CN218655805U - Cleaning device for electronic-grade hydrofluoric acid packaging container - Google Patents
Cleaning device for electronic-grade hydrofluoric acid packaging container Download PDFInfo
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- CN218655805U CN218655805U CN202221755694.6U CN202221755694U CN218655805U CN 218655805 U CN218655805 U CN 218655805U CN 202221755694 U CN202221755694 U CN 202221755694U CN 218655805 U CN218655805 U CN 218655805U
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Abstract
The utility model discloses an electronic grade hydrofluoric acid packaging container belt cleaning device relates to container cleaning equipment technical field, include: a base; the swinging platform is arranged above the base; the telescopic mechanisms are symmetrically arranged on two side walls of the base, the base is connected with the swinging platform through the telescopic mechanisms, and the telescopic mechanisms are used for driving the swinging platform to do up-and-down swinging motion; the rotary frame is arranged above the swing platform and used for fixedly placing the electronic-grade hydrofluoric acid packaging container; and the rotating mechanism is arranged on the swinging platform and is used for driving the rotating frame to do rotating motion. The cleaning device for the electronic-grade hydrofluoric acid packaging container has the advantages that the cleanliness of the electronic-grade hydrofluoric acid packaging container can be improved through combination of swinging and rotating modes, the cleaning grade is guaranteed, and the cost is saved.
Description
Technical Field
The utility model relates to a container cleaning equipment technical field, concretely relates to electron level hydrofluoric acid packaging container belt cleaning device.
Background
Electronic grade hydrofluoric acid, also known as high-purity hydrofluoric acid, has extremely strong corrosivity and active chemical properties, and the purity and cleanliness of the electronic grade hydrofluoric acid have extremely important influences on the yield, the electrical property and the reliability of integrated circuits. Therefore, strict requirements are put on the purity and the cleaning technology of the electronic grade hydrofluoric acid packaging container. However, when the existing cleaning device is used for cleaning an electronic-grade hydrofluoric acid packaging container, most of the existing cleaning devices are difficult to ensure the cleaning grade (semiconductor grade), namely the metal ions (less than or equal to 10 ppt) analyzed after cleaning, the particulate matter content (more than or equal to 0.2um, less than or equal to 30pcs/ml; more than or equal to 0.5um, less than or equal to 3 pcs/ml); and has the problem of higher cleaning cost.
SUMMERY OF THE UTILITY MODEL
1. Technical problem to be solved by the utility model
When wasing electronic level hydrofluoric acid packaging container to adopting current belt cleaning device, the existence is difficult to reach the cleaning grade, and the higher technical problem of cost, the utility model provides an electronic level hydrofluoric acid packaging container belt cleaning device, it not only can improve packaging container's cleanliness factor, guarantees the cleaning grade, and practices thrift the cost.
2. Technical scheme
In order to solve the above problem, the utility model provides a technical scheme does:
an electronic grade hydrofluoric acid packaging container cleaning device comprises:
a base;
the swinging platform is arranged above the base;
the telescopic mechanisms are symmetrically arranged on two side walls of the base, the base is connected with the swing platform through the telescopic mechanisms, and the telescopic mechanisms are used for driving the swing platform to swing up and down;
the rotary frame is arranged above the swinging platform and used for fixedly placing an electronic-grade hydrofluoric acid packaging container;
the rotating mechanism is arranged on the swinging platform and is used for driving the rotating frame to rotate.
In the application, an electronic-grade hydrofluoric acid packaging container which contains cleaning liquid and is sealed is arranged in a rotating frame, then a telescopic mechanism and a rotating mechanism are started, a swinging platform and the rotating frame are driven by the telescopic mechanism to swing up and down within a certain angle range, so that the electronic-grade hydrofluoric acid packaging container in the rotating frame makes pitching motion, meanwhile, the rotating frame makes continuous rotating motion under the driving of the rotating mechanism, at the moment, the rotating frame and the electronic-grade hydrofluoric acid packaging container therein make synchronous swinging and rotating motion, and under the action of the swinging and rotating motion, the cleaning liquid in the electronic-grade hydrofluoric acid packaging container can fully contact with the inner wall of the electronic-grade hydrofluoric acid packaging container, and the cleaning liquid is collected at end sockets at two ends of the packaging container, so that dead-corner-free cleaning of the inner wall of the electronic-grade hydrofluoric acid packaging container is realized, and the cleaning grade is ensured. Meanwhile, due to the adoption of a rotating mode, the cleaning liquid is ensured to be fully contacted with the surface of the electronic-grade hydrofluoric acid packaging container, the liquid immersion type cleaning effect can be achieved, meanwhile, the containing amount of the cleaning liquid can be effectively reduced, the using amount of the cleaning liquid is greatly reduced, and the purpose of saving cost is achieved. Therefore, the cleaning device for the electronic-grade hydrofluoric acid packaging container has the advantages that the cleanliness of the electronic-grade hydrofluoric acid packaging container can be improved through combination of swinging and rotating modes, the cleaning grade is guaranteed, and the cost is saved.
Optionally, a rotatable support structure is provided between the base and the swing platform.
Optionally, the rotatable support structure is located at a central position of the base and the swing platform.
Optionally, the rotatable support structure is a support shaft.
Optionally, the rotating mechanism is a turntable, and the turntable is arranged at two ends of the swing platform.
Optionally, a support base is arranged on the swing platform, the support base is located at two ends of the rotating frame, and the rotary table is located above the support base.
Optionally, the telescopic mechanism is a hydraulic oil cylinder, and the hydraulic oil cylinder is connected with the base and the swing platform through hinges respectively.
Optionally, the hinge is a hooke hinge.
Optionally, the telescopic mechanism further comprises a control system, and the control system is respectively connected with the telescopic mechanism and the rotating mechanism.
Optionally, the angle at which the swing platform can swing up and down is 1 to 30 °, the swing speed is 1 to 6 times/min, and the rotation speed of the rotating mechanism is 0.3 to 1 r/min.
3. Advantageous effects
Adopt the technical scheme provided by the utility model, compare with prior art, have following beneficial effect:
the embodiment of the application provides an electronic grade hydrofluoric acid packaging container belt cleaning device, moreover, the steam generator is simple in structure, start telescopic machanism and rotary mechanism, swing platform and revolving frame do the back and forth swing motion about certain angle within range under telescopic machanism's drive, make electronic grade hydrofluoric acid packaging container in the revolving frame do the luffing motion, and simultaneously, under rotary mechanism's drive, revolving frame is continuous rotary motion, at this moment, revolving frame and the electronic grade hydrofluoric acid packaging container therein do synchronous swing and rotary motion, under the effect of swing and rotary motion, the inner wall that the washing liquid in the electronic grade hydrofluoric acid packaging container can fully contact electronic grade hydrofluoric acid packaging container, and make the washing liquid collect packaging container both ends head, realize that the no dead angle of electronic grade hydrofluoric acid packaging container inner wall washs, thereby the cleanliness factor of electronic grade hydrofluoric acid packaging container has been improved, the washing grade has been guaranteed. Meanwhile, due to the adoption of a rotating mode, the cleaning liquid is ensured to be fully contacted with the surface of the electronic-grade hydrofluoric acid packaging container, the liquid immersion type cleaning effect can be achieved, meanwhile, the containing amount of the cleaning liquid can be effectively reduced, the using amount of the cleaning liquid is greatly reduced, and the purpose of saving cost is achieved. Therefore, the cleaning device for the electronic-grade hydrofluoric acid packaging container has the advantages that the cleanliness of the electronic-grade hydrofluoric acid packaging container can be improved through combination of swinging and rotating modes, the cleaning grade is guaranteed, and the cost is saved.
Drawings
Fig. 1 is a schematic structural view of an electronic grade hydrofluoric acid packaging container cleaning device according to an embodiment of the present invention.
Detailed Description
For a further understanding of the present invention, reference will be made to the following detailed description taken in conjunction with the accompanying drawings and examples.
The present application will be described in further detail with reference to the following drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the relevant invention and are not limiting of the invention. It should be noted that, for convenience of description, only the portions related to the present invention are shown in the drawings. The utility model discloses in words such as first, second, be for the description the utility model discloses a technical scheme is convenient and set up, and does not have specific limiting action, is general finger, right the technical scheme of the utility model does not constitute limiting action. It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. Unless expressly stated or limited otherwise, the terms "mounted," "connected," and "connected" are intended to be inclusive and mean, for example, that they may be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art. The technical solutions in the same embodiment and between the technical solutions in different embodiments can be arranged and combined to form a new technical solution without contradiction or conflict, which is all within the scope of the present invention.
Example 1
With reference to fig. 1, the present embodiment provides an apparatus for cleaning an electronic-grade hydrofluoric acid packaging container, including: a base 1; the swinging platform 2 is arranged above the base 1; the telescopic mechanisms 3 are symmetrically arranged on two side walls of the base 1, the base 1 is connected with the swing platform 2 through the telescopic mechanisms 3, and the telescopic mechanisms 3 are used for driving the swing platform 2 to swing up and down; the rotating frame 4 is arranged above the swing platform 2, and the rotating frame 4 is used for fixedly placing an electronic-grade hydrofluoric acid packaging container 8; and the rotating mechanism 5 is arranged on the swinging platform 2, and the rotating mechanism 5 is used for driving the rotating frame 4 to rotate.
In the application, the electronic-grade hydrofluoric acid packaging container 8 which contains cleaning liquid and is sealed is placed in the rotating frame 4, then the telescopic mechanism 3 and the rotating mechanism 5 are started, the swing platform 2 and the rotating frame 4 are driven by the telescopic mechanism 3 to swing up and down within a certain angle range, so that the electronic-grade hydrofluoric acid packaging container 8 in the rotating frame 4 makes pitching motion, meanwhile, the rotating frame 4 makes continuous rotating motion under the driving of the rotating mechanism 5, at the moment, the rotating frame 4 and the electronic-grade hydrofluoric acid packaging container 8 therein make synchronous swinging and rotating motion, under the action of the swinging and rotating motion, the cleaning liquid in the electronic-grade hydrofluoric acid packaging container 8 can fully contact with the inner wall of the electronic-grade hydrofluoric acid packaging container 8, and the cleaning liquid is collected to end sockets at two ends of the packaging container, so that no dead angle cleaning is left on the inner wall of the electronic-grade hydrofluoric acid packaging container 8, and the cleaning grade is ensured. Meanwhile, due to the adoption of a rotating mode, the cleaning liquid is ensured to be fully contacted with the surface of the electronic-grade hydrofluoric acid packaging container 8, the liquid immersion type cleaning effect can be achieved, meanwhile, the containing amount of the cleaning liquid can be effectively reduced, the using amount of the cleaning liquid is greatly reduced, and the purpose of saving cost is achieved. Therefore, the cleaning device for the electronic-grade hydrofluoric acid packaging container can improve the cleanliness of the electronic-grade hydrofluoric acid packaging container 8, ensure the cleaning grade and save the cost.
In addition, the belt cleaning device of this application is through adopting rotatory and the combination that sways, improving cleaning efficiency, reduces the cleaning cycle, improves and washs the grade, when practicing thrift the cost, can accomplish the washing of payload 25 tons, effective area 9000 × 2600mm's packaging container, and continuous operation time reaches 48 hours for a long time.
In practical application, the cross section of the base 1 is in a regular trapezoid shape.
Example 2
With reference to fig. 1, compared with the technical solution of embodiment 1, the cleaning apparatus for electronic-grade hydrofluoric acid packaging container of the present embodiment may be improved as follows: a rotatable supporting structure 6 is arranged between the base 1 and the swinging platform 2. This setting can play certain supporting role, simultaneously, is convenient for sway platform 2 and revolving frame 4 and is swayd the motion under telescopic machanism 3's drive.
Example 3
Compared with the technical scheme of the embodiment 2, the cleaning device for the electronic grade hydrofluoric acid packaging container provided by the embodiment can be improved as follows: the rotatable support structure 6 is located at the center of the base 1 and the swing platform 2. This setting can guarantee to sway the homogeneity of holding power between platform 2 and the base 1, guarantees to sway the balanced force of rocking of platform 2.
Example 4
Compared with the technical scheme of the embodiment 2, the cleaning device for the electronic grade hydrofluoric acid packaging container provided by the embodiment can be improved as follows: the rotatable support structure 6 is a support shaft.
Example 5
Compared with the technical scheme of the embodiment 1, the cleaning device for the electronic grade hydrofluoric acid packaging container provided by the embodiment can be improved as follows: the rotating mechanism 5 is a rotary table which is arranged at two ends of the swing platform 2.
In practical application, the swing platform 2 is provided with a support frame 9, and the rotary table is fixed on the corresponding support frame 9. The arrangement can ensure that the rotary table can be stably and firmly fixed on the swing platform 2, thereby ensuring that the rotary frame 4 and the electronic-grade hydrofluoric acid packaging container 8 rotate continuously and normally. In practice, the turntable belongs to the prior art, and therefore, will not be described herein.
Example 6
Compared with the technical scheme of the embodiment 5, the cleaning device for the electronic grade hydrofluoric acid packaging container provided by the embodiment can be improved as follows: the swing platform 2 is provided with a support base 10, the support base 10 is arranged at two ends of the rotating frame 4, and the rotary table is arranged above the support base 10. The setting of supporting base 10 can play when supporting fixed action to the revolving platform, and can play certain limiting displacement to revolving frame 4 both ends, can prevent that revolving frame 4 and electron level hydrofluoric acid packaging container 8 from producing when swaing and sliding, strengthens its intensity simultaneously, makes it bear the washing liquid to packaging container 8's impact force, makes it can be intact, the safe operation in the cleaning process.
Example 7
With reference to fig. 1, compared with the technical solution of embodiment 1, the cleaning apparatus for electronic-grade hydrofluoric acid packaging container of the present embodiment may be improved as follows: the telescopic mechanism 3 is a hydraulic oil cylinder, and the hydraulic oil cylinder is respectively connected with the base 1 and the swinging platform 2 through hinges 7. The device can be ensured to be stable and reliable in the using process. In practical application, the hydraulic oil cylinder is a bidirectional hydraulic oil cylinder, and can ensure larger bearing capacity.
Example 8
Compared with the technical scheme of the embodiment 7, the cleaning device for the electronic grade hydrofluoric acid packaging container provided by the embodiment can be improved as follows: the hinge 7 is a hook hinge. The Hooke's joint can effectively increase the motion area.
Example 9
Compared with the technical scheme of the embodiment 1, the cleaning device for the electronic grade hydrofluoric acid packaging container provided by the embodiment can be improved as follows: the telescopic mechanism is characterized by further comprising a control system, wherein the control system is respectively connected with the telescopic mechanism 3 and the rotating mechanism 5.
Example 10
Compared with the technical scheme of the embodiment 1, the cleaning device for the electronic grade hydrofluoric acid packaging container provided by the embodiment can be improved as follows: the angle of the swing platform 2 capable of swinging up and down is 1-30 degrees, the swing speed is 1-6 times/minute, and the rotation speed of the rotating mechanism 5 is 0.3-1 r/minute. Considering that the price of the cleaning liquid is high, the amount of the cleaning liquid required is different when the swing angle is different, and because the swing frequency is low, the flowing speed of the cleaning liquid in the electronic-grade hydrofluoric acid packaging container 8 is slow, and surging cannot be generated. Therefore, the requirement of cleaning the electronic-grade hydrofluoric acid packaging container 8 under different conditions can be met by limiting the swing angle, the swing speed and the rotation speed, and the used cleaning liquid amount is less, so that the aim of saving the cost is fulfilled while the cleaning effect is ensured.
The present invention and its embodiments have been described above schematically, and the description is not limited thereto, and what is shown in the drawings is only one of the embodiments of the present invention, and the actual structure is not limited thereto. Therefore, if the person skilled in the art receives the teaching of the present invention, without departing from the inventive spirit of the present invention, the person skilled in the art should also design the similar structural modes and embodiments without creativity to the technical solution, and all shall fall within the protection scope of the present invention.
Claims (8)
1. An electronic grade hydrofluoric acid packaging container cleaning device is characterized by comprising:
a base;
the swinging platform is arranged above the base;
the telescopic mechanisms are symmetrically arranged on two side walls of the base, the base is connected with the swing platform through the telescopic mechanisms, and the telescopic mechanisms are used for driving the swing platform to swing up and down; the telescopic mechanism is a hydraulic oil cylinder, and the hydraulic oil cylinder is respectively connected with the base and the swinging platform through hinges;
the rotary frame is arranged above the swinging platform and used for fixedly placing an electronic-grade hydrofluoric acid packaging container;
the rotary mechanism is a rotary table and is arranged at two ends of the swing platform, and the rotary mechanism is used for driving the rotary frame to rotate.
2. The apparatus of claim 1, wherein a rotatable support structure is disposed between the base and the swing platform.
3. The electronic grade hydrofluoric acid packaging container cleaning apparatus of claim 2 wherein the rotatable support structure is located in a central position of the base and the swing platform.
4. The electronic grade hydrofluoric acid packaging container cleaning apparatus of claim 2 wherein the rotatable support structure is a support shaft.
5. The cleaning device for the electronic-grade hydrofluoric acid packaging container according to claim 1, wherein the swing platform is provided with support bases at two ends of the rotating frame, and the rotary table is located above the support bases.
6. The electronic grade hydrofluoric acid packaging container cleaning apparatus of claim 1 wherein the hinge is a hooke hinge.
7. The cleaning device for the electronic grade hydrofluoric acid packaging container according to claim 1, further comprising a control system, wherein the control system is connected to the telescoping mechanism and the rotating mechanism respectively.
8. The cleaning device for the electronic-grade hydrofluoric acid packaging container according to claim 1, wherein the swing platform can swing up and down at an angle of 1-30 °, a swing speed of 1-6 times/min, and a rotation speed of 0.3-1 rpm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221755694.6U CN218655805U (en) | 2022-07-07 | 2022-07-07 | Cleaning device for electronic-grade hydrofluoric acid packaging container |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221755694.6U CN218655805U (en) | 2022-07-07 | 2022-07-07 | Cleaning device for electronic-grade hydrofluoric acid packaging container |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218655805U true CN218655805U (en) | 2023-03-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221755694.6U Active CN218655805U (en) | 2022-07-07 | 2022-07-07 | Cleaning device for electronic-grade hydrofluoric acid packaging container |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218655805U (en) |
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2022
- 2022-07-07 CN CN202221755694.6U patent/CN218655805U/en active Active
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