CN218610260U - Ultrasonic transducer - Google Patents

Ultrasonic transducer Download PDF

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Publication number
CN218610260U
CN218610260U CN202222939717.5U CN202222939717U CN218610260U CN 218610260 U CN218610260 U CN 218610260U CN 202222939717 U CN202222939717 U CN 202222939717U CN 218610260 U CN218610260 U CN 218610260U
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layer
ultrasonic transducer
piezoelectric
matching
polymer protective
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陈倩
陆利冬
陈红
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Goldcard Smart Group Co Ltd
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Goldcard Smart Group Co Ltd
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Abstract

The utility model provides an ultrasonic transducer relates to transducer technical field for solve ultrasonic transducer life weak point, the technical problem of easy inefficacy. The ultrasonic transducer comprises a piezoelectric layer, a matching layer, a back lining layer, a shell and a first polymer protective layer, wherein the matching layer is arranged at one end of the piezoelectric layer, and the back lining layer coats the side surface of the piezoelectric layer and the end surface deviating from the matching layer; the shell is arranged on the side surface of the backing layer and extends to the side surface of the matching layer; the first polymer protective layer coats the shell, the back lining layer and the matching layer. The first polymer protective layer can prevent the matching layer from affecting the performance of the ultrasonic transducer after moisture absorption, and the metering precision of the ultrasonic transducer is ensured; and sulfide in natural gas can be prevented from permeating into the piezoelectric layer through the backing layer, so that the failure of the ultrasonic transducer is avoided. In addition, the first polymer protective layer also has high lubricity, so that scratches and adhesion of stains in natural gas to a matching layer of the ultrasonic transducer are reduced, and the metering accuracy of the ultrasonic transducer is ensured.

Description

Ultrasonic transducer
Technical Field
The utility model relates to a transducer technical field especially relates to an ultrasonic transducer.
Background
The gas ultrasonic flowmeter has the advantages of good stability, high measurement precision, wide range ratio, low maintenance rate, small pressure loss, convenient installation and the like, and gradually replaces a mechanical gas flowmeter to obtain more and more extensive application.
The ultrasonic transducer is used as a core element of the gas ultrasonic flowmeter, and the use of the gas ultrasonic flowmeter is directly influenced by the performance of the ultrasonic transducer. An ultrasonic transducer typically includes a piezoelectric layer, a matching layer located at a front end of the piezoelectric layer, and a backing layer located at a back side of the piezoelectric layer. The piezoelectric layer vibrates to generate ultrasonic waves, the matching layer transmits the ultrasonic waves from the piezoelectric layer to the air, and the backing layer reduces the vibration of the back face of the piezoelectric layer and accelerates the elimination of aftershock of the ultrasonic transducer.
However, the ultrasonic transducer usually works in natural gas and other environments, and the ultrasonic transducer has short service life and is easy to fail.
SUMMERY OF THE UTILITY MODEL
In view of the above problem, the embodiment of the present invention provides an ultrasonic transducer, which improves the service life of the ultrasonic transducer and avoids the failure of the ultrasonic transducer.
In order to achieve the above object, the embodiment of the present invention provides the following technical solutions:
an embodiment of the utility model provides an ultrasonic transducer, it includes:
a piezoelectric layer;
a matching layer disposed at one end of the piezoelectric layer;
a backing layer covering a side surface of the piezoelectric layer and an end surface of the piezoelectric layer facing away from the matching layer;
a housing disposed on a side of the backing layer and extending to a side of the matching layer;
the first polymer protective layer coats the shell, the back lining layer and the matching layer.
In some possible embodiments, the first polymer protective layer is a parylene vacuum vapor deposition coating layer.
In some possible embodiments, the thickness of the first polymer protective layer is a multiple of 1/4 wavelength of the material of the first polymer protective layer.
In some possible embodiments, the housing comprises a first sub-body, a second sub-body and a third sub-body connected in sequence;
one end of the first split body is connected with one end of the second split body, the other end of the second split body is connected with one end of the third split body, the first split body is opposite to the matching layer, and the second split body and the third split body are opposite to the backing layer;
the first split and the second split form a first step surface, the second split and the third split form a second step surface, and the first step surface and the second step surface are in the same direction.
In some possible embodiments, the ultrasonic transducer further includes a second polymer protective layer covering a side surface of the piezoelectric layer and an end surface facing away from the matching layer.
In some possible embodiments, the piezoelectric layer includes a first electrode layer, a piezoelectric material layer, and a second electrode layer sequentially stacked, and the first electrode layer is adjacent to the matching layer.
In some possible embodiments, a surface of the first electrode layer facing the matching layer is provided with a groove, the groove further extends to the piezoelectric material layer, and an aspect ratio of the groove is 0.5 to 0.8.
In some possible embodiments, the cross section of the piezoelectric material layer is a rectangle, and the ratio of the long side of the rectangle to the wide side of the groove is 3-6;
or, a plane perpendicular to the axis of the piezoelectric material layer is taken as a cross section, the cross section of the piezoelectric material layer is square, and the ratio of the side length of the square to the width of the groove is 3-6.
In some possible embodiments, the ultrasonic transducer further comprises a metal layer disposed between the matching layer and the piezoelectric layer, the metal layer being electrically connected to the piezoelectric layer;
the metal layer is bonded to the piezoelectric layer through a first bonding layer, and the metal layer is bonded to the matching layer through a second bonding layer.
In some possible embodiments, the ultrasound transducer further includes a first wire and a second wire, a first end of the first wire is connected to the second electrode layer, a first end of the second wire is connected to the metal layer, and a second end of the first wire both penetrate through the backing layer, the housing, and the first polymer protective layer.
The embodiment of the utility model provides an ultrasonic transducer, first polymer protective layer cladding casing, back sheet and matching layer for first polymer protective layer forms ultrasonic transducer's skin. On one hand, the first polymer protective layer has high hydrophobicity, so that the influence on the performance of the ultrasonic transducer after the matching layer absorbs moisture can be avoided, and the metering precision of the ultrasonic transducer is ensured; on the other hand, the first polymer protective layer has sulfide corrosion resistance, and sulfide in natural gas can be prevented from permeating into the piezoelectric layer through the backing layer to cause corrosion of the piezoelectric layer, so that failure of the ultrasonic transducer is avoided. In addition, the first polymer protective layer also has high lubricity, so that the scratch and adhesion of stains in natural gas to a matching layer of the ultrasonic transducer are reduced, and the metering precision of the ultrasonic transducer is further ensured.
In addition to the technical problems, technical features constituting technical solutions, and advantages brought by the technical features of the technical solutions described above, other technical problems, technical features included in technical solutions, and advantages brought by the technical features that can be solved by the ultrasonic transducer provided by the embodiments of the present invention will be described in further detail in the detailed description of embodiments.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of an ultrasonic transducer according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a piezoelectric layer according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of the housing according to the embodiment of the present invention.
Description of reference numerals:
10-a piezoelectric layer;
11-a first electrode layer;
12-a layer of piezoelectric material;
13-a second electrode layer;
14-a groove;
20-a matching layer;
30-backing layer;
40-a housing;
41-a first split;
42-a second body;
43-third body;
44 — a first step face;
45-a second step surface;
50-a first polymer protective layer;
60-a metal layer;
70-a first wire;
80-second conductive line.
Detailed Description
The problems of short service life and volatile effect of the ultrasonic transducer in the related art are found by the research of the inventor, and the reasons are as follows: ultrasonic transducers are commonly used in natural gas, which contains moisture and corrosive gases (e.g., hydrogen sulfide). Along with the accumulation of time, on one hand, moisture and corrosive gas can permeate into the ultrasonic transducer, so that the piezoelectric layer inside is oxidized and corroded, the sensitivity of the ultrasonic transducer is reduced, even the ultrasonic transducer fails, and the service life of the ultrasonic transducer is shortened. On the other hand, the matching layer is usually a rough porous structure, and moisture in natural gas easily enters the matching layer, so that the density and acoustic impedance of the matching layer are changed, the ultrasonic transducer is easily disabled, and the service life of the ultrasonic transducer is shortened. In addition, stains in the natural gas are easy to wash and adhere to the surface of the matching layer, so that the ultrasonic transducer is also failed due to pollution of the matching layer, and the service life of the ultrasonic transducer is shortened.
Therefore, the embodiment of the utility model provides an ultrasonic transducer, by first polymer protective layer cladding casing, back sheet and matching layer, first polymer protective layer forms ultrasonic transducer's skin, and on the one hand, first polymer protective layer has high hydrophobicity, can avoid matching layer moisture absorption after influence ultrasonic transducer's performance, guarantees ultrasonic transducer's measurement accuracy; on the other hand, first polymer protective layer has resistant sulphide corrosivity, can the separation sulphide in the natural gas permeate to the piezoelectric layer through the back sheet, avoids the corruption of piezoelectric layer to avoid ultrasonic transducer inefficacy. In addition, the first polymer protective layer also has high lubricity, so that the scratch and adhesion of stains in natural gas to a matching layer of the ultrasonic transducer are reduced, and the metering precision of the ultrasonic transducer is further ensured.
In order to make the above objects, features and advantages of the embodiments of the present invention more obvious and understandable, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention. It is obvious that the described embodiments are only some of the embodiments of the present invention, and not all of them. Based on the embodiments of the present invention, all other embodiments obtained by a person skilled in the art without creative efforts all belong to the protection scope of the present invention.
Referring to fig. 1, an embodiment of the present invention provides an ultrasonic transducer including a piezoelectric layer 10, a matching layer 20, a backing layer 30, a housing 40, and a first polymer protective layer 50. The piezoelectric layer 10 converts electrical energy into mechanical energy. A matching layer 20 is provided at one end of the piezoelectric layer 10 to complete acoustic matching of the piezoelectric layer 10 with the medium so that ultrasonic waves propagate from the piezoelectric layer 10 into the medium. Backing layer 30 covers the sides of piezoelectric layer 10 and the end face of piezoelectric layer 10 facing away from matching layer 20. Backing layer 30 accelerates the cancellation of aftershocks from the ultrasonic transducer. The housing 40 is disposed on the side of the backing layer 30 and extends to the side of the matching layer 20, and the housing 40 supports the backing layer 30 and the matching layer 20 and reduces damage to the backing layer 30. The first polymer protective layer 50 covers the housing 40, the backing layer 30 and the matching layer 20 to form an outer layer of the ultrasonic transducer.
With this arrangement, the first polymer protective layer 50 has high compactness, and can form a uniform film layer with a small thickness on the housing 40, the backing layer 30, and the matching layer 20. On one hand, the first polymer protection layer 50 has high hydrophobicity, so that the performance of the ultrasonic transducer can be prevented from being influenced after the matching layer 20 absorbs moisture, the metering precision of the ultrasonic transducer is ensured, and the ultrasonic transducer is prevented from being out of work; on the other hand, the first polymer protective layer 50 has sulfide corrosion resistance, so that sulfide in natural gas can be prevented from permeating into the piezoelectric layer 10 through the backing layer 30, corrosion of the piezoelectric layer 10 is avoided, and failure of the ultrasonic transducer is avoided. In addition, the first polymer protective layer 50 also has high lubricity, which reduces the scratch and adhesion of the matching layer 20 of the ultrasonic transducer by stains in natural gas, further ensures the metering precision of the ultrasonic transducer, and avoids the failure of the ultrasonic transducer.
In some possible embodiments, the first polymer protective layer 50 is a parylene vacuum vapor deposition coating. The first polymer protective layer 50 is made of Parylene (Parylene, parylene in chinese), such as N-type Parylene, C-type Parylene, D-type Parylene, or HT-type Parylene, so as to be conveniently attached to the surfaces of the housing 40, the backing layer 30, and the matching layer 20. The parylene can reduce the thickness of the first polymer protective layer 50 to a greater extent, improve the uniformity of the first polymer protective layer 50, and have less influence on the acoustic performance of the ultrasonic transducer.
In the embodiment of the utility model, the pai ruilin adopts vacuum vapor deposition technology coating at casing 40, backing layer 30 and matching layer 20 surface, can form the coating film layer including extremely narrow gap on the surface of various shapes, and rete thickness is even, continuous fine and close sclausura, especially adapted are arranged in protecting ultrasonic transducer among complicated operational environment such as natural gas.
Further, the thickness of the first polymer protective layer 50 is 0.1 to 100 micrometers, and due to the compactness of the first polymer protective layer 50, the protective effect can be realized only by a very thin thickness, and the acoustic performance of the ultrasonic transducer itself is hardly affected.
Furthermore, the thickness of the first polymer protective layer 50 is a multiple of 1/4 wavelength of the material (e.g. parylene), so that the first polymer protective layer 50 is thin enough to protect the ultrasound, and the ultrasound can be transmitted more effectively.
Preferably, the thickness of the first polymer protective layer 50 is greater than or equal to 5 micrometers and less than or equal to 50 micrometers, based on the thickness of the first polymer protective layer 50 being a multiple of 1/4 wavelength of the material. When the thickness of the first polymer protective layer 50 is less than 5 μm, the layer is easily peeled and chipped during transportation and installation, so that the first polymer protective layer 50 is broken and cannot protect the first polymer protective layer. When the thickness of the first polymer protective layer 50 is greater than 50 micrometers, the vibration of the ultrasonic transducer is suppressed, and the performance of the ultrasonic transducer is affected.
In some possible embodiments, the side surfaces of the piezoelectric layer 10 and the end surfaces far away from the matching layer 20 are covered with a second polymer protective layer, and the second polymer protective layer protects the piezoelectric layer 10 and can achieve an effect of corrosion resistance. The second polymer protective layer can be coated on the surface of the piezoelectric layer 10 to form the backing layer 30, so that the stability of the ultrasonic transducer is ensured, and the service life of the ultrasonic transducer is prolonged. The second polymer protective layer may be the same as the first polymer protective layer 50.
Referring to fig. 1 and 2, the piezoelectric layer 10 may include a first electrode layer 11, a piezoelectric material layer 12, and a second electrode layer 13 sequentially stacked, the first electrode layer 11 being adjacent to the matching layer 20. Specifically, the first electrode layer 11 and the second electrode layer 13 are disposed oppositely, and the piezoelectric material layer 12 is located between the first electrode layer 11 and the second electrode layer 13. One of the first electrode layer 11 and the second electrode layer 13 is a negative electrode, and the other is a positive electrode. Illustratively, the first electrode layer 11 is a negative electrode, and the second electrode layer 13 is a positive electrode, that is, the positive electrode face of the piezoelectric layer 10 is an end face of the piezoelectric layer 10 facing away from the matching layer 20, and the negative electrode face of the piezoelectric layer 10 is an end face of the piezoelectric layer 10 facing toward the matching layer 20.
The piezoelectric material layer 12 may be made of piezoelectric ceramic, the first electrode layer 11 and the second electrode layer 13 may be made of silver, and the conductive property of silver is good, so that the electrical properties of the first electrode layer 11 and the second electrode layer 13 can be ensured. Silver may be formed on the opposite end faces of the piezoelectric ceramic by silver firing.
In some possible embodiments, the layer of piezoelectric material 12 may be cylindrical, such as a cylinder, an elliptical cylinder, a cubic cylinder, a rectangular cylinder, or a hexagonal cylinder. The embodiment of the utility model provides an in, the plane of axis with perpendicular to piezoelectric material layer 12 is the cross-section, and the cross sectional shape of piezoelectric material layer 12 is rectangle or square to improve piezoelectric material layer 12's production efficiency, promote ultrasonic transducer's process velocity, and can also improve the effective utilization of piezoelectric material layer 12 raw and other materials, reduce ultrasonic transducer's cost. In other embodiments, the cross-sectional shape of the piezoelectric material layer 12 may also be circular in cross-section taken in a plane perpendicular to the axis of the piezoelectric material layer 12, so as to maximize the transmission area of the piezoelectric material layer 12 within a limited size, and maximize signal sensitivity.
It should be noted that the axial direction of the piezoelectric material layer 12 is the thickness direction of the piezoelectric material layer 12 (vertical direction shown in fig. 2), and since the piezoelectric material layer 12 mainly uses the vibration in the thickness direction, an appropriate thickness can be selected according to the operating frequency of the ultrasonic transducer. Preferably, the piezoelectric material layer 12 is made of PZT-5A material, and the thickness of the piezoelectric material layer 12 is 2.6mm.
It is understood that the sectional shapes of the first electrode layer 11 and the second electrode layer 13 are adapted to the sectional shape of the piezoelectric material layer 12, and the sectional sizes of the first electrode layer 11 and the second electrode layer 13 are adapted to the sectional size of the piezoelectric material layer 12, so that the side of the first electrode layer 11, the side of the second electrode layer 13, and the side of the piezoelectric material layer 12 are aligned.
With continued reference to fig. 1 and 2, the surface of the first electrode layer 11 facing the matching layer 20 is provided with a groove 14, the groove 14 further extends to the piezoelectric material layer 12, and the width-to-height ratio of the groove 14 is 0.5-0.8. With this arrangement, when vibration is transmitted to the groove 14, the vibration intensity is significantly reduced, and interference of radial vibration of the piezoelectric material layer 12 can be reduced, and only vibration in the thickness direction of the piezoelectric material layer 12 remains, so as to obtain a purer vibration mode.
In some possible examples, as shown in fig. 2, the groove 14 extends through the first electrode layer 11 to the piezoelectric material layer 12, and the groove bottom of the groove 14 is located in the piezoelectric material layer 12. The groove 14 is spaced from the second electrode layer 13 by a certain distance, that is, a certain thickness is reserved at the end of the piezoelectric material layer 12 away from the first electrode layer 11, so that the groove 14 is not cut to the second electrode layer 13, thereby ensuring the integrity of the second electrode layer 13.
In other possible examples, the groove 14 extends through the first electrode layer 11 and the piezoelectric material layer 12 to the second electrode layer 13, and the groove bottom of the groove 14 is located in the second electrode layer 13. The groove 14 does not penetrate through the second electrode layer 13, so that a certain thickness is reserved at one end of the second electrode layer 13, which is far away from the piezoelectric material layer 12, and the groove 14 does not cut through the second electrode layer 13, so that the integrity of the second electrode layer 13 can be ensured.
With continued reference to fig. 1 and 2, the aspect ratio of the recess 14 is 0.5 to 0.8, which ensures better performance of the piezoelectric material layer 12. The grooves 14 may be provided in plural, so that the radial direction along the vibration intensity is gradually reduced, and the interference of the radial vibration of the piezoelectric material layer 12 is further reduced, and the overall performance of the ultrasonic transducer is improved.
In the embodiment in which the piezoelectric material layer 12 is rectangular in cross-sectional shape with a plane perpendicular to the axis of the piezoelectric material layer 12 as a cross-section, the ratio of the long side of the rectangle to the wide side of the groove 14 is 3 to 6. In the embodiment in which the piezoelectric material layer 12 is square in cross-sectional shape with a plane perpendicular to the axis of the piezoelectric material layer 12 as a cross-section, the ratio of the side length of the square to the width of the groove 14 is 3 to 6.
The width of the groove 14 refers to the length of the groove 14 along the width direction, that is, the groove width of the groove 14. In the embodiment in which the cross-sectional shape of the piezoelectric material layer 12 is rectangular, the grooves 14 are provided at intervals along the long side of the rectangle, and the width direction of the grooves 14 is parallel to the length direction of the rectangle.
With continued reference to fig. 1, the matching layer 20 may be made of a material having a porous structure, such as a composite material based on epoxy resin and hollow glass spheres. The acoustic impedance of the matching layer 20 is less than 2MRayls, and the thickness of the matching layer 20 may be a quarter wavelength of the ultrasonic wave propagating in the matching layer 20, so as to achieve better matching between the piezoelectric layer 10 and the medium. The matching layer 20 may have a plate shape, such as a circular plate, an elliptical plate, or a square plate. Further, the shape of the matching layer 20 may be the same as or different from the shape of the piezoelectric layer 10.
The embodiment of the utility model provides an in, matching layer 20 sets up the lower extreme at piezoelectric layer 10, and matching layer 20 is greater than the size of piezoelectric layer 10 towards the terminal surface of matching layer 20 towards the size of the terminal surface of piezoelectric layer 10, and piezoelectric layer 10 is just right with matching layer 20's central region. So set up, piezoelectric layer 10 is located matching layer 20 directly over, and matching layer 20's size is greater than piezoelectric layer 10's size for the ultrasonic wave that piezoelectric layer 10 produced can be totally penetrated matching layer 20 and radiated to the medium in, thereby make full use of ultrasonic wave, improve the transmission efficiency of ultrasonic wave.
With continued reference to fig. 1, in some possible embodiments, a metal layer 60 is further disposed between the matching layer 20 and the piezoelectric layer 10, and the metal layer 60 is electrically connected to the piezoelectric layer 10. The metal layer 60 is bonded to the piezoelectric layer 10 by a first adhesive layer, and the metal layer 60 is bonded to the matching layer 20 by a second adhesive layer. The metal layer 60 is disposed between the matching layer 20 and the piezoelectric layer 10, so as to axially support the ultrasonic transducer, and reduce the fracture of the piezoelectric layer 10 caused by the deformation of the material of the matching layer 20, thereby ensuring the performance of the ultrasonic transducer.
Wherein the size of the end face of the metal layer 60 facing the matching layer 20 is larger than the size of the end face of the matching layer 20 facing the metal layer 60, and the matching layer 20 is opposite to the central area of the metal layer 60. This arrangement facilitates mounting between the core formed by the piezoelectric layer 10, matching layer 20 and metal layer 60 and the housing 40. The material of the metal layer 60 may be copper or stainless steel, and the thickness of the metal layer 60 may be 0.2mm.
In the embodiment where the piezoelectric layer 10 includes the first electrode layer 11, the piezoelectric material layer 12 and the second electrode layer 13, the surface of the first electrode layer 11 facing the matching layer 20 is opened with the groove 14, and the groove 14 further extends to the piezoelectric material layer 12, the metal layer 60 and the first electrode layer 11 are bonded by the first adhesive layer. When the grooves 14 penetrate the side faces of the first electrode layer 11 and the piezoelectric material layer 12, the radial vibration of the piezoelectric material layer 12 is lower. At this time, the groove 14 divides the first electrode layer 11 into a plurality of first electrode layer units, and the metal layer 60 can electrically connect the first electrode layer units, so that a separate lead wire is not required for each first electrode unit, and the ultrasonic transducer can be conveniently manufactured.
In some possible implementations, the metal layer 60 may be a metal sheet, the piezoelectric layer 10 and the matching layer 20 are respectively bonded to two opposite end surfaces of the metal sheet, and the diameter of the metal sheet may be 12mm. In other possible implementations, the metal layer 60 may be a metal cylinder, the piezoelectric layer 10 is bonded inside the metal cylinder, and the matching layer 20 is bonded on the bottom of the metal cylinder. Furthermore, the top edge of the metal cylinder can be provided with a convex edge to improve the supporting strength of the metal cylinder.
In order to ensure the electrical connection between the metal layer 60 and the piezoelectric layer 10, the thickness of the first adhesive layer is small, so that the bonding between the piezoelectric layer 10 and the metal layer 60 is realized without affecting the electrical conduction between the metal layer 60 and the piezoelectric layer 10. Illustratively, the first adhesive layer is an epoxy adhesive having a thickness of less than 20 microns. The second adhesive layer may be the same as or different from the first adhesive layer.
It can be understood that the first adhesive layer and the second adhesive layer are located inside the first polymer protective layer 50, and the first polymer protective layer 50 can ensure the reliability of the adhesion between the matching layer 20 and the metal layer 60, thereby avoiding the performance change after the moisture absorption of the first adhesive layer and the second adhesive layer, and further ensuring the service life of the ultrasonic transducer.
With continued reference to fig. 1, the backing layer 30 is a semi-covering structure, which covers the side surface of the piezoelectric layer 10 and the end surface of the piezoelectric layer 10 away from the matching layer 20, so as to increase the damping of the vibration of the ultrasonic transducer and accelerate the elimination of aftershocks of the ultrasonic transducer. The backing layer 30 may be made of sound absorbing material such as epoxy, polyurethane or polyamide. The backing layer 30 can be bonded to the piezoelectric layer 10 by bonding, potting, or injection molding, and the backing layer 30 is cured, for example, by molding, potting, and heating.
In some possible embodiments, the side surface of the backing layer 30 may be a stepped surface, and in particular, the backing layer 30 may include a first section and a second section, a first end surface of the first section is connected to a first end surface of the second section, a contour of the first end surface of the first section is smaller than a contour of the first end surface of the second section, and the first end surface of the first section is located in a central region of the first end surface of the second section. The first section and the second section form a third step surface, the third step surface is an area which is not covered by the first end surface of the first section in the first end surface of the second section, the third step surface faces the matching layer 20, and the third step surface is arranged to provide matching support for the ultrasonic transducer during assembly.
In the above embodiment, the second end face of the first section may be flush with the end face of the matching layer 20 facing the piezoelectric layer 10, i.e. the first section extends as far as the piezoelectric layer 10. The second end face of the first section is arranged opposite to the first end face of the first section, the outline of the end face, facing the piezoelectric layer 10, of the matching layer 20 is within the outline range of the second end face of the first section, so that the first section and the matching layer 20 form a fourth step face, and the fourth step face is arranged to further provide matching support for the ultrasonic transducer during assembly.
In embodiments where the ultrasound transducer includes a metal layer 60, the backing layer 30 covers the side of the piezoelectric layer 10 and the end face facing away from the matching layer 20, and also covers the side of the metal sheet, and the end face of the metal layer 60 facing the piezoelectric layer 10 and exposed. Further, the end of the backing layer 30 facing the matching layer 20 is flush with the end of the metal layer 60 facing the matching layer 20, so that it forms a plane for facilitating the installation of the housing 40.
Referring to fig. 1 and 3, the housing 40 of the ultrasonic transducer is used for providing support and protection, and may be made of engineering plastic with high hardness. Specifically, the housing 40 includes a first sub-body 41, a second sub-body 42, and a third sub-body 43 connected in this order. One end of the first body 41 is connected to one end of the second body 42, the other end of the second body 42 is connected to one end of the third body 43, the first body 41 is opposite to the matching layer 20, and the second body 42 and the third body 43 are both opposite to the backing layer 30. The first and second divided bodies 41 and 42 form a first step surface 44, the second divided body 42 and the third divided body 43 form a second step surface 45, and the first and second step surfaces 44 and 45 are oriented in the same direction.
With such an arrangement, on one hand, the first split body 41 can limit the matching layer 20, and the second split body 42 and the third split body 43 can protect the side surface of the ultrasonic transducer from being permeated by corrosive gases such as hydrogen sulfide, so that the piezoelectric layer 10 is prevented from being corroded by the corrosive gases from the side surface, and the phenomena of side edge cracking and the like caused by the fact that the backing layer 30 is soft when the ultrasonic transducer is installed can be reduced. On the other hand, the first, second and third components 41, 42 and 43 may also be used for forming the backing layer 30, and the backing layer 30 is formed by encapsulating the material of the backing layer 30 in the first, second and third components 41, 42 and 43, so that a mold is not required to be processed, the production cost of the ultrasonic transducer is reduced, and a larger space is provided for selecting the material of the backing layer 30.
As shown in fig. 1 and 3, the size of the end surface of the first division body 41 is smaller than the size of the end surface corresponding to the second division body 42, and the size of the end surface of the second division body 42 is smaller than the size of the end surface corresponding to the third division body 43, so that the first division body 41 and the second division body 42 form a first step surface 44, and the second division body 42 and the third division body 43 form a second step surface 45. First and second step surfaces 44, 45 may be mounting surfaces of housing 40 to ensure that the ultrasonic transducer may be mounted in place within the flow passage.
Further, the first step surface 44 may be attached to the end surface of the backing layer 30 facing the matching layer 20, the second step surface 45 may be attached to the third step surface of the backing layer 30, the inner surface of the first component 41 is attached to the side surface of the matching layer 20, and the inner surfaces of the second component 42 and the third component 43 are attached to the side surface of the backing layer 30.
With continued reference to fig. 1, the ultrasonic transducer further includes a first wire 70 and a second wire 80, the first wire 70 and the second wire 80 being used to transmit electrical signals, the ultrasonic transducer transmitting the electrical signals to the back-end circuitry through the first wire 70 and the second wire 80.
In some possible embodiments, the ultrasound transducer includes a metal layer 60, a first end of the first wire 70 is connected to the second electrode layer 13, a first end of the second wire 80 is connected to the metal layer 60, a second end of the first wire 70 and a second end of the first wire 70 both penetrate through the backing layer 30, the housing 40 and the first polymer protective layer 50, or a second end of the first wire 70 and a second end of the first wire 70 both penetrate through the backing layer 30 and the first polymer protective layer 50.
For example, the housing 40 may be formed with a through hole, the first conductive line 70 and the second conductive line 80 pass through the through hole, and a sealant is filled between the first conductive line 70, the second conductive line 80, and the through hole to seal the through hole. One through hole may be provided, and the first wire 70 and the second wire 80 pass through the same through hole; two through holes may be provided, and the first and second conductive lines 70 and 80 pass through one through hole, respectively.
In other possible embodiments, the ultrasound transducer does not include the metal layer 60, the first end of the first wire 70 is connected to the second electrode layer 13, the first end of the second wire 80 is connected to the first electrode layer 11, the second end of the first wire 70 and the second end of the first wire 70 both penetrate through the backing layer 30, the housing 40 and the first polymer protective layer 50, or the second end of the first wire 70 and the second end of the first wire 70 both penetrate through the backing layer 30 and the first polymer protective layer 50.
It should be noted that in the embodiment where the ultrasound transducer includes the metal layer 60, the first conducting wire 70 and the second conducting wire 80, the first polymer protective layer 50 uniformly covers the core and the outer surface of the housing 40 of the ultrasound transducer, and is tightly bonded to the surfaces of the matching layer 20, the backing layer 30, the housing 40, the first conducting wire 70 and the second conducting wire 80.
To sum up, in the ultrasonic transducer of the embodiment of the present invention, the first polymer protective layer 50 covers the housing 40, the backing layer 30 and the matching layer 20, on one hand, the first polymer protective layer 50 has high hydrophobicity, so that the performance of the ultrasonic transducer can be prevented from being affected after the matching layer 20 absorbs moisture, and the measurement accuracy of the ultrasonic transducer is ensured; on the other hand, the first polymer protective layer 50 has sulfide corrosion resistance, so that sulfide in natural gas can be prevented from permeating into the piezoelectric layer 10 through the backing layer 30, corrosion of the piezoelectric layer 10 is avoided, and failure of the ultrasonic transducer is avoided. In addition, the first polymer protective layer 50 also has high lubricity, which reduces the scratch and adhesion of the matching layer 20 of the ultrasonic transducer by stains in natural gas, and further ensures the metering accuracy of the ultrasonic transducer.
The embodiments or implementation modes in the present specification are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments may be referred to each other.
In the description of the present specification, reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "example", "specific example", or "some examples" or the like means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention.

Claims (10)

1. An ultrasonic transducer, comprising:
a piezoelectric layer;
a matching layer disposed at one end of the piezoelectric layer;
a backing layer covering a side surface of the piezoelectric layer and an end surface of the piezoelectric layer facing away from the matching layer;
a housing disposed on a side of the backing layer and extending to a side of the matching layer;
the first polymer protective layer coats the shell, the back lining layer and the matching layer.
2. The ultrasonic transducer of claim 1, wherein the first polymer protective layer is a parylene vacuum vapor deposition coating.
3. The ultrasonic transducer according to claim 1, wherein the thickness of the first polymer protective layer is a multiple of 1/4 wavelength of the material of the first polymer protective layer.
4. The ultrasonic transducer of claim 1, wherein the housing comprises a first division, a second division, and a third division connected in series;
one end of the first split body is connected with one end of the second split body, the other end of the second split body is connected with one end of the third split body, the first split body is opposite to the matching layer, and the second split body and the third split body are opposite to the backing layer;
the first split and the second split form a first step surface, the second split and the third split form a second step surface, and the first step surface and the second step surface are in the same direction.
5. The ultrasonic transducer of claim 1, further comprising a second polymer protective layer covering side surfaces of the piezoelectric layer and end surfaces facing away from the matching layer.
6. The ultrasonic transducer of any one of claims 1 to 5, wherein the piezoelectric layer comprises a first electrode layer, a piezoelectric material layer and a second electrode layer, which are sequentially stacked, and the first electrode layer is adjacent to the matching layer.
7. The ultrasonic transducer according to claim 6, wherein the surface of the first electrode layer facing the matching layer is provided with a groove, the groove further extends to the piezoelectric material layer, and the width-to-height ratio of the groove is 0.5-0.8.
8. The ultrasonic transducer according to claim 7, wherein a plane perpendicular to an axis of the piezoelectric material layer is taken as a cross section, the cross-sectional shape of the piezoelectric material layer is rectangular, and the ratio of the long side of the rectangle to the wide side of the groove is 3-6;
or, a plane perpendicular to the axis of the piezoelectric material layer is taken as a cross section, the cross section of the piezoelectric material layer is square, and the ratio of the side length of the square to the width of the groove is 3-6.
9. The ultrasonic transducer of claim 6, further comprising a metal layer disposed between the matching layer and the piezoelectric layer, the metal layer being electrically connected to the piezoelectric layer;
the metal layer is bonded to the piezoelectric layer through a first bonding layer, and the metal layer is bonded to the matching layer through a second bonding layer.
10. The ultrasonic transducer according to claim 9, further comprising a first wire and a second wire, wherein a first end of the first wire is connected to the second electrode layer, a first end of the second wire is connected to the metal layer, and a second end of the first wire both penetrate out of the backing layer, the housing, and the first polymer protective layer.
CN202222939717.5U 2022-11-04 2022-11-04 Ultrasonic transducer Active CN218610260U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117222298A (en) * 2023-11-07 2023-12-12 青岛鼎信通讯科技有限公司 Transducer design and installation method applied to integrated ultrasonic water meter

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117222298A (en) * 2023-11-07 2023-12-12 青岛鼎信通讯科技有限公司 Transducer design and installation method applied to integrated ultrasonic water meter
CN117222298B (en) * 2023-11-07 2024-04-26 青岛鼎信通讯科技有限公司 Transducer design and installation method applied to integrated ultrasonic water meter

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