CN218507899U - LPCVD intake pipe supports group - Google Patents
LPCVD intake pipe supports group Download PDFInfo
- Publication number
- CN218507899U CN218507899U CN202222371755.5U CN202222371755U CN218507899U CN 218507899 U CN218507899 U CN 218507899U CN 202222371755 U CN202222371755 U CN 202222371755U CN 218507899 U CN218507899 U CN 218507899U
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- China
- Prior art keywords
- air inlet
- inlet pipe
- furnace body
- supporting
- lpcvd
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The utility model relates to a LPCVD air inlet pipe support group, which comprises a furnace body and a support component which is arranged on the inner side wall of the bottom of the furnace body; an air inlet pipe branch is arranged on a furnace tail cover plate of the furnace body; the support assembly includes: at least two supporting frames attached to the inner side wall of the bottom of the furnace body; the supporting clamping table is fixedly arranged on the inner side wall of the supporting frame and corresponds to the air inlet pipe branch; every two adjacent support frames are fixedly connected through the extension lines of the support clamping tables; the air inlet pipe is fixed through the air inlet pipe branch and the supporting assembly, so that the air inlet pipe can be stably supported in the furnace body, the phenomenon that the air injection position deviates due to falling of the air inlet pipe is avoided, and the uniformity between the sheets is effectively improved.
Description
Technical Field
The utility model belongs to the technical field of solar cell production facility technique and specifically relates to a LPCVD intake pipe supports group is related to.
Background
In the production process of solar cells, films such as polysilicon, silicon nitride and the like need to be coated on the surfaces, and in one mode, the films need to be coated by an LPCVD (low pressure chemical vapor deposition) process. At present, in the process of coating by using the LPCVD process, a plurality of air inlet pipe branches are generally uniformly distributed on a furnace tail cover plate of an LPCVD tube furnace, and then air inlet pipes are inserted into the LPCVD tube furnace through the air inlet pipe branches so as to spray process gases required by coating into the LPCVD tube furnace.
However, because the lengths of the air inlet pipes are different, a support table for supporting the head end of the air inlet pipe needs to be arranged in the LPCVD tube furnace, the support table in the prior art is L-shaped, after the air inlet pipe is inserted into the LPCVD tube furnace, the tail part of the air inlet pipe is tightly attached and fixed with the branch of the air inlet pipe, and the head part of the air inlet pipe is supported on the L-shaped support table; and "L" type brace table can take place to warp after using for a long time under high temperature environment, and the head that the intake pipe can appear after its deformation takes place the unsettled condition of droing for the jet-propelled position of predetermineeing of intake pipe takes place the skew, and then influences the homogeneity between the piece of solar wafer.
Therefore, there is a need to provide a new technical solution to overcome the above-mentioned drawbacks.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a LPCVD intake pipe supports group that can effectively solve above-mentioned technical problem.
In order to achieve the purpose of the utility model, the following technical proposal is adopted:
an LPCVD air inlet pipe supporting set comprises a furnace body and a supporting assembly, wherein the supporting assembly is attached to the inner side wall of the bottom of the furnace body;
an air inlet pipe branch is arranged on a furnace tail cover plate of the furnace body;
the support assembly includes:
at least two supporting frames attached to the inner side wall of the bottom of the furnace body;
the supporting clamping table is fixedly arranged on the inner side wall of the supporting frame and corresponds to the air inlet pipe branch; every two adjacent support frames are connected and fixed through the extension lines of the support clamping tables.
Preferably, the support frame is semicircular and coaxial with the furnace body.
Preferably, the thickness of the support frame is 3-5mm.
Preferably, the supporting clamping table is arranged in a concave shape.
Compared with the prior art, the utility model discloses following beneficial effect has:
when the utility model is used, the supporting component is put into the furnace body, so that the supporting frame is attached to the bottom of the furnace body, then the air inlet pipe is inserted into the furnace body from the branch of the air inlet pipe, and the head end of the air inlet pipe is placed in the supporting clamping table after entering the furnace body; the air inlet pipe is fixed through the air inlet pipe branch and the supporting clamping table, so that the air inlet pipe can be stably supported in the furnace body, the phenomenon that the air injection position deviates due to falling of the air inlet pipe is avoided, and the uniformity between the sheets is effectively improved.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly described below.
Fig. 1 is a schematic diagram of a half-section structure of an LPCVD air inlet pipe supporting set provided by the present invention;
fig. 2 is a schematic structural diagram of a support assembly in an LPCVD air inlet pipe support group provided by the present invention;
fig. 3 isbase:Sub>A cross-sectional view taken along the planebase:Sub>A-base:Sub>A in fig. 1.
Numerical description in the figures: 1. a furnace body; 11. a furnace tail cover plate; 12. an air inlet pipe branch; 2. a support assembly; 21. a support frame; 22. supporting the clamping table; 3. an air inlet pipe.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the following description will be made clearly and completely in conjunction with the technical solutions in the embodiments of the present invention, and obviously, the described embodiments are part of the embodiments of the present invention, rather than all the embodiments.
In the description of the present invention, it is to be understood that the terms "center", "lateral", "longitudinal", "front", "rear", "left", "right", "up", "down", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the scope of the invention. When an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When a component is referred to as being "connected" to another component, it can be directly connected to the other component or intervening components may also be present. When a component is referred to as being "disposed on" another component, it can be directly on the other component or intervening components may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only.
The present invention will be described in detail with reference to the accompanying drawings.
As shown in fig. 1 to 3, the utility model provides a pair of LPCVD intake pipe 3 support group, it includes furnace body 1 and laminating the supporting component 2 that the bottom inside wall of furnace body 1 set up.
The furnace body 1 is provided with a furnace mouth and a furnace tail at two ends respectively, and a furnace mouth cover plate and a furnace tail cover plate 11 are respectively arranged at the furnace mouth and the furnace tail. The furnace tail cover plate 11 is symmetrically provided with air inlet pipe branches 12 so that the air inlet pipe 3 can be inserted into the furnace body 1; the number of the intake pipe branches 12 may be set as needed.
As shown in fig. 2 and 3, the support assembly 2 includes a support frame 21 and a support chuck 22.
Specifically, the number of the support frames 21 is at least two, the support frames are semicircular, and the thickness of the support frames is 3-5mm; support frame 21 laminating the bottom inside wall setting of furnace body 1, and with furnace body 1 is with the axle center to guarantee that furnace body 1 is in the course of the work support assembly 2 can not influence the motion of other parts in furnace body 1. It should be noted that the arc length of the support frame 21 can be set as required, and the same support assembly 2 can adopt support frames 21 with the same arc length or different arcs.
The support clamping table 22 is welded and fixed on the inner circumferential wall of the support frame 21, is concave and corresponds to the air inlet pipe branch 12; and every two adjacent support frames 21 are through arbitrary two the extension line welded fastening of support ka tai 22, distance and every between the support frame 21 support ka tai 22's quantity on the support frame 21 sets up as required can.
When the furnace body is used, the supporting component 2 is placed in the furnace body 1, so that the supporting frame 21 is attached to the bottom of the furnace body 1, then the air inlet pipe 3 is inserted into the furnace body 1 from the air inlet pipe branch 12, and the head end of the air inlet pipe 3 is placed in the supporting clamping table 22 after entering the furnace body 1; the air inlet pipe 3 is fixed through the air inlet pipe branch 12 and the supporting clamping table 22, so that the air inlet pipe 3 can be stably supported in the furnace body 1, the phenomenon that the air injection position deviates due to falling is avoided, and the uniformity among the sheets is effectively improved.
The utility model discloses the standard part that uses all can purchase from the market, and dysmorphism piece all can be customized according to the description with the record of drawing of description, and the concrete connected mode of each part all adopts conventional means such as ripe bolt, rivet, welding among the prior art, and machinery, part and equipment all adopt among the prior art, and conventional model, including the conventional connected mode among the circuit connection adoption prior art, and the details are not repeated here, and the content that does not make detailed description in this description belongs to the prior art that skilled person in the art knows.
Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention.
Claims (4)
1. An LPCVD intake pipe supports group which characterized in that: the furnace comprises a furnace body and a supporting component which is attached to the inner side wall of the bottom of the furnace body;
an air inlet pipe branch is arranged on a furnace tail cover plate of the furnace body;
the support assembly includes:
at least two supporting frames attached to the inner side wall of the bottom of the furnace body;
the supporting clamping table is fixedly arranged on the inner side wall of the supporting frame and corresponds to the air inlet pipe branch; every two adjacent support frames are connected and fixed through the extension lines of the support clamping tables.
2. The LPCVD gas inlet tube support assembly of claim 1, wherein: the support frame is semicircular and coaxial with the furnace body.
3. An LPCVD gas inlet tube support assembly according to claim 1 or 2, characterized in that: the thickness of the support frame is 3-5mm.
4. An LPCVD gas inlet tube support assembly according to claim 1 or 2, characterized in that: the supporting clamping table is arranged in a concave shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222371755.5U CN218507899U (en) | 2022-09-07 | 2022-09-07 | LPCVD intake pipe supports group |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222371755.5U CN218507899U (en) | 2022-09-07 | 2022-09-07 | LPCVD intake pipe supports group |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218507899U true CN218507899U (en) | 2023-02-21 |
Family
ID=85210719
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222371755.5U Active CN218507899U (en) | 2022-09-07 | 2022-09-07 | LPCVD intake pipe supports group |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218507899U (en) |
-
2022
- 2022-09-07 CN CN202222371755.5U patent/CN218507899U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20230307 Address after: 518000 Room 103, Building 3, Shekou Lanyuan, Nanshan District, Shenzhen, Guangdong Province Patentee after: Ou Wenkai Address before: 221000 room 1222, office building, No. 11, Zhujiang East Road, high tech Industrial Development Zone, Xuzhou, Jiangsu Province Patentee before: Pule new energy technology (Xuzhou) Co.,Ltd. |
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| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20230505 Address after: No. 168, West Side of Kechuang Road, High-tech Industrial Development Zone, Taixing City, Taizhou City, Jiangsu Province, 225400 Patentee after: Pule New Energy Technology (Taixing) Co.,Ltd. Address before: 518000 Room 103, Building 3, Shekou Lanyuan, Nanshan District, Shenzhen, Guangdong Province Patentee before: Ou Wenkai |
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| TR01 | Transfer of patent right |