CN218645267U

CN218645267U - Gas cylinder fixing device in gas supply cabinet

Info

Publication number: CN218645267U
Application number: CN202223180370.7U
Authority: CN
Inventors: 陈瑛; 卫宇飞; 司庆超
Original assignee: Gesbo Semiconductor Technology Shanghai Co ltd
Current assignee: Gesbo Semiconductor Technology Shanghai Co ltd
Priority date: 2022-11-29
Filing date: 2022-11-29
Publication date: 2023-03-17
Anticipated expiration: 2032-11-29

Abstract

The utility model relates to a gas cylinder fixing device in gas supply cabinet, it includes the open-sided cabinet body, cabinet internal side wall fixedly connected with fixed plate, the holder is installed to the fixed plate, cabinet body diapire slides and is connected with and holds the bottom plate, it is used for placing the gas cylinder to hold the bottom plate, the cabinet body is installed and is driven assembly, driven assembly is used for the control to hold the bottom plate and reciprocates between internal portion of cabinet and the outside and slide, driven assembly includes driving motor and drive screw, drive screw wears to establish and threaded connection in holding the bottom plate along the direction of sliding that holds the bottom plate, driving motor installs in the cabinet body and is used for controlling drive screw to rotate. This application can improve the installation effectiveness of gas cylinder when placing in the cabinet is internal.

Description

Gas cylinder fixing device in gas supply cabinet

Technical Field

The application relates to the field of gas supply cabinets, in particular to a fixing device for a gas bottle in a gas supply cabinet.

Background

In semiconductor processing, the gas supply cabinet plays a relatively important role. The air supply cabinet comprises a cabinet body and an air bottle arranged in the cabinet body, a protective cover is covered at the side opening of the cabinet body and the opening, a fixed plate is fixedly connected to the inner wall of the cabinet body, and a clamping piece used for clamping the air bottle is arranged on the fixed plate. When the gas cylinder is installed, the gas cylinder is lifted to the inside of the cabinet body, the lower end of the gas cylinder is abutted to the bottom wall of the cabinet body, the side end of the gas cylinder is abutted to the fixed plate, then the gas cylinder is fastened through the clamping piece, and the gas cylinder is installed in the cabinet body relatively and stably, so that the gas cylinder is relatively stable and safe when in use.

However, in the installation process of the gas cylinder, the gas cylinder needs to be lifted, and after the gas cylinder is horizontally moved into the cabinet body, the gas cylinder is put down, so that the process is relatively complex and laborious, and the installation efficiency of the gas cylinder is further influenced.

SUMMERY OF THE UTILITY MODEL

In order to improve the installation effectiveness of the gas cylinder when being placed in the cabinet body, the application provides a gas cylinder fixing device in a gas supply cabinet.

The application provides a gas cylinder fixing device in gas supply cabinet adopts following technical scheme:

the utility model provides a gas cylinder fixing device in gas supply cabinet, includes the open-sided cabinet body, cabinet internal side wall fixedly connected with fixed plate, the holder is installed to the fixed plate, cabinet body diapire slides and is connected with and holds the bottom plate, it is used for placing the gas cylinder to hold the bottom plate, the cabinet body is installed drive assembly, drive assembly is used for the control to hold the bottom plate and reciprocates between the internal portion of cabinet and the outside and slide.

Through adopting the above technical scheme, during the gas cylinder installation, earlier hold the bottom plate through drive assembly control and slide to external of cabinet, place the gas cylinder in holding the bottom plate afterwards, rethread drive assembly control holds the bottom plate and slides to internal portion of cabinet, and then transport the gas cylinder to internal portion of cabinet, adopt the holder to the gas cylinder centre gripping afterwards, make the relatively comparatively firm installation of gas cylinder in the cabinet internal, and then make and hold the bottom plate when being supported the gas cylinder, can also transport the gas cylinder, it is comparatively convenient and laborsaving during making the gas cylinder installation, improve the installation effectiveness of gas cylinder when placing in the cabinet internal simultaneously.

Optionally, the driving assembly comprises a driving motor and a driving screw rod, the driving screw rod penetrates through the sliding direction of the containing bottom plate and is connected with the containing bottom plate in a threaded mode, and the driving motor is installed in the cabinet body and is used for controlling the driving screw rod to rotate.

Through adopting above-mentioned technical scheme, when needs control holds the bottom plate and slides, only need open driving motor, and then can control drive screw and rotate to the drive holds the bottom plate and slides, realizes holding the reciprocal purpose that slides of bottom plate between cabinet body inside and outside.

Optionally, a plurality of rollers are mounted on the bottom wall of the containing bottom plate.

Through adopting above-mentioned technical scheme, the gyro wheel of setting can reduce the resistance that holds the bottom plate and receive, and then makes when holding the bottom plate and sliding more smooth and easy, increases life.

Optionally, the bottom wall of the cabinet body is provided with a guide chute for clamping the roller, and the roller penetrates through the guide chute and is abutted against the ground.

Through adopting above-mentioned technical scheme, the direction can be done to the roll of gyro wheel to the spout that leads that sets up, realizes doing the direction and consolidating to the sliding that holds the bottom plate simultaneously, and then makes the relative comparatively stable that slides that holds the bottom plate.

Optionally, a limiting frame is installed on the upper end face of the containing bottom plate and used for sleeving the lower end of the gas cylinder, and the limiting frame vertically penetrates through the containing bottom plate and is connected to the containing bottom plate in a sliding mode.

Through adopting above-mentioned technical scheme, place in holding the bottom plate when the gas cylinder, upwards slide spacing frame, and then make spacing frame can do spacingly to the gas cylinder, increase the steadiness that the gas cylinder is located and holds on the bottom plate.

Optionally, the limiting frame is rotatably connected with a control bolt, and the control bolt penetrates through the limiting frame and is connected to the containing bottom plate in a threaded manner.

Through adopting above-mentioned technical scheme, during the use, rotate the control bolt and can control spacing frame and slide in vertical, and then make spacing frame can upwards slide and the cover locate the gas cylinder lower extreme, increase the convenience of using.

Optionally, the limiting frame is fixedly connected with a plurality of reinforcing rods, and the reinforcing rods penetrate through and are connected to the containing bottom plate in a sliding mode along the length direction of the control bolt.

Through adopting above-mentioned technical scheme, the anchor strut of setting can be consolidated and support spacing frame, increases the ability that spacing frame bore load for when the gas cylinder butt in spacing frame, spacing frame has the steadiness of preferred.

Optionally, the upper end face of the containing bottom plate is rotatably connected with a guide plate, and one end of the guide plate, which is far away from the containing bottom plate, is used for obliquely and downwards abutting against the ground.

Through adopting above-mentioned technical scheme, during the use, can rotate the baffle, and then when holding the bottom plate and being located the external portion of cabinet, can keep away from the one end slope downward butt that holds the bottom plate with the baffle in ground, the gas cylinder of being convenient for is placed in holding the bottom plate.

In summary, the present application includes at least one of the following beneficial technical effects:

1. when the gas cylinder is installed, the gas cylinder is placed on the containing bottom plate, the containing bottom plate is controlled by the driving assembly to slide towards the inside of the cabinet body, the gas cylinder is conveyed to the inside of the cabinet body, then the gas cylinder is clamped by the clamping piece, so that the gas cylinder is relatively and stably installed in the cabinet body, the containing bottom plate can convey the gas cylinder while supporting the gas cylinder, the gas cylinder is relatively convenient and labor-saving to install, and meanwhile the installation efficiency of the gas cylinder placed in the cabinet body is improved;

2. during the use, the rotation control bolt can control spacing frame and slide in vertical, and then makes spacing frame can upwards slide and the cover locate the gas cylinder lower extreme, increases the steadiness that the gas cylinder is located on holding the bottom plate, increases the convenience that spacing frame used simultaneously.

Drawings

FIG. 1 is a schematic structural diagram of an embodiment of the present application;

FIG. 2 is a schematic partial sectional view of a cabinet according to an embodiment of the present application;

fig. 3 is an enlarged schematic view of a portion a of fig. 1.

Description of reference numerals: 1. a cabinet body; 2. a fixing plate; 3. a bottom plate is arranged; 4. a drive assembly; 41. a drive motor; 42. a drive screw; 5. a roller; 51. a guide chute; 6. a limiting frame; 61. a control bolt; 62. a reinforcing rod; 7. a guide plate.

Detailed Description

The present application is described in further detail below with reference to figures 1-3.

The embodiment of the application discloses gas cylinder fixing device in gas supply cabinet. Referring to fig. 1 and 2, a gas cylinder fixing device in a gas supply cabinet comprises a cabinet body 1, wherein the cabinet body 1 is in a side opening structure, and a cover plate covers the opening. The cabinet body 1 inside wall fixedly connected with fixed plate 2, the holder is installed to fixed plate 2. The cabinet body 1 diapire slides and is connected with and holds bottom plate 3, holds bottom plate 3 and reciprocates between the inside and outside of individual cabinet body 1 and slides. And, cabinet body 1 installs drive assembly 4, and drive assembly 4 can control and hold bottom plate 3 reciprocal the sliding.

When the gas cylinder is installed, the driving assembly 4 is used for controlling the containing bottom plate 3 to slide to the outside of the cabinet body 1, then the gas cylinder is placed on the containing bottom plate 3, the driving assembly 4 is used for controlling the containing bottom plate 3 to slide towards the inside of the cabinet body 1, then the gas cylinder is conveyed to the inside of the cabinet body 1, and then the clamping piece is used for clamping the gas cylinder, so that the gas cylinder is relatively and stably installed in the cabinet body 1. And then make and hold bottom plate 3 and do the support to the gas cylinder in, can also transport the gas cylinder for relatively comparatively convenient and laborsaving during the gas cylinder installation improves the installation effectiveness of gas cylinder when placing in cabinet body 1 simultaneously.

Referring to fig. 2, a guide plate 7 is rotatably connected to an upper end surface of the containing bottom plate 3. During the use, can rotate baffle 7, keep away from baffle 7 and hold the one end slope of bottom plate 3 butt downwards in ground, and then when holding bottom plate 3 and being located the cabinet body 1 outside, the gas cylinder of being convenient for is placed in holding bottom plate 3.

Referring to fig. 2, the driving assembly 4 includes a driving motor 41 and a driving screw 42, the driving screw 42 penetrates through the accommodating bottom plate 3 along the sliding direction of the accommodating bottom plate 3 and is connected to the accommodating bottom plate 3 in a threaded manner, the driving motor 41 is installed in the cabinet 1, and the output end of the driving motor 41 is coaxially and fixedly connected to the driving screw 42. When the bottom plate 3 is controlled to slide, only the driving motor 41 needs to be started, and then the driving screw 42 can be controlled to rotate, so that the bottom plate 3 is driven to slide, and the purpose of reciprocating sliding of the bottom plate 3 between the inside and the outside of the cabinet body 1 is achieved.

In other embodiments, the drive assembly 4 may also be provided as an electric push rod or a hydraulic cylinder.

Referring to fig. 2 and 3, in order to reduce the resistance received by the holding floor 3 when sliding, a plurality of rollers 5 are installed on the bottom wall of the holding floor 3. Moreover, a plurality of guide chutes 51 are formed in the bottom wall of the cabinet 1, and the guide chutes 51 extend along the sliding direction of the containing bottom plate 3. The roller 5 is abutted against the ground, and the roller 5 is clamped in the guide chute 51.

During the use, the gyro wheel 5 that sets up can reduce the resistance that holds bottom plate 3 and receive, and then makes hold bottom plate 3 more smooth and easy when sliding, increases life. The direction can be done to the roll of gyro wheel 5 to the guide chute 51 that sets up, realizes doing the direction and consolidating holding the sliding of bottom plate 3 simultaneously, and then makes holding the relative comparatively stability of sliding of bottom plate 3.

Referring to fig. 2 and 3, hold 3 up ends of bottom plate and install spacing frame 6, 6 levels of spacing frame set up, and along vertical wear to establish and slide and connect in holding bottom plate 3 for the lower extreme of gas cylinder can be located to spacing frame 6 cover.

When the gas cylinder is placed in holding bottom plate 3 back, slide spacing frame 6 upwards, and then make spacing frame 6 can do spacingly to the gas cylinder, increase the steadiness that the gas cylinder is located on holding bottom plate 3.

Referring to fig. 3, the limiting frame 6 is vertically penetrated and rotatably connected with a control bolt 61, and the control bolt 61 is penetrated and screwed in the containing bottom plate 3. And, spacing frame 6 fixedly connected with a plurality of vertical extension's anchor strut 62, anchor strut 62 wears to establish and slides and connect in holding bottom plate 3.

During the use, rotate control bolt 61 and can control spacing frame 6 and slide in vertical, and then make spacing frame 6 can upwards slide and the cover locate the gas cylinder lower extreme, increase the convenience of use. At this moment, the reinforcing rod 62 that sets up can do the reinforcement and support to spacing frame 6, increases the ability that spacing frame 6 bore load for when the gas cylinder butt in spacing frame 6, spacing frame 6 has the steadiness of preferred.

The implementation principle of the fixing device for the air bottle in the air supply cabinet in the embodiment of the application is as follows: when the gas cylinder is installed, the containing bottom plate 3 is controlled to slide to the outside of the cabinet body 1 through the driving assembly 4, and then the gas cylinder is placed on the containing bottom plate 3. The control bolt 61 is rotated to control the limit frame 6 to slide upwards and to be sleeved at the lower end of the gas cylinder. Hold bottom plate 3 through drive assembly 4 control again and slide to cabinet body 1 inside, and then transport the gas cylinder to cabinet body 1 inside, adopt the holder to hold the gas cylinder afterwards for the gas cylinder is comparatively firm relatively installs in cabinet body 1. And then make and hold bottom plate 3 and do the support to the gas cylinder in, can also transport the gas cylinder for relatively comparatively convenient and laborsaving during the gas cylinder installation improves the installation effectiveness of gas cylinder when placing in cabinet body 1 simultaneously.

The above embodiments are preferred embodiments of the present application, and the protection scope of the present application is not limited by the above embodiments, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.

Claims

1. The utility model provides a gas cylinder fixing device in gas supply cabinet, includes the open-sided cabinet body (1), the cabinet body (1) inside wall fixedly connected with fixed plate (2), the holder, its characterized in that are installed to fixed plate (2): the improved cabinet is characterized in that the bottom wall of the cabinet body (1) is connected with a containing bottom plate (3) in a sliding mode, the containing bottom plate (3) is used for placing a gas cylinder, a driving assembly (4) is installed on the cabinet body (1), and the driving assembly (4) is used for controlling the containing bottom plate (3) to slide between the inside and the outside of the cabinet body (1) in a reciprocating mode.

2. A gas cylinder attachment in a gas cabinet as claimed in claim 1, wherein: drive assembly (4) include driving motor (41) and drive screw (42), drive screw (42) wear to establish and threaded connection holds bottom plate (3) along the slip direction that holds bottom plate (3), driving motor (41) are installed in the cabinet body (1) and are used for controlling drive screw (42) and rotate.

3. A gas cylinder attachment in a gas cabinet as claimed in claim 2, wherein: a plurality of rollers (5) are installed on the bottom wall of the containing bottom plate (3).

4. A gas cylinder attachment in a gas cabinet as claimed in claim 3, wherein: the bottom wall of the cabinet body (1) is provided with a guide sliding groove (51) used for clamping the roller (5), and the roller (5) penetrates through the guide sliding groove (51) to be abutted against the ground.

5. A gas cylinder attachment in a gas cabinet as claimed in claim 1, wherein: hold bottom plate (3) up end and install spacing frame (6), spacing frame (6) are used for the cover to establish the gas cylinder lower extreme, spacing frame (6) are along vertical wearing to establish and slide and connect in holding bottom plate (3).

6. An in-cabinet gas cylinder fixture as claimed in claim 5, wherein: spacing frame (6) rotate and are connected with control bolt (61), control bolt (61) wear to establish and threaded connection holds bottom plate (3).

7. An in-cabinet gas cylinder fixture as claimed in claim 6, wherein: spacing frame (6) fixedly connected with a plurality of anchor rods (62), anchor rod (62) wear to establish and slide along the length direction of control bolt (61) and connect in holding bottom plate (3).

8. A gas cylinder attachment in a gas cabinet as claimed in claim 1, wherein: hold bottom plate (3) up end and rotate and be connected with baffle (7), baffle (7) keep away from the one end that holds bottom plate (3) and are used for the downward butt ground of slope.