CN218576088U - Cold pump shell dismounting device - Google Patents
Cold pump shell dismounting device Download PDFInfo
- Publication number
- CN218576088U CN218576088U CN202222418829.6U CN202222418829U CN218576088U CN 218576088 U CN218576088 U CN 218576088U CN 202222418829 U CN202222418829 U CN 202222418829U CN 218576088 U CN218576088 U CN 218576088U
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- CN
- China
- Prior art keywords
- cold pump
- screw
- dismounting device
- screw rod
- supporting plate
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Abstract
The utility model discloses a cold pump shell dismounting device, set up in the riser of backup pad both sides including backup pad and fixed, be equipped with the connecting portion of outside extension on the front side of riser and rear side bottom edge, be equipped with the square hole on the connecting portion, be equipped with the screw in the square hole, be equipped with the screw in the backup pad, install the screw rod in the screw, the length of screw rod is greater than the height of riser and the sum of the thickness of supporting plate, the utility model overcomes prior art's is not enough, and the device convenient to use can realize the dismantlement to the cold pump shell effectively, dismantles the shell that the in-process can not damage cold pump main part and cold pump.
Description
Technical Field
The utility model relates to a cold pump maintenance technical field specifically belongs to a cold pump shell dismounting device.
Background
Vacuum pumps commonly used in semiconductor devices include rotary vane vacuum pumps, roots pumps, dry pumps, molecular pumps, cold pumps, and the like. The cold pump generates ultra-low temperature of about 11K on a cold head in the pump, and an adsorption trap is added to adsorb gas, so that the purpose of high vacuum pumping is achieved. The cold pump comprises pump and high-efficient helium compressor, and after the cold pump used a period, because mechanical wear or corruption made the vacuum decline that the cold pump produced, consequently just need dismantle the maintenance to the cold pump, the cold pump shell is because long-time installation on the cold pump, artifical bare-handed is difficult to dismantle, and can not strike the shell and drop among the dismantlement process, consequently needs the instrument of a dismantlement shell.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a cold pump shell dismounting device has overcome the not enough of prior art.
In order to solve the above problems, the utility model adopts the following technical proposal:
a cold pump shell dismounting device comprises a supporting plate and vertical plates fixedly arranged on two sides of the supporting plate, connecting portions extending outwards are arranged on the edges of the bottom end of the front side and the bottom end of the rear side of each vertical plate, square holes are formed in the connecting portions, screws are arranged in the square holes, screw holes are formed in the supporting plate, screw rods are installed in the screw holes, and the length of each screw rod is larger than the sum of the height of each vertical plate and the thickness of each supporting plate.
Furthermore, the vertical plate and the support plate are connected through a bolt.
Furthermore, at least two screw holes are formed in the supporting plate, and a screw rod is installed in each screw hole.
Furthermore, the bottom of the screw rod is rotatably connected with a support column, and a rubber pad is bonded at the bottom of the support column.
Further, the bottom of screw rod is equipped with the circular slot, the top of pillar is equipped with the connecting rod that inserts the circular slot, the length of connecting rod is less than the degree of depth of circular slot.
Further, the bottom of the circular groove is also provided with a magnet, and the magnet is used for attracting the connecting rod.
Compared with the prior art, the utility model discloses an implement the effect as follows: the device can fix the vertical plate on the cold pump shell through a screw, the screw can be inserted into the shell, the top end of the screw is abutted to the cold pump main body in the shell, and the support plate drives the vertical plate to move by rotating the screw, so that the shell is separated from the cold pump main body; in addition, the top of the screw is rotatably connected with the support column and the rubber pad, so that the screw does not damage the cold pump main body in the shell when abutting against the cold pump main body; the device convenient to use can realize the dismantlement to the cold pump shell effectively, can not damage the shell of cold pump main part and cold pump in the dismantlement process.
Drawings
Fig. 1 is a schematic structural diagram of embodiment 1 of the present invention;
fig. 2 is a schematic structural diagram of embodiment 2 of the present invention;
fig. 3 is a schematic structural view of the bottom of the screw rod in embodiment 2 of the present invention.
Description of reference numerals: 1. a support plate; 2. a vertical plate; 3. a bolt; 4. a screw; 5. a screw; 21. a connecting portion; 22. a square hole; 6. a pillar; 61. a connecting rod; 7. a rubber pad; 8. and a magnet.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation to be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; may be directly connected or indirectly connected through an intermediate. The specific meaning of the above terms in the present invention can be understood as a specific case by those skilled in the art.
Example 1
As shown in fig. 1-3, the utility model discloses a cold pump shell dismounting device, including backup pad 1 with fixed the riser 2 that sets up in backup pad 1 both sides, connect through bolt 3 between riser 2 and the backup pad 1, be equipped with outside extension's connecting portion 21 on the front side of riser 2 and the rear side bottom end edge, be equipped with square hole 22 on the connecting portion 21, be equipped with screw 5 in the square hole 22, be equipped with two screws in the backup pad 1, and install a screw rod 4 in every screw respectively, the length of screw rod 4 is greater than the height of riser 2 and the thickness sum of backup pad 1.
The device can be fixed on the shell of the cold pump through the screw 5 in the square hole 22 (the accessory on the shell of the cold pump is provided with a threaded hole after being removed, the screw 5 can be screwed into the threaded hole), and the screw rod 4 can be inserted into the hole on the shell after the transmission rod is removed, so that the top of the screw rod 4 is pressed against the cold pump body in the shell; by rotating the screw rod 4, the screw rod 4 is further abutted against the main body of the cold pump, and the shell can be separated from the main body of the cold pump under the action of the torsional force and the supporting force.
Example 2
As shown in fig. 2-3, the utility model discloses a cold pump shell dismounting device, including backup pad 1 with fixed the riser 2 that sets up in backup pad 1 both sides, connect through bolt 3 between riser 2 and the backup pad 1, be equipped with outside extension's connecting portion 21 on the front side of riser 2 and the rear side bottom end edge, be equipped with square hole 22 on the connecting portion 21, be equipped with screw 5 in the square hole 22, be equipped with two screws in the backup pad 1, and install a screw rod 4 in every screw respectively, the length of screw rod 4 is greater than the height of riser 2 and the thickness sum of backup pad 1.
The bottom of screw rod 4 is rotated and is connected with pillar 6, and the bottom of screw rod 4 is equipped with the circular slot, and the top of pillar 6 is equipped with the connecting rod 61 that inserts the circular slot, and the length of connecting rod 61 is less than the degree of depth of circular slot, and the contact department coating of pillar 6 and screw rod 4 has lubricating oil, can make the relative screw rod 4 of pillar 6 rotate, and the bottom of pillar 6 bonds and has rubber pad 7, makes the bottom of the in-process pillar 6 of rotating screw rod 4 can not produce the damage to the cold pump main part.
The bottom of the circular groove is also provided with a magnet 8, and the magnet 8 is used for attracting the connecting rod 61, so that the support 6 is not easy to fall off when being installed at the bottom of the screw rod 4.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. The utility model provides a cold pump shell dismounting device which characterized in that: the supporting plate comprises a supporting plate and vertical plates fixedly arranged on two sides of the supporting plate, connecting portions extending outwards are arranged on the edges of the bottom end of the front side and the bottom end of the rear side of each vertical plate, square holes are formed in the connecting portions, screws are arranged in the square holes, screw holes are formed in the supporting plate, screw rods are installed in the screw holes, and the length of each screw rod is greater than the sum of the height of each vertical plate and the thickness of the supporting plate.
2. A cold pump housing dismounting device according to claim 1, wherein: the vertical plates and the supporting plates are connected through bolts.
3. A cold pump housing dismounting device according to claim 1, wherein: at least two screw holes are formed in the supporting plate, and a screw rod is installed in each screw hole.
4. A cold pump housing dismounting device according to claim 1 or 3, wherein: the bottom of the screw rod is rotatably connected with a support column, and a rubber pad is bonded at the bottom of the support column.
5. A cold pump housing dismounting device according to claim 4, characterized in that: the bottom of screw rod is equipped with the circular slot, the top of pillar is equipped with the connecting rod that inserts the circular slot, the length of connecting rod is less than the degree of depth of circular slot.
6. A cold pump housing dismounting device according to claim 5, characterized in that: and a magnet is also arranged at the bottom of the circular groove and used for attracting the connecting rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222418829.6U CN218576088U (en) | 2022-09-13 | 2022-09-13 | Cold pump shell dismounting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222418829.6U CN218576088U (en) | 2022-09-13 | 2022-09-13 | Cold pump shell dismounting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218576088U true CN218576088U (en) | 2023-03-07 |
Family
ID=85364136
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222418829.6U Active CN218576088U (en) | 2022-09-13 | 2022-09-13 | Cold pump shell dismounting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218576088U (en) |
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2022
- 2022-09-13 CN CN202222418829.6U patent/CN218576088U/en active Active
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