a semi-circular groove adapted to fit the internal feeder 500. The semi-annular plate 219 is made of polytetrafluoroethylene, and the semi-annular plate 219 plays roles in limiting, positioning and guiding, so that firstly, the built-in feeder 500 can be prevented from colliding with the transfer tool 200, and the built-in feeder 500 is limited from continuously moving towards the main body support 210; secondly, the semi-annular plate 219 has a semi-circular groove fitted with the built-in feeder 500, so that the built-in feeder 500 can be positioned; again, the internal feeder 500 may be guided as the transfer tool 200 is advanced to connect the internal feeder 500.

In some embodiments of the present invention, referring to fig. 3 and 4, the main body frame 210 includes a first frame 211 and a second frame 212, the first frame 211 is provided with the above-mentioned support plate 2201, the clasping mechanism 230, and the like, the first frame 211 is connected to the second frame 212 through four concentric adjusting structures 213, the second frame 212 is connected to the clamping shaft 214 through a screw thread on a side thereof away from the first frame 211, the main body frame 210 is not the invention of the present invention, and the specific structure thereof is referred to in the utility model (publication No. CN 217149380U), which is not described in detail herein, the first frame 211 is connected to the lower symmetrical fixed connection sleeve 215 on a side thereof away from the clasping mechanism 230, and the sleeve 215 is used to connect the transfer tool 200 to the tip 330 on the transfer cart 300 when the transfer tool 200 is placed on the internal feeder placing cart 100.

In some embodiments of the present invention, referring to fig. 9 and 10, the transferring system 1000 further includes a joint tool 400 used with the hitching female seat 2202, the joint tool 400 includes a connecting plate 410, a round pipe 420 and a connecting head 430, the lower surface center of the connecting plate 410 is vertically and fixedly connected with the round pipe 420, the lower part of the round pipe 420 is sleeved with the connecting head 430, the connecting head 430 has a guiding surface 431, the inner diameter of the round pipe 420 is matched with the outer diameter of the supporting shaft 520, and the top of the supporting shaft 520 is fixed by extending into the round pipe 420 from bottom to top.

Further, the guiding surface 431 is a smooth transition arc surface. For example, the guide surface 431 is an outwardly convex arc, or the guide surface 431 is an inwardly concave arc. The guide surface 431 is provided to allow the connector 430 to be self-centering after being placed in the female hitch seat 2202. The inner diameter of the circular tube 420 is matched with the outer diameter of the supporting shaft 520, a pin hole 421 is horizontally formed in the circular tube 420 above the connecting head 430, and the top of the supporting shaft 520 extends into the circular tube 420 from bottom to top and penetrates through the pin hole 421 to be fixed through a pin 422. Further, the connection plate 410, the circular tube 420 and the connection head 430 are integrally formed. The connecting plate 410 is connected with the hook component 800 through a plurality of bolts, the hook 810 of the hook component 800 is hung on the U-shaped ring 610 of the U-shaped joint component 600, the upper end of the hard shaft seed shaft 700 connected with the U-shaped joint component 600 through the rotary connecting mechanism 710 is connected with the hard shaft seed shaft 700, the U-shaped joint component 600, the rotary connecting mechanism 710 and the U-shaped joint component 600 are not the invention points of the invention, the specific structure of the utility model is referred to the utility model patent (publication No. CN 217149406U), and the detailed description is omitted here.

Referring to fig. 1 and 16, a transfer cart 300 of a transfer system 1000 of the present invention is described in detail below, wherein the transfer cart 300 is used in conjunction with a transfer tool 200 for transporting the transfer tool 200.

For example, referring to fig. 16, the transfer cart 300 includes a cart body 310, a rectangular mounting frame 320 is vertically welded upwards in the middle of the cart body 310, a center 330 matched with the sleeve 215 is symmetrically and fixedly connected to the middle of the left end and the right end of the rectangular mounting frame 320, the transfer cart 300 is only used for transferring the built-in feeder 500, and does not perform a turning action, so that the volume is greatly reduced, and the transfer cart is more portable.

Referring to fig. 11-15, a built-in feeder placement cart 100 of the present invention will be described in detail.

In some embodiments of the present invention, referring to fig. 11-14, the floating buffer 22 includes a fixing plate 221, a floating plate 222, a first compression spring 224 and a first stepped screw 225, the fixing plate 221 is welded below the bottom support 23, the fixing plate 221 is connected to the floating plate 222 through the first stepped screw 225 disposed in a plurality of circumferential directions, the floating plate 222 is located above the fixing plate 221, and is disposed in parallel with the fixing plate 221, the plurality of first stepped screws 225 sequentially pass through the fixing plate 221, the bottom support 23, and are connected to the floating plate 222 through threads, the first compression spring 224 is sleeved outside each of the first stepped screws 225, the upper end of the first compression spring 224 is connected to the lower surface of the floating plate 222, and the lower end of the first compression spring is connected to the bottom support 23.

Further, as shown in fig. 13 and 14, a cushion block 223 is disposed between two adjacent screws 225 of the step 256, the bottom of the cushion block 223 is fixed on the shoe 23, and the cushion block 223 further performs a cushioning function. The resilient pad may be a rubber pad.

In some embodiments of the utility model, as shown with reference to fig. 13 and 14, the top of floating plate 222 is fixed with guard plate 226, the cross-sectional area of guard plate 226 is greater than the cross-sectional area of floating plate 222, guard plate 226 is the polytetrafluoroethylene backing plate, guard plate 226 is the built-in charging means 500 of bearing, avoid built-in charging means 500 and metal material's floating plate 222 direct contact, reduce the impact, guard plate 226 adopts the polytetrafluoroethylene material simultaneously, can be high temperature resistant to adapt to the built-in charging means 500 of the high temperature state of just coming out of the stove after reinforced the completion. Lightening holes 2261 are formed in the centers of the protection plate 226, the floating plate 222, the bottom support 23 and the fixing plate 221, and accordingly the lightening effect is achieved.

In some embodiments of the present invention, referring to fig. 11, 13 and 14, the transferring system 1000 further includes a quartz cone holding mechanism 30, the quartz cone holding mechanism 30 is fixed to the lower portion of the supporting frame 21, the quartz cone holding mechanism 30 is in a U-shaped plate shape, and the opening of the quartz cone holding mechanism 30 is disposed toward the built-in feeder 500, and both side surfaces of the quartz cone holding mechanism 30 contacting the built-in feeder 500 respectively have arc-shaped tangent planes 31 matching with the built-in feeder 500. The quartz cone holding mechanism 30 is clamped with the bottom of the side wall of the built-in feeder 500 through the section 31. The lower part of the built-in feeder 500 is just clamped into the two tangent planes 31, when the built-in feeder 500 is inclined, the quartz cone holding mechanism 30 can support the bottom of the side wall of the built-in feeder 500 to prevent the bottom of the built-in feeder 500 from moving, so that the sealing state between the material pipe 510 and the quartz cone holding mechanism 30 is ensured, and material leakage is prevented. Further, the upper end surfaces of the two side dams also have a cut surface 31 so that the built-in feeder 500 is not damaged during the upward movement.

In some embodiments of the present invention, referring to fig. 11, 12 and 15, the clamping mechanism 40 includes a stationary half ring 41, a movable half ring 42 and a base 43, the base 43 is vertically fixed on the support frame 21, a semicircular groove is opened at one end of the base 43 far away from the support frame 21, the stationary half ring 41 is fixed in the semicircular groove of the base 43, one end of the stationary half ring 41 is hinged to one end of the movable half ring 42 through a rotating connector 44, the movable half ring 42 can be opened and closed relative to the stationary half ring 41, when the movable half ring 42 is closed relative to the stationary half ring 41, the movable half ring 42 and the stationary half ring 41 jointly define a ring forming the clamping built-in charger 500, a connecting shaft 411 is vertically fixed in the middle of one end of the stationary half ring 41 far away from the rotating connector 44, a connecting lock 412 is rotatably fixed on the connecting shaft 411, and a groove 421 matching with the connecting shaft 411 is opened at one end of the movable half ring 42 far away from the rotating connector 44. The locking member 412 has two states, when the movable half ring 42 needs to be closed relative to the fixed half ring 41, the locking member 412 rotates to be perpendicular to the groove 421, and a holding and clamping state is realized; when it is desired to open, the locking member 412 is rotated to be parallel to the recess 421, opening the movable half ring 42 outwardly. The rotating connection element 44 may be a hinge, or may be other connection elements such as a pin 422 and the like that can realize rotation.

In some embodiments of the present invention, referring to fig. 15, the clamping mechanism 40 is further provided with a buckle assembly 45, the buckle assembly 45 includes a buckle male head 451 and a buckle female head 452, the buckle female head 452 is installed on one side of the base 43 close to the rotating connector 44, the buckle male head 451 is installed on one end of the movable half ring 42 close to the rotating connector 44, when the movable half ring 42 is opened relative to the stationary half ring 41, the buckle male head 451 is in snap connection with the buckle female head 452, so as to prevent the movable half ring 42 from swinging freely.

In some embodiments of the present invention, referring to fig. 15, the fixed half ring 41 and the movable half ring 42 are installed near one side of the circumference of the built-in material feeder 500 at equal intervals with a plurality of protective pads 46, a channel 461 allowing silicon material powder to pass through is left between adjacent protective pads 46, when silicon material is fed into the built-in material feeder 500, silicon material powder sprinkled outside the built-in material feeder 500 will not block up on the clamping mechanism 40, which can prevent the silicon material powder from wearing the built-in material feeder 500, and the silicon material powder falls down through the channel 461.

In some embodiments of the utility model, refer to fig. 11 and 12, frame 10 includes bottom frame 11 and upper bracket 12, bottom frame 11's one end is perpendicular upwards to install upper bracket 12, upper bracket 12 is close to bearing frame 13 of the one end symmetry installation of tilting mechanism 20, two bearing frames 13 are located the both sides of support frame 21, a pivot is fixed respectively in the middle part of the both sides of support frame 21, the both sides of support frame 21 are rotated with bearing frame 13 through the pivot respectively and are connected, one of them pivot passes behind bearing frame 13 in proper order with speed reducer 14, angle encoder 15 is connected, speed reducer 14 is connected with hand wheel 16. The rotation of the turnover mechanism 20 is realized by rotating the hand wheel 16, and the turnover angle of the turnover mechanism 20 relative to the horizontal plane can be accurately displayed in real time by arranging the angle encoder 15, so that the controllability of the turnover angle is realized.

In some embodiments of the present invention, referring to fig. 11, one side of the upper bracket 12 away from the turnover mechanism 20 is rotated to connect the armrest 17 through the buckle 121, so that the armrest 17 can be folded, on one hand, the space can be saved, and on the other hand, the worker can be prevented from being injured when feeding into the built-in feeder 500.

In some embodiments of the present invention, referring to fig. 11 and 16, casters 18, ground brakes 112 and laser locators 111 are installed on the bottom of the cart body 310 of the transfer cart 300 and the bottom of the internal charger placing cart 100, the casters 18 are used for moving two cart positions, and the laser locators 111 are used for moving the two carts to the position marked on the ground for precise positioning; the ground brake 112 is used to secure the two cars to prevent the cars from moving.

The charging process comprises the following steps:

(1) Transfer tool 200 is connected to the wafer taking arm 900: the transfer cart 300 carrying the transfer tool 200 is positioned according to the ground mark by the laser positioner 111 on the transfer cart 300, and then the ground brake 112 on the transfer cart 300 is stepped down to fix the transfer cart 300. The sliding table of the crystal taking arm 900 moves forward to be hooked with the clamping shaft 214 of the transfer tool 200, the crystal taking arm 900 is lifted upwards to a set height, then the transfer tool 200 is separated from the transfer cart 300, then the ground brake 112 on the transfer cart 300 is released to move away, and the sliding table of the crystal taking arm 900 moves backwards to be limited.

(2) Feeding: the built-in feeder placing vehicle 100 bearing the built-in feeder 500 filled with silicon materials is released from the ground brake 112, the silicon materials are pushed to the single crystal furnace from the feeding room, the laser positioner 111 on the built-in feeder placing vehicle 100 is used for positioning according to ground marks, and the hand wheel 16 is rotated to realize that the turnover mechanism 20 is rotated to be in a vertical state. The sliding table of the crystal taking arm 900 moves forward to drive the transfer tool 200 to move forward, so that the supporting shaft 520 slides into the first through hole 2204 of the supporting plate 2201 and the second through hole 2205 of the hanging female seat 2202, then the crystal taking arm 900 drives the transfer tool 200 to move upward to a set height, the connecting head 430 at the top of the supporting shaft 520 falls into the hanging female seat 2202, and meanwhile, the clamping mechanism 230 of the transfer tool 200 acts to clamp the built-in feeder 500 under the gravity action of the built-in feeder 500. Then the crystal taking arm moves backwards to limit, drives the transfer tool 200 and the built-in feeder 500 to rotate together to the direction of the auxiliary furnace chamber, the crystal taking arm 900 moves forwards to enable the hook 810 of the hook assembly 800 to be hung and fall into the U-shaped ring 610 of the U-shaped joint assembly 600, the crystal taking arm 900 moves downwards, the clamping mechanism 230 is opened under the action of the elastic resetting mechanism 250 of the transfer tool 200, then the crystal taking arm 900 drives the transfer tool 200 to move backwards and rotate to a set position, at this time, the built-in feeder 500 is connected with the hard shaft seed crystal shaft 700, and finally the built-in feeder 500 is driven to descend through the hard shaft seed crystal shaft 700 to realize feeding.

(3) Unloading of the built-in feeder 500: after feeding is completed, the seed crystal shaft drives the built-in feeder 500 to be lifted into the auxiliary furnace chamber, after cooling reaches set time, the auxiliary furnace chamber door is opened, the crystal taking arm 900 drives the transfer tool 200 to rotate to the direction of the auxiliary furnace chamber, the sliding table of the crystal taking arm 900 moves forwards to drive the transfer tool 200 to move forwards so that the supporting shaft 520 slides into the supporting plate 2201 and the through hole of the hanging female seat 2202, then the crystal taking arm 900 drives the transfer tool 200 to move downwards to a set height, at this time, the connector 430 at the top of the supporting shaft 520 falls into the hanging female seat 2202, and meanwhile, the clamp mechanism 230 of the transfer tool 200 moves under the gravity action of the built-in feeder 500 to tightly hold the built-in feeder 500. Then, after the crystal taking arm moves backwards to limit, the hook 810 of the hook component 800 automatically breaks away from the U-shaped ring 610 of the U-shaped joint component 600, the crystal taking arm drives the transfer tool 200 and the built-in feeder 500 to be screwed out of the auxiliary furnace chamber together, the crystal taking arm 900 moves forwards to drive the built-in feeder 500 to move right above the built-in feeder placing vehicle 100, the crystal taking arm 900 descends until the built-in feeder 500 falls onto the built-in feeder placing vehicle 100, the clamping mechanism 230 is opened under the action of the elastic resetting mechanism 250 of the transfer tool 200, the crystal taking arm 900 moves backwards to realize separation of the transfer tool 200 and the built-in feeder 500, and the next feeding is waited.

(4) Repeated feeding: the next built-in feeder 500 is lifted forward on the built-in feeder placing vehicle 100 to perform feeding, feeding is performed again, after the transfer tool 200 is separated from the previous built-in feeder 500, the previous built-in feeder placing vehicle 100 transports the previous built-in feeder 500 away, after the next built-in feeder placing vehicle 100 is positioned by laser, the crystal taking arm 900 moves downwards, the transfer tool 200 is connected with the next built-in feeder 500, and the next round of feeding to the single crystal furnace is started;

(5) Unloading of the transfer tool 200: after all the feeding is completed, the crystal taking arm 900 drives the transfer tool 200 to move downwards, so that the sleeve 215 of the transfer tool 200 is sleeved on the tip 330 of the transfer cart 300 to realize the quick connection between the two.

In the step (4), the time for the next internal material feeder placing cart 100 to perform the material loading is not much related to the previous internal material feeder 500, and after the previous internal material feeder 500 finishes the silicon material loading, the silicon material can be simultaneously loaded with the previous internal material feeder 500, and in the process of connecting the previous internal material feeder 500 with the crystal taking arm 900, the process of feeding the single crystal furnace by the internal material feeder 500, or the process of unloading and cooling by the previous internal material feeder 500, so long as the next internal material feeder placing cart 100 finishes the material loading before the transfer tool 200 and the previous internal material feeder 500 are separated, the purpose is to save the time and not influence the material loading to the single crystal furnace.

The utility model discloses an it shifts frock 200 of transfer system 1000 is that it is complete separation with built-in charging means placing car 100, and built-in charging means placing car 100 only is used for the material pipe 510 to feed and transport promptly, shifts frock 200 and only is used for shifting material pipe 510 to vice furnace chamber, and this has reduced greatly and has shifted frock 200 and built-in charging means placing car 100's volume, has reduceed weight, has reduced the difficulty that the manpower removed. Meanwhile, the transfer tool 200 is not structurally connected with the built-in feeder placing vehicle 100, so that the built-in feeder 500 can perform feeding in the cooling and unloading process, the other built-in feeder placing vehicle 100 can perform feeding, and one transfer tool 200 can correspond to a plurality of built-in feeder placing vehicles 100 to feed again, so that the cost is saved and the single feeding time is shortened.

In the prior art, normal single feeding needs 2-3 hours, the crystal growth process is fed for 2-4 times, the single feeding time is only 1-1.5 hours after the transfer system and the transfer method are used, at least half of the time can be saved in the single feeding, and 2-6 hours can be saved in the crystal growth process.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like, indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally formed; the connection can be mechanical connection, electrical connection or communication; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

In the present application, unless expressly stated or limited otherwise, the first feature may be directly on or directly under the second feature or indirectly via intermediate members. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.

While embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims (10)

1. A transfer system for a hard axis single crystal furnace internal charger, the transfer system comprising:

the built-in feeder placing vehicle is used for overturning and transferring the built-in feeder and comprises a rack and an overturning mechanism, wherein the overturning mechanism is rotatably connected to one side of the top of the rack and comprises a support frame, clamping mechanisms, a bottom support and a floating buffer piece;

the transfer tool is used for transferring a built-in feeder into or out of a secondary furnace chamber of a single crystal furnace, and comprises a main body support, a bearing mechanism, an attaching and clamping mechanism and a transmission mechanism, wherein the bearing mechanism is in sliding fit with the main body support along the vertical direction, the bearing mechanism comprises a supporting plate and an attaching female seat, the left end and the right end of the supporting plate are in sliding fit with the main body support along the vertical direction, the attaching female seat is detachably fixed on the supporting plate, the attaching and clamping mechanism comprises a first attaching clamp and a second attaching clamp which are symmetrically arranged, the first attaching clamp and the second attaching clamp are spaced apart along the horizontal direction, and the first attaching clamp and the second attaching clamp are respectively in horizontal sliding fit with the main body support; the left end and the right end of the main body support are symmetrically provided with a transmission mechanism, one end of each of the two transmission mechanisms is connected with the supporting plate, the other end of each of the two transmission mechanisms is connected with the holding and clamping mechanism, the supporting plate can move between a first position and a second position along the vertical direction, and when the supporting plate moves downwards to the second position, the first holding clamp and the second holding clamp move towards directions close to each other to be in a holding and clamping state under the driving of the transmission mechanisms;

and the transfer trolley is used for transporting the transfer tool.

2. The system for transferring the built-in feeder of the hard shaft single crystal furnace according to claim 1, wherein the front end of the supporting plate is provided with a first through hole for passing a supporting shaft of the built-in feeder, the hooking female seat is cylindrical with an open upper end, an inner cavity for accommodating the connector is defined inside the hooking female seat, and a second through hole corresponding to the first through hole is formed in the center of the bottom of the hooking female seat.

3. The transfer system suitable for built-in charging means of hard axle single crystal growing furnace of claim 2, characterized in that, still include with articulate the joint frock that female seat cooperation was used, connect the frock including connecting plate, pipe and the connector, the perpendicular fixed connection of lower surface center department of connecting plate the pipe, the lower part of pipe is cup jointed the connector, the connector has the spigot surface, the internal diameter of pipe with the external diameter of back shaft matches suitably, the top of back shaft is from lower and upper stretching into in the pipe fixed.

4. The transfer system suitable for the built-in feeder of the hard shaft single crystal furnace is characterized in that the floating buffering part comprises a fixing plate, a floating plate, a first compression spring and step screws, the fixing plate is fixed below the bottom support, the fixing plate is connected with the floating plate through the step screws arranged in the circumferential direction, the floating plate is located above the fixing plate and is arranged in parallel with the fixing plate, the outer side of each step screw is sleeved with the first compression spring, the upper end of the first compression spring is connected with the lower surface of the floating plate, and the lower end of the first compression spring is connected with the bottom support.

5. The system of claim 1, wherein the cart further comprises a quartz cone holding mechanism fixed to a lower portion of the supporting frame, the quartz cone holding mechanism having a cut surface adapted to fit the sidewall of the inner feeder, the quartz cone holding mechanism being engaged with the bottom of the inner feeder through the cut surface.

6. The system as claimed in claim 1, wherein the clamping mechanism comprises a fixed half ring, a movable half ring and a base, the fixed half ring is fixed on the base, the base is vertically fixed on the supporting frame, one end of the fixed half ring is hinged with one end of the movable half ring through a rotating connector, the movable half ring can be opened and closed relative to the fixed half ring, when the movable half ring is closed relative to the fixed half ring, the movable half ring and the fixed half ring define a ring for clamping the built-in feeder, a connecting shaft is vertically fixed in the middle of one end of the fixed half ring away from the rotating connector, a locking piece is rotatably connected on the connecting shaft, and a groove matched with the connecting shaft is formed in one end of the movable half ring away from the rotating connector.

7. The transfer system suitable for the built-in feeder of the hard shaft single crystal furnace is characterized in that two sleeves are symmetrically arranged on the main body bracket, and tips arranged corresponding to the two sleeves are vertically and upwards arranged on the transfer cart;

still be provided with elastic reset mechanism on the transfer tool, elastic reset mechanism includes bottom plate, compression spring two and guide bar, the bottom plate is fixed in through a plurality of adjusting bolt levels on the main part support upper end horizontal bar, it is a plurality of the guide bar from down and pass horizontal bar, bottom plate and layer board in proper order, it is a plurality of the bottom of guide bar is fixed on the horizontal bar, it is a plurality of compression spring two, a plurality of are established to the cover on the guide bar the top of guide bar is passed the layer board to with layer board fixed connection, it is a plurality of the upper end of compression spring two with the lower surface of layer board is connected, its lower extreme with the bottom plate is connected.

8. The transfer system suitable for the built-in feeder of the hard shaft single crystal furnace is characterized in that the transfer tool is provided with a first slide rail symmetrically fixed at the left end and the right end of the upper part of the main body support, the first slide rail is vertically arranged, first slide blocks corresponding to the first slide rails are vertically and symmetrically fixed at the left end and the right end of the supporting plate, the supporting plate is in sliding fit with the first slide rails through the first slide blocks, horizontal slide rails are horizontally fixed at the lower part of the main body support, a horizontal slide block is respectively installed on each of the first holding clamp and the second holding clamp, and the two horizontal slide blocks are in sliding fit with the horizontal slide rails.

9. The transfer system suitable for the built-in feeder of the hard shaft single crystal furnace is characterized in that the transmission mechanism comprises a vertical connecting rod, an inclined connecting rod, a first connecting block, a second connecting block and a third connecting block, wherein the first two sliding blocks are respectively fixed with the first connecting block, the third connecting block is symmetrically fixed at one end, close to each other, of the two horizontal sliding blocks, a second sliding rail is symmetrically fixed at the left end and the right end of the lower portion of the main body support, the second sliding rail is vertically arranged, the second sliding rail is located between the first sliding rail and the horizontal sliding rail, the second sliding rail is respectively matched with the second sliding block in a sliding manner, the second two sliding blocks are symmetrically fixed with the second connecting block, the upper end of the vertical connecting rod is rotatably connected with the first connecting block, the upper end of the inclined connecting rod is rotatably connected with the second connecting block, and the lower end of the inclined connecting rod is rotatably connected with the third connecting block.

10. The transfer system suitable for the built-in material feeder of the hard shaft single crystal furnace is characterized in that the vertical connecting rod comprises a first connecting rod and a second connecting rod, one end of the first connecting rod is provided with threads, one end of the second connecting rod is provided with a threaded hole, and one end of the first connecting rod is in threaded connection with the threaded hole of the second connecting rod and is fastened through a fastening nut.

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