CN218691247U - Annular array ultrasonic transducer - Google Patents
Annular array ultrasonic transducer Download PDFInfo
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- CN218691247U CN218691247U CN202222280870.1U CN202222280870U CN218691247U CN 218691247 U CN218691247 U CN 218691247U CN 202222280870 U CN202222280870 U CN 202222280870U CN 218691247 U CN218691247 U CN 218691247U
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Abstract
The utility model relates to an annular array ultrasonic transducer, which comprises a piezoelectric layer, a matching layer arranged on one side of the piezoelectric layer and a back lining layer arranged on the other side of the piezoelectric layer, wherein the piezoelectric layer, the matching layer and the back lining layer are coaxially arranged; the piezoelectric layer comprises a piezoelectric material layer and an annular electrode layer arranged on the piezoelectric material layer; the piezoelectric material layer is arranged on one surface of the piezoelectric layer opposite to the matching layer, and the annular electrode layer is arranged on the other surface of the piezoelectric layer opposite to the backing layer. Compared with the prior art, the utility model discloses keeping with the same condition of existing equal area annular array ultrasonic transducer overall dimension under, can effectively restrain apart from the nearest other lamella of sound of focus point, satisfied practical application demand.
Description
Technical Field
The utility model relates to a transmission line technical field especially relates to an annular array ultrasonic transducer.
Background
The array ultrasonic detection technology is a multi-channel ultrasonic technology, an ultrasonic array transducer is formed by adopting a group of mutually independent sound production units, and the ultrasonic focusing and nondestructive detection functions are realized by designing different array element shapes and arrangement modes thereof and combining a specific sound beam control algorithm. Currently, one-dimensional linear array transducers and two-dimensional matrix ultrasonic transducers are most common in both theoretical research and industrial applications. The one-dimensional linear array ultrasonic transducer has the advantages of simple structure, low manufacturing cost and relatively simple sound beam control algorithm, the matrix ultrasonic transducer can realize deflection and focusing of ultrasonic sound beams in a three-dimensional space, but the number of array elements is large, the sound beam control algorithm is complex, and the preparation process is relatively difficult.
Different from linear array and matrix ultrasonic transducers, the single array element of the annular ultrasonic transducer has larger size and is distributed in an axisymmetric way, and a high-resolution focusing sound field can be generated on a central axis by using less array element quantity and a relatively simple sound beam control algorithm. In order to realize the same impedance matching between each ring electrode and the piezoelectric array element layer, the area of each ring electrode must be the same.
However, as can be known from simulation of a sound field by a finite element method, this type of electrode structure may generate a strong side lobe in the sound field, and the generation of the side lobe may seriously affect the imaging effect of ultrasonic detection. Specifically, when detecting an ultrasonic echo signal, in addition to an echo signal reflected at a focus point, an interference signal generated by reflection of a side lobe closer to the focus point on a plane to be measured is also received, and the closer the side lobe is to the focus point, the stronger the generated interference is, which directly causes "artifacts" in an imaging graph.
Therefore, it is desirable to provide a ring array structure capable of suppressing acoustic side lobes near a focus point.
SUMMERY OF THE UTILITY MODEL
In order to solve the above problem, the present invention provides an annular array ultrasonic transducer capable of suppressing acoustic side lobes near a focus point.
An annular array ultrasonic transducer comprises a piezoelectric layer, a matching layer arranged on one side of the piezoelectric layer and a backing layer arranged on the other side of the piezoelectric layer, wherein the piezoelectric layer, the matching layer and the backing layer are coaxially arranged; the piezoelectric layer comprises a piezoelectric material layer and an annular electrode layer arranged on the piezoelectric material layer; the piezoelectric material layer is arranged on one surface of the piezoelectric layer opposite to the matching layer, and the annular electrode layer is arranged on the other surface of the piezoelectric layer opposite to the backing layer.
In addition, according to the utility model provides an annular array ultrasonic transducer can also have as follows additional technical characteristics:
furthermore, the annular electrode layer comprises a circular electrode and a plurality of annular electrodes which are arranged outwards at equal intervals by taking the circular electrode as the center; wherein the annular electrode is an equal-width annular electrode.
Further, the radius of circular electrode is 0.7mm, the quantity of wide ring electrode in the ring electrode is 4, 4 the outer loop radius of equal width ring electrode is 1.3mm, 1.8mm, 2.3mm, 2.8mm in proper order, and wherein, the interval between each equal width ring electrode is 200um.
Furthermore, the circular electrode and each annular electrode are provided with an electrode lead, and the electrode leads are distributed at equal intervals.
Further, the piezoelectric material layer comprises a plurality of ceramic columns and epoxy resin filled between the ceramic columns; wherein, the ceramic cylinder adopts KNNS piezoceramics piece cutting to form.
Furthermore, the complete size of the ceramic cylinder is 80um 100um, each ceramic cylinder is a piezoelectric array element, and the interval between the array elements is 50um.
Furthermore, a lead is arranged between the piezoelectric layer and the backing layer and is connected to the annular electrode layer through metal silver adhesive.
Further, the backing layer is provided with a through hole, and the lead extends to the outside through the through hole in the backing layer.
Further, the thickness of annular electrode layer is 80um.
Further, the backing layer is made of an electrically conductive material E-holder 3022, and the matching layer is made of an insulating material; wherein the insulating material comprises an epoxy resin.
According to the utility model provides an annular array ultrasonic transducer, including piezoelectric layer, locate matching layer of one side of the piezoelectric layer and locate the back sheet of the opposite side of the piezoelectric layer, matching layer and back sheet coaxial setting; the piezoelectric layer comprises a piezoelectric material layer and an annular electrode layer arranged on the piezoelectric material layer; the piezoelectric material layer is arranged on one surface of the piezoelectric layer opposite to the matching layer, and the annular electrode layer is arranged on the other surface of the piezoelectric layer opposite to the backing layer. Compared with the prior art, the utility model discloses keeping with the same condition of existing equal area annular array ultrasonic transducer overall dimension under, can effectively restrain apart from the nearest other lamella of sound of focus point, satisfied practical application demand.
Drawings
Fig. 1 is a schematic structural diagram of an annular array ultrasonic transducer according to the present invention;
FIG. 2 is a schematic structural diagram of the piezoelectric layer in FIG. 1;
FIG. 3 is a schematic view of the ring-shaped electrode layer shown in FIG. 2;
FIG. 4 is a vertical cross-sectional view of the sound field of an annular array ultrasonic transducer; wherein, (a) is an equal-area annular array sound field diagram, and (b) is an equal-width annular array sound field diagram;
FIG. 5 is a diagram showing sound pressure distribution in a cross section of a focal point; wherein, (a) is the sound pressure distribution diagram of the equal-area annular array focal plane, and (b) is the sound pressure distribution diagram of the equal-width annular array focal plane.
The following detailed description of the invention will be further described in conjunction with the above-identified drawings.
Detailed Description
In order to make the objects, features and advantages of the present invention more comprehensible, embodiments of the present invention are described in detail below with reference to the accompanying drawings. Several embodiments of the invention are presented in the drawings. The invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. As used herein, the terms "vertical," "horizontal," "left," "right," "up," "down," and the like are for illustrative purposes only and do not indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present invention.
In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
As shown in fig. 1 to 5, an ultrasonic transducer of a ring array includes a piezoelectric layer 20, a matching layer 10 disposed on one side of the piezoelectric layer, and a backing layer 30 disposed on the other side of the piezoelectric layer. The piezoelectric layer 20, the matching layer 10 and the backing layer 30 have the same cross-sectional area, are circular and are coaxially disposed.
Specifically, the piezoelectric layer 20 includes a piezoelectric material layer 21, and an annular electrode layer 22 disposed on the piezoelectric material layer 21. The piezoelectric material layer 21 is disposed on one side of the piezoelectric layer opposite to the matching layer 10, and the annular electrode layer 22 is disposed on the other side of the piezoelectric layer opposite to the backing layer 30. It can be understood that, when sound wave radiation is performed, the electric pulse signal on the annular electrode layer may be controlled to cause the piezoelectric material in the piezoelectric material layer to generate an electric field, so as to drive the piezoelectric material layer to generate vibration and radiate sound wave outwards.
Further, the thickness of the annular electrode layer is 80um, that is, the annular electrode layer in this example is formed by sputtering a gold electrode with a thickness of about 80nm by a magnetron sputtering apparatus after the surface of the piezoelectric material layer is covered with a mask plate. The annular electrode layer 22 includes a circular electrode and a plurality of annular electrodes arranged outward at equal intervals with the circular electrode as a center, and any two electrodes are not in contact with each other. Wherein, the ring electrode is the equal width ring electrode, and the interval between each equal width ring electrode is 200um. And the circular electrodes and the annular electrodes are respectively provided with an electrode lead, the electrode leads are distributed at equal intervals, and the metal leads which are uniformly distributed are connected with the circular electrodes and the annular electrodes and are led out to apply an electric field to the piezoelectric layer.
Preferably, in this embodiment, the radius of the circular electrode is 0.7mm, the number of the middle-width annular electrodes in the annular electrode is 4, and the outer ring radii of the 4 equal-width annular electrodes are sequentially 1.3mm, 1.8mm, 2.3mm, and 2.8mm. Furthermore, the utility model discloses a ring electrode structure does not use traditional processing mode like form independent array element through the mode of physics cutting and chemical etching on a slice bold piezoelectric material, then fills in modes such as insulating material of decoupling, but covers the mask plate on the piezoelectric layer, forms the electrode of required shape at piezoelectric material layer surface sputtering gold (Au) through the magnetron sputtering appearance. The method not only simplifies the processing technology of the annular array transducer, but also solves the problem that the traditional method can generate interference on echo signals due to burrs left on gaps among array elements.
It should be noted that the overall size of the medium-width ring electrode in this embodiment can be set according to the actual application frequency of the ultrasonic wave, and according to the experience of those skilled in the art, the higher the center frequency of the ultrasonic transducer is, the smaller the corresponding transducer size is, and the smaller the corresponding electrode size is.
Further, the piezoelectric material layer 21 includes a plurality of ceramic pillars and epoxy resin filled between the ceramic pillars. Specifically, in this example, a high precision diamond blade was used to form KNNS piezoelectric ceramic sheets into a plurality of ceramic cylinders of size 80um x 100um, each ceramic cylinder being a piezoelectric array element with a pitch of 50um, and the gaps between the array elements were filled with epoxy resin to form 1-3 layers of composite piezoelectric material with low acoustic impedance and high sensitivity.
Further, a lead is further arranged between the piezoelectric layer 20 and the backing layer 30, and the lead is connected to the annular electrode layer through a metal silver adhesive, so that the annular electrode layer and the lead jointly form a grounding electrode. In order that the lead does not affect the connection relationship of the piezoelectric layer and the backing layer, a through hole is provided in the backing layer, the lead extends to the outside through the through hole in the backing layer, and the space between the piezoelectric layer and the backing layer may be filled with epoxy resin.
It should be noted that, in the present embodiment, the backing layer is made of an electrically conductive material E-holder 3022, and the matching layer is made of an insulating material epoxy resin. It should be further understood that these two materials are only preferred materials for the backing layer and the matching layer in this example, and other materials with good conductivity or insulation and good coverage can be used in the present invention.
Because the utility model discloses a ring array ultrasonic transducer uses the low KNNS leadless piezoelectric ceramics of acoustic impedance and the 1-3 composite piezoelectric material that epoxy prepared and form as the piezoelectric layer main part, forms annular array element through wide ring electrode such as sputtering on the piezoelectric layer, uses relatively less array element quantity to produce the high resolution on the central axis and to the other lamella restraining action more obvious focusing sound field of sound. The utility model discloses a make the novelty change to annular electrode structure, effectively restrained near focus's sound sidelobe in the focus sound field.
Further, the equal-width ring electrode can suppress acoustic side lobes near the focal point while maintaining the same overall size as existing equal-area ring array ultrasonic transducers. By means of finite element simulation, acoustic field diagrams of ultrasonic transducers of the equal-area annular array and the equal-width annular array are compared, and it can be found that the equal-width annular array structure can effectively restrain acoustic side lobes which are nearest to a focus point. The vertical cross section of the sound field is shown in fig. 4, in which (a) is equal area annular array sound field pattern, and (b) is equal width annular array sound field pattern. The sound pressure distribution of the cross section of the focusing point is shown in fig. 5, wherein (a) is the sound pressure distribution of the equal area annular array focal plane, and (b) is the sound pressure distribution of the equal width annular array focal plane.
It should be noted that the simulation is only a simulation of a focused sound field, and a solid mechanical field and an electric field are not coupled, the frequency used for the simulation is 10MHz, the focusing distance is set to be 8.0mm, and the sound intensity value measured by the simulation is a result obtained by adding velocities of different phases of 1.0m/s2 on the electrode array elements, and the result of the example is typical.
The utility model provides an annular array ultrasonic transducer, including piezoelectric layer, locate matching layer of one side of the said piezoelectric layer, and locate the back lining layer of the opposite side of the said piezoelectric layer, matching layer and back lining layer are coaxial to set up; the piezoelectric layer comprises a piezoelectric material layer and an annular electrode layer arranged on the piezoelectric material layer; the piezoelectric material layer is arranged on one surface of the piezoelectric layer opposite to the matching layer, and the annular electrode layer is arranged on the other surface of the piezoelectric layer opposite to the backing layer. Compared with the prior art, the utility model discloses keeping with the same condition of existing equal area annular array ultrasonic transducer overall dimension under, can effectively restrain apart from the nearest other lamella of sound of focus point, satisfied practical application demand.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The above-mentioned embodiments only represent some embodiments of the present invention, and the description thereof is specific and detailed, but not to be construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several variations and modifications can be made, which are within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.
Claims (10)
1. The annular array ultrasonic transducer is characterized by comprising a piezoelectric layer, a matching layer arranged on one side of the piezoelectric layer and a backing layer arranged on the other side of the piezoelectric layer, wherein the piezoelectric layer, the matching layer and the backing layer are coaxially arranged; the piezoelectric layer comprises a piezoelectric material layer and an annular electrode layer arranged on the piezoelectric material layer; the piezoelectric material layer is arranged on one surface of the piezoelectric layer opposite to the matching layer, and the annular electrode layer is arranged on the other surface of the piezoelectric layer opposite to the backing layer.
2. The annular array ultrasonic transducer according to claim 1, wherein the annular electrode layer comprises a circular electrode and a plurality of annular electrodes arranged outwards at equal intervals with the circular electrode as the center; wherein the annular electrode is an equal-width annular electrode.
3. The annular array ultrasonic transducer of claim 2, wherein the radius of the circular electrodes is 0.7mm, the number of the ring electrodes with equal width is 4, the outer ring radius of the 4 ring electrodes with equal width is 1.3mm, 1.8mm, 2.3mm, 2.8mm in sequence, and the distance between the ring electrodes with equal width is 200um.
4. The annular array ultrasonic transducer according to claim 3, wherein an electrode lead is disposed on each of the circular electrodes and each of the annular electrodes, and the electrode leads are equally spaced.
5. The annular array ultrasonic transducer according to claim 4, wherein the piezoelectric material layer comprises a plurality of ceramic pillars and epoxy filled between the plurality of ceramic pillars; wherein, the ceramic cylinder adopts KNNS piezoceramics piece cutting to form.
6. The annular array ultrasonic transducer according to claim 5, wherein the ceramic columns are all 80um by 100um in full size, each ceramic column is a piezoelectric array element, and the array element spacing is 50um.
7. The annular array ultrasonic transducer according to claim 1, wherein a lead wire is further disposed between the piezoelectric layer and the backing layer, and the lead wire is connected to the annular electrode layer through a metal silver adhesive.
8. The annular array ultrasonic transducer according to claim 7, wherein the backing layer is provided with a through hole, and the lead wire extends to the outside through the through hole on the backing layer.
9. The annular array ultrasonic transducer of claim 1, wherein the annular electrode layer has a thickness of 80um.
10. The annular array ultrasonic transducer of claim 7, wherein the backing layer is made of an electrically conductive material E-solder3022, and the matching layer is made of an insulating material; wherein the insulating material comprises an epoxy resin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222280870.1U CN218691247U (en) | 2022-08-29 | 2022-08-29 | Annular array ultrasonic transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222280870.1U CN218691247U (en) | 2022-08-29 | 2022-08-29 | Annular array ultrasonic transducer |
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| Publication Number | Publication Date |
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| CN218691247U true CN218691247U (en) | 2023-03-24 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202222280870.1U Active CN218691247U (en) | 2022-08-29 | 2022-08-29 | Annular array ultrasonic transducer |
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| CN (1) | CN218691247U (en) |
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- 2022-08-29 CN CN202222280870.1U patent/CN218691247U/en active Active
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