CN218677037U - Loading and unloading jig of ion extraction manipulator - Google Patents

Abstract

The utility model relates to a semiconductor extraction ion equipment technical field discloses a loading and unloading tool of ion extraction controller, including locate the fixing base on the ion extraction controller, with fixing base sliding connection's guide bar group with locate the accessory plate of guide bar group tip, the fixing base includes a body coupling's fixed plate and backup pad, offer in the backup pad and be used for the cover to establish the direction through-hole of guide bar group on the accessory plate and with the guide bar group corresponds the department, seted up with the corresponding assembly groove of guide bar group, the fixed plate towards one side of guide bar group seted up be used for with the fixed orifices of connection can be dismantled to the ion extraction controller, the fixed plate deviates from one side of guide bar group is equipped with be used for the fixing base with the alignment piece of the accurate assembly of ion extraction controller. The utility model provides high loading and unloading efficiency, the accurate nature of loading and unloading and security of ion extraction controller.

Description

Loading and unloading jig of ion extraction manipulator

Technical Field

The application relates to the technical field of semiconductor extraction ion equipment, in particular to a loading and unloading jig of an ion extraction manipulator.

Background

In a semiconductor manufacturing process, ions are doped into a predetermined region of a semiconductor through an ion implantation machine body to change the electrical property in the region, an arc cavity for generating the ions needs an ion extraction manipulator to pull out the ions (manager assembly) for extracting the ions to form an initial ion beam, preliminarily accelerate the ion beam, inhibit electrons and prevent x-rays, the ion extraction manipulator belongs to a replacement item in PM and needs to push and pull the ion extraction manipulator back and forth, and the ion extraction manipulator has more integrated parts, is heavy in the whole machine, large in size, small in loading position, and difficult to machine by a weak operator due to the fact that the ion extraction manipulator has a single hand-held position and a narrow working space in actual operation; the ion extraction manipulator needs to be operated by a strong engineer, is easy to shake when the ion extraction manipulator is assembled and disassembled manually in the process of loading, has the risk of collision or friction to other parts in a cavity, and needs to be added with an extraction potential of 80KV and a compression potential of 5KV, if the ion extraction manipulator is not assembled in place with a machine body, the short fault of the potential can be caused, and the situation needs to be changed.

SUMMERY OF THE UTILITY MODEL

The application provides a loading and unloading tool of ion extraction controller to improve loading and unloading efficiency, the accurate nature of loading and unloading and the loading and unloading security of ion extraction controller.

For realizing the purpose of the above utility model, the technical scheme adopted is as follows:

the mounting and dismounting jig comprises a fixing seat arranged on the ion extraction manipulator, a guide rod group in sliding connection with the fixing seat and an auxiliary plate arranged at the end part of the guide rod group, wherein the fixing seat comprises a fixing plate and a supporting plate which are integrally connected, a guide through hole for sleeving the guide rod group is formed in the supporting plate, an assembling groove corresponding to the guide rod group is formed in the position, corresponding to the guide rod group, of the auxiliary plate, a fixing hole for detachably connecting with the ion extraction manipulator is formed in one side, facing the guide rod group, of the fixing plate, and an alignment piece for accurately assembling the fixing seat and the ion extraction manipulator is arranged on one side, facing away from the guide rod group, of the fixing plate.

The utility model discloses further set up to: the guide rod group comprises a first guide rod and a second guide rod which are symmetrically arranged, threads are arranged at the end parts of the first guide rod and the second guide rod, and the first guide rod and the second guide rod are matched with the guide through holes.

The utility model discloses further set up to: the guide rod group comprises a plurality of third guide rods which are linearly arranged at equal intervals, threads are arranged at the end parts of the third guide rods, and the third guide rods are matched with the guide through holes.

The utility model discloses further set up to: the fixed plate is in a rectangular structure, a first round angle is formed in the top corner end of the fixed plate, and the fixed holes are uniformly distributed in the fixed plate and are close to the first round angle.

The utility model discloses further set up to: the auxiliary plate is arranged in a rectangular structure, a second round angle is formed in the top corner end of the auxiliary plate, and a certain distance is kept between one side of the auxiliary plate facing the fixed seat and the fixed seat.

The utility model discloses further set up to: and auxiliary holes are arranged on the auxiliary plate and are uniformly distributed on the auxiliary plate and close to the second round angle.

The utility model discloses further set up to: the fixed seat, the guide rod group and the auxiliary plate are made of alloy manganese steel or alloy tungsten steel.

The utility model discloses further set up to: the alignment piece comprises a plurality of alignment blocks integrally connected with the fixed seat, and the alignment blocks are uniformly arranged on the fixed seat and are staggered with each other.

The utility model discloses further set up to: the cross section of the alignment piece is rectangular, triangular or circular.

The utility model discloses further set up to: the alignment piece comprises a plurality of alignment blocks integrally connected with the fixed seat, and the alignment blocks are arranged on the fixed seat at equal intervals and keep an inclination angle with the fixed seat.

In conclusion, compared with the prior art, the application discloses a loading and unloading tool of ion extraction controller, which comprises a fixed base, guide bar group and accessory plate, the fixed base passes through the fixed plate to be connected with the ion extraction controller, and establish on guide bar group through the backup pad cover, make the ion extraction controller can follow guide bar group reciprocating sliding, the accessory plate is located guide bar group tip and is used for backstop and spacing, wherein one side that the fixed plate deviates from guide bar group is equipped with the counterpoint piece that is used for the accurate assembly of fixed base and ion extraction controller, so that the fixed base can be dismantled with the rapidity of ion extraction controller and be connected, through above-mentioned setting promptly, the loading and unloading efficiency of ion extraction controller, the accurate nature of loading and unloading and loading and unloading security have been improved.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the description below are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.

FIG. 1 is an assembly view of a loading/unloading fixture of the ion extraction manipulator of the present embodiment;

fig. 2 is a schematic view of a first structure of a loading/unloading fixture of the ion extraction manipulator in this embodiment;

fig. 3 is a schematic diagram illustrating a second structure of a loading/unloading fixture of the ion extraction manipulator in this embodiment;

fig. 4 is a schematic view of a third structure of a loading and unloading fixture of the ion extraction manipulator in this embodiment;

fig. 5 is a schematic diagram illustrating a fourth structure of a loading/unloading fixture of the ion extraction manipulator according to the present embodiment.

1. A fixed seat; 11. a fixing plate; 12. a support plate; 13. a guide through hole; 14. a fixing hole; 15. a first rounded corner; 2. a guide rod group; 21. a first guide bar; 22. a second guide bar; 23. a third guide bar; 3. an auxiliary plate; 31. assembling a groove; 32. a second rounded corner; 33. an auxiliary hole; 4. a positioning piece; 41. a positioning block; 42. aligning strips; 100. an ion extraction manipulator; 200. and (6) assembling and disassembling the jig.

Detailed Description

Reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, like numbers in different drawings represent the same or similar elements unless otherwise indicated. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present application. Rather, they are merely examples of apparatus and methods consistent with certain aspects of the present application, as detailed in the appended claims.

It should be noted that, in this document, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, the recitation of a claim "comprising a" 8230a "\8230means" does not exclude the presence of additional identical elements in the process, method, article or apparatus in which the element is incorporated, and further, similarly named components, features, elements in different embodiments of the application may have the same meaning or may have different meanings, the specific meaning of which should be determined by its interpretation in the specific embodiment or by further combination with the context of the specific embodiment.

It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.

In the following description, suffixes such as "module", "component", or "unit" used to indicate elements are used only for facilitating the description of the present application, and have no particular meaning in themselves. Thus, "module", "component" or "unit" may be used mixedly.

In the description of the present application, it should be noted that the terms "upper", "lower", "left", "right", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

The technical solution shown in the present application will be described in detail by specific examples. It should be noted that the description sequence of the following embodiments is not intended to limit the priority sequence of the embodiments.

Example one

Referring to fig. 1 and 2, a mounting and dismounting jig 200 is mounted on one side of an ion extraction controller 100, and includes a fixing base 1, a guide rod group 2 slidably connected to the fixing base 1, and an auxiliary plate 3 disposed at an end of the guide rod group 2, where the fixing base 1 includes a fixing plate 11 and a supporting plate 12 integrally connected, a fixing hole 14 for detachably connecting to the ion extraction controller 100 is disposed on one side of the fixing plate 11 facing the guide rod group 2, a guide through hole 13 for housing the guide rod group 2 is disposed on the supporting plate 12, and a mounting groove 31 corresponding to the guide rod group 2 is disposed on the auxiliary plate 3 and at a position corresponding to the guide rod group 2.

In the specific implementation process, the detachable connection between the loading and unloading jig 200 and the extraction controller 100 is maintained through the fixing plate 11, specifically, the bolt is fixed to the extraction controller 100 through the fixing hole 14, namely, the fixing effect is exerted through the fixing plate 11, the connection strength between the loading and unloading jig 200 and the fixing plate 11 is improved through the integrally connected supporting plate 12, the overall firmness of the fixing seat 1 is further maintained, the fixing seat 1 is maintained to stably slide along the guide rod group 2 in a reciprocating manner through the design of the guide through hole 13, and the ion extraction controller 100 is further driven to slide along the guide rod group 2 in a reciprocating manner, so that the manual operation force is saved, and the operation difficulty of the equipment is reduced.

Further, the one end of guide bar group 2 is equipped with accessory plate 3, and accessory plate 3 is through assembly groove 31 and guide bar group 2 looks adaptation, and is concrete, but assembly groove 31 and guide bar group 2 interference fit connection or screw fixed connection for exert accessory plate 3's backstop and limiting displacement avoid ion extraction controller 100 slippage, improve the practicality.

In this embodiment, the guide rod group 2 includes a first guide rod 21 and a second guide rod 22, the first guide rod 21 and the second guide rod 22 are both matched with the guide through hole 13, and the first guide rod 21 and the second guide rod 22 are symmetrically arranged, so that the fixing base 1 can slide stably along the guide rod group 2.

It should be noted that, the ends of the first guide rod 21 and the second guide rod 22 far away from the auxiliary plate 3 may be provided with threads for being fixedly connected with the ion implanter body, so that the guide rod group 2 and the support plate 12 are stably matched, thereby ensuring that the ion extraction manipulator 100 stably slides into and out of the arc cavity of the ion implanter body along the guide rod group 2, so that the ion extraction manipulator 100 extracts ions.

In some embodiments, referring to fig. 3, the guide rod group 2 includes a plurality of third guide rods 23, the plurality of third guide rods 23 are arranged at equal intervals, the end of the third guide rod 23 is provided with a thread, the third guide rod 23 is matched with the guide through hole 13, that is, by the linear array design of the guide rods, so that the guide rod group 2 is stably matched with the support plate 12, thereby ensuring that the ion extraction manipulator 100 slides smoothly into and out of the arc cavity of the ion implanter body along the guide rod group 2, so that the ion extraction manipulator 100 extracts ions.

In the specific implementation process, the fixed seat 1, the guide rod group 2 and the auxiliary plate 3 are made of alloy manganese steel or alloy tungsten steel materials so as to maintain the structural strength and durability.

Further, the fixed plate 11 is a rectangular structure and the vertex angle end thereof is provided with a first fillet 15 to prevent the corner from scratching human body, equipment or cable, and the fixed holes 14 are uniformly distributed on the fixed plate 11 and close to the first fillet 15, so as to ensure the stable connection of the fixed plate 11 and the ion extraction controller 100.

It should be noted that the auxiliary plate 3 is a rectangular structure and the vertex angle end thereof is provided with a second fillet 32 to prevent the corner from scratching human bodies, equipment or cables, wherein one side of the auxiliary plate 3 facing the fixing base 1 is kept at a certain distance from the fixing base 1, so that the auxiliary plate 3 can be fully contacted with the supporting plate 12 when the stopping and limiting functions are exerted, and the practicability is improved.

Furthermore, the auxiliary plate 3 is provided with auxiliary holes 33, and the auxiliary holes 33 are uniformly distributed on the auxiliary plate 3 and close to the second round angle 32, so that the auxiliary plate 3 can be fixedly connected with external equipment through the auxiliary holes 33.

In this embodiment, refer to fig. 2 and 4, one side of the fixed plate 11 departing from the guide bar group 2 is provided with the alignment piece 4, wherein the alignment piece 4 includes a plurality of alignment blocks 41 integrally connected with the fixed base 1, a plurality of alignment blocks 41 are uniformly arranged on the fixed base 1 and are staggered with each other, it can be understood that an alignment groove matched with the alignment blocks 41 is provided on the ion extraction controller 100 and at a position corresponding to the alignment blocks 41, that is, through the design of the alignment blocks 41 in staggered arrangement, the precise and stable assembly of the fixed base 1 and the ion extraction controller 100 is ensured, and the detachable connection efficiency is improved.

Alternatively, the cross section of the aligning member 4 may be rectangular, triangular or circular to improve the assembling practicality.

In some embodiments, referring to fig. 2 and 5, the aligning member 4 further includes a plurality of aligning bars 42 integrally connected to the fixing base 1, the plurality of aligning bars 42 are arranged on the fixing base 1 at equal intervals and keep an inclined angle with the fixing base 1, that is, the aligning bars 42 are designed to be inclined through the equal intervals, so as to ensure accurate and stable assembly of the fixing base 1 and the ion extraction controller 100, and improve the detachable connection efficiency, it should be noted that the inclined angle between the aligning bars 42 and the fixing base 1 is an included angle of a horizontal/vertical parallel line between a side edge of the aligning bar 42 and a side surface of the fixing base 1 on which the aligning bar 42 is arranged, and the included angle is 45 °.

In summary, the application discloses a loading and unloading jig of an ion extraction controller, including a fixed seat 1, a guide rod group 2 and an auxiliary plate 3, the fixed seat 1 is connected with the ion extraction controller 100 through a fixed plate 11, and is sleeved on the guide rod group 2 through a supporting plate 12, so that the ion extraction controller 100 can slide along the guide rod group 2 in a reciprocating manner, the auxiliary plate 3 is arranged at the end of the guide rod group 2 and is used for stopping and limiting, wherein an aligning member 4 for accurately assembling the fixed seat 1 and the ion extraction controller 100 is arranged at one side of the fixed plate 11 departing from the guide rod group 2, so that the fixed seat 1 and the ion extraction controller 100 can be quickly and detachably connected, namely, the loading and unloading jig replaces manpower, the stable assembly and separation of the ion extraction controller 100 relative to an electric arc cavity of an ion implantation machine body are ensured, and the loading and unloading efficiency, the loading and unloading accuracy and the safety of the ion extraction controller are improved.

Example two

The utility model provides a loading and unloading tool of ion extraction controller, refer to fig. 1, 2 and 4, loading and unloading tool 200 assembles in one side of ion extraction controller 100, including fixing base 1, guide bar group 2 with fixing base 1 sliding connection and the accessory plate 3 of locating the guide bar group 2 tip, fixing base 1 includes a fixed plate 11 and a backup pad 12 of body coupling, fixed plate 11 offers the fixed orifices 14 that is used for dismantling the connection with ion extraction controller 100 towards one side of guide bar group 2, offer the guide through-hole 13 that is used for the cover to establish guide bar group 2 in the backup pad 12, correspond department on accessory plate 3 and with guide bar group 2, set up the assembly groove 31 corresponding with guide bar group 2, guide bar group 2 includes symmetrical arrangement's first guide bar 21 and second guide bar 22, first guide bar 21 and second guide bar 22 all match with guide through-hole 13, one side that fixing plate 11 deviates from guide bar group 2 is equipped with counterpoint piece 4, counterpoint piece 4 includes a plurality of counterpoint piece 41 with fixing base 1 body coupling, a plurality of counterpoint piece 41 is evenly arranged and staggered arrangement each other on fixing base 1.

In the specific implementation process, the detachable connection between the handling jig 200 and the extraction controller 100 is maintained through the fixing plate 11 and the fixing hole 14, the connection strength between the handling jig and the fixing plate 11 is improved through the integrally connected supporting plate 12, and further the overall firmness of the fixing seat 1 is maintained, the fixing seat 1 is maintained to stably slide back and forth along the guide rod set 2 through the guide through hole 13, the first guide rod 21 and the second guide rod 22, and further the ion extraction controller 100 is driven to slide back and forth along the guide rod set 2, the assembling groove 31 and the guide rod set 2 can be in interference connection or in screw fixed connection for exerting the stopping and limiting effects of the auxiliary plate 3, and through the design of the alignment blocks 41 in staggered arrangement, the accurate and stable assembly between the fixing seat 1 and the ion extraction controller 100 is ensured, and the detachable connection efficiency is improved.

Wherein, the one end that accessory plate 3 was kept away from to first guide bar 21 and second guide bar 22 can be equipped with the screw thread for with ion implantation organism fixed connection, so that guide bar group 2 is stable with the backup pad 12 cooperation, and then guarantees that ion extraction controller 100 is along the steady electric arc cavity that slides in roll-off ion implantation organism of guide bar group 2, so that ion extraction controller 100 carries out the extraction ion.

Alternatively, the cross section of the aligning member 4 may be rectangular, triangular or circular to improve the assembling practicality.

It can be understood that the ion extraction manipulator 100 is provided with a corresponding alignment slot corresponding to the alignment block 41 and matching with the alignment block 41.

In summary, the application discloses a loading and unloading jig of an ion extraction controller, including a fixed base 1, a guide rod group 2, an auxiliary plate 3 and a positioning piece 4, the fixed base 1 is connected with the ion extraction controller 100 through a fixed plate 11, and is sleeved on the guide rod group 2 through a supporting plate 12, so that the ion extraction controller 100 can slide along the guide rod group 2 in a reciprocating manner, the auxiliary plate 3 is arranged at the end part of the guide rod group 2 and is used for stopping and limiting, wherein the positioning piece 4 used for accurately assembling the fixed base 1 and the ion extraction controller 100 is arranged at one side of the fixed plate 11 departing from the guide rod group 2, so that the fixed base 1 and the ion extraction controller 100 can be quickly and detachably connected, namely, through the arrangement, manual work is replaced by the loading and unloading jig, stable assembly and separation of the ion extraction controller 100 relative to an arc cavity of an ion implantation machine body are ensured, and the loading and unloading efficiency, the loading and unloading accuracy and the loading and the unloading safety of the ion extraction controller are improved.

The waste sulfuric acid recycling device provided by the present application is described in detail above, and the principle and the implementation manner of the present application are explained by applying specific examples, and the description of the above examples is only used to help understanding the core idea of the present application; meanwhile, for those skilled in the art, according to the idea of the present application, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present application.

Claims (10)

1. The utility model provides a loading and unloading tool of ion extraction controller which characterized in that: the ion extraction manipulator comprises a fixed seat arranged on an ion extraction manipulator, a guide rod group in sliding connection with the fixed seat and an auxiliary plate arranged at the end part of the guide rod group, wherein the fixed seat comprises a fixed plate and a supporting plate which are integrally connected, a guide through hole for sleeving the guide rod group is formed in the supporting plate, an assembling groove corresponding to the guide rod group is formed in the auxiliary plate and corresponds to the guide rod group, a fixed hole for detachably connecting with the ion extraction manipulator is formed in one side, facing the guide rod group, of the fixed plate, and an aligning piece for accurately assembling the fixed seat and the ion extraction manipulator is arranged on one side, facing away from the guide rod group, of the fixed plate.

2. The handling tool of an ion extraction manipulator as recited in claim 1, wherein said set of guide rods comprises a first guide rod and a second guide rod arranged symmetrically, wherein the ends of said first guide rod and said second guide rod are threaded, and wherein said first guide rod and said second guide rod are both matched with said guide through hole.

3. The handling tool of an ion extraction manipulator as claimed in claim 1, wherein the guide rod set comprises a plurality of third guide rods, the plurality of third guide rods are linearly arranged at equal intervals, the end of the third guide rod is provided with a thread, and the third guide rods are matched with the guide through holes.

4. The handling tool of claim 1, wherein the mounting plate is rectangular and has a first rounded corner at a top corner thereof, and the mounting holes are uniformly distributed on the mounting plate and close to the first rounded corner.

5. The handling apparatus of claim 1, wherein the auxiliary plate is rectangular and has a second rounded corner at a top corner thereof, and a side of the auxiliary plate facing the mounting seat is spaced from the mounting seat.

6. The handling tool of an ion extraction manipulator as recited in claim 5, wherein the auxiliary plate has auxiliary holes formed therein, the auxiliary holes being evenly distributed on the auxiliary plate and proximate to the second rounded corner.

7. The handling fixture of an ion extraction manipulator of claim 1, wherein the mounting base, the set of guide rods, and the auxiliary plate are made of manganese alloy steel or tungsten alloy steel.

8. The handling apparatus of an ion extraction manipulator as claimed in claim 1, wherein the alignment member comprises a plurality of alignment blocks integrally connected to the fixing base, and the plurality of alignment blocks are uniformly arranged on the fixing base and are staggered with respect to each other.

9. The handling tool of an ion extraction manipulator of claim 8, wherein the cross-section of the alignment member is rectangular, triangular or circular.

10. The handling apparatus of an ion extraction manipulator as claimed in claim 1, wherein the alignment member comprises a plurality of alignment bars integrally connected to the mounting base, and the plurality of alignment bars are arranged on the mounting base at equal intervals and maintain an inclination angle with the mounting base.

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