CN218510182U

CN218510182U - Sealing ring

Info

Publication number: CN218510182U
Application number: CN202222831043.7U
Authority: CN
Inventors: 宋冉冉; 耿德占; 孙晔
Original assignee: Zhongke Aier Beijing Technology Co Ltd
Current assignee: Zhongke Aier Beijing Technology Co Ltd
Priority date: 2022-10-26
Filing date: 2022-10-26
Publication date: 2023-02-21
Anticipated expiration: 2032-10-26

Abstract

The utility model discloses a sealing ring relates to the semiconductor seal technology field to solve the relatively poor problem of current sealing ring seal effect. The sealing ring is of an annular structure and comprises an inner ring body and an outer ring body, the inner ring body and the outer ring body are distributed along the radial direction of the sealing ring, and the inner ring body is connected with the outer ring body; a first annular groove is formed in the inner ring body, an opening of the first annular groove faces to the axis of the sealing ring, and two ends of the inner ring body are abutted to the to-be-sealed piece to form a first sealing line; the outer ring body is provided with a second annular groove, the opening of the second annular groove deviates from the axis of the sealing ring, and the two ends of the outer ring body are abutted to the sealing element to form a second sealing line. The utility model provides a sealing ring is used for improving its sealing performance.

Description

Sealing ring

Technical Field

The utility model relates to a semiconductor seal technical field especially relates to a sealing ring.

Background

The sealing ring is an annular sealing element with a notch, is arranged in the groove of the sealing element, and is pressed to generate certain elastic deformation to be tightly propped against the upper wall, the lower wall and the side wall of the groove of the sealing element to play a role in sealing.

In the field of semiconductor sealing, metal materials are mostly adopted for the sealing ring, generally, an annular groove is arranged on the outer side, and when the sealing ring is installed in the groove of the to-be-sealed piece, the sealing ring is ensured to be in a compressed state, so that the end face of the sealing ring is abutted against the upper wall and the lower wall of the groove of the to-be-sealed piece, and a sealing effect is achieved.

However, after the flow channel lets in gas, under atmospheric pressure effect, the upper and lower both ends of sealing ring can draw close to the centre after receiving the extrusion, leads to the sealing ring compressed, and the sealing ring is kept away from the upper and lower wall of treating the recess of sealing member, leads to the sealing effect of sealing ring and the upper and lower wall butt department of treating the recess of sealing member relatively poor.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a sealing ring for improve its leakproofness.

In order to achieve the above object, the present invention provides a sealing ring, which is an annular structure and comprises an inner ring body and an outer ring body, wherein the inner ring body and the outer ring body are distributed along the radial direction of the sealing ring, and the inner ring body and the outer ring body are connected;

a first annular groove is formed in the inner ring body, an opening of the first annular groove faces to the axis of the sealing ring, and two ends of the inner ring body are abutted to the to-be-sealed piece to form a first sealing line;

the outer ring body is provided with a second annular groove, the opening of the second annular groove deviates from the axis of the sealing ring, and the two ends of the outer ring body are abutted to the sealing element to form a second sealing line.

Compared with the prior art, the sealing ring provided by the utility model comprises an inner ring body, wherein the inner ring body is provided with a first annular groove, when the air pressure is larger, the air pressure in the groove is increased, and the inner ring body generates elastic deformation expanding outwards along the middle line axis of the first annular groove after receiving acting force, so that two ends of the inner ring body are respectively attached to the butting positions of the first sealing member to be sealed and the second sealing member to be sealed more tightly, and the sealing effect of the positions is enhanced; simultaneously, the outer ring body produces certain effort to the outer ring body, and the outer ring body receives to produce after the effort along the elastic deformation that the central line axial of second annular groove outwards expands, makes the both ends of outer ring body treat that the laminating of sealing member butt department is inseparabler with first and the second respectively, strengthens the sealed effect of this department, and then further improves the leakproofness of sealing ring. In addition, under the vibration operating mode, radial alternating stress grow compares in prior art the sealing ring that only sets up an annular groove, the utility model provides a deformation can take place for the inner ring body and the outer annular body homoenergetic of sealing ring, has increased the elastic limit of sealing ring, and then has increased the yield limit of sealing ring, can be applicable to the bigger condition of radial alternating stress, improves the life of sealing ring. Based on this, the utility model provides a sealing ring can strengthen the leakproofness of sealing ring, simultaneously, can improve the life of sealing ring.

Optionally, the cross section of the sealing ring along the radial direction is X-shaped.

Optionally, in the above-mentioned seal ring, a cross section of the inner ring body in the radial direction and a cross section of the outer ring body in the radial direction have mirror symmetry in shape.

Optionally, in the sealing ring, the maximum depths of the first annular groove and the second annular groove are the same;

and/or the widths of the open ends of the first annular groove and the second annular groove are the same.

Optionally, in the sealing ring, the inner ring is axially symmetric along a central line of the first annular groove; the outer ring body is axially symmetrical along the center line of the second annular groove.

Optionally, in the seal ring, two first annular recesses are formed in the side surface of the inner ring body, which is close to the outer ring body, and the vertical distances from the two first annular recesses to the center line of the first annular groove are equal;

and/or two second annular depressions are arranged on the side surface of the outer ring body close to the inner ring body, and the vertical distances from the two second annular depressions to the center line of the second annular groove are equal.

Optionally, the sealing ring is of an integrated structure.

Optionally, the material of the sealing ring is an elastic metal material.

Optionally, the material of the sealing ring is 361L stainless steel or 361Ti stainless steel.

Optionally, the surface of the sealing ring is a smooth continuous curved surface.

Drawings

The accompanying drawings, which are described herein, serve to provide a further understanding of the invention and constitute a part of this specification, and the exemplary embodiments and descriptions thereof are provided for explaining the invention without unduly limiting it. In the drawings:

fig. 1 is a schematic view of a sealing ring provided in the present invention;

fig. 2 is a cross-sectional view of the sealing ring and the sealing member after assembling.

Reference numerals:

1-internal ring body; 11-a first annular groove; 12-a first annular recess; 2-outer ring body; 21-a second annular groove; 22-a second annular recess; 3-a first seal line; 4-a second seal line; 5-a first to-be-sealed member, 6-a second to-be-sealed member; 7-a gasket.

Detailed Description

In order to make the technical problem, technical solution and advantageous effects to be solved by the present invention more clearly understood, the following description is given in conjunction with the accompanying drawings and embodiments to illustrate the present invention in further detail. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise. The meaning of "a number" is one or more unless specifically limited otherwise.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those of ordinary skill in the art.

The metal seal is a high expansion rate pressure safety mechanism which adopts proper metal material to replace elastic material to form seal, and adopts controllable load to press one metal element and make it fully deform and contact with another metal element, and utilizes the pressure of two element contact surfaces to make metal produce plastic deformation and flow to fill the gap between two element contact surfaces so as to obtain sealing capacity.

In the semiconductor trade, have the requirement of low leakage to sealing element, common sealed mode is that the sealing ring is sealed, puts the sealing ring between two treating the sealing member, produces sufficient sealed specific pressure in order to prevent to leak on compressing tightly the face, and current sealing ring often adopts plane seal, and the sealing ring recess sets up outwards, and sealed effect is poor.

In order to solve the above problem, the present invention provides a sealing ring for improving the sealing performance of the sealing ring, and the sealing ring is described with reference to the accompanying drawings.

Referring to fig. 1 and 2, a sealing ring according to an embodiment of the present invention is an annular structure, and includes an inner ring 1 and an outer ring 2, where the inner ring 1 and the outer ring 2 are radially distributed along the sealing ring, and the inner ring 1 is connected to the outer ring 2; a first annular groove 11 is formed in the inner ring body 1, the opening of the first annular groove 11 faces the axis of the sealing ring, a second annular groove 21 is formed in the outer ring body 2, the opening of the second annular groove 21 deviates from the axis of the sealing ring, and two ends of the inner ring body 1 are abutted to a to-be-sealed element to form a first sealing line 3; both ends of the outer ring body 2 abut against the member to be sealed and form a second seal line 4.

In a specific implementation process, as shown in fig. 2, a first to-be-sealed part 5 is connected with a second to-be-sealed part 6, a sealing ring is placed in a groove body between the two to-be-sealed parts, a gasket 7 is placed on a non-groove body part between the first to-be-sealed part 5 and the second to-be-sealed part 6, airflow can be formed inside the first to-be-sealed part 5 and the second to-be-sealed part 6, after pressure is stabilized, the gas can apply pressure on the sealing ring, after the side wall of a first annular groove 11 of the sealing ring is pressed, an inner ring body 1 expands outwards to generate elastic deformation, the stress of two ends of the inner ring body 1 at the positions abutted to the first to-be-sealed part 5 and the second to-be-sealed part 6 is increased, namely, the stress of two ends of the inner ring body 1 at the position of a first sealing line 3 formed by the to-be-sealed parts is increased, so that the sealing ring is more attached to the to-be-sealed part at the first sealing line 3, and further improves the sealing performance at the position of the first sealing line 3; simultaneously, the inner ring body 1 generates certain acting force to the outer ring body 2, the joint of the outer ring body 2 and the inner ring body 1 deforms towards the direction far away from the axis of the sealing ring, the acting force is transmitted to the two ends of the outer ring body 2, the two ends of the outer ring body 2 are respectively subjected to stress increasing at the joint of a first sealing element 5 and a second sealing element 6, namely, the two ends of the outer ring body 2 are subjected to stress increasing at a second sealing line 4 formed by the first sealing element, and then the sealing ring is more laminated at the second sealing line 4 and the first sealing element, and further the sealing performance at the second sealing line 4 is improved. Wherein the direction of the small arrow is the direction indicated by the pressure inside the sealing ring.

According to the structure and the specific implementation process of the sealing ring, the sealing ring provided by the embodiment comprises an inner ring body 1, wherein a first annular groove 11 is formed in the inner ring body 1, when the air pressure is higher, the air pressure in the groove is increased, and the inner ring body 1 generates elastic deformation which expands outwards along the central line of the first annular groove 11 after being subjected to an acting force, so that two ends of the inner ring body 1 are respectively attached to the abutted positions of a first to-be-sealed part 5 and a second to-be-sealed part 6 more tightly, and the sealing effect of the abutted positions is enhanced; simultaneously, certain effort is produced to outer ring body 2 to inner ring body 1, and outer ring body 2 receives the effort after to produce along the elastic deformation that the central line axial of second annular groove 21 expands outward, makes the both ends of outer ring body 2 treat that sealing member 6 butt laminating is inseparabler with first 5 and the second of treating respectively, strengthens the sealed effect of this department, and then further improves the leakproofness of sealing ring. In addition, under the vibration operating mode, radial alternating stress grow compares in prior art the sealing ring that only sets up an annular groove, the embodiment of the utility model provides a deformation can take place for the inner ring body 1 and the outer annular body 2 homoenergetic of sealing ring, has increased the elastic limit of sealing ring, and then has increased the yield limit of sealing ring, can be applicable to the bigger condition of radial alternating stress, improves the life of sealing ring. Based on this, the embodiment of the utility model provides a sealing ring can strengthen the leakproofness of sealing ring, simultaneously, can improve the life of sealing ring.

In some embodiments, the seal ring is X-shaped in cross-section in the radial direction. So set up, be formed with opening opposite direction's first annular groove 11 and second annular groove 21 on the sealing ring, and then with treat that the sealing member forms first seal line 3 and second seal line 4.

Alternatively, the shape of the cross section of the inner ring body 1 in the radial direction and the shape of the cross section of the outer ring body 2 in the radial direction are mirror images. So set up, under the circumstances of guaranteeing the leakproofness, the machine-shaping of being convenient for.

As an alternative, the maximum depths of the first and second

annular grooves

11 and 21 are the same, and/or the widths of the open ends of the first and second

annular grooves

11 and 21 are the same. Exemplarily, the maximum depths of the first annular groove 11 and the second annular groove 21 are the same; alternatively, the widths of the open ends of the first annular groove 11 and the second annular groove 21 are the same; alternatively, the maximum depths of the first and second

annular grooves

11 and 21 are the same and the widths of the open ends of the first and second

annular grooves

11 and 21 are the same.

In some embodiments, the inner ring 1 is axially symmetrical along the median line of the first annular groove 11; the outer ring body 2 is axially symmetrical along the centerline of the second annular groove 21. So set up, under the circumstances of guaranteeing the leakproofness, the machine-shaping of being convenient for.

Specifically, in some embodiments, two first annular recesses 12 are provided on the side surface of the inner ring body 1 near the outer ring body 2, and the two first annular recesses 12 are equidistant from the centerline of the first annular groove 11; and/or two second annular recesses 22 are also arranged on the side surface of the outer ring body 2 close to the inner ring body 1, and the vertical distances from the two second annular recesses 22 to the midline of the second annular groove 21 are equal. Illustratively, two first annular recesses 12 are provided on the side of the inner ring body 1 close to the outer ring body 2; or, the side surface of the outer ring body 2 close to the inner ring body 1 is also provided with two second annular recesses 22; alternatively, two first annular recesses 12 are provided on the side of the inner ring body 1 close to the outer ring body 2 and two second annular recesses 22 are also provided on the side of the outer ring body 2 close to the inner ring body 1. So set up, first annular recess 12 and second annular recess 22 can make the outward expansion of sealing ring easier, further guarantee the leakproofness of sealing ring.

Specifically, the embodiment of the utility model provides a sealing ring structure as an organic whole to guarantee the position degree of sealing ring. The degree of position is the range of the axis or central plane of a body that allows for its own positional variation.

Specifically, the material of the above-described seal ring may be an elastic metal material, and for example, the material of the seal ring is 361L stainless steel or 361Ti stainless steel, or the like. The elastic metal material has good elasticity and can generate elastic deformation, so that the sealing property is ensured; wherein 361L stainless steel and 361Ti stainless steel all have better corrosion resistance and hardness, can guarantee in the course of the work, can not produce the metal fillings to influence the gas purity that flows through.

Further, the surface of the sealing ring is a smooth surface, and the surface of the sealing ring close to the axis of the sealing ring is a smooth continuous curved surface. Further guarantee that the sealing ring can not produce the metal fillings, and then pollute sealed runner.

In the foregoing description of embodiments, the particular features, structures, materials, or characteristics may be combined in any suitable manner in any one or more embodiments or examples.

The above description is only for the specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art can easily think of the changes or substitutions within the technical scope of the present invention, and all should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims

1. A sealing ring is characterized in that the sealing ring is of an annular structure and comprises an inner ring body and an outer ring body, wherein the inner ring body and the outer ring body are distributed along the radial direction of the sealing ring and are connected;

a first annular groove is formed in the inner ring body, the opening of the first annular groove faces to the axis of the sealing ring, and two ends of the inner ring body are abutted to the to-be-sealed element to form a first sealing line;

and a second annular groove is formed in the outer ring body, an opening of the second annular groove deviates from the axis of the sealing ring, and two ends of the outer ring body are abutted to the sealing element to form a second sealing line.

2. The seal ring of claim 1, wherein the seal ring is X-shaped in cross-section in a radial direction.

3. The seal ring of claim 2, wherein a cross-section of the inner ring body in the radial direction and a cross-section of the outer ring body in the radial direction have mirror symmetry in shape.

4. The seal ring of claim 1, wherein the maximum depths of the first and second annular grooves are the same;

5. The seal ring of claim 1, wherein the inner ring body is axially symmetric along a centerline of the first annular groove; the outer ring body is axially symmetrical along the center line of the second annular groove.

6. The seal ring of claim 1, wherein two first annular recesses are provided on a side of the inner ring body adjacent to the outer ring body, the two first annular recesses being equidistant from a perpendicular of a centerline of the first annular groove;

7. The seal ring of claim 1, wherein the seal ring is a unitary structure.

8. The seal ring of claim 1, wherein the material of the seal ring is a resilient metal material.

9. The seal ring of claim 8, wherein the material of the seal ring is 361L stainless steel or 361Ti stainless steel.

10. The seal ring of claim 1, wherein the surface of the seal ring is a smooth continuous curved surface.