CN218628112U

CN218628112U - Disk body flatness detection device

Info

Publication number: CN218628112U
Application number: CN202223049714.0U
Authority: CN
Inventors: 杨军
Original assignee: Suzhou Art Precision Machinery Co ltd
Current assignee: Suzhou Art Precision Machinery Co ltd
Priority date: 2022-11-16
Filing date: 2022-11-16
Publication date: 2023-03-14
Anticipated expiration: 2032-11-16

Abstract

The utility model relates to a disk body flatness detection device, which comprises a base, a positioning component and a checking fixture, wherein a horizontal supporting surface is formed on the top of the base, the positioning component is used for attaching and positioning a disk body on the supporting surface, a virtual axis which is vertical to and intersected with the supporting surface or/and the disk body is set, and the disk body and the supporting surface can be synchronously and freely rotated around the virtual axis; examine a setting in one side of base, and examine the detection tip contact of utensil and be located the disk body upper surface on the holding surface. The utility model positions and attaches the tray body on the horizontal supporting surface through the positioning component and performs the run-out detection, thus replacing the detection of flatness and parallelism with the detection of the full run-out data of the tray surface, and having simple structure and low detection cost; meanwhile, the detection device is convenient and quick to operate, can effectively improve the detection efficiency, and realizes quick field self-detection.

Description

Disk body flatness detection device

Technical Field

The utility model belongs to the check out test set field, concretely relates to disk flatness detection device.

Background

In semiconductor device processing equipment, there are similar engineering plastic trays with a central hole, and trays of this type have some common features: 1. the flatness requirement of the disk surface is high and is 0.01-0.001; 2. the parallelism of the upper surface to the lower surface of the tray body is 0.01-0.053; 3. generally, the material is an engineering material, the thickness is relatively thin, generally 5 to 10mm, and the diameter is about 20 times of the thickness.

At present, the machining self-checking and repairing of the parts are normal, the first part cannot be confirmed like common parts, the parts can be produced in batches, the parts must be self-checked while being repaired, however, according to the conventional thinking, the parts all need to be subjected to three-coordinate inspection, time consumption and waste are caused, and the actual operation is difficult, so that a checking fixture capable of being quickly self-checked on site needs to be designed to replace the existing three-coordinate inspection device.

Disclosure of Invention

The utility model aims to solve the technical problem that overcome prior art not enough, provide a brand-new disk body flatness detection device.

For solving the technical problem, the utility model adopts the following technical scheme:

a disc body flatness detection device comprises a base, a positioning component and a detection tool, wherein a horizontal supporting surface is formed on the top of the base, the positioning component is used for attaching a disc body and positioning the disc body on the supporting surface, a virtual axis which is vertical to and intersected with the supporting surface or/and the disc body is set, and the disc body and the supporting surface can be synchronously and freely rotatably arranged around the virtual axis; the checking fixture is arranged on one side of the base, and the detection end of the checking fixture is in contact with the upper surface of the tray body on the supporting surface.

Preferably, the virtual axis is arranged coincident with the axis of the support surface or/and the disc. By means of the arrangement, the zero resetting of the checking fixture is facilitated.

Preferably, the base comprises a first base body with a rotating cavity and a second base body inserted in the rotating cavity in a free rotating manner around a virtual axis, wherein the upper end of the second base body protrudes out of the rotating cavity and forms a supporting surface from the upper end. The device is simple in structure and convenient to install and implement.

Specifically, a first bearing and a second bearing are sleeved on the part, inserted in the rotating cavity, of the second seat body, wherein the first bearing and the second bearing are distributed at intervals up and down. The gap of a common bearing is 0.03, the runout under a free state can reach 0.01-0.02, and the requirement on the precision of the checking fixture cannot be met, so that the radial runout of the second seat body is reduced by adopting a double bearing and keeping a certain distance mode during design, and the detection precision is ensured.

Furthermore, a bearing washer is sleeved on the part of the second seat body inserted in the rotating cavity, wherein the bearing washer is respectively abutted against the first bearing and the second bearing from two end parts.

Preferably, the second seat body comprises a rotating shaft body inserted in the rotating cavity, and a supporting part arranged on the top of the rotating shaft body and protruding out of the rotating cavity, wherein the diameter of the supporting part is larger than that of the rotating shaft body. Set up like this, increase the area of contact between supporting part and the disk body, improve support stability, avoid the disk body slope to influence and detect the precision.

Preferably, the upper end of the second seat body is provided with a screw hole, the positioning component comprises a pressing block and a bolt piece matched with the screw hole, the disk body is horizontally placed on the supporting surface and aligned with the screw hole from a center hole of the disk body, the pressing block is relatively connected with the second seat body through the bolt piece, and the disk body is clamped between the pressing block and the second seat body. Set up like this, place the disk body and detect before, the accessible is examined the plane degree that detects the holding surface to adjust until meeting the testing requirement through rotatory bolt spare.

Furthermore, the positioning component further comprises a positioning module arranged at the bottom of the rotating cavity, wherein the positioning module is provided with a positioning column extending upwards, a positioning hole is formed at the bottom of the second seat body, and when the second seat body is inserted into the rotating cavity, the positioning column is inserted into the positioning hole.

Preferably, the positioning module is recessed downwards from the top surface and forms a positioning groove matched with the second seat body. The second seat body can be inserted and positioned conveniently.

In addition, the gauge comprises a ruler frame capable of adjusting height and a dial indicator arranged on the ruler frame.

Due to the implementation of the above technical scheme, compared with the prior art, the utility model have the following advantage:

the utility model positions and attaches the tray body on the horizontal supporting surface through the positioning component and performs the run-out detection, thus replacing the detection of flatness and parallelism with the detection of the full run-out data of the tray surface, and having simple structure and low detection cost; meanwhile, the detection device is convenient and quick to operate, can effectively improve the detection efficiency, and realizes quick field self-detection.

Drawings

Fig. 1 is a schematic top view of a tray body according to the present invention;

FIG. 2 is a schematic front view of the device for detecting flatness of a tray body according to the present invention;

fig. 3 is a front view of the first base in fig. 2;

fig. 4 is a front view of the second seat in fig. 2;

wherein: p, a tray body;

1. a base; 11. a first seat body; q, a rotating cavity; 12. a second seat body; x, a virtual axis; 120. a rotating shaft body; a1, a first bearing; a2, a second bearing; a3, bearing washers; 121. a support portion; m, a support surface; k 1, screw holes; k2, positioning holes;

2. a positioning member; 20. pressing into blocks; 21. a bolt member; 23. a positioning module; 230. a positioning column; 231. positioning a groove;

3. a checking fixture; 30. a ruler frame; 31. and (5) a dial indicator.

Detailed Description

In order to make the aforementioned objects, features and advantages of the present application more comprehensible, embodiments accompanying the present application are described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. This application is capable of embodiments in many different forms than those described herein and that modifications may be made by one skilled in the art without departing from the spirit and scope of the application and it is therefore not intended to be limited to the specific embodiments disclosed below.

In the description of the present application, it is to be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the present application and for simplicity in description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be considered limiting of the present application.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the feature. In the description of the present application, "plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.

In this application, unless expressly stated or limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can include, for example, fixed connections, removable connections, or integral parts; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be interconnected within two elements or in a relationship where two elements interact with each other unless otherwise specifically limited. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.

In this application, unless expressly stated or limited otherwise, a first feature is "on" or "under" a second feature such that the first and second features are in direct contact, or the first and second features are in indirect contact via an intermediary. Also, a first feature "on," "above," and "over" a second feature may be directly on or obliquely above the second feature, or simply mean that the first feature is at a higher level than the second feature. A first feature "under," "beneath," and "under" a second feature may be directly under or obliquely under the second feature, or may simply mean that the first feature is at a lesser elevation than the second feature. It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. As used herein, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like are for purposes of illustration only and do not denote a single embodiment.

As shown in fig. 1 to 4, the flatness detecting apparatus of a plate P of the present embodiment includes a base 1, a positioning member 2, and a detecting tool 3.

Specifically, the base 1 includes a first base body 11 having a rotation cavity q, and a second base body 12 inserted in the rotation cavity q, and a virtual axis x is set, and the second base body 12 is freely rotatably disposed around the virtual axis in the rotation cavity q, wherein an upper end of the second base body 12 protrudes out of the rotation cavity q and forms a horizontal supporting surface m from the upper end, and the tray body P can be flatly placed on the supporting surface m. The device is simple in structure and convenient to install and implement.

For convenience of implementation, the virtual axis x is perpendicular to and intersects the supporting surface m, and the virtual axis x, the axis of the tray body P, the axis of the supporting surface m, and the center line of the rotating cavity q are arranged in a superposed manner. By means of the arrangement, the zero resetting of the checking fixture is facilitated.

In this example, the second seat 12 includes a rotating shaft 120 inserted into the rotating cavity q, and a supporting portion 121 disposed on the top of the rotating shaft 120 and protruding out of the rotating cavity q, wherein the top surface of the supporting portion 121 is a supporting surface m, and the diameter of the supporting portion 121 is greater than that of the rotating shaft 120. Set up like this, increase the area of contact between supporting part and the disk body, improve support stability, avoid the disk body slope to influence the area of contact between the detection precision, improve support stability, avoid the disk body slope to influence the detection precision.

Specifically, the rotating shaft 120 is sleeved with a first bearing a1, a second bearing a2, and a bearing washer a3, wherein the first bearing a1 and the second bearing a2 are distributed at intervals up and down, and the bearing washer a3 respectively abuts against the first bearing a1 and the second bearing a2 from the upper end portion and the lower end portion. The gap of a common bearing is 0.03, the runout under a free state can reach 0.01-0.02, and the requirement on the precision of the checking fixture cannot be met, so that the radial runout of the second seat body is reduced by adopting a double bearing and keeping a certain distance mode during design, and the detection precision is ensured. In some embodiments, the first bearing a1 and the second bearing a2 both adopt angular contact bearings special for machine tools, so that the adjustment precision is higher.

In this example, the positioning member 2 is used to attach and position the disk P on the support surface m so that the disk P and the support surface m can rotate freely in synchronization about the virtual axis x.

Specifically, the positioning member 2 includes a pressing block 20, a bolt member 21, and a positioning block 23.

The top of the supporting part 121 is provided with a screw hole k 1, and when the disk body P is flatly placed on the supporting surface m, the central hole of the disk body P is aligned with the screw hole k 1; the bolt member 21 is a conventional bolt member matched with the screw hole k 1, and connects the pressing block 20 and the support portion 121 to each other, and the plate body P is clamped between the pressing block 20 and the support portion 121. Set up like this, place the disk body and detect before, the accessible is examined the plane degree that detects the holding surface to adjust until meeting the testing requirement through rotatory bolt spare.

The positioning module 23 is disposed at the bottom of the rotating cavity q, wherein the positioning module 23 is provided with a positioning post 230 extending upward, a positioning hole k2 is formed at the bottom of the rotating shaft 120, and when the second seat 12 is inserted into the rotating cavity q, the positioning post 230 is inserted into the positioning hole k 2.

In addition, the positioning module 23 is recessed downward from the top surface and forms a positioning groove 231 matched with the rotating shaft body 120. The second seat body can be conveniently inserted and positioned.

It should be noted that, in order to facilitate the installation of the first bearing a1, the second bearing a2, the bearing washer a3, and the positioning module 23, the inner wall of the first seat 11 forms a corresponding matching groove.

In this example, the detection tool 3 is disposed on one side of the base 1, and the detection end of the detection tool 3 contacts the upper surface of the plate P on the support surface m.

Specifically, the gauge 3 includes a height-adjustable ruler frame 30 and a dial indicator 31 disposed on the ruler frame 30, wherein the height-adjustable structure adopted by the ruler frame 30 can be various conventional structures, and therefore, it is clear that the description is omitted here.

In summary, the implementation process of this embodiment is as follows:

1. and (3) precision confirmation: placing the base 1 on a platform, adjusting the height of the ruler frame 30, pointing the dial indicator 31 to the top surface of the supporting part 121, finding any point to zero, rotating the rotating shaft body 120, determining whether the runout reaches 0.001, if the runout does not reach the point, adjusting the bolt piece 21 clockwise, detecting again, and repeating the above actions until the runout is 0.002;

2. product installation: the tray body P is arranged on the top surface of the supporting part 121 through the pressing block 20 and is screwed by hands, so that the tray body P is prevented from being deformed after being pressed;

3. jitter/full jitter detection: a. finding any point on the disc body P to return to zero, rotating the disc body P, confirming a jumping numerical value, b, moving the ruler frame 30 inwards, and observing the numerical value change after stopping; repeating the actions a and b, marking the position of the maximum numerical value as a judgment numerical value, and if the position exceeds the drawing, taking the position as the basis of repair.

Therefore, the present embodiment has the following advantages:

1. the tray body is positioned and attached to the horizontal supporting surface through the positioning component, and the runout detection is carried out, so that the detection of the full runout data of the tray surface replaces the detection of the flatness and parallelism, the structure is simple, and the detection cost is low; meanwhile, the operation is convenient and quick, the detection efficiency can be effectively improved, and the on-site quick self-detection is realized;

2. through the design of the rotating shaft body and the supporting part, the contact area between the supporting part and the disc body is increased, the supporting stability is improved, the contact area between the detection precision is prevented from being influenced by the inclination of the disc body, the supporting stability is improved, and the detection precision is prevented from being influenced by the inclination of the disc body;

3. the clearance of a general bearing is 0.03, the runout under the free state can reach 0.01-0.02, and the precision requirement of the checking fixture cannot be met, so that the radial runout of the second seat body is reduced by adopting a double-bearing mode and keeping a certain distance in the design process of the bearing, and the detection precision is ensured.

The present invention has been described in detail, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and to implement the same, and the protection scope of the present invention should not be limited thereby, and all equivalent changes or modifications made according to the spirit of the present invention should be covered by the protection scope of the present invention.

Claims

1. A disc flatness detection device is characterized in that: the automatic positioning device comprises a base, a positioning component and a checking tool, wherein a horizontal supporting surface is formed on the top of the base, the positioning component is used for attaching a tray body to the supporting surface and positioning the tray body on the supporting surface, a virtual axis which is vertical to and intersected with the supporting surface or/and the tray body is set, and the tray body and the supporting surface can be synchronously and freely rotatably arranged around the virtual axis; the detection tool comprises a detection tool for detecting jumping, and the detection end of the detection tool is in contact with the upper surface of the disc body on the supporting surface.

2. The tray body flatness detection device of claim 1, wherein: the virtual axis is coincided with the axis of the supporting surface or/and the disk body.

3. The tray flatness detection apparatus of claim 1, wherein: the base comprises a first base body with a rotary cavity and a second base body which is freely inserted in the rotary cavity in a rotating mode around the virtual axis, wherein the upper end portion of the second base body protrudes out of the rotary cavity and forms the supporting surface from the upper end surface.

4. The tray flatness detection apparatus of claim 3, wherein: the part of the second seat body inserted in the rotating cavity is sleeved with a first bearing and a second bearing, wherein the first bearing and the second bearing are distributed at intervals up and down.

5. The tray body flatness detection device of claim 4, wherein: and the part of the second seat body inserted in the rotating cavity is also sleeved with a bearing gasket, and the bearing gasket is respectively abutted on the first bearing and the second bearing from two end parts.

6. The tray flatness detection apparatus of claim 3, 4 or 5, wherein: the second seat body comprises a rotating shaft body inserted in the rotating cavity and a supporting part arranged at the top of the rotating shaft body and protruding out of the rotating cavity, wherein the diameter of the supporting part is larger than that of the rotating shaft body.

7. The tray flatness detection apparatus of claim 3, wherein: the upper end of second pedestal is equipped with the screw, positioning element include the briquetting, with screw assorted bolt spare, wherein the disk body lie in on the holding surface and from self centre bore with the screw aligns, bolt spare will the briquetting with the second pedestal is connected relatively, the disk body presss from both sides tightly the briquetting with between the second pedestal.

8. The tray flatness detection apparatus of claim 7, wherein: the positioning component further comprises a positioning module arranged at the bottom of the rotating cavity, wherein the positioning module is provided with a positioning column extending upwards, a positioning hole is formed at the bottom of the second seat body, and when the second seat body is inserted into the rotating cavity, the positioning column is inserted into the positioning hole.

9. The tray flatness detection apparatus of claim 8, wherein: the positioning module is sunken downwards from the top surface and forms a positioning groove matched with the second seat body.

10. The tray flatness detection apparatus of claim 1, wherein: the gauge comprises a ruler frame capable of adjusting height and a dial indicator arranged on the ruler frame.