CN218557732U

CN218557732U - Clamping mechanism for silicon material tubular parts

Info

Publication number: CN218557732U
Application number: CN202222694104.XU
Authority: CN
Inventors: 范荣; 李士昌
Original assignee: Shengjisheng Precision Technology Ningbo Co ltd; SGS Ningbo Semiconductor Technology Co Ltd
Current assignee: Shengjisheng Precision Technology Ningbo Co ltd; SGS Ningbo Semiconductor Technology Co Ltd
Priority date: 2022-10-13
Filing date: 2022-10-13
Publication date: 2023-03-03
Anticipated expiration: 2032-10-13

Abstract

The utility model provides a fixture of silicon material tubulose part, including branch and two fixation clamps, branch sets up along vertical direction, branch is provided with a plurality of connecting holes that run through along the thickness direction on the direction of height, the fixation clamp includes connecting rod and holder, the one end of connecting rod is inserted the connecting hole with the connection can be dismantled to branch, the other end with the holder is connected, the holder is suitable for pressing from both sides tight silicon pipe. The utility model discloses a fixture passes through branch pipe and fixation clamp cooperation, can fix the silicon pipe and keep at vertical state, and upper portion and the lower part of silicon pipe are cliied respectively to two fixation clamps, and the centre gripping is reliable, sets up a plurality of connecting holes on the branch, and corresponding fixation clamp mounting height is adjustable, fixture can with the silicon pipe adaptation of different length.

Description

Clamping mechanism for silicon material tubular parts

Technical Field

The utility model relates to a clamping device technical field particularly, relates to a fixture of silicon material tubular part.

Background

Silicon is a common component of semiconductor devices, wherein diffusion devices are used in many silicon tubular parts, commonly referred to as silicon tubes in the industry. Unclean inside of the silicon tube affects the performance of the semiconductor material, and thus, regular cleaning is required.

In the prior art, the cleaning is generally carried out by adopting an acid liquor soaking mode, in order to ensure that the cleaning is more sufficient, acid liquor oscillation, bubbling or convection can be carried out in a cleaning tank, but the cleaning mode is more suitable for parts with simple structures, and the cleaning effect on tubular parts is poor. In order to achieve an ideal cleaning effect, the silicon tube can be vertically placed, the cleaning liquid circulates in the silicon tube in a mode of going in and out from the bottom, but the silicon tube is certainly inclined and moved in the cleaning process, so that the silicon tube is vertically positioned, and the smooth cleaning is guaranteed, which is a problem to be solved urgently.

SUMMERY OF THE UTILITY MODEL

The utility model aims to solve the problem of how to make the vertical location of silicon pipe, be convenient for realize the cleaning mode of going into under the cleaning solution and going out from top to bottom.

In order to solve the problem, the utility model provides a fixture of silicon material tubular part, including branch and two fixation clamps, branch sets up along vertical direction, branch is provided with a plurality of connecting holes that run through along the thickness direction on the direction of height, the fixation clamp includes connecting rod and holder, the one end of connecting rod is inserted the connecting hole with branch can be dismantled the connection, the other end with the holder is connected, the holder is suitable for pressing from both sides tight silicon pipe.

Compared with the prior art, the utility model discloses a fixture passes through the branch pipe and the fixation clamp cooperation, can fix the silicon pipe and keep at vertical state, and the upper portion and the lower part of silicon pipe are cliied respectively to two fixation clamps, and the centre gripping is reliable, sets up a plurality of connecting holes on the branch, and corresponding fixation clamp installation height-adjustable, fixture can with the silicon pipe adaptation of different length.

Furthermore, the clamping piece comprises a first clamping plate and a second clamping plate, the first clamping plate is connected with the connecting rod, and the first clamping plate is connected with the second clamping plate through a screw rod, so that the silicon tube is clamped between the first clamping plate and the second clamping plate. Two grip blocks structure can adapt to the silicon tube of different pipe diameters, and two grip blocks pass through the screw rod and connect the clamp tightly effectually.

Furthermore, arc-shaped grooves are formed in two opposite wall surfaces of the first clamping plate and the second clamping plate. The arc wall can laminate with the silicon pipe surface, improves the area of contact of grip block and silicon pipe, avoids local atress, and the silicon pipe location of being convenient for avoids appearing the slope.

Furthermore, the first clamping plate and the second clamping plate are made of polytetrafluoroethylene. The polytetrafluoroethylene material has good durability and can not damage the surface of the silicon tube.

Furthermore, the inner wall of the connecting hole is provided with an internal thread, the outer wall of one end, connected with the support rod, of the connecting rod is provided with an external thread, and the connecting rod is in threaded connection with the connecting hole. The connecting rod connecting hole is convenient to assemble and reliable in connection.

Furthermore, the extension length of the external thread on the connecting rod is 5-20 cm. Within the extension range of the screw thread, the extension length of the connecting rod relative to the support rod can be adjusted, so that the silicon tube can be conveniently positioned at a proper position.

Furthermore, the number of the connecting holes is 10-20, and the connecting holes are arranged at equal intervals. The silicon tubes with different lengths can be clamped by arranging a plurality of connecting holes.

Further, the distance between the adjacent connecting holes is 5-20 cm. Whereby the distance between the two fixing clips can be adjusted to a small extent.

Furthermore, a pipe bracket is arranged at the top of the support rod and is suitable for supporting a liquid return pipe of cleaning liquid. The upper part of the liquid return pipe of the cleaning liquid is convenient to position by arranging the pipe support groove.

Furthermore, a through hole is formed in the lower portion of the support rod and located below the connecting hole at the lowest side, and the through hole is suitable for the liquid return pipe to penetrate through. The lower part that sets up the poling pore pair and return the liquid pipe plays the support positioning action, avoids returning the liquid pipe and rocks.

Drawings

FIG. 1 is a first structural diagram of a clamping mechanism according to an embodiment of the present invention;

FIG. 2 is a second structural diagram of the clamping mechanism in the embodiment of the present invention;

FIG. 3 is a view of the structure of the fixing clip according to the embodiment of the present invention;

FIG. 4 is a schematic diagram of the connecting rod and the first clamping plate according to the embodiment of the present invention;

fig. 5 is a diagram illustrating a usage status of the clamping mechanism according to an embodiment of the present invention.

Description of the reference numerals:

1-support rod, 11-connecting hole, 12-tube bracket, 13-tube through hole, 2-fixing clamp, 21-connecting rod, 22-first clamping plate, 23-second clamping plate, 24-screw rod, 25-arc groove, 3-liquid return tube, 4-liquid inlet tube and 5-silicon tube.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.

In the description of the present invention, it should be noted that the terms "upper", "lower", "left", "right", "inner", "outer", "front", "rear", and the like indicate the position or positional relationship based on the position or positional relationship shown in the drawings, or the position or positional relationship which is usually placed when the product of the present invention is used, and are only for convenience of description of the present invention and simplification of description, but do not indicate or imply that the device or element to which the term refers must have a specific orientation, be constructed and operated in a specific orientation, and therefore, should not be construed as limiting the present invention. The utility model discloses a be provided with coordinate system XYZ in the drawing of embodiment, wherein the place ahead is represented to the forward of X axle, and the back is represented to the reverse of X axle, and the left is represented to the forward of Y axle, and it is right-hand that the reverse of Y axle represents, and the top is represented to the forward of Z axle, and the below is represented to the reverse of Z axle.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "disposed," "connected," and the like are to be construed broadly, and for example, "connected" may be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

The preferred embodiments of the present invention will be described hereinafter with reference to the accompanying drawings, and it should be understood that the preferred embodiments described herein are merely for purposes of illustration and explanation, and are not intended to limit the present invention.

With reference to fig. 1 to 5, an embodiment of the present invention provides a clamping mechanism for silicon tubular parts, which is used for clamping and positioning a silicon tube 5 during cleaning. Combine shown in figure 1, fixture includes branch 1 and two fixation clamps 2, and branch 1 sets up along vertical direction (Z axle direction), and branch 1 is provided with a plurality of connecting holes 11 that run through along thickness direction (Y axle direction) on the direction of height, and fixation clamp 2 includes connecting rod 21 and holder, and connecting rod 21's one end is inserted connecting hole 11 and can be dismantled with branch 1 and be connected, and the other end is connected with the holder, and the holder is used for pressing from both sides tight silicon pipe 5. Two fixation clamps 2 of this fixture set up on vertical branch 1, can grasp the upper portion and the lower part of silicon pipe 5, fix silicon pipe 5 and keep at vertical state to realize the cleaning mode of entering under the cleaning solution and going out from top to bottom.

Referring to fig. 1 and 2, the inner wall of the connecting hole 11 is provided with an internal thread, referring to fig. 3 and 4, the outer wall of one end of the connecting rod 21 connected with the supporting rod 1 is provided with an external thread, and the connecting rod 21 is in threaded connection with the connecting hole 11. And within the extension length range of the external thread, the connecting rod 21 can move in the Y-axis direction, namely the distance between the clamping piece and the support rod 1 can be adjusted, so that the silicon tube 5 can be positioned at a proper position to be conveniently connected with a transfusion pipeline. The external thread of the tie rod 21 in this embodiment extends for a length of 10cm, and in other embodiments between 5 and 20cm.

In this embodiment, the quantity of connecting hole 11 is 15, and adjacent connecting hole 11 equidistance sets up, sets up a plurality of connecting holes 11 and can adjust 2 mounting heights of fixation clamp in a flexible way, and adaptation in the silicon pipe 5 of different length improves fixture's commonality. The distance between adjacent attachment holes 11 is 10cm, whereby the distance between two fixing clips 2 can be adjusted to a small extent. In other embodiments, the number of the connection holes 11 is 10 to 20, and the distance between adjacent connection holes 11 is 5 to 20cm.

Referring to fig. 3 and 4, the clamping member includes a first clamping plate 22, a second clamping plate 23, and four screws 24, the first clamping plate 22 is connected to the connecting rod 21, four corners of the first clamping plate 22 and the second clamping plate 23 are respectively provided with a screw hole, the screws 24 pass through the screw holes to connect the first clamping plate 22 to the second clamping plate 23, and the silicon tube 5 can be clamped by the cooperation of the first clamping plate 22 and the second clamping plate 23. The distance between the first clamping plate 22 and the second clamping plate 23 can be adjusted, so that the clamping piece can be matched with silicon tubes 5 with different tube diameters, and the universality is good. In this embodiment, the first clamping plate 22 and the second clamping plate 23 are made of teflon, which has good durability and does not damage the surface of the silicon tube 5 during clamping.

Further, be equipped with the arc wall 25 on two relative walls of first grip block 22 and second grip block 23, when the holder used, silicon pipe 5 can get into arc wall 25, and the outer wall laminates with arc wall 25, can improve grip block and silicon pipe 5's area of contact like this, avoids local atress, and sets up the arc wall 25 and be convenient for silicon pipe 5 location, avoids silicon pipe 5 installation slope.

Combine fig. 1 and fig. 2, need be connected the lower extreme of silicon pipe 5 and the feed liquor pipe 4 of washing liquid when wasing silicon pipe 5, the upper end is connected with the liquid pipe 3 that returns of washing liquid, and the length that returns liquid pipe 3 is great, takes place to rock easily. Set up pipe support groove 12 at 1 top of branch, the lower part sets up wearing hole 13, wearing hole 13 is located the below of connecting hole 11 of downside most, pipe support groove 12 is arranged in on the upper portion of returning liquid pipe 3, pipe support groove 12 plays the bearing effect, will return the upper portion location of liquid pipe 3, the lower part of returning liquid pipe 3 is worn to establish from wearing hole 13, wearing hole 13 plays the support positioning effect, pipe support groove 12 and wearing hole 13 cooperation, will return the upper portion and the lower part of liquid pipe 3 and fix a position respectively, avoid returning liquid pipe 3 and rock.

The clamping mechanism for the silicon material tubular part has the advantages of convenience in operation, simple structure, reliability in clamping and high universality. During the use firstly install two fixation clamps 2 respectively in suitable position according to 5 lengths of silicon pipe, then insert silicon pipe 5 between first grip block 22 and the second grip block 23, rotate screw rod 24 and make first grip block 22 and the second grip block 23 be close to and press from both sides tight silicon pipe 5, be connected the feed liquor pipe 4 and the 5 lower extremes of silicon pipe of washing liquid, return liquid pipe 3 and be connected with 5 upper ends of silicon pipe, the state is as shown in figure 5, fixture guarantees 5 rigidity in silicon pipe this moment, can let in the washing liquid and wash, realize the washing mode of entering under the washing liquid and going out from top to bottom.

Finally, it should be noted that the above embodiments are only used for illustrating the technical solutions of the present invention, and not for limiting the same; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention.

Claims

1. The utility model provides a fixture of silicon material tubulose part, its characterized in that includes branch (1) and two fixation clamps (2), branch (1) sets up along vertical direction, branch (1) is provided with a plurality of connecting holes (11) that run through along the thickness direction on the direction of height, fixation clamp (2) include connecting rod (21) and holder, the one end of connecting rod (21) is inserted connecting hole (11) with branch (1) can be dismantled the connection, the other end with the holder is connected, the holder is suitable for pressing from both sides tight silicon tube (5).

2. Clamping mechanism for tubular parts of silicon material according to claim 1, characterized in that the clamping member comprises a first clamping plate (22) and a second clamping plate (23), the first clamping plate (22) is connected with the connecting rod (21), the first clamping plate (22) and the second clamping plate (23) are connected by a screw (24) so that the silicon tube (5) is clamped between the first clamping plate (22) and the second clamping plate (23).

3. The clamping mechanism for the tubular silicon material part as claimed in claim 2, wherein the two wall surfaces of the first clamping plate (22) opposite to the second clamping plate (23) are provided with arc-shaped grooves (25).

4. The clamping mechanism for the tubular silicon material parts as claimed in claim 2, wherein the first clamping plate (22) and the second clamping plate (23) are made of teflon.

5. The clamping mechanism of the silicon material tubular part as claimed in claim 1, wherein the inner wall of the connecting hole (11) is provided with an internal thread, the outer wall of one end of the connecting rod (21) connected with the support rod (1) is provided with an external thread, and the connecting rod (21) is in threaded connection with the connecting hole (11).

6. The clamping mechanism for the silicon material tubular part is characterized in that the extension length of the external thread on the connecting rod (21) is 5-20 cm.

7. A clamping mechanism of a tubular part of silicon material as claimed in claim 1, wherein the number of the connecting holes (11) is 10-20, and the adjacent connecting holes (11) are arranged at equal intervals.

8. The clamping mechanism for the tubular parts of silicon materials as claimed in claim 7, wherein the distance between the adjacent connecting holes (11) is 5-20 cm.

9. The clamping mechanism for the silicon material tubular part as recited in claim 1, characterized in that a tube bracket (12) is arranged on the top of the supporting rod (1), and the tube bracket (12) is suitable for holding a liquid return tube (3) of cleaning liquid.

10. A holding mechanism for a silicon material tubular part according to claim 9, characterized in that the lower part of the supporting rod (1) is provided with a through hole (13), the through hole (13) is positioned below the lowest connecting hole (11), and the through hole (13) is suitable for the liquid return pipe (3) to pass through.