CN218531423U - Spraying frock of semi-ring shape outer lining spare - Google Patents
Spraying frock of semi-ring shape outer lining spare Download PDFInfo
- Publication number
- CN218531423U CN218531423U CN202222319130.4U CN202222319130U CN218531423U CN 218531423 U CN218531423 U CN 218531423U CN 202222319130 U CN202222319130 U CN 202222319130U CN 218531423 U CN218531423 U CN 218531423U
- Authority
- CN
- China
- Prior art keywords
- support
- annular
- middle support
- annular support
- semi
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Coating By Spraying Or Casting (AREA)
Abstract
The utility model belongs to the technical field of semiconductor part processing, and provides a spraying tool for a semi-annular lining part, which comprises a middle support, a connecting rod, an annular support and a base; the annular support is arranged on the front surface of the middle support; the number of the connecting rods is at least three, the at least three connecting rods are uniformly distributed on the outer surface of the middle support, one end of any connecting rod is connected to the outer surface of the middle support, the other end of any connecting rod extends to the back surface of the annular support, and the back surface of the annular support is flush with the front surface of the middle support; the back surface of the annular support is provided with a plurality of first positioning pieces, and the end parts of the first positioning pieces extend towards the axis of the annular support; the back of the annular support is provided with a second positioning piece, and the end part of the second positioning piece extends to the axis of the annular support. The end face and the outer surface of the part are positioned simultaneously, so that the uniformity and the spraying quality of part spraying are guaranteed, and the spraying efficiency is improved.
Description
Technical Field
The utility model relates to an auxiliary fixtures that semiconductor flush coater carousel was used specifically is a spraying frock of semi-annular outer lining spare.
Background
As the OUTER LINER (OUTER lining) is used as a part of equipment for a semiconductor etching process, because the semi-annular sheet structure is special and the OUTER lining is also provided with a groove plate, the end surface of the OUTER lining is uneven, and the OUTER lining can be sprayed on other surfaces when directly placed on a rotary disc spraying machine to carry out spraying operation on the inner surface of the OUTER lining, so that the attractiveness of parts and the spraying uniformity are influenced;
therefore, a tool is needed to position the end face of the part flatly, improve the spraying uniformity and improve the spraying quality.
SUMMERY OF THE UTILITY MODEL
The utility model aims at overcoming current defect, providing a spraying frock of semi-ring shape lining spare.
In order to solve the technical problem, the utility model provides a following technical scheme:
the utility model relates to a spraying tool for a semi-annular lining piece, which is made of aluminum alloy materials and comprises a middle support, a connecting rod, an annular support and a base;
the annular support is arranged on the front surface of the middle support;
the number of the connecting rods is at least three, the at least three connecting rods are uniformly distributed on the outer surface of the middle support, one end of any connecting rod is connected to the outer surface of the middle support, the other end of any connecting rod extends to the back surface of the annular support, and the back surface of the annular support is flush with the front surface of the middle support;
the back of the annular support is provided with a plurality of first positioning pieces, and the end parts of the first positioning pieces extend towards the axis of the annular support;
a second positioning piece is arranged on the back surface of the annular support, and the end part of the second positioning piece extends to the axis of the annular support;
the plurality of first positioning pieces, the at least three connecting rods and the second positioning piece are arranged in a staggered mode;
the base is arranged on the back of the middle support and can be connected with a rotary table on the semiconductor coating machine.
Further, the shape of the middle support is a circular sheet structure, the diameter of the middle support is smaller than the inner diameter of the annular support, and the thickness of the middle support is smaller than that of the annular support.
Further, the middle support is provided with a circular hole in a radial penetrating mode.
Furthermore, a plurality of pillars are uniformly distributed between the middle support and the base;
one end of the support column is vertically connected to the back surface of the middle support, and the other end of the support column is vertically connected to the front surface of the base.
Furthermore, one end of the strut is provided with threads, the middle support is provided with a threaded hole, and one end of the strut is in threaded connection with the middle support; the other end of the support column is connected with the base through a bolt.
Further, the middle support and the connecting rod are of an integrated structure.
Has the advantages that:
according to the spraying device, the annular support is attached to the outer surface of the part, one end of the part is positioned by combining the first positioning piece, and the groove piece is clamped by combining the second positioning piece, so that the end surface and the outer surface of the part are positioned simultaneously, the spraying uniformity and the spraying quality of the part are ensured, and the spraying efficiency is improved;
the base and the middle support are detachable by using the support, so that local replacement is realized when a local structure is damaged, and the manufacturing cost is reduced;
the aluminum alloy finished piece is light in weight, and the load of the rotary disc spraying machine is reduced.
Drawings
The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description serve to explain the invention and not to limit the invention. In the drawings:
fig. 1 is a view of the first perspective of the present invention;
fig. 2 is a structural view of a second perspective of the present invention;
fig. 3 is a structural view of a third perspective of the present invention;
fig. 4 is a structural diagram of a fourth viewing angle of the present invention.
In the figure: 1-middle support, 2-connecting rod, 3-annular support, 301-first positioning piece, 302-second positioning piece, 4-pillar, and 5-base.
Detailed Description
The preferred embodiments of the present invention will be described in conjunction with the accompanying drawings, and it will be understood that they are presented herein only to illustrate and explain the present invention, and not to limit the present invention.
As shown in fig. 1-4, the application provides a spraying tool for a semi-annular lining part, which is made of an aluminum alloy material, wherein the aluminum alloy part is light in weight, and the load of a rotary disc spraying machine is reduced; comprises a middle support 1, a connecting rod 2, an annular support 3 and a base 5; the annular support 3 is arranged on the front surface of the middle support 1; a gap is reserved between the middle support 1 and the annular support 3, so that heat dissipation is facilitated; the number of the connecting rods 2 is at least three, the at least three connecting rods 2 are uniformly distributed on the outer surface of the middle support 1, one end of any connecting rod 2 is connected to the outer surface of the middle support 1, the other end of any connecting rod 2 extends to the back of the annular support 3, and the back of the annular support 3 is flush with the front of the middle support 1; the connecting rod 2 not only has a stable connection function, but also has an auxiliary positioning function, and when a part is attached to the inner surface of the annular support 3, the end surface of the part can contact the connecting rod 2; a plurality of first positioning pieces 301 are arranged on the back surface of the annular support 3, and the end parts of the first positioning pieces 301 extend towards the axis of the annular support 3; the first positioning member 301 is used to match the end face of the part, but it should be noted that the length of the first positioning member 301 extending towards the center of the ring support 3 should be no less than the thickness of the part, so as to ensure that the first positioning member 301 fully supports the part; a second positioning piece 302 is arranged on the back of the annular support 3, and the end part of the second positioning piece 302 extends towards the axis of the annular support 3; the second positioning piece 302 is used for matching with a slotted vane on the part, and when the part is placed, the notch of the slotted vane is aligned with the second positioning piece 302, so that the second positioning piece 302 enters the notch until the second positioning piece is attached to the inner surface of the slotted vane, and thus, the positioning of the slotted vane, the end surface of the part and the outer surface of the part is realized, and the positioning effect of the part is greatly improved; a plurality of first positioning parts 301, at least three connecting rods 2 and a second positioning part 302 are arranged in a staggered manner; the staggered arrangement meets the positioning function and avoids position interference; the base 5 is arranged on the back of the middle support 1 and can be connected with a turntable on a semiconductor coating machine.
Specifically, the shape of the middle support 1 is a circular sheet structure, the diameter of the middle support 1 is smaller than the inner diameter of the annular support 3, and the thickness of the middle support 1 is smaller than the thickness of the annular support 3.
Specifically, a circular hole is radially arranged in the middle support 1 in a penetrating manner; the design of round hole has further reduced the weight of intermediate strut 1, has improved the thermal diffusivity of whole frock, still makes things convenient for the coating to flow out the frock.
Specifically, a plurality of pillars 4 are uniformly distributed between the middle support 1 and the base 5; one end of the strut 4 is vertically connected with the back surface of the middle support 1, and the other end of the strut 4 is vertically connected with the front surface of the base 5; the support column 4 is connected with the base 5 and the middle support 1, so that the flatness of the middle support 1 is improved, and the positioning effect is further improved.
In the embodiment, one end of the pillar 4 is provided with a thread, the middle support 1 is provided with a threaded hole, and one end of the pillar 4 is in threaded connection with the middle support 1; the other end of the strut 4 is connected with the base 5 through a bolt; the detachable connection realizes local detachment, and achieves the purpose of local replacement.
In the embodiment, the middle support 1 and the connecting rod 2 are of an integral structure; the integrated structure facilitates the integrated molding of the die, and reduces the manufacturing process.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described in the foregoing embodiments, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (6)
1. The utility model provides a spraying frock of semi-ring shape lining spare which characterized in that: is made of aluminum alloy materials and comprises a middle support (1), a connecting rod (2), an annular support (3) and a base (5);
the annular support (3) is arranged on the front surface of the middle support (1);
the number of the connecting rods (2) is at least three, the at least three connecting rods (2) are uniformly distributed on the outer surface of the middle support (1), one end of any connecting rod (2) is connected to the outer surface of the middle support (1), the other end of any connecting rod (2) extends to the back surface of the annular support (3), and the back surface of the annular support (3) is flush with the front surface of the middle support (1);
a plurality of first positioning pieces (301) are arranged on the back surface of the annular support (3), and the end parts of the first positioning pieces (301) extend towards the axis of the annular support (3);
a second positioning part (302) is arranged on the back of the annular support (3), and the end part of the second positioning part (302) extends towards the axis of the annular support (3);
the first positioning pieces (301), the at least three connecting rods (2) and the second positioning pieces (302) are arranged in a staggered mode;
the base (5) is arranged on the back surface of the middle support (1) and can be connected with a rotary disc on a semiconductor coating machine.
2. The spraying frock of semi-annular liner spare of claim 1, characterized in that: the shape of the middle support (1) is a circular sheet structure, the diameter of the middle support (1) is smaller than the inner diameter of the annular support (3), and the thickness of the middle support (1) is smaller than that of the annular support (3).
3. The spraying frock of semi-annular liner spare of claim 2, characterized in that: the middle support (1) is provided with a circular hole in a radial penetrating mode.
4. The spraying frock of semi-annular liner spare of claim 3, characterized in that: a plurality of struts (4) are uniformly distributed between the middle support (1) and the base (5);
one end of the support column (4) is vertically connected to the back surface of the middle support (1), and the other end of the support column (4) is vertically connected to the front surface of the base (5).
5. The spraying frock of semi-annular liner spare of claim 4, characterized in that: one end of the strut (4) is provided with threads, the middle support (1) is provided with a threaded hole, and one end of the strut (4) is in threaded connection with the middle support (1); the other end of the strut (4) is connected with the base (5) through a bolt.
6. The spraying frock of semi-annular liner of any one of claims 1-5, characterized in that: the middle support (1) and the connecting rod (2) are of an integrated structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222319130.4U CN218531423U (en) | 2022-09-01 | 2022-09-01 | Spraying frock of semi-ring shape outer lining spare |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222319130.4U CN218531423U (en) | 2022-09-01 | 2022-09-01 | Spraying frock of semi-ring shape outer lining spare |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218531423U true CN218531423U (en) | 2023-02-28 |
Family
ID=85270042
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222319130.4U Active CN218531423U (en) | 2022-09-01 | 2022-09-01 | Spraying frock of semi-ring shape outer lining spare |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218531423U (en) |
-
2022
- 2022-09-01 CN CN202222319130.4U patent/CN218531423U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108466083B (en) | Auxiliary supporting clamp for machining edge and hole of thin-wall part and working method | |
| CN205271505U (en) | A anchor clamps for clamping large flange | |
| CN202910492U (en) | Positioning and supporting device for stirring, rubbing and welding | |
| CN107791057B (en) | Special fixture for vertical composite machining center | |
| CN218531423U (en) | Spraying frock of semi-ring shape outer lining spare | |
| CN208663512U (en) | A kind of special fixture of abrasive flows four-way interface macropore inner wall polishing | |
| CN109483072B (en) | Welding method and tool for shield machine spiral machine seat | |
| CN202701457U (en) | Disc-type component drilling tool | |
| CN219379547U (en) | Welding fixture | |
| CN112139749A (en) | Welding tool and welding method for annular cylinder mounting seat | |
| CN217371409U (en) | Horizontal additional installation clamping tool for large thin-wall parts | |
| CN105252086B (en) | The planetary roll flute clamping device of wind power plant | |
| CN216858976U (en) | Special clamp for deep well pump | |
| CN209412307U (en) | A kind of optical element film coated tooling being vertically loaded | |
| CN211803451U (en) | Adjustable combined die device | |
| CN211028418U (en) | Rapid positioning clamp for hollow shaft gear shaping | |
| CN107717502A (en) | A kind of vertical machining centre assembled tool and processing method for improving efficiency of changing the line of production | |
| CN110587343A (en) | Tool clamp capable of being replaced and installed quickly and using method thereof | |
| CN219633166U (en) | Screen plate fixing ring tooling plate | |
| CN110819939A (en) | Optical part clitellum vacuum coating frock | |
| CN217394332U (en) | Internal support tool for frame machining | |
| CN218745838U (en) | Box-type expander corrugated sheet welding tool | |
| CN205111195U (en) | Welding mould | |
| CN209969951U (en) | Guide wheel body assembly tool | |
| CN217167607U (en) | Machining tool for valve seat supporting ring of ball valve |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |