CN218727669U - Universal control box for matcher - Google Patents
Universal control box for matcher Download PDFInfo
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- CN218727669U CN218727669U CN202222355380.3U CN202222355380U CN218727669U CN 218727669 U CN218727669 U CN 218727669U CN 202222355380 U CN202222355380 U CN 202222355380U CN 218727669 U CN218727669 U CN 218727669U
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Abstract
The invention relates to a universal control box for a matcher, which comprises a shell, wherein the top surface of the shell is also provided with a first display gauge outfit and a second display gauge outfit, the first display gauge outfit is correspondingly provided with a first toggle switch, and the second display gauge outfit is correspondingly provided with a second toggle switch; the front surface of the shell is also provided with a first mode switching dial and a second mode switching dial, a third display gauge outfit and a fourth display gauge outfit are also arranged below the first mode switching dial and the second mode switching dial, a first adjustable knob is correspondingly arranged right below the third display gauge outfit, and a second adjustable knob is correspondingly arranged right below the fourth display gauge outfit; the back of casing still is provided with power supply switch, and power supply switch's below still is provided with the power supply input line, and the next door of power supply input line still is provided with the public head of signal control port and the female head of signal control port, and the public head of signal control port and the female head of signal control port are with part interconnect on the casing.
Description
Technical Field
The invention relates to a universal control box of semiconductor equipment, in particular to a universal control box of a matcher.
Background
The matcher is widely used in the semiconductor industry, and is usually used in combination with a radio frequency power supply to match power and eliminate the reflected power. The utility model provides a detection to the adapter performance is a difficult problem that puzzles semiconductor industry equipment engineer, the utility model provides a general control box of adapter. The performance characteristics of the tested matcher can be conveniently and quickly detected and judged.
Disclosure of Invention
The invention aims to solve the defects in the prior art and provides a universal control box for a matcher.
In order to achieve the purpose, the invention adopts the following technical scheme:
a universal control box for a matcher comprises a shell, wherein a first display gauge head and a second display gauge head are further arranged on the top surface of the shell, a first toggle switch is correspondingly arranged on the first display gauge head, and a second toggle switch is correspondingly arranged on the second display gauge head;
the front surface of the shell is also provided with a first mode switching dial and a second mode switching dial, a third display gauge outfit and a fourth display gauge outfit are also arranged below the first mode switching dial and the second mode switching dial, a first adjustable knob is correspondingly arranged right below the third display gauge outfit, and a second adjustable knob is correspondingly arranged right below the fourth display gauge outfit;
the back of the shell is further provided with a power supply switch, a power supply input line is further arranged below the power supply switch, a signal control port male head and a signal control port female head are further arranged beside the power supply input line, and the signal control port male head and the signal control port female head are used for mutually connecting components on the shell.
Further, a mode switching dial code is composed of a double-contact relay SV1, a contact relay SV2 and a contact relay SV3, the double-contact relay SV1, the contact relay SV2 and the contact relay SV3 are further provided with a voltage regulation module in a matched manner, the double-contact relay SV1, the contact relay SV2 and the contact relay SV3 are arranged in parallel in the voltage regulation module, the double-contact relay SV1, the contact relay SV2 and the other end of the contact relay SV3 are further connected in series with a button switch S4, a button switch S5 and a button switch S6 respectively, two poles of the double-contact relay SV1 are connected in series with an adjustable resistor R2 and an adjustable resistor R4 respectively, two poles of the contact relay SV2 are connected in series with the adjustable resistor R1 and the adjustable resistor R3 respectively, one pole of the contact relay SV3 is grounded, and the common ends of the double-contact relay SV1 and the contact relay SV2 are connected in series with the adjustable resistor R6 respectively.
Furthermore, the mode switching dial code of No. two is composed of a double-contact relay SV4, a double-contact relay SV5 and a double-contact relay SV6, the double-contact relay SV4, the double-contact relay SV5 and the double-contact relay SV6 are further provided with a voltage adjusting module of No. two in a matched manner, the double-contact relay SV4, the double-contact relay SV5 and the double-contact relay SV6 are arranged in parallel in the voltage adjusting module of No. two, the double-contact relay SV4, the double-contact relay SV5 and the other end of the double-contact relay SV6 are further respectively connected in series with a button switch S12, a button switch S14 and a button switch S13, two poles of the double-contact relay SV4 are respectively connected in series with an adjustable resistor R8 and an adjustable resistor R10, two poles of the double-contact relay SV5 are respectively connected in series with an adjustable resistor R9 and an adjustable resistor R11, one pole of the double-contact relay SV6 is grounded, and the common ends of the double-contact relay SV4 and the double-contact relay SV5 are respectively connected in series with an adjustable resistor R7.
Further, a gauge head display module is further arranged on the third display gauge head and the fourth display gauge head in a matched mode, a pin of the third display gauge head is connected with the adjustable resistor R6 of the first voltage adjusting module through an amplifier AMP1, a base electrode of the amplifier AMP1 is connected with the third display gauge head, and an emitting electrode of the amplifier AMP1 is connected with the adjustable resistor R6;
the pin of the fourth display gauge head is connected with the adjustable resistor R7 of the second voltage adjusting module through an amplifier AMP4, the base of the amplifier AMP4 is connected with the fourth display gauge head, and the emitter of the amplifier AMP4 is connected with the adjustable resistor R7.
Furthermore, the signal control port male head and the signal control port female head are also provided with a signal interface module and a feedback signal monitoring module in a matched manner, and the signal interface module comprises the signal control port male head and the signal control port female head which are mutually connected;
the feedback signal interface module comprises the first display gauge head and the second display gauge head, the first display gauge head is connected with the first toggle switch, and the first toggle switch is connected with the signal control port male head; the second display gauge outfit is connected with the second toggle switch, and the second toggle switch is connected with the signal control port female outfit.
Furthermore, the first toggle switch and the second toggle switch are bipolar multi-position switches, and the first toggle switch is connected with the toggle switch.
Further, a weak current power supply module is further arranged inside the shell, the weak current power supply module comprises a switching power supply, a first three-terminal regulator, a voltage regulator and a second three-terminal regulator, a capacitor C1 is connected between the input end of the first three-terminal regulator and the grounding end in series, a capacitor C2 is connected between the output end of the first three-terminal regulator and the grounding end in series, a capacitor C5 is connected between the input end of the second three-terminal regulator and the grounding end in series, and a capacitor C6 is connected between the output end of the second three-terminal regulator and the grounding end in series;
the earthing terminal of voltage regulator is connected ground connection behind adjustable resistance R11, electrolytic capacitor C3 has still been established ties between the input of voltage regulator and the earthing terminal, electrolytic capacitor C3's positive pole with the input of voltage regulator links to each other, the output of voltage regulator with it has resistance R12 to establish ties between the adjustable resistance R13, adjustable resistance R13's both ends still connect in parallel electrolytic capacitor C4, electrolytic capacitor C4's positive pole with adjustable resistance R13's input links to each other.
Furthermore, the male head of the signal control port and the female head of the signal control port are both 25 pins.
Further, the voltage that the weak current power supply module can provide is 5V, +12V, -12V, 10V, +15V, -15V.
Furthermore, the adjustable voltage ranges of the first voltage adjusting module and the second voltage adjusting module are-12V-12V, 0-10V and-5V.
Compared with the prior art, the invention has the beneficial effects that:
the general control box for the matcher is connected with the control port of the matcher by using the male head and the female head of the signal control port, so that the matcher is controlled, the input voltage range and the input value range of the C1 Set and the C2 Set are adjusted by each circuit module, so that the Vpp value, the Ipp value and the DC Bias value of the matcher are changed, the change is displayed by the display meter head, and the performance characteristic of the matcher is judged by the change of the values under specific conditions.
Drawings
FIG. 1 is a front perspective view of the present invention;
FIG. 2 is a rear perspective view of the present invention;
FIG. 3 is a circuit diagram of the present invention;
FIG. 4 shows the data of the matcher RMN100 according to the present invention.
In the figure: 1. the signal control port male connector, 2, the signal control port female connector, 3, a three-terminal regulator, 4, a voltage regulator, 5, a three-terminal regulator, 6, a switching power supply, 7, a voltage regulation module, 8, a meter head display module, 9, a feedback signal monitoring module, 10, a second voltage regulation module, 11, a weak current power supply module, 12, a display meter head, 13, a second display meter head, 14, a first toggle switch, 15, a second toggle switch, 16, a first mode switching dial, 17, a second mode switching dial, 18, a third display meter head, 19, a fourth display meter head, 20, a first adjustable knob, 21, a second adjustable knob, 22, a power supply switch, 23, a power supply input line, 26, a shell, 27 and a signal interface module.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention and are not to be construed as limiting the present invention.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations and positional relationships based on those shown in the drawings, and are used only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be considered as limiting the present invention. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate the number of technical features indicated. Thus, features defined as "first" and "second" may explicitly or implicitly include one or more of the described features. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
As shown in fig. 1-3.
A general control box for a matcher comprises a shell 26, wherein a first display gauge outfit 12 and a second display gauge outfit 13 are further arranged on the top surface of the shell 26, the first display gauge outfit 12 is correspondingly provided with a first toggle switch 14, and the second display gauge outfit 13 is correspondingly provided with a second toggle switch 15;
a first mode switching dial 16 and a second mode switching dial 17 are further arranged on the front face of the shell 26, a third display gauge head 18 and a fourth display gauge head 19 are further arranged below the first mode switching dial 16 and the second mode switching dial 17, a first adjustable knob 20 is correspondingly arranged right below the third display gauge head 18, and a second adjustable knob is correspondingly arranged right below the fourth display gauge head 19;
the back of casing 26 still is provided with power switch 22, and power switch 22's below still is provided with power supply input line 23, and power supply input line 23's next door still is provided with the public head 1 of signal control port and the female head 2 of signal control port, and the public head 1 of signal control port and the female head 2 of signal control port are with the part interconnect on casing 26.
Furthermore, the first mode switching dial 16 is composed of a double-contact relay SV1, a contact relay SV2 and a contact relay SV3, the double-contact relay SV1, the contact relay SV2 and the contact relay SV3 are further provided with a first voltage regulating module 7 in a matched manner, the double-contact relay SV1, the contact relay SV2 and the contact relay SV3 are arranged in parallel in the first voltage regulating module 7, the other ends of the double-contact relay SV1, the contact relay SV2 and the contact relay SV3 are also respectively connected in series with a button switch S4, a button switch S5 and a button switch S6, two poles of the double-contact relay SV1 are respectively connected in series with an adjustable resistor R2 and an adjustable resistor R4, two poles of the contact relay SV2 are respectively connected in series with the adjustable resistor R1 and the adjustable resistor R3, one pole of the contact relay SV3 is grounded, and common ends of the double-contact relay SV1 and the contact relay SV2 are respectively connected with the adjustable resistor R6.
Further, the mode switching dial 17 is composed of a double-contact relay SV4, a double-contact relay SV5 and a double-contact relay SV6, the double-contact relay SV4, the double-contact relay SV5 and the double-contact relay SV6 are further provided with a voltage regulating module 10 in a matched manner, the double-contact relay SV4, the double-contact relay SV5 and the double-contact relay SV6 are arranged in parallel in the voltage regulating module 10, the other ends of the double-contact relay SV4, the double-contact relay SV5 and the double-contact relay SV6 are further respectively connected in series with a button switch S12, a button switch S14 and a button switch S13, two poles of the double-contact relay SV4 are respectively connected in series with an adjustable resistor R8 and an adjustable resistor R10, two poles of the double-contact relay SV5 are respectively connected in series with an adjustable resistor R9 and an adjustable resistor R11, one pole of the double-contact relay SV6 is grounded, and common ends of the double-contact relay SV4 and the double-contact relay SV5 are respectively connected with an adjustable resistor R7.
Furthermore, a meter head display module 8 is further arranged on the third display meter head 18 and the fourth display meter head 19 in a matched mode, a pin of the third display meter head 18 is connected with an adjustable resistor R6 of the first voltage adjusting module 7 through an amplifier AMP1, a base electrode of the amplifier AMP1 is connected with the third display meter head 18, and an emitting electrode of the amplifier AMP1 is connected with the adjustable resistor R6;
the pin of the fourth display gauge head 19 is connected with the adjustable resistor R7 of the second voltage adjusting module 10 through the amplifier AMP4, the base of the amplifier AMP4 is connected with the fourth display gauge head 19, and the emitter of the amplifier AMP4 is connected with the adjustable resistor R7.
Further, the signal control port male head 1 and the signal control port female head 2 are also provided with a signal interface module 27 and a feedback signal monitoring module 9 in a matching manner, and the signal interface module 27 comprises the signal control port male head 1 and the signal control port female head 2 which are connected with each other;
the feedback signal interface module 27 comprises a first display meter head 12 and a second display meter head 13, the first display meter head 12 is connected with a first toggle switch 14, and the first toggle switch 14 is connected with the signal control port male head 1; the second display meter head 13 is connected with the second toggle switch 15, and the second toggle switch 15 is connected with the signal control port female head 2.
Further, the first toggle switch 14 and the second toggle switch 15 are bipolar multi-position switches, and the first toggle switch 14 is connected with the second toggle switch 15.
Further, a weak current power supply module 11 is further arranged inside the shell 26, and comprises a switching power supply 6, a first three-terminal regulator 3, a voltage regulator 4 and a second three-terminal regulator 5, a capacitor C1 is connected in series between the input end of the first three-terminal regulator 3 and the ground end, a capacitor C2 is connected in series between the output end of the first three-terminal regulator 3 and the ground end, a capacitor C5 is connected in series between the input end of the second three-terminal regulator 5 and the ground end, and a capacitor C6 is connected in series between the output end of the second three-terminal regulator 5 and the ground end;
the ground terminal of the voltage regulator 4 is connected with the adjustable resistor R11 and then grounded, an electrolytic capacitor C3 is further connected in series between the input end of the voltage regulator 4 and the ground terminal, the anode of the electrolytic capacitor C3 is connected with the input end of the voltage regulator 4, a resistor R12 is connected in series between the output end of the voltage regulator 4 and the adjustable resistor R13, the electrolytic capacitor C4 is further connected in parallel at two ends of the adjustable resistor R13, and the anode of the electrolytic capacitor C4 is connected with the input end of the adjustable resistor R13.
Furthermore, the signal control port male head 1 and the signal control port female head 2 are both 25 pins, and only the corresponding 25-pin special control line needs to be replaced for testing different matchers, so that the invention has wider application range and more convenient use.
Further, the weak current power supply module 11 can provide voltages of 5V, +12V, -12V, 10V, +15V, -15V.
Furthermore, the adjustable voltage ranges of the first voltage adjusting module 7 and the second voltage adjusting module 10 are-12V, 0-10V and-5V.
Further, the power supply input line 23 is a single-phase 220V power supply input for supplying power to the control box; the power supply switch 22 is a power supply switch 22 of the control box, and the signal control port male head 1 and the signal control port female head 2 are used for connecting a control port of the tested equipment to realize a control function; the display gauge head is used for displaying real-time working conditions of the tested equipment including C1 Set, C2 Set, C1 Pos, C2 Pos, vpp, ipp and DC Bias; the toggle switch is used for switching the display content of the gauge outfit; the adjustable screw is used for setting the input value adjustment of the C1 Set and the C2 Set; the mode switch dial is used to select the input voltage ranges of C1 Set and C2 Set.
Furthermore, the general control box for the matcher designed by the invention is connected with the control port of the matcher by utilizing the signal control port male head 1 and the signal control port female head 2, so that the matcher is controlled, the input voltage range and the input value range of the C1 Set and the C2 Set are adjusted through each circuit module, so that the Vpp value, the Ipp value and the DC Bias value of the matcher are changed, the change is displayed through the display meter head, and the performance characteristic of the matcher is judged through the change of the values under a specific condition.
When the device is used, the power supply input line 23 is connected with single-phase 220V power, the power supply switch 22 is turned on, the control ports of the matcher are respectively connected into the signal control port male head 1 and the signal control port female head 2, the range of input control voltage is selected through mode switching dial, and three gears can be adjusted to be-12V-12V, 0-10V and-5V respectively;
the first adjustable knob 20 sets a C1 Set value to accurately control the input value of a C1 capacitor in the matcher, and the second adjustable knob sets a C2 Set value to accurately control the input value of a C2 capacitor in the matcher;
the third display gauge head 18 and the fourth display gauge head 19 respectively display the input Set values C1 Set and C2 Set to be tested and matched;
the first toggle switch 14 is turned on, the second toggle switch 15 is turned off, and the first display gauge head 12 and the second display gauge head 13 respectively display the values of C1 Pos and C2 Pos which are matched with the test;
the first toggle switch 14 is turned off, the second toggle switch 15 is turned off, and the first display gauge header 12 and the second display gauge header 13 respectively display Vpp and Ipp numerical values matched with the test;
the second toggle switch 15 is turned on, and the second display gauge outfit 13 displays the DC Bias value matched with the test;
and finally, judging the functional characteristics of the matcher according to the numerical values displayed by the four meter heads.
Furthermore, the matcher which can be used for testing in the invention comprises other matchers with analog control interfaces, such as RMN-50, RMN75, RMN100, RMN-200, NPM-15K, MERCURY 10013, PSG-IIA, P500 and the like.
Further, taking the matcher RMN100 as an example, as shown in fig. 4 below, the test data of the matcher RMN100 is shown;
s1, respectively accessing a control port of a matcher RMN100 into a signal control port male head 1 and a signal control port female head 2;
s2: turning on a power supply switch, and respectively adjusting the power of a power supply to 1KW, 3KW, 5KW and 8KW;
s3: the first adjustable knob 20 sets a C1 Set value, accurately controls the input value of a C1 capacitor in the matcher, the second adjustable knob sets a C2 Set value, and accurately controls the input value of a C2 capacitor in the matcher, wherein as shown in a table, the C1 Set is adjusted to 6.5, and the C2 Set is adjusted to 5.3;
s4, then turning on the first toggle switch 14 and turning off the second toggle switch 15, recording and observing two numerical values of C1 Pos and C2 Pos, and judging whether the numerical values are in a reference range or not as shown in FIG. 4;
s5: then, the first toggle switch 14 is turned off and the second toggle switch 15 is turned off, and two numerical values of Vpp and Ipp are recorded and observed, as shown in fig. 4, whether the numerical values are within the reference range or not;
s6: the second toggle switch 15 is turned on, the second display header 13 displays the DC Bias value to be tested and matched, and as shown in FIG. 4, whether the value is in the reference range or not is judged;
s7: if the values of the steps S4, S5 and S7 are all within the reference range, the matcher RMN100 is qualified.
In the description herein, references to the description of the terms "one embodiment," "certain embodiments," "an illustrative embodiment," "an example," "a specific example" or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
In summary, although the present invention has been described with reference to the preferred embodiments, the above-described preferred embodiments are not intended to limit the present invention, and those skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention, therefore, the scope of the present invention shall be determined by the appended claims.
Claims (10)
1. A general control box of matcher is characterized in that: the display instrument comprises a shell, wherein a first display meter head and a second display meter head are further arranged on the top surface of the shell, a first toggle switch is correspondingly arranged on the first display meter head, and a second toggle switch is correspondingly arranged on the second display meter head;
the front surface of the shell is also provided with a first mode switching dial and a second mode switching dial, a third display gauge outfit and a fourth display gauge outfit are also arranged below the first mode switching dial and the second mode switching dial, a first adjustable knob is correspondingly arranged right below the third display gauge outfit, and a second adjustable knob is correspondingly arranged right below the fourth display gauge outfit;
the back of casing still is provided with power supply switch, power supply switch's below still is provided with the power supply input line, the next door of power supply input line still is provided with the public head of signal control port and the female head of signal control port, the public head of signal control port with the female head of signal control port will component interconnect on the casing.
2. The matcher universal control box according to claim 1, wherein: the mode switching dial code is composed of a double-contact relay SV1, a double-contact relay SV2 and a double-contact relay SV3, the double-contact relay SV1, the contact relay SV2 and the contact relay SV3 are further provided with a voltage regulation module in a matched mode, the double-contact relay SV1, the contact relay SV2 and the contact relay SV3 are arranged in parallel, the double-contact relay SV1, the contact relay SV2 and the other end of the contact relay SV3 are further respectively connected in series with a button switch S4, a button switch S5 and a button switch S6, two poles of the double-contact relay SV1 are respectively connected in series with an adjustable resistor R2 and an adjustable resistor R4, two poles of the contact relay SV2 are respectively connected in series with an adjustable resistor R1 and an adjustable resistor R3, one pole of the contact relay SV3 is grounded, and the double-contact relay SV1 and the common end of the contact relay SV2 are respectively connected with an adjustable resistor R6.
3. The matcher universal control box according to claim 2, wherein: the mode switching dial code of No. two comprises double contact relay SV4, double contact relay SV5 and double contact relay SV6, double contact relay SV4 double contact relay SV5 with double contact relay SV6 still forms a complete set and is provided with No. two voltage regulation modules in No. two voltage regulation modules double contact relay SV4 double contact relay SV5 with double contact relay SV6 sets up in parallel, double contact relay SV4 double contact relay SV5 with the other end of double contact relay SV6 still establishes ties respectively has button switch S12, button switch S14 and button switch S13, double contact relay SV4 'S two poles of the earth respectively with adjustable resistance R8 and adjustable resistance R10 establish ties, double contact relay SV 5' S two poles of the earth respectively with adjustable resistance R9 and adjustable resistance R11 establish ties, double contact relay SV6 'S one utmost point ground connection, double contact relay SV4 with double contact relay SV 5' S common terminal links to each other in adjustable resistance R7 respectively.
4. The matcher universal control box as claimed in claim 3, wherein: the third display gauge head and the fourth display gauge head are also provided with gauge head display modules in a matching way, a pin of the third display gauge head is connected with the adjustable resistor R6 of the first voltage adjusting module through an amplifier AMP1, a base electrode of the amplifier AMP1 is connected with the third display gauge head, and an emitting electrode of the amplifier AMP1 is connected with the adjustable resistor R6;
the pin of the fourth display gauge head is connected with the adjustable resistor R7 of the second voltage adjusting module through an amplifier AMP4, the base of the amplifier AMP4 is connected with the fourth display gauge head, and the emitter of the amplifier AMP4 is connected with the adjustable resistor R7.
5. The matcher universal control box as set forth in claim 1, wherein: the signal control port male head and the signal control port female head are also provided with a signal interface module and a feedback signal monitoring module in a matched manner, and the signal interface module comprises the signal control port male head and the signal control port female head which are mutually connected;
the feedback signal interface module comprises the first display gauge head and the second display gauge head, the first display gauge head is connected with the first toggle switch, and the first toggle switch is connected with the signal control port male head; the second display meter is connected with the second toggle switch, and the second toggle switch is connected with the signal control port female connector.
6. The matcher universal control box as claimed in claim 5, wherein: the first toggle switch and the second toggle switch are bipolar multi-position switches, and the first toggle switch is connected with the second toggle switch.
7. The matcher universal control box according to claim 1, wherein: a weak current power supply module is further arranged inside the shell and comprises a switching power supply, a first three-terminal voltage stabilizer, a voltage regulator and a second three-terminal voltage stabilizer, a capacitor C1 is connected between the input end of the first three-terminal voltage stabilizer and the grounding end in series, a capacitor C2 is connected between the output end of the first three-terminal voltage stabilizer and the grounding end in series, a capacitor C5 is connected between the input end of the second three-terminal voltage stabilizer and the grounding end in series, and a capacitor C6 is connected between the output end of the second three-terminal voltage stabilizer and the grounding end in series;
the earthing terminal of voltage regulator is connected ground connection behind adjustable resistance R11, electrolytic capacitor C3 has still been established ties between the input of voltage regulator and the earthing terminal, electrolytic capacitor C3's positive pole with the input of voltage regulator links to each other, the output of voltage regulator with it has resistance R12 to establish ties between the adjustable resistance R13, adjustable resistance R13's both ends still connect in parallel electrolytic capacitor C4, electrolytic capacitor C4's positive pole with adjustable resistance R13's input links to each other.
8. The matcher universal control box according to claim 1, wherein: the male head of the signal control port and the female head of the signal control port are both 25 pins.
9. The matcher universal control box as claimed in claim 7, wherein: the voltage provided by the weak current power supply module is 5V, +12V, -12V, 10V, +15V, -15V.
10. The matcher universal control box according to claim 4, wherein: the adjustable voltage ranges of the first voltage adjusting module and the second voltage adjusting module are-12V-12V, 0-10V and-5V.
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CN202222355380.3U CN218727669U (en) | 2022-09-05 | 2022-09-05 | Universal control box for matcher |
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CN202222355380.3U CN218727669U (en) | 2022-09-05 | 2022-09-05 | Universal control box for matcher |
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