CN218613614U

CN218613614U - Utensil is restoreed in sculpture machine damage

Info

Publication number: CN218613614U
Application number: CN202222832551.7U
Authority: CN
Inventors: 王迪杏; 王宁; 王金裕
Original assignee: Wuxi Diyuante Technology Co ltd
Current assignee: Wuxi Diyuante Technology Co ltd
Priority date: 2022-10-26
Filing date: 2022-10-26
Publication date: 2023-03-14
Anticipated expiration: 2032-10-26

Abstract

The utility model discloses an etching machine damage restoration apparatus, including detecting the apparatus, it includes the connecting rod to detect the apparatus, one side fixedly connected with arc frame one and arc frame two of connecting rod, a plurality of screw holes have been seted up at the top of arc frame one, and is a plurality of equal swing joint screwed pipe in the screwed hole, the bottom fixedly connected with clamp plate of screwed pipe, the bottom fixedly connected with of clamp plate is sealed fills up, the square frame of top fixedly connected with of screwed pipe, a plurality of balladeur trains of top fixedly connected with of arc frame one, and is a plurality of the spout has all been seted up to one side of balladeur train. The utility model discloses not only can prevent that the end cap from being popped out by pressure, improved the accuracy that detects the sculpture machine, can make the more stable that the sculpture machine placed moreover, improved the stability that detects the sculpture machine, can also improve the stability that the detection apparatus that the sculpture machine damage was restoreed in the apparatus used.

Description

Utensil is restoreed in sculpture machine damage

Technical Field

The utility model relates to an etching machine damage restoration technical field especially relates to an etching machine damage restoration apparatus.

Background

An etching machine is used for processing materials of semiconductors, and parts of the etching machine are small and precise, so that the etching machine is easy to damage in the using process, and a repairing tool is also required to repair the etching machine in the repairing process.

Through retrieval, the grant number CN103208405B discloses a repair process for a cathode lining in a P5000 etching machine, and by adding a sealing ring on an end face and changing the end face into a threaded connection, the sealing performance of a component is more reliable than that of an original welding structure.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving the defects existing in the prior art and providing a damage repairing tool of an etching machine.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

the utility model provides an etching machine damage restoration apparatus, includes the detection apparatus, it includes the connecting rod to detect the apparatus, one side fixedly connected with arc frame one and arc frame two of connecting rod, a plurality of screw holes have been seted up at the top of arc frame one, and is a plurality of equal swing joint screwed pipe in the screwed hole, the bottom fixedly connected with clamp plate of screwed pipe, the sealed pad of bottom fixedly connected with of clamp plate, the square frame of top fixedly connected with of screwed pipe, a plurality of balladeur train of top fixedly connected with of arc frame one, it is a plurality of the spout has all been seted up to one side of balladeur train, and swing joint has the slider in the spout, and the slide opening has been seted up to one side of slider, and swing joint has the link in the slide opening, the one end fixedly connected with baffle of link, the outside swing joint of link has the extension spring, and the both ends of extension spring are fixed mutually with slider and link respectively.

As a further proposal, the top fixedly connected with connector of the square frame.

As a further proposal, one side of the connecting rod is fixedly connected with a handle.

As the utility model discloses the scheme of furthering again, two fixed blocks of the equal fixedly connected with in one side of arc frame one and arc frame two, and the fixed block is fixed mutually with the connecting rod.

As a further proposal of the utility model, the upper surface of the second arc-shaped frame is fixedly connected with a rubber pad, and the rubber pad is equal to the second arc-shaped frame.

As a further scheme of the utility model, the bottom fixedly connected with of arc frame two is a plurality of bracing pieces, and bracing piece evenly distributed.

As a further proposal of the utility model, the bottom of the supporting rod is fixedly connected with ground feet.

As the utility model discloses further scheme again, the bottom fixedly connected with slipmat of lower margin, and slipmat is isometric with the lower margin.

The beneficial effects of the utility model are that:

1. the threaded pipe is used in cooperation with the pressing plate, the threaded pipe is rotated, the threaded pipe can drive the pressing plate to move downwards, the pressing plate is enabled to seal the interface through the sealing gasket, the end cap does not need to be used for sealing the interface, the end cap can be prevented from being popped out by pressure, and the accuracy of detection of the etching machine is improved.

2. Through the setting of rubber pad, place the sculpture machine on arc type frame two, the rubber pad can increase the frictional force between sculpture machine and the arc type frame two, makes the stability that the sculpture machine placed more stable, has improved the stability to the sculpture machine detection.

3. Through the setting of slipmat, place the detection apparatus in the apparatus is restoreed in the sculpture machine damage subaerial, and the slipmat on the lower margin this moment can contact with ground, increases the frictional force between lower margin and the ground, makes the detection apparatus in the apparatus is restoreed in the sculpture machine damage place more stable, has improved the stability that the detection apparatus used in the apparatus is restoreed in the sculpture machine damage.

Drawings

Fig. 1 is a schematic three-dimensional structure diagram of a damage repairing tool for an etching machine according to the present invention;

FIG. 2 is a schematic view of a partially enlarged structure of a damage repairing tool for an etching machine according to the present invention;

fig. 3 is the utility model provides a screwed pipe enlarged structure schematic diagram of sculpture machine damage repair apparatus.

In the figure: 1. a first arc-shaped frame; 2. a connecting rod; 3. a second arc-shaped frame; 4. a fixed block; 5. a support bar; 6. ground feet; 7. a non-slip mat; 8. a handle; 9. a carriage; 10. a chute; 11. a slider; 12. a connecting frame; 13. a tension spring; 14. a baffle plate; 15. a threaded hole; 16. a threaded pipe; 17. a square frame; 18. a connector; 19. pressing a plate; 20. a gasket; 21. and (7) a rubber pad.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and the described embodiments are only some, but not all embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by the skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-3, an etching machine damage repairing tool comprises a detection tool, the detection tool comprises a connecting rod 2, one side of the connecting rod 2 is welded with a first arc-shaped frame 1 and a second arc-shaped frame 3, the top of the first arc-shaped frame 1 is provided with a plurality of threaded holes 15, a threaded pipe 16 is connected with the threaded holes 15 in a threaded manner, the bottom end of the threaded pipe 16 is welded with a pressing plate 19, the bottom of the pressing plate 19 is bonded with a sealing gasket 20, the top end of the threaded pipe 16 is welded with a square frame 17, the top of the first arc-shaped frame 1 is welded with a plurality of sliding frames 9, one side of each sliding frame 9 is provided with a sliding groove 10, the sliding groove 10 is connected with a sliding block 11 in a sliding manner, one side of the sliding block 11 is provided with a sliding hole, a connecting frame 12 is connected in the sliding manner, one end of the connecting frame 12 is welded with a baffle plate 14, the baffle 14 is contacted with the square frame 17, the outer side of the connecting frame 12 is sleeved with the tension spring 13, two ends of the tension spring 13 are respectively fixed with the slide block 11 and the connecting frame 12, the connecting frame 12 is pulled, the connecting frame 12 drives the baffle 14 to move and stretches the tension spring 13, so that the baffle 14 is separated from the square frame 17, then, the threaded pipe 16 is rotated, the threaded pipe 16 will drive the pressing plate 19 to move downwards, and after the pressing plate 19 moves the sealing gasket 20 thereon downwards to be tightly connected with the interface, stopping rotating the threaded pipe 16, sliding the sliding block 11 downwards, the sliding block 11 driving the connecting frame 12 to move downwards, the connecting frame 12 driving the baffle plate 14 to move downwards, after baffle 14 moves down and aligns with square frame 17, loosen link 12, link 12 can drive baffle 14 through the effort of extension spring 13 and reset this moment, makes baffle 14 contact with square frame 17 again, prevents that screwed pipe 16 from taking place to rotate, need not use the end cap to seal the interface, can prevent that the end cap from being popped out by pressure, has improved the accuracy that detects the etching machine.

In the utility model, a connector 18 is fixed on the top of a square frame 17 through a bolt, a worker can rotate a screwed pipe 16 through the connector 18, a handle 8 is fixed on one side of a connecting rod 2 through a bolt, the worker can take up a detection tool through the handle 8, two fixed blocks 4 are welded on one sides of a first arc frame 1 and a second arc frame 3, the fixed blocks 4 are fixed with the connecting rod 2, the fixed blocks 4 can strengthen the connection relationship between the first arc frame 1 and the second arc frame 3 and the connecting rod 2, a rubber pad 21 is bonded on the upper surface of the second arc frame 3, the rubber pad 21 is as long as the second arc frame 3, an etching machine is placed on the second arc frame 3, rubber pad 21 can increase the frictional force between sculpture machine and the two 3 arc type framves, make the sculpture machine place more stable, the stability of detecting the sculpture machine has been improved, the bottom of the two 3 arc type framves has a plurality of bracing pieces 5 through the bolt fastening, and bracing piece 5 evenly distributed, the bottom of bracing piece 5 is through the bolt fastening has lower margin 6, the bottom of lower margin 6 bonds and has slipmat 7, and slipmat 7 is isometric with lower margin 6, slipmat 7 can increase the frictional force between lower margin 6 and the ground, make the sculpture machine damage detection apparatus among the restoration apparatus place more stable, the stability of detection apparatus use among the sculpture machine damage restoration apparatus has been improved.

The working principle is as follows: when the etching machine is repaired and needs to be detected, the etching machine is placed on the arc-shaped frame II 3, the connecting frame 12 is pulled, the connecting frame 12 drives the baffle plate 14 to move and stretches the tension spring 13, the baffle plate 14 is separated from the square frame 17, then the threaded pipe 16 is rotated, the threaded pipe 16 drives the pressing plate 19 to move downwards, when the pressing plate 19 moves downwards to enable the sealing gasket 20 on the pressing plate to be close to the interface, the threaded pipe 16 stops rotating, the sliding block 11 slides downwards, the sliding block 11 drives the connecting frame 12 to move downwards, the connecting frame 12 drives the baffle plate 14 to move downwards, when the baffle plate 14 moves downwards to be aligned with the square frame 17, the connecting frame 12 is loosened, at the moment, the connecting frame 12 drives the baffle plate 14 to reset through the acting force of the tension spring 13, the baffle plate 14 is enabled to be contacted with the square frame 17 again, the threaded pipe 16 is prevented from rotating, all the sealing gaskets 20 on the pressing plate 19 are sequentially contacted with the interface according to the steps, then the etching machine is detected, the plug port does not need to be used for sealing, the plug ejection sealing can be prevented from being pressed, and the accuracy of the detection of the etching machine is improved.

Finally, it should be noted that: it will be apparent to those skilled in the art that modifications may be made to the above-described embodiments, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. The utility model provides an apparatus is restoreed in sculpture machine damage, is including detecting the apparatus, its characterized in that, it includes connecting rod (2) to detect the apparatus, one side fixedly connected with arc frame (1) and arc frame two (3) of connecting rod (2), a plurality of screw holes (15) have been seted up at the top of arc frame (1), and is a plurality of equal swing joint screwed pipe (16) in screw hole (15), the bottom fixedly connected with clamp plate (19) of screwed pipe (16), the sealed pad (20) of bottom fixedly connected with of clamp plate (19), the square frame of top fixedly connected with (17) of screwed pipe (16), a plurality of balladeur train (9) of top fixedly connected with of arc frame (1), it is a plurality of spout (10) have all been seted up to one side of balladeur train (9), and the swing joint has slider (11) in spout (10), and the slide opening has been seted up to one side of slider (11), and swing joint has link (12) in the slide opening, the one end fixedly connected with baffle (14) of link (12), the outside activity of link (12) is connected with extension spring (13), and the both ends of extension spring (13) are connected with the link (12) respectively with the link (12) and link (12) with the link (12) mutually.

2. The etching machine damage repairing tool according to claim 1, wherein a connector (18) is fixedly connected to the top of the square frame (17).

3. The etching machine damage repair tool according to claim 1, wherein a handle (8) is fixedly connected to one side of the connecting rod (2).

4. The damage repairing tool for the etching machine as claimed in claim 1, wherein one side of the first arc-shaped frame (1) and one side of the second arc-shaped frame (3) are both fixedly connected with two fixing blocks (4), and the fixing blocks (4) are fixed with the connecting rod (2).

5. The apparatus for repairing damage of etching machine as claimed in claim 1, wherein the upper surface of the second arc-shaped frame (3) is fixedly connected with a rubber pad (21), and the rubber pad (21) has the same length as the second arc-shaped frame (3).

6. The etching machine damage repairing tool according to claim 5, wherein a plurality of support rods (5) are fixedly connected to the bottom of the second arc-shaped frame (3), and the support rods (5) are uniformly distributed.

7. The damage repairing tool of the etching machine according to claim 6, wherein the bottom of the support rod (5) is fixedly connected with a ground pin (6).

8. The damage repairing tool of the etching machine according to claim 7, wherein the bottom of the ground feet (6) is fixedly connected with a non-slip pad (7), and the non-slip pad (7) is as long as the ground feet (6).