CN218502904U

CN218502904U - Monocrystalline silicon piece belt cleaning device

Info

Publication number: CN218502904U
Application number: CN202222948173.9U
Authority: CN
Inventors: 信广志
Original assignee: Tianjin Chuangyuda Photovoltaic Technology Co ltd
Current assignee: Tianjin Chuangyuda Photovoltaic Technology Co ltd
Priority date: 2022-11-07
Filing date: 2022-11-07
Publication date: 2023-02-21
Anticipated expiration: 2032-11-07

Abstract

The utility model provides a monocrystalline silicon piece belt cleaning device, include: the box body, the motor and the lead screw; the box body is of a rectangular shell structure, and the motor is fixedly arranged on one side of the top surface of the box body; the bracket is fixedly arranged on the top surfaces of the sliding block and the screw nut, the lower end of the bracket is fixedly connected with the main water pipe, and the water distribution pipe is arranged below the main water pipe; the supporting plates are fixedly arranged on two sides of the lower part of the inner wall of the box body; the bottom plate is placed above the supporting plate, and the fixed clamping plate array is arranged on one side of the top surface of the bottom plate; the fixing grooves are formed in the two ends of the bottom plate, and the fixing bolts penetrate through the fixing grooves to fix the movable clamping plate and the bottom plate; the water outlet is formed in the bottom of the box body; the utility model discloses a to monocrystalline silicon piece belt cleaning device's improvement, have convenient to use, can press from both sides dress not unidimensional monocrystalline silicon piece, to monocrystalline silicon piece's washing more thoroughly, do not keep the advantage at dead angle to the effectual problem of appearing in having solved current device is with not enough.

Description

Monocrystalline silicon piece belt cleaning device

Technical Field

The utility model relates to a monocrystalline silicon piece makes technical field, and more specifically says, especially relates to a monocrystalline silicon piece belt cleaning device.

Background

Monocrystalline silicon is a relatively active non-metallic element, is an important component of a crystal material, is in the front of the development of new materials, is mainly used as a semiconductor material and utilizes solar photovoltaic power generation, heat supply and the like, and has the advantages of cleanness, environmental protection, convenience and the like due to solar energy.

The monocrystalline silicon wafer is a raw material for manufacturing semiconductor silicon devices and is used as a main material for manufacturing high-power rectifiers, high-power transistors, diodes, switching devices and the like, particles, organic matters, metals or impurity molecules are easy to adhere to the monocrystalline silicon wafer in the processing process of the silicon wafer, the monocrystalline silicon wafer needs to be cleaned, and the monocrystalline silicon wafer needs to be placed in a fixing device to keep the stability of the monocrystalline silicon wafer during cleaning.

The single crystal silicon wafer fixing device in the existing cleaning device can only fix a single crystal silicon wafer of one size generally, the fixing devices of different sizes need to be replaced when the single crystal silicon wafers of different sizes are cleaned, the using efficiency of the fixing device is low, the cost is high, meanwhile, the single crystal silicon wafers are arranged densely, dead corners are easily left when water flows wash the wafers, and the phenomenon of incomplete cleaning exists.

In view of the above, the present invention provides a cleaning apparatus for a single crystal silicon wafer, which is improved in view of the conventional problems, and aims to solve the problems and improve the practical value by the above-mentioned technique.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a monocrystalline silicon piece belt cleaning device to solve the problem and not enough that propose among the above-mentioned background art.

In order to achieve the above object, the present invention provides a cleaning device for monocrystalline silicon wafer, which is achieved by the following specific technical means:

a single crystal silicon wafer cleaning apparatus comprising: the water distribution box comprises a box body, a motor, a lead screw, a guide rail, a bracket, a sliding block, a shaft seat, a water distribution pipe, a supporting plate, a fixed clamp plate, a fixed groove, a movable clamp plate, a bottom plate, a fixed bolt, a box door, a main water pipe, a lead screw nut and a water outlet; the box body is of a rectangular shell structure, the motor is fixedly arranged on one side of the top surface of the box body, and the shaft seat is arranged on the other side of the top surface of the box body; two ends of the screw rod are respectively connected with the motor and the shaft seat, and the screw rod nut is arranged in the middle of the screw rod; the guide rails are arranged on two sides of the screw rod on the top surface of the box body, and the sliding blocks are inserted and arranged on the guide rails; the bracket is fixedly arranged on the top surfaces of the sliding block and the screw nut, the lower end of the bracket is fixedly connected with the main water pipe, and the water distribution pipe is arranged below the main water pipe; the supporting plates are fixedly arranged on two sides of the lower part of the inner wall of the box body; the bottom plate is placed above the supporting plate, and the fixed clamping plate array is arranged on one side of the top surface of the bottom plate; the fixing grooves are formed in the two ends of the bottom plate, and the fixing bolts penetrate through the fixing grooves to fix the movable clamping plate and the bottom plate; the box door is hinged to one side of the box body; the water outlet is arranged at the bottom of the box body.

As a further optimization of this technical scheme, the utility model relates to a monocrystalline silicon piece belt cleaning device the distributive pipe is circular tubular structure, and the distributive pipe is provided with many places at the lower part array of main water pipe to many places round hole has been seted up to distributive pipe both sides array.

As the further optimization of this technical scheme, the utility model relates to a monocrystalline silicon piece belt cleaning device solid fixed splint are rectangle strip structure, and offer the recess that is english letter "V" type on the solid fixed splint side to gu fixed splint array is provided with many places on the bottom plate.

As a further optimization of this technical scheme, the utility model relates to a monocrystalline silicon piece belt cleaning device movable splint are rectangle platelike structure, and the array is seted up many places and is the recess of english letter "V" type on the movable splint side to movable splint's both ends link up and seted up the round hole.

As the further optimization of the technical scheme, the utility model relates to a monocrystalline silicon piece belt cleaning device the bottom plate is rectangle platelike structure, and the array has seted up many both ends semicircular rectangle recess on the bottom plate.

As a further optimization of the technical scheme, the utility model relates to a monocrystalline silicon piece belt cleaning device the support is rectangular plate structure, and the support below is equipped with two tip and is the semicircular rectangular plate arch.

Because of above-mentioned technical scheme's application, compared with the prior art, the utility model have the following advantage:

1. the utility model discloses support fixed mounting is on slider, screw nut top surface, and support lower extreme and main water pipe fixed connection to the distributive pipe sets up in the below of main water pipe, and the setting of many places round hole is seted up to distributive pipe both sides array, drives support reciprocating motion through screw nut, and the distributive pipe can the round trip movement, washes monocrystalline silicon piece surface, does not leave the dead angle and washes more thoroughly cleaner.

2. The utility model discloses movable clamp plate is rectangle platelike structure, and the array has seted up the recess that many places are english letter "V" type on the movable clamp plate side to movable clamp plate's both ends link up the setting of seting up the round hole, through movable clamp plate and fixing bolt's cooperation, can adjust the distance between movable clamp plate and the fixed clamp plate, thereby can press from both sides the monocrystalline silicon piece of dress unidimensional not, and the availability factor is higher, practices thrift the cost.

3. The utility model discloses a to monocrystalline silicon piece belt cleaning device's improvement, have convenient to use, can press from both sides the monocrystalline silicon piece of dress unidimensional, more thorough to monocrystalline silicon piece's washing, do not keep the advantage at dead angle to effectual problem and the not enough that appear in having solved current device.

Drawings

The accompanying drawings, which are incorporated in and constitute a part of this application, are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification. In the drawings:

FIG. 1 is a schematic view of the present invention;

FIG. 2 is a schematic structural view of the case of the present invention;

FIG. 3 is a schematic view of the fixing clip plate of the present invention;

fig. 4 is a schematic view of the movable splint of the present invention.

In the figure: the water distribution box comprises a box body 1, a motor 2, a screw rod 3, a guide rail 4, a support 5, a sliding block 6, a shaft seat 7, a water distribution pipe 8, a supporting plate 9, a fixed clamping plate 10, a fixed groove 11, a movable clamping plate 12, a bottom plate 13, a fixed bolt 14, a box door 15, a main water pipe 16, a screw rod nut 17 and a water outlet 18.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.

It is to be noted that, in the description of the present invention, "a plurality" means two or more unless otherwise specified; the terms "upper", "lower", "left", "right", "inner", "outer", "front", "rear", "head", "tail", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are merely for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.

Furthermore, the terms "first," "second," "third," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

Meanwhile, in the description of the present invention, unless otherwise explicitly specified or limited, the terms "connected" and "connected" should be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; the connection can be mechanical connection or electrical connection; may be directly connected or indirectly connected through an intermediate. The specific meaning of the above terms in the present invention can be understood as a specific case by those skilled in the art.

Referring to fig. 1 to 4, the present invention provides a specific technical embodiment of a single crystal silicon wafer cleaning apparatus:

a single crystal silicon wafer cleaning apparatus comprising: the water distribution box comprises a box body 1, a motor 2, a screw rod 3, a guide rail 4, a bracket 5, a sliding block 6, a shaft seat 7, a water distribution pipe 8, a supporting plate 9, a fixed clamp plate 10, a fixed groove 11, a movable clamp plate 12, a bottom plate 13, a fixed bolt 14, a box door 15, a main water pipe 16, a screw rod nut 17 and a water outlet 18; the box body 1 is of a rectangular shell structure, the motor 2 is fixedly arranged on one side of the top surface of the box body 1, and the shaft seat 7 is arranged on the other side of the top surface of the box body 1; two ends of the screw rod 3 are respectively connected with the motor 2 and the shaft seat 7, and the screw rod nut 17 is arranged in the middle of the screw rod 3; the guide rails 4 are arranged on two sides of the top surface screw rod 3 of the box body 1, and the slide blocks 6 are inserted and arranged on the guide rails 4; the bracket 5 is fixedly arranged on the top surfaces of the sliding block 6 and the screw nut 17, the lower end of the bracket 5 is fixedly connected with the main water pipe 16, and the water diversion pipe 8 is arranged below the main water pipe 16; the supporting plates 9 are fixedly arranged on two sides of the lower part of the inner wall of the box body 1; the bottom plate 13 is placed above the supporting plate 9, and the array of the fixed clamping plates 10 is arranged on one side of the top surface of the bottom plate 13; the fixing grooves 11 are formed at two ends of the bottom plate 13, and the fixing bolts 14 penetrate through the fixing grooves 11 to fix the movable clamping plate 12 and the bottom plate 13; the box door 15 is hinged on one side of the box body 1; the drain port 18 is opened at the bottom of the cabinet 1.

Specifically, as shown in fig. 2, the water diversion pipe 8 is a circular tubular structure, the water diversion pipe 8 is arranged at multiple positions in an array manner on the lower portion of the main water pipe 16, multiple circular holes are formed in the arrays on the two sides of the water diversion pipe 8, water flow is sprayed out from the two sides of the water diversion pipe 8 to wash the surface of the monocrystalline silicon wafer, and dirt on the surface of the monocrystalline silicon wafer is washed clean.

Specifically, as shown in fig. 3, the fixing clamp plate 10 is a rectangular strip structure, a groove in the shape of an english letter "V" is formed on a side surface of the fixing clamp plate 10, and a plurality of positions are arranged on the bottom plate 13 of the fixing clamp plate 10 in an array manner, so as to facilitate fixing of the monocrystalline silicon wafer.

Specifically, as shown in fig. 4, the movable clamp plate 12 has a rectangular plate-shaped structure, and a plurality of grooves having the shape of the english letter "V" are formed in the side surface of the movable clamp plate 12 in an array manner, and the two ends of the movable clamp plate 12 are penetrated and formed with circular holes, so that the distance between the movable clamp plate 12 and the fixed clamp plate 10 can be adjusted by matching the movable clamp plate 12 and the fixing bolts 14, thereby clamping monocrystalline silicon wafers of different sizes, and the clamping device has higher use efficiency and saves cost.

Specifically, as shown in fig. 3, the bottom plate 13 is a rectangular plate-shaped structure, and a plurality of rectangular grooves with semicircular two ends are formed in the bottom plate 13 in an array manner, so that water flow can be discharged conveniently.

Specifically, as shown in fig. 2, the bracket 5 has a rectangular plate-shaped structure, and two rectangular plate-shaped protrusions with semicircular end portions are arranged below the bracket 5, so as to be conveniently connected with the main water pipe 16.

The method comprises the following specific implementation steps:

during the use, open chamber door 15, pull out bottom plate 13, place the monocrystalline silicon piece between solid fixed splint 10 and movable splint 12, and use fixing bolt 14 to fix movable splint 12, push into bottom plate 13, close chamber door 15, open motor 2, motor 2 drives lead screw 3 rotatory, lead screw nut 17 drives support 5 reciprocating motion back and forth, distributive pipe 8 trailing movement, rivers are followed distributive pipe 8 both sides blowout, wash monocrystalline silicon piece surface, the surperficial filth of monocrystalline silicon piece is washed cleanly, rivers flow out from outlet 18.

In summary, the following steps: according to the monocrystalline silicon wafer cleaning device, the support is fixedly mounted on the top surfaces of the sliding block and the screw nut, the lower end of the support is fixedly connected with the main water pipe, the water distribution pipe is arranged below the main water pipe, a plurality of round holes are formed in the two sides of the water distribution pipe in an array mode, the support is driven to move back and forth through the screw nut, the water distribution pipe can move back and forth, the surface of a monocrystalline silicon wafer is washed, and the washing is thorough and clean without dead angles; the movable clamping plate is of a rectangular plate-shaped structure, a plurality of grooves in the shape of English letters V are formed in the side face of the movable clamping plate in an array mode, the two ends of the movable clamping plate are provided with round holes in a penetrating mode, the distance between the movable clamping plate and the fixed clamping plate can be adjusted through the matching of the movable clamping plate and the fixed bolt, monocrystalline silicon wafers of different sizes can be clamped, the use efficiency is high, and the cost is saved; the utility model discloses a to monocrystalline silicon piece belt cleaning device's improvement, have convenient to use, can press from both sides dress not unidimensional monocrystalline silicon piece, to monocrystalline silicon piece's washing more thoroughly, do not keep the advantage at dead angle to the effectual problem of appearing in having solved current device is with not enough.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. A single crystal silicon wafer cleaning apparatus comprising: the water distribution box comprises a box body (1), a motor (2), a lead screw (3), a guide rail (4), a support (5), a sliding block (6), a shaft seat (7), a water distribution pipe (8), a support plate (9), a fixing clamp plate (10), a fixing groove (11), a movable clamp plate (12), a bottom plate (13), a fixing bolt (14), a box door (15), a main water pipe (16), a lead screw nut (17) and a water outlet (18); the method is characterized in that: the box body (1) is of a rectangular shell structure, the motor (2) is fixedly arranged on one side of the top surface of the box body (1), and the shaft seat (7) is arranged on the other side of the top surface of the box body (1); two ends of the lead screw (3) are respectively connected with the motor (2) and the shaft seat (7), and a lead screw nut (17) is arranged in the middle of the lead screw (3); the guide rails (4) are arranged on two sides of the top surface screw rod (3) of the box body (1), and the sliding blocks (6) are inserted and arranged on the guide rails (4); the bracket (5) is fixedly arranged on the top surfaces of the sliding block (6) and the screw nut (17), the lower end of the bracket (5) is fixedly connected with the main water pipe (16), and the water diversion pipe (8) is arranged below the main water pipe (16); the supporting plates (9) are fixedly arranged on two sides of the lower part of the inner wall of the box body (1); the bottom plate (13) is placed above the supporting plate (9), and the fixed clamping plates (10) are arranged on one side of the top surface of the bottom plate (13) in an array manner; the fixing grooves (11) are formed in two ends of the bottom plate (13), and the fixing bolts (14) penetrate through the fixing grooves (11) to fix the movable clamping plate (12) and the bottom plate (13); the box door (15) is hinged to one side of the box body (1); the water outlet (18) is arranged at the bottom of the box body (1).

2. The cleaning apparatus for the single crystal silicon wafer according to claim 1, wherein: the water diversion pipe (8) is of a circular tubular structure, a plurality of positions of the water diversion pipe (8) are arranged on the lower portion of the main water pipe (16) in an array mode, and a plurality of round holes are formed in the two sides of the water diversion pipe (8) in an array mode.

3. The cleaning apparatus for a single crystal silicon wafer according to claim 1, wherein: the fixing clamp plate (10) is of a rectangular strip structure, grooves in the shape of English letters are formed in the side face of the fixing clamp plate (10), and a plurality of positions are arranged on the bottom plate (13) in an array mode through the fixing clamp plate (10).

4. The cleaning apparatus for the single crystal silicon wafer according to claim 1, wherein: the movable clamping plate (12) is of a rectangular plate-shaped structure, a plurality of grooves in the shape of English letters V are formed in the side face of the movable clamping plate (12) in an array mode, and round holes are formed in the two ends of the movable clamping plate (12) in a penetrating mode.

5. The cleaning apparatus for the single crystal silicon wafer according to claim 1, wherein: the bottom plate (13) is of a rectangular plate-shaped structure, and a plurality of rectangular grooves with semicircular two ends are formed in the bottom plate (13) in an array mode.

6. The cleaning apparatus for the single crystal silicon wafer according to claim 1, wherein: the support (5) is of a rectangular plate-shaped structure, and two rectangular plate-shaped protrusions with semicircular end parts are arranged below the support (5).