CN218526441U - Micro-electro-mechanical system microphone - Google Patents

Abstract

The utility model discloses a micro-electromechanical system microphone, including a base plate, a backplate, a vibrating diaphragm and a plurality of slot hole. The back plate is arranged on one side of the substrate, and the vibrating diaphragm is movably arranged between the substrate and the back plate. The long holes are formed on the diaphragm and are separated from each other by a distance, wherein the long holes have non-uniform width and are used for reducing the residual stress on the diaphragm.

Description

Micro-electro-mechanical system microphone

Technical Field

The present invention relates to an acoustic energy sensor (acoustic transducer), and more particularly to a micro-electro-mechanical system (MEMS) microphone.

Background

Electronic devices, including microphones, are being developed towards thin, compact, lightweight and high performance. For example, a general microphone may be used to receive sound waves and convert sound signals into electrical signals, wherein the microphone has been widely used in daily life and installed inside electronic products such as a phone, a mobile phone, and a recording pen.

In a condenser microphone (capacitive microphone), a change in sound pressure (i.e. a local pressure deviation of the ambient atmospheric pressure caused by sound waves) may force the diaphragm (diaphragm) to deform accordingly, and the deformation of the diaphragm may cause a change in capacitance. Therefore, the sound pressure variation of the sound wave can be known by detecting the voltage difference due to the capacitance variation.

Unlike conventional Electret Condenser Microphones (ECMs), they are: the mechanical and electronic components of a micro-electromechanical system (MEMS) microphone can be integrated on a semiconductor material by using Integrated Circuit (IC) technology to manufacture a miniature microphone, which has become the mainstream of the miniature microphone because the MEMS microphone can have the advantages of small size, light weight and low power consumption.

Although the existing MEMS microphones have the above advantages, they still have some disadvantages. For example, the compatible sound pressure range (i.e., dynamic range) of the sound waves detected in the MEMS microphone still has room for improvement, wherein the aforementioned dynamic range is related to the maximum compatible sound pressure (i.e., acoustic overload point (hereinafter, abbreviated as "AOP"), which is determined by the harmonic distortion rate (i.e., total harmonic distortion (hereinafter, abbreviated as "THD") of the MEMS microphone.

On the other hand, if the diaphragm has a small elastic coefficient (i.e., low stiffness), it can be used to sense a small sound pressure (i.e., has high sensitivity), but the THD of the diaphragm will be sacrificed accordingly (i.e., the AOP will be lowered), so it is often technically difficult to achieve both high AOP and high sensitivity (i.e., a wider dynamic range cannot be achieved) of the MEMS microphone.

SUMMERY OF THE UTILITY MODEL

In view of the foregoing problems, an embodiment of the present invention provides a mems microphone, which includes a substrate, a back plate, a diaphragm, and a plurality of slots. The back plate is arranged on one side of the substrate, and the vibrating diaphragm is movably arranged between the substrate and the back plate. The long holes are formed in an annular area on the diaphragm and are spaced from each other by a distance, wherein the long holes have non-uniform width and are used for reducing the residual stress on the diaphragm.

In an embodiment, at least one of the long holes is formed with a body and two end portions extending from the body toward the outer side or the inner side of the diaphragm.

In an embodiment, the slot includes a plurality of outer holes and a plurality of inner holes arranged in a concentric manner, and the outer holes respectively form a body and two end portions extending from the body toward the outer side or the inner side of the diaphragm.

In one embodiment, the outer holes each define a center line, and the ends of the outer holes each have a center point, wherein the center points all lie on a circular path, and the center lines are tangent to the circular path.

In an embodiment, the long hole includes a plurality of outer holes and a plurality of inner holes arranged in a concentric manner, and the inner holes respectively form a body and two end portions extending from the body toward the outer side or the inner side of the diaphragm.

In one embodiment, the inner holes each define a center line, and the ends of the inner holes each have a center point, wherein the center points all lie on a circular trajectory, and the center lines are tangent to the circular trajectory.

In an embodiment, the long holes are arranged in a concentric manner, and each of the long holes is formed with a body and two end portions extending from the body toward an outer side of the diaphragm.

In one embodiment, the slots are arranged concentrically and each have a body and two ends extending from the body toward the inside of the diaphragm.

In one embodiment, the slot comprises a plurality of outer holes and a plurality of inner holes arranged in a concentric manner, the outer holes respectively form a first end portion, the inner holes respectively form a second end portion, and the first end portion and the second end portion extend in opposite directions.

In one embodiment, the plurality of slots are respectively formed with a body and an end portion extending from the body, and the width of the end portion is greater than the width of the body.

In one embodiment, the widths of the long holes gradually increase from the bodies to the end parts.

An embodiment of the utility model provides a micro-electromechanical system microphone still, include: a substrate; a back plate disposed at one side of the substrate; the vibrating diaphragm is movably arranged between the substrate and the back plate; and a plurality of long holes formed on the diaphragm and arranged in a concentric circle manner, wherein the long holes have non-uniform width for reducing the residual stress on the diaphragm.

In one embodiment, at least one of the long holes is formed with a body and two end portions extending from the body toward the outer side or the inner side of the diaphragm.

In one embodiment, the plurality of long holes include a plurality of outer holes and a plurality of inner holes, and the outer holes are respectively formed with a body and two end portions extending from the body toward the outer side or the inner side of the diaphragm.

In one embodiment, the outer holes respectively define center lines, and the ends of the outer holes respectively have center points, wherein the center points all fall on a circular track, and the center lines are tangent to the circular track.

In one embodiment, the plurality of elongated holes include a plurality of outer holes and a plurality of inner holes, and the inner holes respectively form a body and two end portions extending from the body toward the outer side or the inner side of the diaphragm.

In one embodiment, the inner holes respectively define center lines, and the ends of the inner holes respectively have center points, wherein the center points all fall on a circular track, and the center lines are tangent to the circular track.

In one embodiment, the plurality of slots are respectively formed with a body and two end portions extending from the body toward the outer side of the diaphragm.

In an embodiment, the plurality of long holes are respectively formed with a body and two end portions extending from the body toward the inner side of the diaphragm.

In one embodiment, the plurality of slots include a plurality of outer holes and a plurality of inner holes, the outer holes are respectively formed with first ends, the inner holes are respectively formed with second ends, and the first ends and the second ends extend in opposite directions.

In one embodiment, the plurality of slots are respectively formed with a body and an end portion extending from the body, and the width of the end portion is greater than the width of the body.

In one embodiment, the widths of the long holes gradually increase from the bodies to the end parts.

The utility model has the advantages of, a micro-electromechanical system microphone is provided, it mainly includes a base plate, a backplate and is located a vibrating diaphragm between aforementioned base plate and backplate. Particularly, a plurality of outer holes and inner holes are formed on the diaphragm and are separated from each other by a distance, wherein the outer holes and the inner holes have non-uniform width design, so that the problem of stress concentration on the diaphragm can be relieved, the load capacity of the diaphragm to wind pressure can be greatly improved, and the residual stress on the diaphragm can be effectively reduced, thereby improving the Acoustic Overload Point (AOP) and the sensitivity of the MEMS microphone.

Drawings

Fig. 1A is a cross-sectional view of a MEMS microphone M according to an embodiment of the present invention;

fig. 1B is a cross-sectional view of a MEMS microphone M according to another embodiment of the present invention;

fig. 1C is a cross-sectional view of a MEMS microphone M according to another embodiment of the present invention;

fig. 2A and 2B are schematic views of a sector portion of the diaphragm 14 in fig. 1A, 1B and 1C;

fig. 3A is a schematic diagram of the slot 141 of an embodiment of the present invention surrounding the center point C of the diaphragm 14 in a concentric circle manner;

FIG. 3B is a partially enlarged view of the outer hole P1 and the inner hole P2 in FIG. 3A;

FIG. 3C is a further enlarged view of the lateral hole P1 and the medial hole P2 of FIG. 3B;

FIG. 3D is a schematic view of the body P11 and the end P12 of the outer hole P1 forming a crutch-like structure;

fig. 4A is a schematic diagram of a slot 141 concentrically surrounding a center point C of the diaphragm 14 according to another embodiment of the present invention;

FIG. 4B is a partially enlarged view of the outer hole P1 and the inner hole P2 in FIG. 4A;

FIG. 4C is a further enlarged view of the outer hole P1 and the inner hole P2 of FIG. 4B;

fig. 5A is a schematic diagram of a central point C of the diaphragm 14 surrounded by a long hole 141 in a concentric circle manner according to another embodiment of the present invention;

FIG. 5B is a partially enlarged view of the outer hole P1 and the inner hole P2 shown in FIG. 5A;

fig. 5C is a schematic diagram illustrating that the long hole 141 of another embodiment of the present invention surrounds the central point C of the diaphragm 14 in a concentric circle manner;

FIG. 5D is an enlarged partial view of the outer hole P1 and the inner hole P2 of FIG. 5C;

fig. 6A is a schematic diagram of a slot 141 concentrically surrounding a center point C of the diaphragm 14 according to another embodiment of the present invention;

FIG. 6B is an enlarged view of the outer hole P1 and the inner hole P2 in FIG. 6A;

FIG. 6C is a further enlarged view of the outer hole P1 and the inner hole P2 of FIG. 6B;

fig. 7A is a schematic view of a slot 141 concentrically surrounding a center point C of the diaphragm 14 according to another embodiment of the present invention;

FIG. 7B is an enlarged partial view of the outer hole P1 and the inner hole P2 of FIG. 7A;

FIG. 7C is a further enlarged view of the outer hole P1 and inner hole P2 of FIG. 7B;

fig. 8A is a schematic diagram of a long hole 141 concentrically surrounding a center point C of the diaphragm 14 according to another embodiment of the present invention;

FIG. 8B is an enlarged partial view of the outer hole P1 and the inner hole P2 of FIG. 8A;

fig. 8C is a further enlarged schematic view of the outer hole P1 and the inner hole P2 in fig. 8B.

Description of the symbols

10

11 substrate

11A opening part

12 dielectric layer

12A opening part

13 back plate

13A sound hole

131 conductive layer

132 insulating layer

1321 first insulating layer

1322 second insulating layer

133 first insulating bump

134 second insulating projection

14 diaphragm

141 long hole

15 electrode layer

16 protective layer

17 additional insulating layer

A1-recessed region

A2-Recessed region

A3-recessed region

C center point

C1 center point

C2 center point

D, a groove

G is an air gap

L1: width

L2: width

L3 is distance

P1 outer side hole

P11 is the body

P12: end

P2 inner side hole

P21 body

P22 end of

R is a ring region

R1 is a circular track

R2 circular locus

R3 is a circular track

R4 is a circular track

R5 is a circular track

S1 first side

S2 second side

T1 center line

T2 center line

W1 minimum Width

W2 maximum width

Detailed Description

The mems microphone according to the embodiment of the present invention is described below. It should be readily appreciated, however, that the present invention provides many suitable novel concepts that can be embodied in a wide variety of specific contexts. The specific embodiments disclosed are merely illustrative of specific ways to make and use the invention, and do not limit the scope of the invention.

Unless defined otherwise, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and the present disclosure, and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.

The foregoing and other technical and scientific aspects, features and advantages of the present invention will be apparent from the following detailed description of a preferred embodiment, which is to be read in connection with the accompanying drawings. Directional terms as referred to in the following examples, for example: up, down, left, right, front or rear, etc., are directions with reference to the attached drawings only. Therefore, the directional terms used in the embodiments are used for description and not for limiting the present invention.

Fig. 1A is a cross-sectional view of a MEMS microphone M according to an embodiment of the present invention. It is to be appreciated that the MEMS microphone M depicted in fig. 1A is simplified for clarity in order to better understand the novel concepts of the present invention. In some embodiments, other additional features may be added to the MEMS microphone M, and some of the features described below may also be replaced or eliminated in other embodiments of the MEMS microphone M. As shown in fig. 1A, the MEMS microphone M is a condenser microphone and includes a MEMS structure 10, the MEMS structure 10 includes a substrate 11, a dielectric layer 12, a back plate 13, a diaphragm 14 and an electrode layer 15.

The substrate 11 is configured to support a dielectric layer 12, a back plate 13, a diaphragm 14, and an electrode layer 15 on one side thereof. The substrate 11 may have an open portion 11A that allows sound waves (such as the arrows shown in fig. 1A) received by the MEMS microphone M to pass through and/or enter the MEMS structure 10. The substrate 11 may be made of silicon or a similar material.

The dielectric layer 12 is disposed between the substrate 11 and the diaphragm 14 and between the diaphragm 14 and the backplate 13, so that partial isolation from each other can be provided between the substrate 11, the diaphragm 14, and the backplate 13. Further, the dielectric layer 12 is disposed around the backplate 13 and the diaphragm 14 so that the edges of the backplate 13 and the diaphragm 14 can be sandwiched by the dielectric layer 12. Further, the dielectric layer 12 may have an open portion 12A corresponding to the open portion 11A of the substrate 11 so as to allow sound waves to pass through the diaphragm 14 and the backplate 13 and then exit the MEMS structure 10. The dielectric layer 12 may be made of silicon oxide or similar material.

The back plate 13 is a fixing member provided at one side of the substrate 11. The backplate 13 may be sufficiently rigid (stiff) that it does not bend or move as sound waves pass through the backplate 13. In some embodiments, the backplate 13 is a rigid porous member including a plurality of acoustic holes (13A), each acoustic hole 13A passing through the backplate 13 (e.g., as shown in FIG. 1A). The sound hole 13A is configured to allow sound waves to pass therethrough.

In some embodiments, as shown in fig. 1A, the back plate 13 includes a conductive layer 131 and an insulating layer 132 covering the conductive layer 131 for protection. The conductive layer 131 and the insulating layer 132 are respectively located on a first side S1 of the back plate 13 facing the diaphragm 14 and a second side S2 of the back plate 13 opposite to the first side S1. The conductive layer 131 may be made of polysilicon or the like, and the insulating layer 132 may be made of silicon nitride or the like.

In some embodiments, the MEMS structure 10 is electrically connected to a circuit (not shown) through a plurality of electrode pads (pads) of the electrode layer 15, and the electrode layer 15 is disposed on the back plate 13 and electrically connected to the conductive layer 131 and the diaphragm 14. In some embodiments, the material of the electrode layer 15 includes copper, silver, gold, aluminum, or alloys thereof.

The diaphragm 14 is movable or displaceable relative to the backplate 13. The diaphragm 14 is configured to sense sound waves received by the MEMS microphone M.

A change in the displacement of the diaphragm 14 relative to the backplate 13 causes a change in the capacitance between the diaphragm 14 and the backplate 13. Then, the capacitance change is converted into an electric signal by an electric circuit connected to the diaphragm 14 and the back plate 13, and the electric signal is transmitted from the MEMS microphone M through the electrode layer 15.

In some embodiments, as shown in fig. 1A, a first insulating protrusion 133 is disposed or formed on the first side S1 of the back plate 13 facing the diaphragm 14, and the first insulating protrusion 133 is permanently (permanently) connected and fixed to the diaphragm 14. In some embodiments, the first insulating protrusion 133 is integrally formed with the insulating layer 132 and protrudes toward the diaphragm 14. The first insulating protrusion 133 may be a solid pillar (solid pillar) connected to the back plate 13 and the diaphragm 14 (e.g., the center of the diaphragm 14), so that the first insulating protrusion 133 may support the diaphragm 14 and increase the rigidity of the diaphragm 14, thereby increasing the AOP of the MEMS microphone M.

In some embodiments, an additional insulating layer 17 is also disposed and connected between the first insulating protrusion 133 and the diaphragm 14, as shown in FIG. 1A. The additional insulating layer 17 may comprise the same material as the dielectric layer 12 or another insulating material. However, it is also possible to omit the additional insulating layer 17 in different embodiments.

On the other hand, in order to increase the sensitivity of the diaphragm 14, a plurality of long holes (long apertures) 141 may also be provided in the diaphragm 14. In some embodiments, the long holes 141 in the diaphragm 14 are arranged in concentric circles and located near the dielectric layer 12 (e.g., between the conductive layer 131 of the back plate 13 and the dielectric layer 12), and the long holes in adjacent circles are staggered (see fig. 1A and 2B), so that the long holes 141 can be used as a resilient structure in the diaphragm 14 to reduce the rigidity of the diaphragm 14. In some alternative embodiments, the number of concentric circles formed by the long holes 141 may be more than two. With such a structural feature, high sensitivity of the MEMS microphone M can be achieved.

In addition, the elongated hole 141 in the diaphragm 14 may also serve to relieve (relieve) stress (stress) on the diaphragm 14.

In some embodiments, as shown in fig. 1A, a plurality of second insulating protrusions 134 are also disposed or formed on the first side S1 of the back plate 13, and an air gap (air gap) G is formed between the diaphragm 14 and each second insulating protrusion 134. In addition, the size of the air gap G between the diaphragm 14 and each of the second insulating protrusions 134 may be the same, but is not limited to the disclosure of the embodiment of the present invention.

Referring to fig. 1A again, in order to form the first insulating protrusion 133 and the second insulating protrusion 134, the insulating layer 132 of the back plate 13 may include a first insulating layer 1321 and a second insulating layer 1322 stacked on the first insulating layer 1321. In some embodiments, the first and second insulating layers 1321 and 1322 may include the same material or different materials. In some embodiments, a protection layer 16 is further disposed to cover a groove D formed on the second side S2 and corresponding to the first insulating protrusion 133. The protective layer 16 may comprise a conductive material (e.g., aluminum) or other material.

Fig. 1B is a cross-sectional view of a MEMS microphone M according to another embodiment of the present invention. As shown in fig. 1B, the first insulating protrusion 133 shown in fig. 1A may be omitted from the back plate 13, wherein the additional insulating layer 17 connects the diaphragm 14 and the first side S1 of the back plate 13, so as to effectively support the central region of the diaphragm 14, thereby improving the Acoustic Overload Point (AOP) of the MEMS microphone M.

Fig. 1C is a cross-sectional view of a MEMS microphone M according to another embodiment of the present invention. As shown in fig. 1C, the additional insulating layer 17 in fig. 1A and 2B may be omitted in the MEMS microphone M.

Fig. 2A and 2B are schematic diagrams illustrating a sector portion of the diaphragm 14 in fig. 1A, 1B and 1C. As shown in fig. 2A and 2B, the diaphragm 14 has a thin and circular structure, wherein a plurality of long holes 141 are distributed in a circular shape and surround a center point C of the diaphragm 14, and the long holes 141 include a plurality of outer holes P1 and a plurality of inner holes P2. When the diaphragm 14 is affected by the sound pressure caused by the external sound wave, air can flow through the long hole 141 from top to bottom (fig. 2A) or from bottom to top (fig. 2B) for relieving the stress (stress) on the diaphragm 14 and increasing the load capacity of the diaphragm 14 against wind pressure.

Fig. 3A shows a schematic diagram of the slot 141 of an embodiment of the present invention concentrically surrounding the center point C of the diaphragm 14, fig. 3B shows a partially enlarged schematic diagram of the outer hole P1 and the inner hole P2 in fig. 3A, fig. 3C shows a further enlarged schematic diagram of the outer hole P1 and the inner hole P2 in fig. 3B, and fig. 3D shows a schematic diagram of the body P11 and the end portion P12 of the outer hole P1 forming a crutch-like structure.

As shown in fig. 3A to 3D, the elongated holes 141 (the outer holes P1 and the inner holes P2) in the present embodiment are distributed in an annular region R on the diaphragm 14, wherein the outer holes P1 and the inner holes P2 are arranged in a concentric manner and surround the center point C of the diaphragm 14.

It should be noted that the outer holes P1 and the inner holes P2 are arranged in a staggered manner with respect to the center point C of the diaphragm 14, wherein each outer hole P1 is formed with a body P11 and two end portions P12 extending from the body P11 toward the outer side of the diaphragm 14. Conversely, each inner hole P2 is formed with a body P21 and two end portions P22 extending from the body P21 toward the inner side of the diaphragm 14.

As shown in fig. 3C, the main bodies P11 of the outer holes P1 are arranged along a circular track R1, and the main bodies P21 of the inner holes P2 are arranged along another circular track R2, wherein the two circular tracks R1 and R2 are concentric circles.

On the other hand, the two ends P12 of the outer hole P1 respectively have a center point C1, and the position of the center point C1 falls on a circular track R3; in addition, the two ends P22 of the inner hole P2 respectively have a center point C2, and the position of the center point C2 is located on another circular track R4, wherein the two circular tracks R3 and R4 are concentric circles.

As can be seen from fig. 3D, the main body P11 and the end P12 of the outer hole P1 form a crutch-shaped structure, in which the end P12 has an arc-shaped edge. Specifically, the center line T1 of each elongated outer hole P1 extends through the center points C1 of the two end portions P12, and the center line T1 is tangent to the circular locus R3.

In the present embodiment, the body P11 has a minimum width W1 of the outer hole P1, and the end portion P12 has a maximum width W2 of the outer hole P1. Specifically, the width of the outer hole P1 gradually increases from the body P11 to the end P12, wherein the outer hole P1 has a non-uniform width design, so that the residual stress on the diaphragm 14 can be reduced, and the load capacity of the diaphragm 14 to wind pressure can be greatly improved.

On the other hand, as can also be seen from fig. 3B and 3C, the body P21 and the end P22 of the inner hole P2 form a crutch-shaped structure, wherein the end P22 has an arc-shaped edge. Specifically, the center line T2 of each elongated inner hole P2 extends through the center points C2 of the two end portions P22, and the center line T2 is tangent to the circular locus R4.

In this embodiment, the body P21 has the smallest width of the inner hole P2, and the end P22 has the largest width of the inner hole P2. Specifically, the width of the inner holes P2 gradually increases from the body P21 to the end P22, wherein the outer holes P1 and the inner holes P2 have non-uniform width designs, so that the residual stress on the diaphragm 14 can be reduced, and the load capacity of the diaphragm 14 to wind pressure can be greatly improved.

Fig. 4A is a schematic diagram illustrating that the long hole 141 of another embodiment of the present invention surrounds the center point C of the diaphragm 14 in a concentric circle manner, fig. 4B is a partially enlarged schematic diagram of the outer hole P1 and the inner hole P2 in fig. 4A, and fig. 4C is a further enlarged schematic diagram of the outer hole P1 and the inner hole P2 in fig. 4B.

As shown in fig. 4A to 4C, the long hole 141 (the outer hole P1 and the inner hole P2) in the present embodiment is mainly different from that in fig. 3A to 3D in that: the main body P11 of the outer hole P1 and the main body P21 of the inner hole P2 have a meandering structure.

Specifically, two drop-shaped recess areas A1 may be defined between the body P11 of each outer hole P1 and the two ends P12 thereof, and the recess area A1 is formed with an opening facing the outer side of the diaphragm 14. In addition, two drop-shaped recess areas A2 can be defined between the body P21 of each inner hole P2 and the two ends P22 thereof, and the recess areas A2 are formed with openings facing the inner side of the diaphragm 14, so that the residual stress on the diaphragm 14 can be reduced, and the load capacity of the diaphragm 14 against wind pressure can be greatly improved.

Fig. 5A is a schematic diagram illustrating that the long hole 141 of another embodiment of the present invention surrounds the center point C of the diaphragm 14 in a concentric circle manner, and fig. 5B is a partially enlarged schematic diagram illustrating the outer hole P1 and the inner hole P2 in fig. 5A.

As shown in fig. 5A and 5B, the long hole 141 (the outer hole P1 and the inner hole P2) in the present embodiment is mainly different from those in fig. 4A to 4C in that: the main body P11 of the outer hole P1 and the main body P21 of the inner hole P2 have a more meandering structure.

Specifically, two recess regions A1 may be defined between the body P11 of each outer hole P1 and two ends P12 thereof, and the recess regions A1 are formed with openings facing the outer side of the diaphragm 14. In addition, two recessed regions A2 may be defined between the body P21 of each inner hole P2 and the two ends P22 thereof, and the recessed regions A2 are formed with openings facing the outer holes P1.

On the other hand, the body P21 of each inner hole P2 is further formed with two recessed regions A3 opening toward the inner side of the diaphragm 14, so that the residual stress on the diaphragm 14 can be reduced, and the load capacity of the diaphragm 14 to wind pressure can be greatly improved.

It should be understood that the two circular tracks R3, R4 pass through the body P11 of the outer hole P1, wherein the inner hole P2 is tangent to a circular track R5, and the circular track R5 is concentric with the circular tracks R3, R4.

Fig. 5C is a schematic diagram illustrating that the long hole 141 of another embodiment of the present invention surrounds the central point C of the diaphragm 14 in a concentric circle manner, and fig. 5D is a partially enlarged schematic diagram illustrating the outer hole P1 and the inner hole P2 in fig. 5C.

As shown in fig. 5C and 5D, the long hole 141 (the outer hole P1 and the inner hole P2) in the present embodiment is mainly different from those in fig. 5A and 5B in that: the main body P11 of the outer hole P1 and the main body P21 of the inner hole P2 have a more meandering structure. Wherein the body P21 of each inner hole P2 is formed with two recess regions A3 opening toward the inside of the diaphragm 14.

Particularly, two concave regions A2 opening toward the outer hole P1 are formed between the body P21 of each inner hole P2 and the end P22 thereof, whereby the residual stress on the diaphragm 14 can be reduced, and the load capacity of the diaphragm 14 against wind pressure can also be greatly improved. It should be understood that the inner hole P2 is tangent to a circular track R5, wherein the two circular tracks R3 and R4 are concentric with the circular track R5, and the circular track R4 does not pass through the outer hole P1.

Fig. 6A is a schematic diagram illustrating that the long hole 141 of another embodiment of the present invention surrounds the center point C of the diaphragm 14 in a concentric circle manner, fig. 6B is a partially enlarged schematic diagram of the outer hole P1 and the inner hole P2 in fig. 6A, and fig. 6C is a further enlarged schematic diagram of the outer hole P1 and the inner hole P2 in fig. 6B.

As shown in fig. 6A to 6C, the long hole 141 (the outer hole P1 and the inner hole P2) in the present embodiment is mainly different from that in fig. 4A to 4C in that: two recess areas A1 are defined between the body P11 of each outer hole P1 and the two ends P12 thereof, and the recess areas A1 are formed with openings facing the inner side of the diaphragm 14. In addition, two recess areas A2 can be defined between the body P21 and two ends P22 of each inner hole P2, and the recess areas A2 are formed with openings facing the outside of the diaphragm 14.

In the present embodiment, the opening of the recess region A1 faces the inner hole P2, and the opening of the recess region A2 faces the outer hole P1, so that the residual stress on the diaphragm 14 can be reduced, and the load capacity of the diaphragm 14 to wind pressure can be greatly improved.

Fig. 7A is a schematic diagram of a long hole 141 concentrically surrounding a center point C of the diaphragm 14 according to another embodiment of the present invention, fig. 7B is a partially enlarged schematic diagram of an outer hole P1 and an inner hole P2 in fig. 7A, and fig. 7C is a further enlarged schematic diagram of the outer hole P1 and the inner hole P2 in fig. 7B.

As shown in fig. 7A to 7C, the long hole 141 (the outer hole P1 and the inner hole P2) in the present embodiment is mainly different from that in fig. 3A to 3D in that: a concave area A2 opened toward the outer hole P1 is formed between the body P21 and one end P22 of each inner hole P2, so that residual stress on the diaphragm 14 can be reduced, and the load capacity of the diaphragm 14 against wind pressure can be greatly improved.

Fig. 8A is a schematic diagram illustrating that the long hole 141 of another embodiment of the present invention surrounds the center point C of the diaphragm 14 in a concentric circle manner, fig. 8B is a partially enlarged schematic diagram of the outer hole P1 and the inner hole P2 in fig. 8A, and fig. 8C is a further enlarged schematic diagram of the outer hole P1 and the inner hole P2 in fig. 8B.

As shown in fig. 8A to 8C, the long hole 141 (the outer hole P1 and the inner hole P2) in the present embodiment is mainly different from those in fig. 3A to 3D in that: the widths L1 and L2 of the outer hole P1 and the inner hole P2 in the radial direction of the circular diaphragm 14 are greater than the distance L3 between the outer hole P1 and the inner hole P2 in the radial direction, so that the residual stress on the diaphragm 14 can be reduced, and the load capacity of the diaphragm 14 to wind pressure can be greatly improved.

To sum up, the utility model provides a micro-electromechanical system microphone, it mainly includes a base plate, a backplate and is located a vibrating diaphragm between aforementioned base plate and backplate. Particularly, a plurality of outer holes and inner holes are formed on the diaphragm and are separated from each other by a distance, wherein the outer holes and the inner holes have non-uniform width design, so that the problem of stress concentration on the diaphragm can be relieved, the load capacity of the diaphragm to wind pressure can be greatly improved, and the residual stress on the diaphragm can be effectively reduced, thereby improving the Acoustic Overload Point (AOP) and the sensitivity of the micro-electro-mechanical system microphone.

Although the embodiments of the present invention and their advantages have been disclosed, it should be understood that various changes, substitutions and alterations can be made herein by those skilled in the art without departing from the spirit and scope of the invention. Moreover, the scope of the present application is not intended to be limited to the particular embodiments of the process, machine, manufacture, composition of matter, means, methods and steps described in the specification, but rather, to one skilled in the art that will recognize from the disclosure that the invention may be practiced in other embodiments that perform substantially the same function or achieve substantially the same result as one another. Accordingly, the scope of the present invention includes the above processes, machines, manufacture, compositions of matter, means, methods, or steps. In addition, each claim constitutes a separate embodiment, and the scope of protection of the present invention also includes combinations of the respective claims and embodiments.

Although the present invention has been described with reference to the preferred embodiments, it should be understood that various changes and modifications can be made therein by those skilled in the art without departing from the spirit and scope of the invention as defined in the appended claims.

Claims (22)

1. A mems microphone, the mems microphone comprising:

a substrate;

a back plate disposed at one side of the substrate;

the vibrating diaphragm is movably arranged between the substrate and the back plate; and

and the plurality of long holes are formed in the annular area of the diaphragm and are separated from each other by a distance, wherein the long holes have non-uniform width and are used for reducing the residual stress on the diaphragm.

2. The mems microphone of claim 1, wherein at least one of the slots is formed with a body and two ends extending from the body toward the outside or inside of the diaphragm.

3. The mems microphone of claim 1, wherein the elongated holes comprise a plurality of outer holes and a plurality of inner holes arranged in concentric circles, the outer holes respectively forming a body and two ends extending from the body toward the outer side or the inner side of the diaphragm.

4. The mems microphone of claim 3, wherein the outer holes each define a center line, and the ends of the outer holes each have a center point, wherein the center points are all located on a circular locus, and the center lines are tangential to the circular locus.

5. The mems microphone of claim 1, wherein the plurality of slots comprise a plurality of outer slots and a plurality of inner slots arranged in a concentric manner, the inner slots respectively forming a body and two ends extending from the body toward the outside or the inside of the diaphragm.

6. The MEMS microphone as claimed in claim 5, wherein the inner holes respectively define center lines, and the ends of the inner holes respectively have center points, wherein the center points are all located on a circular locus, and the center lines are tangent to the circular locus.

7. The mems microphone as claimed in claim 1, wherein the elongated holes are arranged in concentric circles and respectively formed with a body and two end portions extending from the body in a direction of an outer side of the diaphragm.

8. The mems microphone as recited in claim 1, wherein the plurality of slots are arranged in concentric circles and respectively formed with a body and two ends extending from the body toward an inner side of the diaphragm.

9. The mems microphone of claim 1, wherein the plurality of slots comprise a plurality of outer slots and a plurality of inner slots arranged in concentric circles, the outer slots respectively forming first ends, the inner slots respectively forming second ends, wherein the first ends and the second ends extend in opposite directions.

10. The mems microphone as recited in claim 1, wherein the slots respectively form a body and an end portion extending from the body, and the width of the end portion is greater than the width of the body.

11. The mems microphone of claim 10, wherein the width of the slots increases from the bodies toward the ends.

12. A mems microphone, comprising:

a substrate;

a back plate disposed at one side of the substrate;

the vibrating diaphragm is movably arranged between the substrate and the back plate; and

and the plurality of long holes are formed on the vibrating diaphragm and are arranged in a concentric circle mode, wherein the long holes have non-uniform width and are used for reducing the residual stress on the vibrating diaphragm.

13. The mems microphone of claim 12, wherein at least one of the slots is formed with a body and two ends extending from the body toward the outside or inside of the diaphragm.

14. The mems microphone of claim 12, wherein the slots comprise a plurality of outer holes and a plurality of inner holes, the outer holes respectively forming a body and two ends extending from the body toward the outer side or the inner side of the diaphragm.

15. The mems microphone of claim 14, wherein the outer holes each define a center line, and the ends of the outer holes each have a center point, wherein the center points are all located on a circular path, and the center lines are tangent to the circular path.

16. The mems microphone of claim 12, wherein the slots comprise a plurality of outer holes and a plurality of inner holes, and the inner holes are respectively formed with a body and two ends extending from the body toward the outer side or the inner side of the diaphragm.

17. The mems microphone of claim 16, wherein the inner holes each define a center line, and the ends of the inner holes each have a center point, wherein the center points are all located on a circular locus, and the center lines are tangent to the circular locus.

18. The mems microphone of claim 12, wherein the slots are respectively formed with a body and two ends extending from the body toward the outer side of the diaphragm.

19. The mems microphone of claim 12, wherein the slots are respectively formed with a body and two ends extending from the body toward the inner side of the diaphragm.

20. The mems microphone of claim 12, wherein the plurality of slots comprise a plurality of outer slots and a plurality of inner slots, the outer slots each having a first end and the inner slots each having a second end, wherein the first ends and the second ends extend in opposite directions.

21. The mems microphone as recited in claim 12, wherein the slots are formed with a body and an end extending from the body, and the width of the end is greater than the width of the body.

22. The mems microphone of claim 21, wherein the width of the slots increases from the bodies toward the ends.

Images