CN218542600U

CN218542600U - Vacuum pump

Info

Publication number: CN218542600U
Application number: CN202222804386.4U
Authority: CN
Inventors: 张伟明; 胡雪慧
Original assignee: Shanghai Shengjian Semiconductor Technology Co ltd
Current assignee: Shanghai Shengjian Semiconductor Technology Co ltd
Priority date: 2022-10-24
Filing date: 2022-10-24
Publication date: 2023-02-28
Anticipated expiration: 2032-10-24

Abstract

The embodiment of the utility model provides a vacuum pump relates to the vacuum apparatus field. The vacuum pump comprises a pump body, a pump shaft, a bearing assembly and a shielding motor. Wherein be provided with the pump shaft hole in the pump body, the pump shaft is installed in the tip of pump shaft hole and pump shaft and is spread the pump body, and bearing assembly is including the bearing frame and the bearing that are connected, and the bearing frame is worn to locate the bearing with the end connection of the pump body, and shield motor is located the one end of the pump body and keeps away from one side of the pump body with the bearing frame and is connected, and the pump shaft is connected with shield motor. The pump body and the pump shaft are assembled through the pump shaft hole, the bearing is not arranged in the pump body, and the bearing is arranged outside the pump body of the vacuum pump, so that the condition of overhigh temperature in the pump body caused by friction between the bearing and the pump shaft when the equipment runs can be effectively reduced, and the performance of the equipment is further ensured.

Description

Vacuum pump

Technical Field

The utility model relates to a vacuum apparatus field particularly, relates to a vacuum pump.

Background

A vacuum pump refers to a device or apparatus for obtaining a vacuum by mechanically, physically, chemically or physico-chemically pumping a container to be pumped, and in general, a vacuum pump is an apparatus for improving, generating and maintaining a vacuum in a certain closed space by various methods.

The inventor researches and finds that most of vacuum pumps integrated with shielding motors at present have the condition of influencing equipment performance due to overhigh temperature in the vacuum pumps.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a vacuum pump, it can reduce the heat production phenomenon that appears in the vacuum pump, and then guarantees the performance of equipment.

The embodiment of the utility model is realized like this:

in a first aspect, the present invention provides a vacuum pump, comprising;

the pump body is internally provided with a pump shaft hole;

the pump shaft is arranged in the pump shaft hole, and the end part of the pump shaft penetrates out of the pump body;

the pump comprises a pump body, a pump shaft, a bearing assembly and a pump cover, wherein the pump shaft is arranged in the pump body;

the pump comprises a pump body, a bearing seat, a shielding motor, a pump shaft and a motor shaft, wherein the shielding motor is positioned at one end of the pump body and is connected with one side, away from the pump body, of the bearing seat, and the pump shaft is connected with the shielding motor.

The bearing is not arranged in the pump body and is arranged outside the pump body of the vacuum pump, so that the situation of overhigh temperature in the pump body caused by friction between the bearing and the pump shaft when the equipment runs can be effectively reduced, and the performance of the equipment is further ensured.

In an optional embodiment, the pump shaft comprises a driven shaft and a driving shaft which are connected, the driven shaft is arranged in the pump shaft hole, the end part of the driven shaft penetrates through the pump body, and the driven shaft penetrates through the bearing;

the bearing assembly further comprises a shaft sleeve, the driven shaft is connected with the driving shaft through the shaft sleeve, and the driving shaft is connected with the shielding motor.

The driven shaft penetrates out of the pump body and is connected with the driving shaft through the shaft sleeve, the driving shaft is connected with the shielding motor, and the support of the end part of the driving shaft is increased, so that the linear displacement of the motor and the pump shaft in the vertical direction of the axis can be reduced, and the deflection of the pump shaft is reduced.

In an optional embodiment, the shielding motor comprises a stator shielding sleeve, and a stator assembly and a rotor assembly which are arranged inside the stator shielding sleeve, the driving shaft penetrates through the rotor assembly and abuts against the rotor assembly, and the stator shielding sleeve is connected with the bearing seat.

In the embodiment, the stator shielding sleeve is arranged to serve as a shell and prevent leakage of the vacuum pump. The shielding cover is avoided being arranged between the stator and the rotor independently, and the space required by the whole vacuum pump is saved to the greater extent.

In an alternative embodiment, the vacuum pump further comprises a sealing flange, and the shield motor is hermetically connected with the bearing seat through the sealing flange.

The sealing performance of the shielding motor and the pump body is further ensured through the sealing flange.

In an alternative embodiment, the shield motor is detachably connected to a bearing housing, which is detachably connected to the pump body.

Through detachable connected mode, guarantee the convenience that the vacuum pump maintained.

In an optional embodiment, the bearing assembly further includes a sealing ring bushing and a sealing ring, an end surface of the sealing ring bushing abuts against the pump body, the pump shaft is sleeved with the sealing ring bushing, and the sealing ring bushing is sleeved with the sealing ring bushing.

The sealing performance of the pump body is further ensured by arranging the sealing ring bushing and the sealing ring.

In an optional embodiment, the bearing assembly further includes an oil blocking sleeve, the oil blocking sleeve is disposed on the pump shaft and located between the bearing and the sealing ring bushing, and an end surface of the oil blocking sleeve abuts against an end of the sealing ring bushing, which is far away from the pump body.

The lubricating oil of the bearing is prevented from leaking through the oil blocking sleeve.

In an alternative embodiment, at least one of the seal ring bushing, the seal ring and the oil deflector sleeve is made of a polytetrafluoroethylene material.

The sealing ring bushing, the sealing ring and the oil blocking sleeve made of polytetrafluoroethylene materials enable the vacuum pump to be good in sealing effect and long in service life.

In an optional embodiment, the vacuum pump further includes a gear component, the gear component includes a gear housing and a gear disposed in the gear housing, a bearing assembly is also disposed on one side of the pump body away from the shield motor, two sides of the bearing seat are respectively connected with the pump body and the gear housing, and one end of the pump shaft away from the shield motor penetrates through the bearing and is connected with the gear.

The bearings at the two ends of the driven shaft can ensure that the driven shaft can stably rotate, and further the power of the pump shaft is stably transmitted through the gears.

In an alternative embodiment, the inner side wall of the gear is provided with a gear key, and the pump shaft is provided with a key groove matched with the gear key.

Through the cooperation between gear key and the keyway to guarantee the joint strength of gear and pump shaft.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.

Fig. 1 is a schematic structural diagram of a vacuum pump according to an embodiment of the present invention.

The icon is 100-vacuum pump; 10-a pump body; 11-pump shaft hole; 20-a pump shaft; 21-a driven shaft; 22-a drive shaft; 30-a bearing assembly; 31-a bearing seat; 32-a bearing; 33-a sealing ring bushing; 34-a sealing ring; 35-oil retaining sleeve; 36-bearing seat cover plate; 37-shaft sleeve; 40-a shielded motor; 41-stator shielding sleeve; 42-a stator assembly; 43-a rotor assembly; 50-sealing flange; 60-a gear member; 61-a gear housing; 62-gear; 621-gear key.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of the embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate the directions or positional relationships based on the directions or positional relationships shown in the drawings, or the directions or positional relationships that the products of the present invention are usually placed when used, and are only for the convenience of describing the present invention and simplifying the description, but do not indicate or imply that the device or element indicated must have a specific direction, be constructed and operated in a specific direction, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another, and are not to be construed as indicating or implying relative importance.

Furthermore, the terms "horizontal", "vertical" and the like do not imply that the components are required to be absolutely horizontal or pendant, but rather may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.

In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

The specific structure of the vacuum pump and the corresponding technical effects brought by the vacuum pump provided by the embodiment of the invention are described in detail in the following with reference to the patent drawings.

Referring to fig. 1, a vacuum pump 100 according to an embodiment of the present invention includes a pump body 10, a pump shaft 20, a bearing assembly 30, and a shield motor 40.

Wherein pump body 10 is inside to be provided with pump shaft hole 11, and pump shaft 20 installs in pump shaft hole 11 and the tip of pump shaft 20 passes pump body 10. The bearing assembly 30 includes a bearing seat 31 and a bearing 32 connected to each other, the bearing seat 31 is connected to an end of the pump body 10, and the pump shaft 20 is inserted through the bearing 32. The canned motor 40 is located at one end of the pump body 10 and connected with one side of the bearing block 31 far away from the pump body 10, and the pump shaft 20 is connected with the canned motor 40.

The pump body 10 and the pump shaft 20 are assembled through the pump shaft hole 11, the bearing 32 is not arranged in the pump body 10, the bearing 32 is arranged outside the pump body 10 of the vacuum pump 100 and then connected with the pump shaft 20 extending out of the pump body 10, the situation that the temperature in the pump body 10 is too high due to friction between the bearing 32 and the pump shaft 20 when the equipment runs can be effectively reduced, and the performance of the equipment is further ensured. It should be noted that, the bearing 32 in the present embodiment is disposed outside the pump body 10 of the vacuum pump 100, which can effectively avoid the influence of the vacuuming gas on the lubricating effect of the bearing 32 at the joint.

Further, in the present embodiment, the vacuum pump 100 further includes a sealing flange 50, wherein the canned motor 40 is hermetically connected to the bearing housing 31 through the sealing flange 50. As can be appreciated, the canned motor 40 is hermetically connected to the bearing seat 31 through the sealing flange 50, so that the sealing performance of the canned motor 40 and the pump body 10 can be further ensured.

In addition, in the whole device, the pump shaft 20, the bearing 32 and the flange sealing part are exposed outside the vacuum environment of the pump body 10, so that the performance of the pump shaft 20, the bearing 32 and the flange sealing part can be prevented from being influenced by the vacuum environment.

Further, the pump shaft 20 includes a driven shaft 21 and a driving shaft 22 connected to each other, the driven shaft 21 is installed in the pump shaft hole 11, an end of the driven shaft 21 penetrates through the pump body 10, and the driven shaft 21 penetrates through the bearing 32. The bearing assembly 30 further includes a sleeve 37, the driven shaft 21 is connected with the driving shaft 22 through the sleeve 37, and the driving shaft 22 is connected with the canned motor 40. It will be understood that the driving shaft 22 can be rotated by the shield motor 40 to rotate the driven shaft 21, thereby operating the pump body 10.

The driven shaft 21 penetrates through the pump body 10 and is connected with the driving shaft 22 through the shaft sleeve 37, the driving shaft 22 is connected with the shielding motor 40, and the support of the end part of the driving shaft 22 is increased, so that the linear displacement of the motor and the pump shaft 20 in the direction vertical to the axis can be reduced, and the deflection of the shaft is also reduced. The pump shaft 20 in this embodiment extends out of the pump body 10, and thus, it is possible to avoid a failure such as leakage due to a poor sealing effect of the pump body 10.

Specifically, in this embodiment, the canned motor 40 includes a stator shielding sleeve 41, and a stator assembly 42 and a rotor assembly 43 disposed inside the stator shielding sleeve, the driving shaft 22 penetrates through the rotor assembly 43 and abuts against the rotor assembly 43, it should be noted that the rotation axes of the driving shaft 22, the driven shaft 21, and the rotor assembly 43 in this embodiment are all on a straight line, so as to ensure that the pump body 10 can work smoothly. The stator shielding 41 is connected to the bearing housing 31. That is, the stator shielding case 41 is connected to the bearing housing 31 through the sealing flange 50.

It should be noted that, in some prior arts, the end of the pump body 10, through which the main shaft passes, penetrates into the canned motor 40 and is fixed with the rotor of the canned motor 40, and the canned motor 40 is provided with a canned cover which is located between the stators of the rotors. In the present embodiment, the stator shielding case 41 serves as a housing and also prevents the vacuum pump 100 from leaking. I.e. avoiding the need for a separate shield between the stator and rotor, a greater saving in space is required for the overall vacuum pump 100.

In this embodiment, the shield motor 40 is detachably connected to the bearing housing 31, and the bearing housing 31 is detachably connected to the pump body 10. In some existing vacuum pumps 100 integrated with a canned motor 40, a vacuum pump 100 casing, a motor casing, a canned cover, and an end plate are welded as a whole, and after the vacuum pump 100 casing, the canned cover and the end plate are welded as a whole, it is difficult to maintain the vacuum pump 100, or in some other existing technologies, a sealing flange 50 is welded with the motor casing, if the flange is damaged, the whole motor casing needs to be replaced, and the cost is high.

In this embodiment, the shield motor 40 is detachably connected to the bearing seat 31, and the bearing seat 31 is detachably connected to the pump body 10. Specifically, the canned motor 40 is connected to the bearing seat 31 through the sealing flange 50, wherein the sealing flange 50 is detachably connected to the bearing seat 31 and the stator shielding sleeve 41 of the canned motor 40, respectively. Therefore, in this embodiment, since the pump body 10 is detachably connected to the bearing seat 31, the bearing seat 31 is detachably connected to the sealing flange 50, and the sealing flange 50 is detachably connected to the stator shielding sleeve 41, when maintenance is needed, corresponding parts can be detached, so that maintenance can be performed easily, and when a certain part is damaged, the damaged part can be replaced without replacing two fixedly connected parts together, thereby effectively saving cost.

Specifically, in the present embodiment, the pump body 10 and the bearing seat 31, and the bearing seat 31 and the stator shielding sleeve 41 are all connected by threads. Of course, in some other embodiments, the connection is not limited to a threaded connection, and may be detachable in other manners as long as the sealing performance between the components can be ensured, and the detachable connection manner is not limited herein.

Further, in the present embodiment, the bearing seat 31 further includes a bearing seat cover plate 36, wherein the bearing seat cover plate 36 is located at a side of the bearing seat 31 close to the shielding motor 40, the bearing seat cover plate 36 is provided with a hole for installing the shaft sleeve 37, and the shaft sleeve 37 penetrates and abuts against the bearing seat cover plate 36. Specifically, the bearing seat cover plate 36, the sealing flange 50 and the stator shielding sleeve 41 are sequentially arranged along one side far away from the pump body 10. And the bearing seat cover plate 36 and the stator shielding sleeve 41 are both provided with holes for bolts to penetrate through, the bolts penetrate through the bearing seat cover plate 36, the sealing flange 50 and the stator shielding sleeve 41 simultaneously, and nuts are sleeved on the bolts to connect the bearing seat cover plate 36, the sealing flange 50 and the stator shielding sleeve 41.

Further, in the embodiment, the bearing assembly 30 further includes a sealing ring bushing 33 and a sealing ring 34, wherein an end surface of the sealing ring bushing 33 abuts against the pump body 10, the sealing ring bushing 33 is sleeved on the pump shaft 20, that is, the driven shaft 21, and the sealing ring 34 is sleeved on the sealing ring bushing 33. It can be understood that the sealing performance between the pump body 10 and the shield motor 40 can be further enhanced by the sealing ring bushing 33, and the sealing ring 34 is additionally arranged on the sealing ring bushing 33 to further enhance the sealing performance of the pump body 10.

Further, the bearing assembly 30 further includes an oil blocking sleeve 35, the oil blocking sleeve 35 is sleeved on the pump shaft 20 (i.e. on the driven shaft 21) and is located between the bearing 32 and the sealing ring bushing 33, and an end surface of the oil blocking sleeve 35 abuts against an end of the sealing ring bushing 33 far away from the pump body 10. To avoid leakage of the lubricating oil on the bearings 32.

Further, at least one of the seal ring bushing 33, the seal ring 34, and the oil baffle sleeve 35 is made of a teflon material. In this embodiment, the seal ring bush 33, the seal ring 34, and the oil baffle sleeve 35 are made of polytetrafluoroethylene. It can be understood that the teflon material has high compressibility and is easy to fill the sealing surface, so that the sealing ring bushing 33, the sealing ring 34 and the oil blocking sleeve 35 are made of teflon, which can ensure the sealing effect and maintain the rotation of the pump shaft 20.

Further, in this embodiment, the vacuum pump 100 further includes a gear component 60, the gear component 60 includes a gear housing 61 and a gear 62 disposed in the gear housing 61, wherein a bearing assembly 30 is also disposed on one side of the pump body 10 away from the canned motor 40, two sides of the bearing seat 31 are respectively connected with the pump body 10 and the gear housing 61, and one end of the pump shaft 20 away from the canned motor 40 penetrates through the bearing 32 and is connected with the gear 62. That is, the other end of the driven shaft 21 far away from the driving shaft 22 is connected with another bearing 32, and the bearing 32 is also located outside the pump body 10, and the bearings 32 located at the two ends of the driven shaft 21 can ensure that the driven shaft 21 can stably rotate. As is well known, since the gear 62 can stably transmit power, in the present embodiment, power of the driven shaft 21 can be stably transmitted through the gear 62. Note that the gear housing 61 is detachably connected to the pump body 10.

In the present embodiment, the gear key 621 is disposed on the inner side wall of the gear 62, and the pump shaft 20 (i.e., the driven shaft 21) is provided with a key slot that is matched with the gear key 621, so as to ensure the connection strength between the gear 62 and the pump shaft 20. Of course, in some other embodiments, the gear 62 and the pump shaft 20 may be connected by other means, and are not limited in any way. In the whole device, the pump shaft 20, the bearing 32 and the flange sealing part are exposed outside the vacuum environment of the pump body 10, so that the performance of the pump shaft 20, the bearing 32 and the flange sealing part can be prevented from being influenced by the vacuum environment.

To sum up, the embodiment of the present invention provides a vacuum pump 100's the inside bearing 32 that does not be provided with of pump body 10, bearing 32 set up in the outer both sides of the pump body 10, can effectual reduction because the too high condition of temperature in the pump body 10 that the friction caused between bearing 32 and the pump shaft 20 when equipment operates, and then guarantee the performance of equipment to for dismantling the connection between the pump body 10, canned motor 40 and the gear part 60, can be better maintain or change corresponding spare part.

The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A vacuum pump, comprising;

the pump comprises a pump body (10), wherein a pump shaft hole (11) is formed in the pump body (10);

the pump shaft (20) is mounted in the pump shaft hole (11), and the end part of the pump shaft (20) penetrates out of the pump body (10);

the pump body (10) comprises a pump body (30), the pump body (10) is provided with a pump shaft (20), the pump shaft (20) is arranged on the pump body (10), and the pump shaft (20) is arranged on the bearing (32);

the pump comprises a shielding motor (40), wherein the shielding motor (40) is located at one end of the pump body (10) and is connected with one side, away from the pump body (10), of the bearing seat (31), and the pump shaft (20) is connected with the shielding motor (40).

2. A vacuum pump according to claim 1, wherein:

the pump shaft (20) comprises a driven shaft (21) and a driving shaft (22) which are connected, the driven shaft (21) is installed in the pump shaft hole (11), the end part of the driven shaft (21) penetrates through the pump body (10), and the driven shaft (21) penetrates through the bearing (32);

the bearing assembly (30) further comprises a shaft sleeve (37), the driven shaft (21) is connected with the driving shaft (22) through the shaft sleeve (37), and the driving shaft (22) is connected with the shielding motor (40).

3. A vacuum pump according to claim 2, wherein:

the shielding motor (40) comprises a stator shielding sleeve (41), a stator assembly (42) and a rotor assembly (43) which are arranged in the stator shielding sleeve (41), the driving shaft (22) penetrates through the rotor assembly (43) and is abutted to the rotor assembly (43), and the stator shielding sleeve (41) is connected with the bearing seat (31).

4. A vacuum pump according to claim 1, wherein:

the vacuum pump further comprises a sealing flange (50), and the shielding motor (40) is connected with the bearing seat (31) in a sealing mode through the sealing flange (50).

5. A vacuum pump according to claim 1, wherein:

the shielding motor (40) is detachably connected with the bearing seat (31), and the bearing seat (31) is detachably connected with the pump body (10).

6. A vacuum pump according to claim 1, wherein:

the bearing assembly (30) further comprises a sealing ring bushing (33) and a sealing ring (34), the end face of the sealing ring bushing (33) abuts against the pump body (10), the pump shaft (20) is sleeved with the sealing ring bushing (33), and the sealing ring bushing (33) is sleeved with the sealing ring (34).

7. A vacuum pump according to claim 6, wherein:

the bearing assembly (30) further comprises an oil blocking sleeve (35), the pump shaft (20) is sleeved with the oil blocking sleeve (35) and located between the bearing (32) and the sealing ring bushing (33), and the end face of the oil blocking sleeve (35) abuts against one end, far away from the pump body (10), of the sealing ring bushing (33).

8. A vacuum pump according to claim 7, wherein:

at least one of the sealing ring bushing (33), the sealing ring (34) and the oil retaining sleeve (35) is made of polytetrafluoroethylene material.

9. A vacuum pump according to claim 1, wherein:

the vacuum pump further comprises a gear part (60), the gear part (60) comprises a gear housing (61) and a gear (62) arranged in the gear housing (61), one side, far away from the shielding motor (40), of the pump body (10) is also provided with the bearing assembly (30), two sides of the bearing seat (31) are respectively connected with the pump body (10) and the gear housing (61), and one end, far away from the shielding motor (40), of the pump shaft (20) penetrates through the bearing (32) and is connected with the gear (62).

10. A vacuum pump according to claim 9, wherein:

the gear pump is characterized in that a gear key (621) is arranged on the inner side wall of the gear (62), and a key groove matched with the gear key (621) is formed in the pump shaft (20).