CN218710793U

CN218710793U - Target position moving baffle plate component of film plating machine

Info

Publication number: CN218710793U
Application number: CN202222752156.8U
Authority: CN
Inventors: 谭红东; 蒋勤勇
Original assignee: Shenzhen Mingzhi Vacuum Coating Technology Co ltd
Current assignee: Shenzhen Mingzhi Vacuum Coating Technology Co ltd
Priority date: 2022-10-19
Filing date: 2022-10-19
Publication date: 2023-03-24
Anticipated expiration: 2032-10-19

Abstract

The application relates to the technical field of coating equipment and discloses a target position moving baffle plate component of a coating machine. Including the base in this application, the coating machine main part, the gyration inner tube, protection casing and guard plate, a plurality of target positions have been seted up on the inside wall of coating machine main part, the draw-in groove has been seted up to the upper surface of protection casing, and the inside fixed surface of draw-in groove of protection casing is connected with the electro-magnet, the upper surface adsorption of electro-magnet is at the inner wall top of coating machine main part, the inside surface joint of protection casing has electric telescopic handle, the upper surface of guard plate is seted up flutedly, and electric telescopic handle's output passes through screw fixed connection inside the recess of guard plate, fix the inner wall top at the coating machine main part through the upper surface adsorption of starting the electro-magnet with the protection casing, make this baffle subassembly can not lead to the fact the damage to the inside of coating machine main part at the in-process of installation, consequently, the life of coating machine main part is improved to a certain extent.

Description

Target position moving baffle plate component of film plating machine

Technical Field

This application belongs to coating equipment technical field, specifically is coating machine target position movable baffle subassembly.

Background

The vacuum coating machine mainly refers to a coating machine which needs to be carried out under a higher vacuum degree, and specifically comprises various types including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and the like.

A plurality of target positions have been placed to current vacuum coating machine inside, need use the removal baffle subassembly to shelter from the target position that does not use when vacuum coating machine is using the in-process, need use the fastener to install when current removal baffle subassembly is installed inside vacuum coating machine, the in-process of installing the removal baffle subassembly many times causes vacuum coating machine's inner wall to produce easily and damages, therefore we need a coating machine target position to remove the baffle subassembly, the problem of solving.

SUMMERY OF THE UTILITY MODEL

The purpose of this application lies in: in order to solve the problem that the existing movable baffle plate assembly needs to be installed by using a fastener when being installed inside a vacuum coating machine and the inner wall of the vacuum coating machine is easily damaged in the process of installing the movable baffle plate assembly for many times, the target position movable baffle plate assembly of the coating machine is provided.

The technical scheme adopted by the application is as follows:

coating machine target removes baffle subassembly, including base, coating machine main part, gyration inner tube, protection casing and guard plate, a plurality of target positions have been seted up on the inside wall of coating machine main part, the draw-in groove has been seted up to the upper surface of protection casing, just the inside fixed surface of draw-in groove of protection casing is connected with the electro-magnet, the upper surface of electro-magnet adsorbs the inner wall top of coating machine main part, the inside surface joint of protection casing has electric telescopic handle, the upper surface of guard plate is seted up flutedly, just electric telescopic handle's output passes through screw fixed connection and is in inside the recess of guard plate, just the position of guard plate is located the gyration inner tube with between the inner wall of coating machine main part.

Through adopting above-mentioned technical scheme, adsorb the upper surface of protection casing through starting the electro-magnet and fix at the inner wall top of coating machine main part for this baffle subassembly can not cause the damage to the inside of coating machine main part at the in-process of installation, consequently improves the life of coating machine main part to a certain extent.

In a preferred embodiment, the end of the protective cover away from the protective plate is provided with a degaussing plate.

Through adopting above-mentioned technical scheme, block the magnetic force that the electro-magnet propagated to electric telescopic handle in the use through the demagnetization board to avoid the electro-magnet to influence electric telescopic handle at the in-process that uses as far as possible and carry out normal use.

In a preferred embodiment, a protective pad is adhered to one side of the electromagnet away from the demagnetizing plate.

Through adopting above-mentioned technical scheme, protect the part that the electro-magnet exposes outside through the protection pad to avoid the electro-magnet to produce the damage after suffering the striking as far as possible.

In a preferred embodiment, a handle is welded to the end of the screw.

Through adopting above-mentioned technical scheme, drive the screw through rotating the handle and rotate for the staff need not to rely on the instrument can install and dismantle the screw, consequently improves staff's installation effectiveness to a certain extent.

In a preferred embodiment, the inner diameter of the recess of the protective plate is adapted to the outer diameter of the protective cover.

Through adopting above-mentioned technical scheme, drive the guard plate through starting electric telescopic handle and upwards remove, with the surface joint of the recess internal surface of guard plate at the surface of protection casing for the protection casing protects the inside of guard plate recess, thereby avoids the dust to get into inside the recess of guard plate as far as possible.

In conclusion, due to the adoption of the technical scheme, the beneficial effects of the application are as follows:

1. in this application, fix the upper surface adsorption of protection casing at the inner wall top of coating machine main part through starting the electro-magnet, make this baffle subassembly can not cause the damage to the inside of coating machine main part at the in-process of installation, consequently, improve the life of coating machine main part to a certain extent, and simultaneously, shift out the screw from electric telescopic handle's output is inside through rotating the screw, but make the disconnection between electric telescopic handle and the guard plate, thereby make single part or equipment need not to change whole after damaging in this baffle subassembly, consequently reduce this baffle subassembly's later maintenance expense to a certain extent.

2. In this application, drive the guard plate through starting electric telescopic handle and upwards remove, with the inside surperficial joint of recess of guard plate at the surface of guard shield for the guard shield protects the inside of guard plate recess, thereby avoids the dust to get into inside the recess of guard plate as far as possible, consequently reduces the staff to the inside clean number of times of guard plate recess to a certain extent.

Drawings

FIG. 1 is a schematic front view of the present application;

FIG. 2 is a side view schematic of the present application;

fig. 3 is an enlarged view of fig. 1 at a.

The labels in the figure are: 1. a base; 2. a film plating machine main body; 3. a rotary inner cylinder; 4. a protective cover; 5. an electric telescopic rod; 6. a protection plate; 7. a protective pad; 8. a screw; 9. a handle; 10. a degaussing plate; 11. an electromagnet.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the embodiments of the present application, and it is obvious that the described embodiments are some embodiments of the present application, but not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

Example (b):

with reference to figures 1-3 of the drawings,

coating machine target position removes baffle subassembly, the on-line screen storage device comprises a base 1, coating machine main part 2, gyration inner tube 3, protection casing 4 and guard plate 6, a plurality of target positions have been seted up on coating machine main part 2's the inside wall, the draw-in groove has been seted up to protection casing 4's upper surface, and the inside fixed surface of draw-in groove of protection casing 4 is connected with electro-magnet 11, the upper surface of electro-magnet 11 adsorbs at coating machine main part 2's inner wall top, protection casing 4's inside surface joint has electric telescopic handle 5, the upper surface of guard plate 6 is seted up flutedly, and electric telescopic handle 5's output passes through screw 8 fixed connection inside the recess of guard plate 6, and the position of guard plate 6 is located between the inner wall of gyration inner tube 3 and coating machine main part 2.

Drive guard plate 6 through starting electric telescopic handle 5 and remove in the inside of coating machine main part 2 for guard plate 6 can shelter from the protection to the target position that need not carry out work temporarily, simultaneously, fix the upper surface adsorption of protection casing 4 at the inner wall top of coating machine main part 2 through starting electromagnet 11, make this baffle subassembly can not cause the damage to the inside of coating machine main part 2 at the in-process of installation, consequently improve the life of coating machine main part 2 to a certain extent.

In addition, the screw 8 is moved out from the inside of the output end of the electric telescopic rod 5 by rotating the screw 8, so that the electric telescopic rod 5 and the protection plate 6 can be disconnected, single parts or equipment in the baffle plate assembly do not need to be integrally replaced after being damaged, and the later maintenance cost of the baffle plate assembly is reduced to a certain extent.

The one end that guard plate 6 was kept away from to protection casing 4 is provided with demagnetization board 10, blocks the magnetic force that electro-magnet 11 propagated to electric telescopic handle 5 in the use through demagnetization board 10 to avoid electro-magnet 11 to influence electric telescopic handle 5 at the in-process that uses as far as possible and carry out normal use.

The protection pad 7 is bonded on one side of the electromagnet 11 far away from the demagnetizing plate 10, and the exposed part of the electromagnet 11 is protected by the protection pad 7, so that the electromagnet 11 is prevented from being damaged after being impacted as much as possible, and the service life of the electromagnet 11 is prolonged to a certain extent.

The tip welding of screw 8 has handle 9, drives screw 8 through rotating handle 9 and rotates for the staff need not to rely on the instrument can install and dismantle screw 8, consequently improves staff's installation effectiveness to a certain extent.

The recess internal diameter of guard plate 6 and the external diameter looks adaptation of protection casing 4, after this protection component dismantles, drive guard plate 6 through starting electric telescopic handle 5 and upwards remove, with the inside surface joint of recess of guard plate 6 at the surface of protection casing 4 for protection casing 4 protects the inside of 6 recesses of guard plate, thereby avoids the dust to get into inside the recess of guard plate 6 as far as possible, consequently reduces the staff to the inside clean number of times of 6 recesses of guard plate to a certain extent.

The implementation principle of this application coating machine target position movement baffle subassembly embodiment does:

After this protection component dismantles, drive guard plate 6 through starting electric telescopic handle 5 and upwards remove, with the inside surface joint of recess of guard plate 6 at the surface of protection casing 4 for protection casing 4 protects the inside of 6 recesses of guard plate, thereby avoids the dust to get into inside the recess of guard plate 6 as far as possible, consequently reduces the clean number of times of staff to the inside of 6 recesses of guard plate to a certain extent.

The above embodiments are only used to illustrate the technical solutions of the present application, and not to limit the same; although the present application has been described in detail with reference to the foregoing embodiments, it should be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions in the embodiments of the present application.

Claims

1. Baffle subassembly is removed to coating machine target position, including base (1), coating machine main part (2), gyration inner tube (3), protection casing (4) and guard plate (6), its characterized in that: a plurality of target positions are arranged on the inner side wall of the film coating machine main body (2), a clamping groove is formed in the upper surface of the protective cover (4), an electromagnet (11) is fixedly connected to the inner surface of the clamping groove of the protective cover (4), the upper surface of the electromagnet (11) is adsorbed on the top of the inner wall of the film coating machine main body (2), an electric telescopic rod (5) is connected to the inner surface of the protective cover (4) in a clamped mode, a groove is formed in the upper surface of the protective plate (6), the output end of the electric telescopic rod (5) is fixedly connected with the inner surface of the protective plate (6) through a screw (8), and the position of the protective plate (6) is located between the inner wall of the rotary inner cylinder (3) and the inner wall of the film coating machine main body (2).

2. The coater target moving baffle assembly as set forth in claim 1 wherein: and a demagnetizing plate (10) is arranged at one end, far away from the protection plate (6), of the protection cover (4).

3. The coater target moving baffle assembly as set forth in claim 2 wherein: and a protective pad (7) is bonded on one side of the electromagnet (11) far away from the demagnetizing plate (10).

4. The coater target moving baffle assembly as set forth in claim 1 wherein: the end part of the screw (8) is welded with a handle (9).

5. The coater target moving baffle assembly as set forth in claim 1 wherein: the inner diameter of the groove of the protection plate (6) is matched with the outer diameter of the protection cover (4).