CN218632000U

CN218632000U - Adjustable silicon wafer machining clamp

Info

Publication number: CN218632000U
Application number: CN202223184835.6U
Authority: CN
Inventors: 郑松
Original assignee: Anhui Jingtian New Energy Technology Co ltd
Current assignee: Anhui Jingtian New Energy Technology Co ltd
Priority date: 2022-11-29
Filing date: 2022-11-29
Publication date: 2023-03-14
Anticipated expiration: 2032-11-29

Abstract

The utility model discloses a silicon chip adds clamping apparatus with adjustable, relate to silicon chip processing field, this adds clamping apparatus aims at solving present silicon chip two-sided man-hour and need take off manual turn-over from the centre gripping machines, use inconvenient technical problem, this adds clamping apparatus includes the end cushion cap, set up the revolving platform in the middle of the end cushion cap, set up in the postnotum of revolving platform top, set up in the regulation and control motor of postnotum rear side, the postnotum front side is provided with the compensating beam, the fore-and-aft guide rail is installed to postnotum front end bilateral symmetry, linear motor is installed to the guide rail front end, perpendicular hydro-cylinder is installed to both ends symmetry about the compensating beam, the compensating beam front end is provided with the holding piece, the holding piece is installed in the hydraulic actuator top rather than adjacent perpendicular hydro-cylinder, this adds clamping apparatus adopts the regulation and control motor can drive the rotation that anchor clamps carried out the degree in vertical plane, control silicon chip turn-over or adjustment inclination in order to deal with different processing equipment when stabilizing the centre gripping to the silicon chip, it is nimble convenient to use.

Description

Adjustable silicon wafer machining clamp

Technical Field

The utility model belongs to silicon chip processing field, concretely relates to silicon chip adds clamping apparatus with adjustable.

Background

The conventional monocrystalline silicon wafer is of a round structure with a notch, the silicon wafer is processed by polishing, etching and other processes, the silicon wafer is required to be fixed by using a clamp during processing, the stability of the silicon wafer is improved, the processing quality is guaranteed, the conventional clamp is simple and is generally two metal plates, the silicon wafer is clamped between the metal plates in a bolt tightening mode, during processing, two end faces of the silicon wafer are required to be processed, an operator needs to turn the silicon wafer down from a clamping machine and then turn the silicon wafer, and the use is inconvenient.

The prior Chinese utility model with publication number CN209389017U discloses a silicon wafer clamp for dry etching, which comprises a bottom plate and a pressing plate, wherein screw rod mounting holes are formed in two sides of the bottom plate, and screw rods are vertically fixed in the mounting holes; through holes for the screw to pass through are formed in the two sides of the pressing plate, and the pressing plate moves up and down on the screw relative to the base plate; the bottom plate is provided with two grooves which are vertical to each other and are respectively provided with a baffle; the screw is respectively provided with an upper bolt, an elastic telescopic bracket and a lower bolt from top to bottom; the upper bolt is arranged above the pressing plate, the elastic telescopic bracket is arranged below the pressing plate, and the lower bolt is arranged between the bottom plate and the pressing plate; the pressing plate is positioned or moved on the screw rod through the opening or closing of the elastic telescopic bracket. Adopt the utility model discloses can carry out even sculpture, and avoid the secondary fish tail effectively, fine solution electrical property yield is low (the electric leakage part is big partially), has improved the production yield greatly.

Therefore, when the silicon wafer double-sided machining is carried out, the manual turnover needs to be taken down from the clamping machine tool, the novel silicon wafer machining clamp is developed under the condition of inconvenience in use, the height-adjustable motor equipment is used for controlling the clamp to drive the silicon wafer to turn over, the manual turnover is avoided, and the machining efficiency is improved.

SUMMERY OF THE UTILITY MODEL

(1) Technical problem to be solved

To prior art not enough, the utility model aims to provide a silicon chip adds clamping apparatus with adjustable, this adds clamping apparatus and aims at solving present silicon chip two-sided processing and need take off manual turn-over from the centre gripping machines, uses inconvenient technical problem.

(2) Technical scheme

In order to solve the technical problem, the utility model provides such silicon chip adds clamping apparatus with adjustable, this adds clamping apparatus include the end cushion cap, set up in revolving platform in the middle of the end cushion cap, set up in the postnotum of revolving platform top, set up in the regulation and control motor of postnotum rear side, the postnotum front side is provided with the compensating beam, the support is installed to end cushion cap lower extreme bilateral symmetry, rotary motor is installed to end cushion cap lower extreme, the revolving platform install in rotary motor's power output component upper end, postnotum lower extreme fixedly connected with support, fore-and-aft guide rail is installed to postnotum front end bilateral symmetry, linear motor is installed to the guide rail front end, the compensating beam set up in the place ahead between the linear motor, perpendicular hydro-cylinder is installed to the both ends symmetry about the compensating beam, the compensating beam front end is provided with the holding piece, the holding piece install rather than adjacent the hydraulic actuator top of perpendicular hydro-cylinder.

When the adjustable silicon wafer processing clamp of the technical scheme is used, a user aims the plug connector at the plug-in hole to be vertically installed, the support is made to fall between the clamping pieces, then the rotary motor is started to drive the rotary table to horizontally rotate, the front side of the backboard faces to an operator, then the silicon wafer is placed between the clamping pieces, the vertical oil cylinders on two sides are started to drive the clamping pieces to move oppositely to fix the silicon wafer, then the linear motor is started to drive the clamping machine to move longitudinally along the guide rail together with the silicon wafer until the silicon wafer is butted with corresponding processing equipment, then the upper surface of the silicon wafer is processed, after the processing is finished, the regulating motor is started, power is output outwards to the balance beam through the transmission shaft, the balance beam is made to rotate one hundred eighty degrees, the silicon wafer is made to turn over, and then the surface of the silicon wafer is processed.

Furthermore, a plug hole is formed in the middle of the upper end of the rotary table, a plug connector matched with the plug hole is installed at the lower end of the support, the plug connector is arranged on the inner side of the plug hole, the rear back plate and the support are locked by the aid of the plug connector and the plug hole in a vertical plug-in mode, horizontal sliding is avoided, and stability of the rear back plate is improved.

Furthermore, clamping and fixing pieces are symmetrically arranged at the front and the back of the upper end of the rotary table, the clamping and fixing pieces are arranged at the front side and the back side of the support, a through groove is longitudinally formed in the middle of the back plate, the front side and the back side of the support are limited by the clamping and fixing pieces, and the support and an upper structure of the support are prevented from horizontally rotating relative to the rotary table in the using process.

Further, the guide rails are arranged on the left side and the right side of the through groove, an outer protecting sleeve is fixedly mounted at the front end of the rotary motor and arranged on the inner side of the through groove, a supporting ring is fixedly mounted between shells of the linear motor, the front end of the outer protecting sleeve is arranged on the inner side of the supporting ring, the linear motor generates vertical push-pull acting force on the outer protecting sleeve by means of the supporting ring, and the linear motor drives the regulating motor, the clamp and the clamped silicon wafer to move to a proper height.

Furthermore, wing plates are fixedly connected to the left end and the right end of the regulating motor, limiting frames are symmetrically arranged on the left side and the right side of the rear back plate, the wing plates are arranged between the limiting frames and the rear back plate, the limiting frames are of L-shaped structures, the upper ends of the limiting frames are fixed to the top surface of the rear back plate, the wing plates are horizontally limited, and the regulating motor is prevented from moving horizontally back and forth.

Furthermore, the spacing groove has been seted up to backplate rear end bilateral symmetry, the spacing groove with the vertical parallel arrangement of spacing front and back symmetry, pterygoid lamina front end fixed connection has the spacing head, the spacing head set up in spacing inslot side, the regulation and control motor plays the guide effect along with linear electric motor longitudinal movement's in-process through the joint of spacing head with the spacing groove to prevent the pterygoid lamina horizontal slip.

Furthermore, the transmission shaft is installed at the power output element front end of regulation and control motor front end, the transmission shaft set up in oversheath section of thick bamboo is inboard, compensating beam rear end fixed mounting has the silk head, silk head threaded connection in transmission shaft front end is inboard, holding piece subtend one side is provided with the liner, and the regulation and control motor passes through the outside output power of transmission shaft, drives the synchronous rotation of anchor clamps on compensating beam and the compensating beam, adjusts the processing angle and the plane of silicon chip.

(3) Advantageous effects

Compared with the prior art, the beneficial effects of the utility model reside in that: the adjustable silicon wafer processing clamp of the utility model adopts the regulating motor to drive the clamp to rotate 360 degrees in a vertical plane, controls the silicon wafer to turn over or adjusts the inclination angle to deal with different processing equipment while stably clamping the silicon wafer, and has flexible and convenient use; the upper structure can be controlled to rotate 360 degrees on the horizontal plane by utilizing the rotary table, and operators standing in different directions can conveniently use the equipment when the end bearing table is fixedly installed; the linear motor can drive the clamp and the silicon wafer to longitudinally move to a proper height, and the linear motor is matched with the corresponding processing equipment or is suitable for operators with different heights.

Drawings

FIG. 1 is a schematic view of an assembly structure of an embodiment of an adjustable silicon wafer processing fixture according to the present invention;

FIG. 2 is a schematic view of another state of an assembly structure of an adjustable silicon wafer processing fixture according to an embodiment of the present invention;

FIG. 3 is a schematic view of an assembly structure of a back plate and an end support platform of an embodiment of the adjustable silicon wafer processing fixture of the present invention;

fig. 4 is the utility model relates to a silicon chip adds clamping apparatus embodiment's regulation and control motor, linear electric motor and compensating beam assembly structure sketch with adjustable.

The symbols in the drawings are: 1. an end bearing platform; 2. a support; 3. a rotary motor; 4. a turntable; 5. a support; 6. a back panel; 7. a guide rail; 8. a linear motor; 9. regulating and controlling a motor; 10. a balance beam; 11. a vertical oil cylinder; 12. a clamping piece; 13. inserting holes; 14. a plug-in connector; 15. clamping and fixing the sheet; 16. a through groove; 17. an outer jacket barrel; 18. a ring; 19. a wing plate; 20. a limiting frame; 21. a limiting groove; 22. a limiting head; 23. a drive shaft; 24. spinning heads; 25. a liner.

Detailed Description

The specific embodiment is used for an adjustable silicon wafer processing clamp, the assembly structure schematic diagram of which is shown in fig. 1, the assembly structure schematic diagram of which is shown in fig. 2 in another state, the assembly structure schematic diagram of a back plate 6 and an end bearing platform 1 is shown in fig. 3, and the assembly structure schematic diagram of a regulating motor 9, a linear motor 8 and a balance beam 10 is shown in fig. 4, the processing clamp comprises the end bearing platform 1, a rotary platform 4 arranged in the middle of the end bearing platform 1, a back plate 6 arranged above the rotary platform 4, and the regulating motor 9 arranged on the rear side of the back plate 6, wherein the front side of the back plate 6 is provided with the balance beam 10, the lower end of the end bearing platform 1 is bilaterally symmetrically provided with a support 2, the lower end of the end bearing platform 1 is provided with the rotary motor 3, the rotary platform 4 is arranged at the upper end of a power output element of the rotary motor 3, the lower end of the back plate 6 is fixedly connected with a support 5, the front end of the back plate 6 is bilaterally symmetrically provided with longitudinal guide rails 7, the front end of the guide rail 7 is provided with the linear motor 8, the balance beam 10 is arranged in front of the linear motor 8, the vertical clamping elements 11 are symmetrically arranged at the upper end of the balance beam, and the top ends of the vertical clamping elements 12, and the hydraulic cylinders are arranged at the top ends of the vertical clamping pieces 12.

For the specific embodiment, the linear motor 8 directly converts the electric energy into the linear motion mechanical energy, the guide rail 7 is a magnetic track fixed with a magnet, the mover of the linear motor 8 comprises a coil winding, a hall element circuit board, a thermistor and an electronic interface, the position of the mover in a magnetic field generated by the magnetic track is maintained through the guide rail 7, the position of the linear motor 8 is fed back through the linear encoder, and the linear motor 8 is pushed by magnetic force to move axially along the guide rail 7 to adjust the clamping position of the silicon wafer.

The middle of the upper end of the rotary table 4 is provided with an insertion hole 13, the lower end of the support 5 is provided with a plug 14 matched with the insertion hole 13, the plug 14 is arranged on the inner side of the insertion hole 13, the front and the back of the upper end of the rotary table 4 are symmetrically provided with clamping pieces 15, the clamping pieces 15 are arranged on the front and the back of the support 5, the middle of the back plate 6 is longitudinally provided with a through groove 16, the back plate 6 and the support 5 are locked by the vertical insertion of the plug 14 and the insertion hole 13 to form a plane, horizontal sliding is avoided, the stability of the back plate 6 is improved, the front and the back of the support 5 are limited by the clamping pieces 15, and the support 5 and the upper structure of the support are prevented from horizontally rotating relative to the rotary table 4 in the use process.

Meanwhile, the guide rails 7 are arranged on the left side and the right side of the through groove 16, an outer sheath cylinder 17 is fixedly arranged at the front end of the rotary motor 3, the outer sheath cylinder 17 is arranged on the inner side of the through groove 16, a supporting ring 18 is fixedly arranged between shells of the linear motors 8, the front end of the outer sheath cylinder 17 is arranged on the inner side of the supporting ring 18, wing plates 19 are fixedly connected to the left end and the right end of the regulating motor 9, limiting frames 20 are symmetrically arranged on the left side and the right side of the rear back plate 6, the wing plates 19 are arranged between the limiting frames 20 and the rear back plate 6, limiting grooves 21 are symmetrically arranged on the left side and the right side of the rear back plate 6, the limiting grooves 21 and the limiting frames 20 are longitudinally arranged in parallel in a front-back symmetry mode, limiting heads 22 are fixedly connected to the front ends of the wing plates 19, the limiting heads 22 are arranged on the inner sides of the limiting grooves 21, the linear motors 8 generate vertical push-pull acting force on the outer sheath cylinder 17 by means of the supporting ring 18 to drive the regulating motors 9, clamps and clamped silicon wafers to move to proper heights, the limiting frames 20 are of L-shaped structures, the top surfaces of the limiting frames 20, the top surfaces of the rear back plate 6, the regulating motors play a horizontal limiting effect of limiting on preventing the regulating and the regulating motor 9 from moving along with the limiting grooves of the limiting heads and moving of the limiting heads and the limiting plates 19, and preventing the limiting heads from moving back-and moving of the limiting heads from moving of the limiting heads of the limiting motors from moving back-and the limiting heads and moving of the limiting plates 9 and moving of the limiting motors.

In addition, transmission shaft 23 is installed to the power take off element front end of regulation and control motor 9 front end, transmission shaft 23 set up in outer sheath section of thick bamboo 17 is inboard, compensating beam 10 rear end fixed mounting has a screw head 24, screw head 24 threaded connection in transmission shaft 23 front end is inboard, the opposite direction one side of holding piece 12 is provided with liner 25, and regulation and control motor 9 passes through the outside output power of transmission shaft 23, drives the synchronous rotation of anchor clamps on compensating beam 10 and the compensating beam 10, the processing angle and the plane of adjustment silicon chip.

When the adjustable silicon wafer processing clamp of the technical scheme is used, a user aligns a plug connector 14 with a plug hole 13 to be vertically installed, enables a support 5 to fall between clamping pieces 15, then starts a rotary motor 3 to drive a rotary table 4 to horizontally rotate, enables the front side of a back plate 6 to face an operator, then places a silicon wafer between clamping pieces 12, starts vertical oil cylinders 11 on two sides to drive the clamping pieces 12 to move oppositely to fix the silicon wafer, then starts a linear motor 8 to drive a clamping machine and the silicon wafer to longitudinally move along a guide rail 7 until the silicon wafer is in butt joint with corresponding processing equipment, then processes the upper surface of the silicon wafer, starts a regulating motor 9 after the processing is finished, outputs power outwards to a balance beam 10 through a transmission shaft 23, enables the balance beam 10 to rotate by one hundred eighty degrees, enables the silicon wafer to be turned over, and processes the surface of the silicon wafer.

Claims

1. An adjustable silicon wafer machining clamp comprises an end bearing platform, a rotary table arranged in the middle of the end bearing platform, a rear back plate arranged above the rotary table, and a regulating motor arranged on the rear side of the rear back plate, wherein a balance beam is arranged on the front side of the rear back plate; the hydraulic oil cylinder type back plate is characterized in that supports are symmetrically arranged at the lower end of the end bearing platform in the left-right direction, a rotary motor is arranged at the lower end of the end bearing platform, the rotary platform is arranged at the upper end of a power output element of the rotary motor, a support is fixedly connected to the lower end of the back plate, longitudinal guide rails are symmetrically arranged at the front end of the back plate in the left-right direction, a linear motor is arranged at the front end of each guide rail, the balance beam is arranged in front of the linear motors, vertical oil cylinders are symmetrically arranged at the upper end and the lower end of the balance beam, clamping pieces are arranged at the front end of the balance beam, and the clamping pieces are arranged at the top ends of hydraulic execution elements of the vertical oil cylinders adjacent to the clamping pieces.

2. The adjustable silicon wafer processing clamp of claim 1, wherein an insertion hole is formed in the middle of the upper end of the rotary table, a plug connector matched with the insertion hole is installed at the lower end of the support, and the plug connector is arranged inside the insertion hole.

3. The adjustable silicon wafer processing clamp of claim 1, wherein clamping pieces are symmetrically arranged at the upper end of the rotary table in the front and back directions, the clamping pieces are arranged at the front side and the back side of the support, and a through groove is longitudinally formed in the middle of the back plate.

4. The adjustable silicon wafer processing fixture according to claim 3, wherein the guide rails are disposed on the left and right sides of the through groove, an outer sheath cylinder is fixedly mounted at the front end of the rotary motor and disposed inside the through groove, a supporting ring is fixedly mounted between the shells of the linear motor, and the front end of the outer sheath cylinder is disposed inside the supporting ring.

5. The adjustable silicon wafer processing clamp according to claim 1, wherein wing plates are fixedly connected to the left and right ends of the regulating motor, limiting frames are symmetrically installed on the left and right sides of the rear back plate, and the wing plates are arranged between the limiting frames and the rear back plate.

6. The adjustable silicon wafer processing clamp according to claim 5, wherein the rear end of the rear back plate is symmetrically provided with a limiting groove at left and right sides, the limiting groove and the limiting frame are symmetrically arranged longitudinally and longitudinally in parallel at front and back sides, the front end of the wing plate is fixedly connected with a limiting head, and the limiting head is arranged inside the limiting groove.

7. The adjustable silicon wafer processing clamp of claim 4, wherein a transmission shaft is mounted at the front end of a power output element at the front end of the regulating motor, the transmission shaft is arranged on the inner side of the outer sheath cylinder, a screw head is fixedly mounted at the rear end of the balance beam, the screw head is in threaded connection with the inner side of the front end of the transmission shaft, and a gasket is arranged on one opposite side of the clamping piece.