CN218596494U - Magnetron sputtering coating machine with seal structure - Google Patents
Magnetron sputtering coating machine with seal structure Download PDFInfo
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- CN218596494U CN218596494U CN202223239151.1U CN202223239151U CN218596494U CN 218596494 U CN218596494 U CN 218596494U CN 202223239151 U CN202223239151 U CN 202223239151U CN 218596494 U CN218596494 U CN 218596494U
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Abstract
The utility model discloses a magnetron sputtering coating machine with a sealing structure, which comprises a base, wherein a first clean room is arranged at the center of the top of the base, and a magnetron sputtering coating machine body is arranged in the first clean room; both sides of the first clean room are provided with a feed inlet and a discharge outlet; a second clean room is arranged on one side of the feed port and one side of the discharge port, which are far away from the first clean room; a purification assembly is arranged at the top of the second clean room, and one end of the purification assembly is communicated with one side of the top of the second clean room; the utility model discloses a set up feed inlet and bin outlet, form the different passageway of two sets of functions, can reduce the congestion nature of single passageway, reduce the time of single passageway and external intercommunication and contact, cleanliness factor in the first clean room of keeping that can furthest improves this seal structure's sealed effect, simultaneously, still makes coating film work order orderly like this, has improved the smoothness nature and the efficiency of coating film work.
Description
Technical Field
The utility model relates to a magnetron sputtering coating machine technical field specifically is a magnetron sputtering coating machine with seal structure.
Background
The magnetron sputtering coating machine is a process test instrument used in the field of material science.
Chinese patent No.: CN202111104573.5 has provided a magnetron sputtering coating machine that can rapid cooling, including the magnetron sputtering coating machine casing, be equipped with the screw thread post in the magnetron sputtering coating machine casing, the top of screw thread post passes through the bearing with the top inner wall of magnetron sputtering coating machine casing and is connected, the outside cover of screw thread post is equipped with the screw thread ring, the connected mode of screw thread ring and screw thread post is threaded connection, the outside cover of screw thread post is equipped with the go-between, the go-between is located the below of screw thread ring, be equipped with a plurality of first connecting plates on the go-between. The magnetron sputtering coating machine capable of rapidly cooling disclosed by the invention belongs to the technical field of coating equipment, is convenient for fixing a plurality of workpieces, reduces the clamping area of the workpieces, is convenient for heat dissipation and cooling, can change the positions of the workpieces by driving the threaded columns to rotate, does not need a sputtering device to move, can effectively avoid the problem of uneven coating, and is higher in production efficiency.
Although the cooling efficiency of magnetron sputtering coating machine has been improved to above-mentioned patent, magnetron sputtering coating machine belongs to precision instruments, need work in dustless environment, above-mentioned patent does not optimize magnetron sputtering coating machine's seal structure, and current magnetron sputtering coating machine is when going on unloading, all can open its coating film room, outside dust enters into magnetron sputtering coating machine inside at the unloading very easily, treat simultaneously that the coating film spare of processing also is infected with the dust easily on the surface when waiting for, can cause the influence to the effect of coating film like this, therefore we need propose a magnetron sputtering coating machine with seal structure.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a magnetron sputtering coating machine with seal structure possesses sealed effectual and conveniently goes on the advantage of unloading to the problem of proposing among the above-mentioned background art is solved.
In order to achieve the above object, the utility model provides a following technical scheme: a magnetron sputtering coating machine with a sealing structure comprises a base, wherein a first clean room is arranged at the center of the top of the base, and a magnetron sputtering coating machine body is arranged in the first clean room;
both sides of the first clean room are provided with a feed inlet and a discharge outlet;
a second clean room is arranged on one side of the feed port and one side of the discharge port, which are far away from the first clean room;
a purification assembly is arranged at the top of the second clean room, and one end of the purification assembly is communicated with one side of the top of the second clean room;
the one side in second clean room inner chamber is installed and is removed and blow the dirt subassembly, the other end that purifies the subassembly extends to the inside of second clean room and blows dirt subassembly intercommunication with removing.
Preferably, the inside of second toilet just is located the one side of keeping away from first clean room and installs first airtight door, the inside of second clean room just is located and installs the closing plate between first airtight door and the first clean room, the airtight door of second is installed to the inside one side of closing plate.
Preferably, be formed with clean storehouse between first airtight door and the second airtight door, remove and blow the dirt subassembly and install the inside one side in clean storehouse.
Preferably, the movable dust blowing assembly comprises an electric sliding rail, the electric sliding rail is arranged on one side inside the clean cabin, and a hollow support is arranged at the power output end of the electric sliding rail.
Preferably, one end of the hollow support far away from the electric slide rail is provided with a hollow column in a communicated mode, and the surface of the hollow column is provided with an air hole.
Preferably, the purification assembly comprises a fan, the fan is installed on the top of the second clean room, and an air inlet end of the fan extends to the interior of the clean room and is communicated with the interior of the clean room.
Preferably, the exhaust end of the fan is communicated with an air filter, the exhaust end of the air filter is communicated with a connecting pipe, and one end of the connecting pipe penetrates through the second clean room and extends into the clean room.
Preferably, the bottom of the connecting pipe is communicated with an extension pipe, and the bottom of the extension pipe is communicated with the top of the hollow bracket.
Compared with the prior art, the beneficial effects of the utility model are that:
1. the utility model discloses a set up feed inlet and bin outlet, form the different passageway of two sets of functions, can reduce the congestion nature of single passageway, reduce the time of single passageway and external intercommunication and contact, cleanliness factor in the first clean room of keeping that can furthest improves this seal structure's sealed effect, simultaneously, still makes coating film work order orderly like this, has improved the smoothness nature and the efficiency of coating film work.
2. The utility model discloses a setting up and purifying the subassembly and removing and blow the dirt subassembly, carrying out the dust to the clean storehouse that corresponds with bin outlet and feed inlet and clear away the work, staff and work piece can be blown away from the dust that the external world carried, are inhaled air cleaner afterwards, so circulate, can keep the leakproofness in first toilet and second toilet, and then improve the sealed effect to the magnetron sputtering coating machine body.
Drawings
FIG. 1 is a schematic view of the present invention;
FIG. 2 is a front sectional view of a first clean room of the present invention;
FIG. 3 is a schematic side view of a second clean room according to the present invention;
FIG. 4 is a side sectional view of a second clean room of the present invention;
fig. 5 is a schematic view of the three-dimensional structure of the hollow column of the present invention.
In the figure: 1. a base; 2. a first clean room; 3. a magnetron sputtering coating machine body; 4. a feed inlet; 5. a discharge outlet; 6. a second clean room; 7. a first airtight door; 8. a sealing plate; 9. a second airtight door; 10. a clean bin; 11. an electric slide rail; 12. a hollow support; 13. a hollow column; 14. a fan; 15. an air filter; 16. a connecting pipe; 17. a telescopic tube.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-5, the present invention provides a technical solution: the utility model provides a magnetron sputtering coating machine with seal structure, includes base 1, and the center department at base 1 top installs first toilet 2, and branch is all installed to the both sides at base 1 top, and the roof is installed at the top of branch, through setting up the roof, can shelter from the protection to the top of first toilet 2.
A magnetron sputtering coating machine body 3 is arranged in the first clean room 2; the magnetron sputtering coating machine body 3 is used for coating a film on a coated part, a user puts a workpiece to be coated into the magnetron sputtering coating machine body 3, and the magnetron sputtering coating machine body 3 is started to coat the film on the workpiece.
Furthermore, both sides of the first clean room 2 are provided with a feed inlet 4 and a discharge outlet 5; a second clean room 6 is arranged on one side of the feed port 4 and one side of the discharge port 5, which are far away from the first clean room 2; through setting up feed inlet 4 and bin outlet 5, make feeding and row material enter into first toilet 2 from the passageway of difference respectively in, treat that the work piece of coating film enters into first toilet 2 through the second toilet 6 of installing at feed inlet 4 in, carry out the coating film through magnetron sputtering coating machine body 3 to the work piece, after the coating film is accomplished, enter into the second toilet 6 rather than corresponding through bin outlet 5 in, and send out the work piece after the coating film is accomplished through second toilet 6, make coating film work order like this, the smoothness nature and the efficiency of coating film work have been improved.
Simultaneously, through setting up feed inlet 4 and bin outlet 5, form the passageway that two sets of functions are different, can reduce the congestion nature of single passageway, reduce the time of single passageway and external intercommunication and contact, can furthest keep the cleanliness factor in the first toilet 2, improve this seal structure's sealed effect.
A purification assembly is arranged at the top of the second clean room 6, and one end of the purification assembly is communicated with one side of the top of the second clean room 6; and a movable dust blowing assembly is installed on one side of the inner cavity of the second clean room 6, and the other end of the purifying assembly extends into the second clean room 6 and is communicated with the movable dust blowing assembly. Will open and pass through second clean room 6 when carrying out row material and feeding, second clean room 6 has the opportunity to contact with the external world, consequently, through setting up the purification subassembly and moving the dust blowing subassembly for take a breath to the inside of second clean room 6, maintain the clean degree of second clean room 6 inside.
The inside of second toilet 6 and be located the one side of keeping away from first clean room 2 and install first airtight door 7, the inside of second clean room 6 and be located and install sealing plate 8 between first airtight door 7 and the first clean room 2, and second airtight door 9 is installed to the inside one side of sealing plate 8. A clean cabin 10 is formed between the first closed door 7 and the second closed door 9, and the movable dust blowing assembly is arranged on one side inside the clean cabin 10. Through setting up first airtight door 7 and second airtight door 9, can independently go out a space in second toilet 6 and be clean storehouse 10 promptly, can treat the work piece of processing and the work piece that has processed and keep in, can also make it can not contact with the external world.
The movable dust blowing assembly comprises an electric sliding rail 11, the electric sliding rail 11 is installed on one side inside the clean cabin 10, and a hollow support 12 is installed at the power output end of the electric sliding rail 11. One end of the hollow bracket 12 far away from the electric slide rail 11 is provided with and communicated with a hollow column 13, and the surface of the hollow column 13 is provided with air holes. Through setting up hollow post 13, hollow post 13 is cylindrical setting, and gas passes through the gas pocket discharge, can the multi-angle blow.
Further, the cleaning assembly includes a blower fan 14, the blower fan 14 is installed on the top of the second clean room 6, and an air inlet end of the blower fan 14 extends to the inside of the clean room 10 and communicates with the inside of the clean room 10. An air filter 15 is communicated with the exhaust end of the fan 14, a connecting pipe 16 is communicated with the exhaust end of the air filter 15, and one end of the connecting pipe 16 penetrates through the second clean room 6 and extends to the interior of the clean room 10. The air filter 15 is provided for filtering the air in the second clean room 6, and the cleanliness of the air is maintained.
The bottom of the connecting pipe 16 is communicated with a telescopic pipe 17, and the bottom of the telescopic pipe 17 is communicated with the top of the hollow bracket 12. By providing the telescopic tube 17, it is facilitated to maintain communication with the connecting tube 16 when the hollow frame 12 is moved.
Further, when the staff transported the work piece and entered into in the second toilet 6, at first open first airtight door 7, the user entered into clean storehouse 10, close first airtight door afterwards, start fan 14 afterwards, fan 14 filters in extracting the air in clean storehouse 10 to air cleaner 15, the air after the filtration blows out through cavity setting hollow support 12 and hollow post 13, blow to staff and work piece through the dense air pocket on hollow post 13 surface, the dust that the two carried from the external world can be blown away, later inhaled air cleaner 15, so circulate, can reach the purpose of cleaing away the dust that the external world got into.
After clearing away the completion, open second airtight door 9, the user carries the work piece and enters into first toilet 2 through feed inlet 4 in, closes second airtight door 9 afterwards, can keep the leakproofness of first toilet 2 and second toilet 6 like this, and then improves the sealed effect to magnetron sputtering coating machine body 3.
It is worth to say that, when sending out the processed workpiece, the user firstly enters the discharge port 5, opens the second airtight door 9, then enters the clean room 10, then closes the second airtight door 9, then opens the first airtight door 7 to send out the workpiece, and opens the fan 14 after sending out, and as when entering the second clean room 6, the dust cleaning work is performed on the clean room 10 corresponding to the discharge port 5 through the purification component and the movable dust blowing component.
Wherein, start electronic slide rail 11, the power take off end of electronic slide rail 11 drives hollow support 12 and hollow post 13 and removes, can carry out appropriate regulation like this to the height and the position of blowing, has improved the convenient degree of use.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (8)
1. The utility model provides a magnetron sputtering coating machine with seal structure, includes base (1), its characterized in that: a first clean room (2) is arranged at the center of the top of the base (1), and a magnetron sputtering coating machine body (3) is arranged in the first clean room (2);
both sides of the first clean room (2) are provided with a feed inlet (4) and a discharge outlet (5);
a second clean room (6) is arranged on one side of the feed port (4) and one side of the discharge port (5) far away from the first clean room (2);
a purification assembly is arranged at the top of the second clean room (6), and one end of the purification assembly is communicated with one side of the top of the second clean room (6);
the one side of second toilet (6) inner chamber is installed and is removed and blow the dirt subassembly, the other end that purifies the subassembly extends to the inside of second toilet (6) and blows the dirt subassembly intercommunication with removing.
2. The magnetron sputtering coating machine with the sealing structure as claimed in claim 1, wherein: the inside of second toilet (6) and be located the one side of keeping away from first toilet (2) and install first airtight door (7), the inside of second toilet (6) and be located and install sealing plate (8) between first airtight door (7) and first toilet (2), second airtight door (9) are installed to the inside one side of sealing plate (8).
3. The magnetron sputtering coating machine with a sealing structure as claimed in claim 2, characterized in that: be formed with clean storehouse (10) between first airtight door (7) and second airtight door (9), remove and blow the dirt subassembly and install in clean storehouse (10) inside one side.
4. The magnetron sputtering coating machine with the sealing structure as claimed in claim 3, wherein: the movable dust blowing assembly comprises an electric sliding rail (11), the electric sliding rail (11) is installed on one side inside the clean bin (10), and a hollow support (12) is installed at the power output end of the electric sliding rail (11).
5. The magnetron sputtering coating machine with the sealing structure as claimed in claim 4, wherein: the hollow support (12) is far away from one end of the electric slide rail (11) and is installed and communicated with a hollow column (13), and an air hole is formed in the surface of the hollow column (13).
6. The magnetron sputtering coating machine with the sealing structure as claimed in claim 5, wherein: the purification assembly comprises a fan (14), the fan (14) is installed at the top of the second clean room (6), and the air inlet end of the fan (14) extends to the interior of the clean room (10) and is communicated with the interior of the clean room (10).
7. The magnetron sputtering coating machine with a sealing structure as claimed in claim 6, characterized in that: the exhaust end of the fan (14) is communicated with an air filter (15), the exhaust end of the air filter (15) is communicated with a connecting pipe (16), and one end of the connecting pipe (16) penetrates through the second clean room (6) and extends into the clean room (10).
8. The magnetron sputtering coating machine with the sealing structure as claimed in claim 7, wherein: the bottom of the connecting pipe (16) is communicated with an extension pipe (17), and the bottom of the extension pipe (17) is communicated with the top of the hollow bracket (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223239151.1U CN218596494U (en) | 2022-12-04 | 2022-12-04 | Magnetron sputtering coating machine with seal structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223239151.1U CN218596494U (en) | 2022-12-04 | 2022-12-04 | Magnetron sputtering coating machine with seal structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218596494U true CN218596494U (en) | 2023-03-10 |
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ID=85409732
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223239151.1U Active CN218596494U (en) | 2022-12-04 | 2022-12-04 | Magnetron sputtering coating machine with seal structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218596494U (en) |
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2022
- 2022-12-04 CN CN202223239151.1U patent/CN218596494U/en active Active
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