CN218583330U

CN218583330U - Two-fluid spraying humidifying structure

Info

Publication number: CN218583330U
Application number: CN202223108064.2U
Authority: CN
Inventors: 何宣谕
Original assignee: Chyi Ding Technologies Co ltd
Current assignee: Chyi Ding Technologies Co ltd
Priority date: 2022-11-23
Filing date: 2022-11-23
Publication date: 2023-03-07
Anticipated expiration: 2032-11-23

Abstract

The utility model provides a two fluid spray humidification structure, including a body, at least one fixing base and at least two fluid nozzle, wherein, this body is equipped with at least one income wind gap and at least one air outlet, be equipped with an air runner in it, make outside dry air can flow into this air runner through this income wind gap, and flow out this body outside from this air outlet after forming the humidification air again, this fixing base can be in this air runner, and be equipped with this two fluid nozzle on it, this two fluid nozzle can spray vaporific aqueous vapor, so that dry air in this air runner can mix aforementioned vaporific aqueous vapor, and form the humidification air, so, this two fluid spray humidification structure need not to use any electric heating structure, still can effectively control the humidity of humidification air, and then can reduce the energy that needs consume when controlling humidity by a wide margin.

Description

Two-fluid spraying humidifying structure

Technical Field

The present application relates to a temperature control machine energy saving technology, and more particularly to a two-fluid mist spray humidifying structure which uses two fluids to form mist water vapor so as to humidify air without using an electric heating humidifying technology.

Background

For some manufacturing industries (e.g., semiconductor), humidity control is important and must be controlled within a proper range to ensure the yield of the manufactured products. For example, in a semiconductor manufacturing process, the environmental standards for clean rooms (cleanrooms) are becoming more and more stringent, and the temperature, humidity, cleanliness, pressure in the clean rooms, gas flow rate, gas flow distribution, vibration static electricity, magnetic field, etc. in the clean rooms must be stably controlled within a desired range.

In the season of dry air (e.g. winter), humidity of the outside air is often increased by a humidifying device and then introduced into the clean room, so that Relative Humidity (RH) of the clean room can be maintained at a value expected by a manufacturer, and discomfort of a human body due to too low Relative Humidity of the indoor air or generation of static electricity between a processing device and a processed object due to adsorption of fine dust in the air is avoided, thereby increasing the fraction defective of the finished product.

At present, the precise humidity control method widely used in the industry generally adopts an electrothermal humidifying structure, which converts liquid water into gaseous water vapor by an electrothermal tube (or called electrothermal rod) so that dry external air can be mixed with the water vapor, thereby increasing the humidity in the air. However, the working principle of the electric heating tube is that heat energy is generated after current passes through the resistor, and the generated heat energy is required to heat liquid water to 100 ℃ to generate steam, so that the electric heating type humidifying structure consumes energy in air conditioning equipment or a temperature control machine, and the situation obviously does not meet the perpetual operation target of enterprises in the direction of energy saving and carbon reduction. Therefore, how to effectively solve the foregoing problems and provide a humidification structure with low energy consumption is an important issue of the present application.

SUMMERY OF THE UTILITY MODEL

Because the electrothermal humidifying structure in the prior art needs to consume huge energy, creators develop a two-fluid spray humidifying structure based on the environmental issues of continuous development and the research spirit of lean and refinement, and after long-term research and experiments, the two-fluid spray humidifying structure can still achieve the effect of precisely controlling the relative humidity of air without using an electrothermal structure (such as an electrothermal tube) and can effectively reduce the energy consumption of equipment.

One objective of the present application is to provide a two-fluid spraying and humidifying structure, which includes a body, at least one fixing seat and at least one two-fluid nozzle, wherein the body has at least one air inlet and at least one air outlet, an air channel is disposed therein, and the air inlet and the air outlet are communicated through the air channel; the fixed seat can be positioned in the air flow channel; the two-fluid nozzle can be arranged on the fixed seat and can spray mist water vapor so that dry air flowing in through the air inlet can be mixed in the air flow channel to form humidifying air, and the humidifying air can flow out of the body through the air outlet.

Optionally, a partition board is disposed in the main body, the partition board divides the air flow channel into an air inlet area, a communication area and a humidification area, the air inlet area can be respectively communicated with the air inlet and the communication area, the humidification area can be respectively communicated with the air outlet and the communication area, and each of the two fluid nozzles is located in the humidification area.

Optionally, a first side surface and a second side surface of the body are opposite to each other, the partition plate is located between the first side surface and the second side surface, the first side surface of the body is provided with the air inlet, and the air inlet and the one side surface of the partition plate are separated by a first distance to form the air inlet area; the second side surface of the body is separated from the other side surface of the partition plate by a second distance to form the humidifying area, and the separation distance between each two fluid nozzle and the second side surface of the body is substantially the same as the separation distance between each two fluid nozzle and the other side surface of the partition plate; a third side surface of the body, which is far away from the air outlet, is separated from the free end of the partition plate by a third distance to form the communication area.

Optionally, the second distance is greater than the first distance.

Optionally, the first distance is between 75 mm and 125 mm; the second distance is 175 mm to 225 mm.

Optionally, the flow rate of the drying air into the humidification region is between 2 and 3.5 meters per second.

Optionally, the two-fluid spray humidifying structure can have a plurality of two-fluid nozzles and a plurality of fixing bases, wherein the centers of two adjacent fixing bases are spaced from each other by a fourth distance, and the fourth distance is between 200 mm and 300 mm.

Optionally, the main body includes a box main body and an external cover plate, wherein one side of the box main body is provided with the air inlets, the other side of the box main body opposite to the air inlets is provided with an assembly opening, and one side of the box main body adjacent to the air inlets is provided with the air outlets, the box main body is further provided with the air flow channel and the partition plate therein; the external cover plate can be assembled to the position of the box main body corresponding to the assembling port so as to shield the assembling port.

Optionally, an extension piece is further disposed in the body, the extension piece is close to a fourth side of the body, each of the air outlets is disposed on the fourth side, one end of the partition plate can be connected to the extension piece, and the extension piece can block the dry air flowing into the air inlet area, so that the dry air can only flow towards the direction of the communication area.

Other features and embodiments of the present application will be described in detail below with reference to the drawings.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments described in the present application, and other drawings can be obtained by those skilled in the art without creative efforts.

FIG. 1 is an exploded view of a two-fluid spray humidifying structure of the present application;

FIG. 2 is a perspective view of a two-fluid spray humidifying structure of the present application;

FIG. 3 is a cross-sectional side view of a two-fluid spray humidifying structure of the present application;

FIG. 4 is a schematic illustration of the two fluid spray humidifying structure of the present application with the outer cover removed;

FIG. 5A is a schematic view of an exemplary arrangement of two fluids according to the present application; and

fig. 5B is a schematic view of another arrangement of two fluids according to the present application.

Description of the symbols

1: a body 1A: first side face 1B: second side surface

1C: third side surface 1D: fourth side 10: air flow passage

101: the wind inlet area 102: connected region 103: humidification area

11: air inlet 12: and an air outlet 13: box main body

14: outer cover 15: the assembly port 16: extension piece

2: fixing base 3: two-fluid nozzle 4: partition board

S: two-fluid spraying humidifying structure

H1: first distance H2: second distance H3: third distance

H4: a fourth distance

Detailed Description

In order to make the objects, technical contents and advantages of the present application more apparent, the embodiments disclosed in the present application are further described in detail below with reference to the accompanying drawings. Those skilled in the art can appreciate that the advantages and benefits of the present disclosure can be realized and obtained by means of the instrumentalities and combinations particularly pointed out in the appended claims, and that the invention is capable of other embodiments and applications, and that various modifications and changes can be made in the details within the scope of the description without departing from the spirit of the application. It should be noted that the drawings are for illustrative purposes only and are not drawn to scale. In addition, the meaning of "a", "an", and "the" of the present application includes a plurality, unless the context clearly indicates or defines otherwise. The following embodiments will further explain the related art contents of the present application in detail, but the disclosure is not intended to limit the scope of the present application.

The terms used herein have their ordinary meaning in the art, and in case of conflict, any definitions given herein should be relied upon for understanding. Since the same thing can be said in many ways, alternative words and synonyms can be used for any term discussed or recited herein, and there is no specific limitation as to whether a term is set forth or discussed herein, the use of one or more synonyms does not exclude other synonyms. The examples used anywhere in the description of this application, including the use of any term, are illustrative only and in no way limit the scope and meaning of this application or any term. As such, the present application is not limited to the various embodiments disclosed in the specification. Although the terms first, second, third, etc. may be used herein to describe various elements, these elements should not be limited by the foregoing terms, which are primarily used to distinguish one element from another, should not impose any substantial limitations on any elements, and should not restrict the order in which the elements are assembled or arranged in actual use. In addition, directional terms such as "upper", "lower", "front", "rear", "left", "right", and the like in the embodiments are directions referring to the drawings. Accordingly, the directional terminology used is intended to be in the nature of words of description rather than of limitation.

Further, as used herein, the term "or" should be taken to include any one or combination of the associated listed items, as the case may be. Furthermore, as used herein, the terms "substantially" or "approximately" may refer to a value or an average of a plurality of values within a deviation range that may be recognized or determined by those skilled in the art, including certain specific errors that may occur when measuring a particular value due to limitations of the measuring system or apparatus, such as: essentially (substitially) recited values can include ± 5%, 3%, 1%, 0.5%, 0.1% or one or more standard deviation ranges of the particular value.

In an embodiment, please refer to fig. 1 to 2, the two-fluid spray humidifying structure S includes a body 1, at least one fixing seat 2, and at least one two-fluid nozzle 3, wherein the body 1 has at least one air inlet 11 and at least one air outlet 12, an air flow channel 10 is disposed therein, the air inlet 11 and the air outlet 12 can be communicated through the air flow channel 10, in other words, external air can flow into the body 1 through the air inlet 11, and flow out of the body 1 through the air outlet 12 after flowing along the air flow channel 10. In this embodiment, the main body 1 at least comprises a box main body 13 and an external cover 14, the air channel 10 is disposed in the box main body 13, the air inlet 11 is disposed on one side thereof, the assembling opening 15 is disposed on the other side thereof opposite to the air inlet 11, and the air outlet 12 is disposed on the other side (the upper position in fig. 2) adjacent to the air inlet 11. The outer cover 14 may be made of stainless steel, and may be assembled to the other side of the box body 13 to cover the assembly opening 15. However, in other embodiments of the present application, the body 1 can be modified in terms of its components, materials and shapes according to actual requirements, and is not limited to the structural features shown in fig. 1 and 2.

In addition, referring to fig. 1 to 3, in the embodiment, a partition plate 4 is disposed in the main body 1, the partition plate 4 can divide the air flow channel 10 into an air inlet area 101, a communication area 102 and a humidification area 103, wherein the air inlet area 101 can be respectively communicated with the air inlet 11 and the communication area 102, and the humidification area 103 can be respectively communicated with the air outlet 12 and the communication area 102, so that the air flowing in through the air inlet 11 will sequentially flow through the air inlet area 101, the communication area 102 and the humidification area 103, and then flow out through the air outlet 12. More specifically, referring to fig. 3, in the embodiment, a first side surface 1A (corresponding to one side of the box main body 13) and a second side surface 1B (corresponding to the other side of the box main body 13, i.e. the position where the external cover 14 is assembled) of the main body 1 are opposite to each other, and the partition plate 4 is located between the first side surface 1A and the second side surface 1B, and a free end (the lower position shown in fig. 3) thereof does not contact a third side surface 1C of the main body 1 away from the air outlet 12.

As shown in fig. 1 to 3, the air inlet 11 is disposed on the first side surface 1A of the main body 1, and is separated from a side surface of the partition plate 4 by a first distance H1, and the area of the first distance H1 can form the air inlet area 101; the second side surface 1B of the main body 1 is separated from the other side surface of the partition plate 4 by a second distance H2, and the second distance H2 can form the humidification region 103. In this embodiment, the first distance H1 is between 75 mm and 125 mm, and the second distance H2 is between 175 mm and 225 mm, in other words, the second distance H2 is greater than the first distance H1, so that the overall volume of the humidifying area 103 can be greater than the overall volume of the air intake area 101. The third side 1C of the main body 1 is separated from the free end of the partition plate 4 by a third distance H3 to form the communication region 102, the fourth side 1D of the main body 1 is provided with the air outlet 12, and the main body 1 is further provided with an extension piece 16, the extension piece 16 can be close to the fourth side 1D of the main body 1, and one end of the partition plate 4 can be connected to the extension piece 16, wherein the extension piece 16 can block the air flowing into the air inlet region 101, so that the air can only flow toward the communication region 102, but not limited thereto. In other embodiments of the present application, the positions and examples of the partition plate 4 and the extension piece 16 can be adjusted according to actual requirements, for example, the partition plate 4 is connected to the third side surface 1C of the body 1, and a hole is formed on the partition plate 4 to form the communication region 102, or even the partition plate 4 and the extension piece 16 are not provided.

Furthermore, referring to fig. 1 to 3, the fixing base 2 can be located in the air flow channel 10, in this embodiment, the two-fluid spray humidifying structure S can have two fixing bases 2, the two fixing bases 2 can be connected to the free end of the partition plate 4 (but not limited thereto) and located in the humidifying area 103, and the centers of the two adjacent fixing bases 2 are separated from each other by a fourth distance H4 (as shown in fig. 4), and the fourth distance H2 can be 200 mm to 300 mm. In addition, two fluid nozzles 3 are respectively disposed on the two fixing bases 2, and the distance between the two fluid nozzles 3 and the second side surface 1B of the main body is substantially the same as the distance between the two fluid nozzles 3 and the other side surface of the partition plate 4, in other words, the two fluid nozzles 3 are located in the humidification region 103 and will be located at the middle position of the second distance H2.

In summary, referring to fig. 1 to 4, the two fluid nozzles 3 can spray mist water vapor, and the working principle of the two fluid nozzles 3 is briefly described, wherein the two fluid nozzles 3 are provided with a gas channel and a liquid channel at the same time, and the high-speed air in the gas channel can break up the liquid in the liquid channel at the external position in the two fluid nozzles 3 or adjacent to the nozzle, so that the liquid particle size becomes smaller and then forms mist water vapor. In addition, the fourth distance H4 between the adjacent fixing bases 2 enables the mist of water vapor sprayed by the two fluid nozzles 3 to completely or as completely as possible cover the humidification area 103. However, in other embodiments of the present application, according to the requirement of use, the two fixing bases 2 can be disposed at one end (i.e. the direction away from the free end) or any position of the partition plate 4, and the two fixing bases 2 can be respectively provided with two fluid nozzles 3 (as shown in fig. 5A), the direction of the mist water sprayed by the two fluid nozzles 3 can be toward the third side surface 1C of the body 1; alternatively, the two fixed seats 2 can be respectively disposed at one end and a free end of the partition plate 4, and two fluid nozzles 3 are respectively disposed thereon, as shown in fig. 5B, the two fluid nozzles 3 can be staggered with each other (but not limited thereto); or, the two-fluid spraying and humidifying structure S can have four fixing bases 2, and two fixing bases 2 are respectively disposed at one end and a free end of the partition plate 4, and two fluid nozzles 3 are respectively disposed on each fixing base 2.

As shown in fig. 1 to 3, the dry air flowing in through the air inlet 11 can mix the mist of water vapor in the air flow channel 10 (or the humidification region 103) to form humidified air with a predetermined humidity, and then the humidified air can flow out of the main body 1 through the air outlet 12. In this embodiment, the flow rate of the dry air flowing into the humidification region 103 is 2m to 3.5m/s, and the dry air flow rate (2 m/s to 3.5 m/s) can effectively improve the mixing uniformity between the dry air and the mist water vapor to form the desired humidified air. Therefore, the two-fluid spraying humidification structure S of the present application can adjust the amount, frequency, duration, etc. of mist-like moisture sprayed by the two-fluid nozzle 3 without using an electrothermal humidification technique, so as to achieve precise Humidity control, and the precision of the Humidity control is about ± 0.5% rh (Relative Humidity), and after actual tests, compared with the prior art that uses an electrothermal humidification structure, the two-fluid spraying humidification structure S can achieve an excellent effect of saving energy by about 75% when both have the same Humidity control range.

The above-described embodiments and/or implementations are only for illustrating the preferred embodiments and/or implementations of the technology of the present application, and are not intended to limit the implementations of the technology of the present application in any way, and those skilled in the art can make modifications or changes to other equivalent embodiments without departing from the scope of the technology disclosed in the present application, but should be construed as technology or implementations substantially the same as the present application.

Claims

1. A two-fluid spray humidifying structure, comprising:

a body, which is provided with at least one air inlet and at least one air outlet, an air flow channel is arranged in the body, and the air inlet is communicated with the air outlet through the air flow channel;

at least one fixed seat in the air flow channel; and

at least a second fluid nozzle, which is set on the fixed seat and can spray mist water vapor, so that the dry air flowing in through the air inlet can be mixed with the mist water vapor in the air flow channel to form humidified air, and the humidified air can flow out of the main body through the air outlet.

2. The two-fluid spray humidifying structure of claim 1, wherein a partition plate is disposed in the body, the partition plate divides the air flow passage into an air inlet region, a communication region and a humidifying region, the air inlet region can be respectively communicated with the air inlet and the communication region, the humidifying region can be respectively communicated with the air outlet and the communication region, and each of the two-fluid nozzles is disposed in the humidifying region.

3. The two-fluid spraying humidifying structure of claim 2, wherein a first side surface and a second side surface of the body are opposite to each other, and the partition plate is located between the first side surface and the second side surface, the first side surface of the body is provided with the air inlet, and is separated from one side surface of the partition plate by a first distance to form the air inlet area; the second side surface of the body is separated from the other side surface of the partition plate by a second distance to form the humidifying area, and the separation distance between each two fluid nozzle and the second side surface of the body is substantially the same as the separation distance between each two fluid nozzle and the other side surface of the partition plate; a third side surface of the body, which is far away from the air outlet, is separated from the free end of the partition plate by a third distance so as to form the communication area.

4. A two-fluid spray humidifying structure according to claim 3, wherein the second distance is greater than the first distance.

5. The two-fluid spray humidifying structure of claim 4, wherein the first distance is between 75 mm and 125 mm; the second distance is 175 mm to 225 mm.

6. The two-fluid spray humidifying structure of claim 5, wherein the flow rate of the drying air into the humidifying area is between 2 and 3.5 meters per second.

7. The two-fluid spraying humidifying structure of claim 2, wherein there are a plurality of two-fluid nozzles and a plurality of fixing bases, wherein two adjacent fixing bases are disposed on the same end of the partition plate and respectively provided with the two-fluid nozzles, and the centers of two adjacent fixing bases are spaced apart from each other by a fourth distance, and the fourth distance is 200 mm to 300 mm.

8. The two-fluid spray humidifying structure according to claim 2, wherein there are a plurality of two-fluid nozzles and a plurality of fixing seats, wherein two ends of the partition plate are respectively provided with one fixing seat, each fixing seat is respectively provided with a corresponding two-fluid nozzle, and the two-fluid nozzles are arranged in a staggered manner.

9. A two-fluid spray humidifying structure according to any one of claims 3 to 8, wherein the body comprises:

one side of the box main body is provided with each air inlet, the other side of the box main body opposite to the air inlet is provided with an assembling opening, the other side of the box main body adjacent to the air inlet is provided with each air outlet, and the air flow channel and the partition plate are arranged in the box main body; and

an external cover plate can be assembled to the position of the box main body corresponding to the assembling port to shield the assembling port.

10. The two-fluid spray humidifying structure according to any one of claims 3 to 8, wherein an extension is further disposed in the body, the extension is near a fourth side of the body, the fourth side is provided with each of the air outlets, one end of the partition plate can be connected to the extension, and the extension can block the dry air flowing into the air inlet region, so that the dry air can only flow toward the direction of the communication region.