CN218524181U - Numerical control system of micro-cantilever sensor and equipment thereof - Google Patents
Numerical control system of micro-cantilever sensor and equipment thereof Download PDFInfo
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Abstract
The utility model relates to the technical field of sensors, the utility model discloses a numerical control system of little cantilever beam sensor and equipment thereof. The numerical control system of the micro-cantilever sensor comprises the micro-cantilever sensor, a signal transmission module and a control module; the micro-cantilever sensor is connected with the signal transmission module, and the signal transmission module is connected with the control module through a serial peripheral interface; the control module is used for generating frequency control information and sending the frequency control information to the signal transmission module through the serial peripheral interface and one-time information transmission; the signal transmission module is used for generating an excitation signal according to the frequency control information and sending the excitation signal to the micro-cantilever sensor; the micro-cantilever sensor is used for generating a response signal according to the excitation signal. Therefore, the obtained numerical control system of the micro-cantilever sensor has the advantages of high operation efficiency and stable system.
Description
Technical Field
The utility model relates to a sensor technical field, in particular to numerical control system of little cantilever beam sensor and equipment thereof.
Background
The micro-cantilever is a mechanical structure in the shape of a strip with one end suspended and the other fixed, and is often used as a biochemical sensor. The principle of the micro-cantilever sensor is to measure the change of each physical and chemical parameter by tracking the change of the resonant frequency of the micro-cantilever sensor in a real-time closed loop manner. The original data of the micro-cantilever sensor is only a weak voltage value, so a numerical control system capable of combining data characteristic parameters is needed to carry out data acquisition and control on the micro-cantilever sensor.
In the prior art, the numerical control system suitable for the micro-cantilever beam sensor can be divided into two types, wherein the first type is a numerical control system consisting of a closed-loop analog circuit of a hardware phase-locked loop, and the second type is a numerical control system based on a software phase-locked loop. Compared with the analog circuit system of the first hardware phase-locked loop, the second type of numerical control system based on the software phase-locked loop is usually a numerical control system based on Labview, and has the advantages of convenience in modification and adjustment, programmability, no need of matching with additional instruments and equipment, low noise, automatic calculation of frequency and phase coefficients and the like, but still has the following defects: the method is limited by the algorithm of a control system, high-speed data sampling and high-speed control cannot be performed, the system can acquire data at most once per second, and the phenomenon of data loss exists; the stacked sequential operation structure is adopted, the operation efficiency is low, and when an error occurs in a certain step of the system, a fatal error can occur to cause system crash and data loss; when the quality factor is calculated by the traditional system, if the initial signal amplitude level is high (the signal-to-noise ratio is small), the quality factor cannot be calculated according to a calculation formula, and the system is blocked.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problem that the numerical control system of current little cantilever beam sensor operating efficiency is low, the system is unstable.
In order to solve the technical problem, the application discloses a numerical control system of a micro-cantilever sensor on one hand, which comprises the micro-cantilever sensor, a signal transmission module and a control module;
the micro-cantilever sensor is connected with the signal transmission module, and the signal transmission module is connected with the control module through a serial peripheral interface;
the control module is used for generating frequency control information and sending the frequency control information to the signal transmission module through the serial peripheral interface and one-time information transmission;
the signal transmission module is used for generating an excitation signal according to the frequency control information and sending the excitation signal to the micro-cantilever sensor;
the micro-cantilever sensor is used for generating a response signal according to the excitation signal.
Furthermore, the control module comprises a first data interaction module and a data processing module;
the first data interaction module is connected with the data processing module and is connected with the signal transmission module through a serial peripheral interface;
the data processing module is used for generating frequency control information and sending the frequency control information to the first data interaction module according to a preset time interval;
the first data interaction module is used for sending the frequency control information to the signal transmission module through the serial peripheral interface.
Further, the signal transmission module comprises a second data interaction module, a signal generation module and a third data interaction module;
the second data interaction module, the signal generation module and the third data interaction module are sequentially connected, and the second data interaction module is connected with the first data interaction module through a serial peripheral interface;
the second data interaction module is used for receiving frequency control information through the serial peripheral interface;
the signal generation module is used for receiving the frequency control information from the second data interaction module, generating an excitation signal according to the frequency control information and sending the excitation signal to the third data interaction module;
and the third data interaction module is used for sending the excitation signal to the micro-cantilever sensor.
Further, the micro-cantilever sensor is also used for sending the response signal to the third data interaction module;
the signal transmission module also comprises a signal amplification module, and the signal amplification module is connected with the third data interaction module;
the third data interaction module is used for receiving the response signal;
the signal amplification module is used for receiving the response signal from the third data interaction module, and performing amplification and filtering processing on the response signal to obtain a processed response signal.
Furthermore, the signal transmission module also comprises a signal acquisition module;
the signal acquisition module is respectively connected with the signal generation module, the signal amplification module and the second data interaction module;
the signal acquisition module is used for acquiring excitation signals from the signal generation module, acquiring processed response signals from the signal amplification module to obtain digital excitation signals and digital response signals, and sending the digital excitation signals and the digital response signals to the second data interaction module;
the second data interaction module is used for sending the digital excitation signal and the digital response signal to the first data interaction module.
Further, when in the open loop state, the data processing module is used for generating corresponding frequency control information from low frequency to high frequency,
and/or the presence of a gas in the gas,
when the micro-cantilever sensor is in an open-loop state, the data processing module is used for reading the digital excitation signal and the digital response signal from the first data interaction module and determining an initial response parameter of the micro-cantilever sensor.
Further, when the micro-cantilever sensor is in the closed loop state, the data processing module is configured to read the digital response signal from the first data interaction module, determine a current response parameter of the micro-cantilever sensor according to the digital response signal, determine a current resonant frequency of the micro-cantilever sensor according to the current response parameter and the initial response parameter, and determine frequency control information according to the current resonant frequency.
Furthermore, the control module also comprises a data acquisition module, and the data acquisition module is connected with the data processing module;
and when the data processing module is in the closed loop state, the data acquisition module is used for reading and storing the current response parameters from the data processing module according to the preset time interval.
Furthermore, the signal generation module and the third data interaction module are arranged in the signal generator, and the signal acquisition module and the second data interaction module are arranged in the data acquisition card.
In another aspect, the present application discloses a micro-cantilever sensor apparatus comprising a numerical control system of a micro-cantilever sensor as described in any of the above.
By adopting the technical scheme, the numerical control system of the micro-cantilever beam has the following beneficial effects:
the application discloses a numerical control system of a micro-cantilever sensor, which comprises the micro-cantilever sensor, a signal transmission module and a control module; the micro-cantilever sensor is connected with the signal transmission module, and the signal transmission module is connected with the control module through a serial peripheral interface; the control module is used for generating frequency control information and sending the frequency control information to the signal transmission module through the serial peripheral interface and one-time information transmission; the signal transmission module is used for generating an excitation signal according to the frequency control information and sending the excitation signal to the micro-cantilever sensor; the micro-cantilever sensor is used for generating a response signal according to the excitation signal. Therefore, the obtained numerical control system of the micro-cantilever sensor has the advantages of high operation efficiency and stable system.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a numerical control system of a micro-cantilever according to an embodiment of the present disclosure;
fig. 2 is a schematic structural diagram of a numerical control system of a micro-cantilever according to an embodiment of the present disclosure;
fig. 3 is a schematic structural diagram of a numerical control system of a micro-cantilever according to an embodiment of the present disclosure.
The following is a supplementary description of the drawings:
1-micro cantilever sensor; 2-a signal transmission module; 21-a second data interaction module; 22-a signal generation module; 23-a third data interaction module; 24-a signal amplification module; 25-a signal acquisition module; 3-a control module; 31-a data processing module; 32-a first data interaction module; 33-data acquisition module.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. It is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
Reference herein to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic may be included in at least one implementation of the present application. In the description of the present application, it is to be understood that the terms "upper", "lower", "top", "bottom", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are only for convenience in describing the present application and simplifying the description, and do not indicate or imply that the referred devices or elements must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present application. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. Moreover, the terms "first," "second," and the like are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the application described herein are capable of operation in sequences other than those illustrated or described herein.
Fig. 1 shows a schematic structural diagram of a micro-cantilever numerical control system provided in an embodiment of the present application, and as shown in fig. 1, the micro-cantilever numerical control system includes a micro-cantilever sensor 1, a signal transmission module 2, and a control module 3. The micro-cantilever sensor 1 is connected with the signal transmission module 2, and the signal transmission module 2 is connected with the control module 3 through a Serial Peripheral Interface (SPI).
As an alternative embodiment, the control module 3 is configured to generate frequency control information, and the frequency control signal is configured to instruct the signal transmission module 2 to generate a corresponding excitation signal. The frequency control information is 40-bit data, wherein 37 bits are data representing excitation signal related information, and 3 bits are data related to system operation. Specifically, of the 37-bit data indicating the excitation signal-related information, 32 bits are data indicating the frequency of the excitation signal, and 5 bits are data indicating the phase of the excitation signal; in 3-bit data related to system operation, there are 2-bit data to control system operation mode and 1-bit data to control power supply to sleep.
As an optional implementation manner, after the control module 3 generates the frequency control information, the hardware clock of the signal transmission module 2 may be called through a Serial Peripheral Interface (SPI), and the timing diagram is generated by using the hardware clock, so that only once information transmission is needed, the 40-bit data of the frequency control information can be directly sent to the signal transmission module 2.
In the prior art, the timing diagram is usually simulated by a software algorithm, the trigger level is generated by simulation in one cycle, and one bit of data is transmitted to the signal transmission module 2. The frequency control information of which the transmission is completed by 40 bits needs a software algorithm to complete 40 cycles, which takes long time, resulting in high delay of the system, and if one cycle is overtime, data transmitted by the cycle may be lost, resulting in incorrect transmitted frequency control information and reduced system reliability.
Compared with a timing diagram simulated by a software algorithm, the timing diagram generated by calling a hardware clock is more accurate and stable, data transmission is not easy to lose, only one time of data transmission is needed, the data transmission speed is high, the consumed time is short, and the system delay is low.
As an optional implementation manner, after receiving the frequency control information, the signal transmission module 2 generates a corresponding excitation signal according to the frequency control information, and then sends the excitation signal to the micro-cantilever sensor 1. After receiving the excitation signal, the micro-cantilever sensor 1 generates a response signal according to the excitation signal.
As an optional implementation manner, the micro-cantilever sensor 1 sends the generated response signal to the signal transmission module 2, the signal transmission module 2 processes and acquires the response signal and the excitation signal to obtain a digital response signal and a digital excitation signal, and sends the digital response signal and the digital excitation signal to the control module 3; the control module 3 processes the digital response signal and the digital excitation signal, so as to guide the generation of the next frequency control information and adjust the response state of the micro-cantilever sensor 1, thereby realizing the closed-loop control of the micro-cantilever sensor 1.
As an optional implementation mode, the numerical control system comprises an open loop state and a closed loop state. When the numerical control system is started to be in an open-loop state, the control module 3 generates frequency control information according to a sequence from low frequency to high frequency so as to sweep frequency of the micro-cantilever sensor 1 and determine initial response parameters of the micro-cantilever sensor 1. Optionally, the initial response parameters may include information such as a quality factor, a resonance frequency, and a phase difference of the micro-cantilever sensor 1.
After the initial response parameters of the micro-cantilever sensor 1 are determined, the numerical control system enters a closed loop state, the control module 3 determines the current response parameters of the micro-cantilever sensor 1 according to the digital response signals and the digital excitation signals, compares the current response parameters with the initial response parameters, and determines frequency control information, so that the response state of the micro-cantilever sensor 1 is adjusted, and the closed loop control of the micro-cantilever sensor 1 is realized.
As an alternative implementation, fig. 2 shows a schematic structural diagram of a numerical control system of a micro-cantilever according to an embodiment of the present application, and as shown in fig. 2, the control module 3 may include a first data interaction module 31 and a data processing module 32. The first data interaction module 31 is connected with the data processing module 32, and the first data interaction module 31 is connected with the signal transmission module 2 through a serial peripheral interface.
As an alternative implementation, the first data module is used to implement information interaction between the control module 3 and the signal transmission module 2, that is, information interaction between the data processing module 31 and the signal transmission module 2. On one hand, the data processing module 31 sends the frequency control information to the signal transmission module 2 through the first data interaction module 32; on the other hand, the signal transmission module 2 transmits the digital excitation signal and the digital response signal to the data processing module 31 through the first data interaction module 31.
As an alternative embodiment, in the open loop state, the data processing module 31 obtains the initial response parameter of the micro-cantilever sensor 1 according to the frequency sweep.
Specifically, the data processing module 31 generates frequency control information in the order from the low frequency to the high frequency, so that the micro-cantilever sensor 1 generates response signals in the order from the low frequency to the high frequency, and obtains an amplitude-frequency characteristic curve and a phase-frequency characteristic curve of the micro-cantilever sensor 1 according to the digital response signals and the digital excitation signals corresponding to the response signals. Obtaining the initial amplitude A of the micro-cantilever sensor 1 from the amplitude-frequency characteristic curve 0 Initial resonant frequency f 0 Obtaining the initial phase difference of the micro-cantilever sensor 1 from the phase-frequency characteristic curve according to the amplitude at the resonant frequency
And a frequency-phase coefficient K.
As an alternative embodiment, after the frequency sweep, the data processing module may further calculate the quality factor Q of the micro-cantilever sensor 1 by using an adaptive stepping method.
Specifically, the data processing module 31 sets the initial signal point of the amplitude-frequency characteristic curve on the x-axis, and reconstructs the coordinate system of the amplitude-frequency characteristic curve, that is, the amplitude of all the signal points on the amplitude-frequency characteristic curve is uniformly subtracted from the initial amplitude to obtain a new amplitude-frequency characteristic curve, so as to prevent the situation that when the initial amplitude of the amplitude-frequency characteristic curve is large but a resonance peak still exists, the target amplitude cannot be scanned by left and right frequency sweeps, which causes the system to be stuck, and improve the reliability of the system.
After a new amplitude-frequency characteristic curve is obtained, the amplitude at the new resonance frequency is determined and divided by
And obtaining the bandwidth amplitude. Scanning towards low frequency by taking a resonance frequency point as a starting point and taking a frequency interval of 10Hz as a step until the current amplitude is less than or equal to the bandwidth amplitude under the current frequency; then, scanning the high frequency by taking 1Hz as a frequency interval until the current amplitude is greater than or equal to the bandwidth amplitude under the current frequency, and recording the current frequency at the moment as a first frequency f 1 。
Scanning to high frequency by taking a resonance frequency point as a starting point and taking a frequency interval of 10Hz as a step until the current amplitude is more than or equal to the bandwidth amplitude under the current frequency; then, scanning the low frequency by taking 1Hz as a frequency interval until the current amplitude is less than or equal to the bandwidth amplitude under the current frequency, and recording the current frequency at the moment as a second frequency f 2 。
According to a first frequency f 1 A second frequency f 2 And an initial resonant frequency f 0 The quality factor Q of the micro-cantilever sensor 1 can be calculated, as shown in the following formula (1):
as an alternative embodiment, the quality factor Q of the micro-cantilever sensor 1 may also be obtained by other methods, such as a bisection method.
As an alternativeIn one embodiment, the sweep interval is set to 300Hz for each of the left and right sides, i.e., the sweep range is the resonant frequency f 0 -300Hz to f 0 +300Hz when scanning to f 0 Signal points with amplitude less than or equal to the bandwidth amplitude are not scanned at 300Hz, or when scanned to f 0 The signal point with amplitude larger than or equal to the bandwidth amplitude is not scanned at +300Hz, the scanning is stopped, and the method is based on f 0 -300Hz or f 0 +300Hz, the scan is continued with a sweep interval of 1 Hz.
As an alternative embodiment, the number of scans is 10 times at most when the frequency sweep interval is 1Hz, and the first frequency f is not scanned when the number of scans reaches 10 times 1 Or a second frequency f 2 Then, the frequency at the time of the 10 th scan is referred to as a first frequency f 1 Or a second frequency f 2 。
By setting the two scanning limits, the data processing module 31 is prevented from being stuck due to the fact that the bandwidth amplitude cannot be scanned in the frequency sweeping range, and therefore stability and reliability of the system are improved.
As an alternative embodiment, in the closed loop state, the data processing module 31 determines the current phase difference of the micro-cantilever sensor 1 according to the digital response signal and the digital excitation signal
Then, according to the phase-frequency characteristic curve and the frequency phase coefficient K obtained in the open loop state, the current phase difference is obtained through calculation according to the formula (2)
Corresponding current resonance frequency f t Equation (2) is as follows:
wherein f is t Is the current resonant frequency, f 0 In order to be the initial resonant frequency,
for the purpose of the current phase difference,
k is the frequency phase coefficient for the initial phase difference.
The data processing module 31 obtains the current resonant frequency f according to the calculation t Generating corresponding frequency control information, and sending the frequency control information to the signal transmission module 2 through the first information interaction module 32, wherein the signal transmission module 2 generates a corresponding excitation signal according to the frequency control information, so as to control the micro-cantilever sensor 1 to generate a corresponding response signal according to the excitation signal; the micro-cantilever sensor 1 sends the response signal to the signal transmission module 2, the signal transmission module 2 performs data acquisition on the response signal and the excitation signal to obtain a digital response signal and a digital excitation signal, the digital response signal and the digital excitation signal are sent to the data processing module 31 through the first information interaction module 32, the data processing module 31 processes the digital response signal and the excitation signal, and the new current resonant frequency f is obtained through calculation t Until the current phase difference
Equal to the initial phase difference
Therefore, the phase-locked loop of the micro-cantilever sensor 1 is realized, and the closed-loop control of the micro-cantilever sensor 1 is realized.
As an alternative embodiment, the data processing module 31 reads the digital excitation signal and the digital response signal from the first data interaction module 32, processes them to generate the frequency control information, and sends the frequency control information to the first data interaction module 32 according to a preset time interval.
The running mode of the stacking sequence adopted in the prior art is low in running efficiency, and when a certain module or thread has a problem, other modules or threads cannot work normally, so that the system is crashed.
In the application, the data processing module 31 works independently according to the preset time interval, and does not need to wait for the completion of the operation of other modules and then perform data processing, so that the operation efficiency is high, the data processing module 31 can still normally operate even if other modules go wrong, and the stability and the reliability of the system are improved. And other modules of the control system can also work independently at regular time, so that a plurality of modules work independently without mutual influence and do not need to run according to a laminated sequence, thereby improving the overall running efficiency and stability of the system.
As an alternative embodiment, as shown in fig. 2, the control module 3 may further include a data acquisition module 33, and the data acquisition module 33 is connected to the data processing module 31. When in the closed loop state, the data acquisition module 33 reads and stores the current response parameters from the data processing module 31 according to the preset time interval. Optionally, the current response parameter may include a current resonant frequency f of the micro-cantilever sensor 1 t And the current phase difference
And the like.
As an optional implementation manner, a display panel may be further disposed in the data acquisition module 33, and the current response parameters of the micro-cantilever sensor 1 are displayed in real time through the display panel.
As an alternative implementation manner, fig. 3 shows a schematic structural diagram of a numerical control system of a micro-cantilever provided in an embodiment of the present application, and as shown in fig. 3, the signal transmission module 2 includes a second data interaction module 21, a signal generation module 22, and a third data interaction module 23. The second data interaction module 21, the signal generation module 22 and the third data interaction module 23 are connected in sequence, and the second data interaction module 21 is connected with the first data interaction module 32 through a serial peripheral interface.
The second data interaction module 21 receives the frequency control information from the first data interaction module 32 through the serial peripheral interface; the signal generating module 22 receives the frequency control information from the second data interaction module 21, generates an excitation signal according to the frequency control information, and sends the excitation signal to the third data interaction module 23; and after receiving the excitation signal, the third data interaction module 23 sends the excitation signal to the micro-cantilever sensor 1.
As an alternative embodiment, after receiving the excitation signal sent by the third data interaction module 23, the micro-cantilever sensor 1 generates a response signal and sends the response signal to the third data interaction module 23.
As an optional implementation manner, the signal transmission module 2 further includes a signal amplification module 24, the signal amplification module 24 is connected to the third data interaction module 23, and the signal amplification module 24 receives the response signal from the third data interaction module 23, and performs amplification and filtering processing on the response signal to obtain a processed response signal.
As an optional implementation manner, the signal transmission module 2 further includes a signal acquisition module 25, and the signal acquisition module 25 is connected to the signal generation module 22, the signal amplification module 24, and the second data interaction module 21, respectively. The signal acquisition module 2 acquires the excitation signal from the signal generation module 22 to obtain a digital excitation signal, acquires the processed response signal from the signal amplification module 24 to obtain a digital response signal, and sends the digital excitation signal and the digital response signal to the first data interaction module 33 through the second data interaction module 21.
As an alternative embodiment, the signal generating module 22, the signal amplifying module 24 and the third data interaction module 23 may be disposed in a signal generator control circuit (DDS), and the signal collecting module 25 and the second data interaction module 21 may be disposed in a data collecting card.
In another aspect, the present application discloses a micro-cantilever sensor apparatus comprising a numerical control system of a micro-cantilever sensor as described in any of the above.
The application discloses a numerical control system of a micro-cantilever, which comprises a micro-cantilever sensor, a signal transmission module and a control module; the micro-cantilever sensor is connected with the signal transmission module, and the signal transmission module is connected with the control module through a serial peripheral interface; the control module is used for generating frequency control information and sending the frequency control information to the signal transmission module through the serial peripheral interface and one-time information transmission; the signal transmission module is used for generating an excitation signal according to the frequency control information and sending the excitation signal to the micro-cantilever sensor; the micro-cantilever sensor is used for generating a response signal according to the excitation signal. Therefore, the obtained numerical control system of the micro-cantilever has the advantages of high operation efficiency and stable system.
The above description is only exemplary of the present application and should not be taken as limiting, as any modification, equivalent replacement, or improvement made within the spirit and principle of the present application should be included in the protection scope of the present application.
Claims (10)
1. A numerical control system of a micro-cantilever sensor is characterized by comprising a micro-cantilever sensor (1), a signal transmission module (2) and a control module (3);
the micro-cantilever sensor (1) is connected with the signal transmission module (2), and the signal transmission module (2) is connected with the control module (3) through a serial peripheral interface;
the control module (3) is used for generating frequency control information and sending the frequency control information to the signal transmission module (2) through the serial peripheral interface and one-time information transmission;
a hardware clock is arranged in the signal transmission module (2), and the control module (3) is connected with the hardware clock through a serial peripheral interface so as to call a timing diagram of the hardware clock to transmit the frequency control information;
the signal transmission module (2) is used for generating an excitation signal according to the frequency control information and sending the excitation signal to the micro-cantilever sensor (1);
the micro-cantilever sensor (1) is used for generating a response signal according to the excitation signal.
2. The numerical control system of a micro-cantilever sensor according to claim 1, wherein the control module comprises a first data interaction module (32) and a data processing module (31);
the first data interaction module (32) is connected with the data processing module (31), and the first data interaction module (32) is connected with the signal transmission module (2) through the serial peripheral interface;
the data processing module (31) is configured to generate the frequency control information, and send the frequency control information to the first data interaction module (32) according to a preset time interval;
the first data interaction module (32) is used for sending the frequency control information to the signal transmission module (2) through the serial peripheral interface.
3. The numerical control system of the micro-cantilever sensor according to claim 2, wherein the signal transmission module (2) comprises a second data interaction module (21), a signal generation module (22) and a third data interaction module (23);
the second data interaction module (21), the signal generation module (22) and the third data interaction module (23) are sequentially connected, and the second data interaction module (21) is connected with the first data interaction module (32) through the serial peripheral interface;
the second data interaction module (21) is configured to receive the frequency control information through the serial peripheral interface;
the signal generating module (22) is configured to receive the frequency control information from the second data interaction module (21), generate the excitation signal according to the frequency control information, and send the excitation signal to the third data interaction module (23);
the third data interaction module (23) is used for sending the excitation signal to the micro-cantilever sensor (1).
4. The numerical control system of a micro-cantilever sensor according to claim 3, wherein the micro-cantilever sensor (1) is further configured to send the response signal to the third data interaction module (23);
the signal transmission module (2) further comprises a signal amplification module (24), and the signal amplification module (24) is connected with the third data interaction module (23);
the third data interaction module (23) is used for receiving the response signal;
the signal amplification module (24) is configured to receive the response signal from the third data interaction module (23), and amplify and filter the response signal to obtain a processed response signal.
5. The numerical control system of a micro-cantilever sensor according to claim 4, wherein the signal transmission module (2) further comprises a signal acquisition module (25);
the signal acquisition module (25) is respectively connected with the signal generation module (22), the signal amplification module (24) and the second data interaction module (21);
the signal acquisition module (25) is configured to acquire the excitation signals from the signal generation module (22), acquire the processed response signals from the signal amplification module (24), obtain digital excitation signals and digital response signals, and send the digital excitation signals and the digital response signals to the second data interaction module (21);
the second data interaction module (21) is configured to send the digital excitation signal and the digital response signal to the first data interaction module (32).
6. The numerical control system of a micro-cantilever sensor according to claim 5, wherein the data processing module (31) is configured to generate the corresponding frequency control information from a low frequency to a high frequency when in an open loop state,
and/or the presence of a gas in the gas,
when in an open-loop state, the data processing module (31) is used for receiving the digital excitation signal and the digital response signal from the first data interaction module (32) and determining an initial response parameter of the micro-cantilever sensor (1).
7. The numerical control system of a micro-cantilever sensor according to claim 6, wherein when in the closed-loop state, the data processing module (31) is configured to receive the digital response signal from the first data interaction module (32), determine a current response parameter of the micro-cantilever sensor (1) according to the digital response signal, determine a current resonance frequency of the micro-cantilever sensor (1) according to the current response parameter and the initial response parameter, and determine the frequency control information according to the current resonance frequency.
8. The numerical control system of a micro-cantilever sensor according to claim 7, wherein the control module further comprises a data acquisition module (33), the data acquisition module (33) is connected with the data processing module (31);
when the data processing module is in the closed loop state, the data acquisition module (33) is used for reading and storing the current response parameters from the data processing module (31) according to the preset time interval.
9. The numerical control system of a micro-cantilever sensor according to claim 5, wherein the signal generating module (22) and the third data interaction module (23) are disposed in a signal generator, and the signal collecting module (25) and the second data interaction module (21) are disposed in a data acquisition card.
10. A micro-cantilever sensor apparatus, comprising a numerical control system of the micro-cantilever sensor of any one of claims 1-9.
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