CN218501996U - Hydrogen chloride reaction unit with multiple dehydrogenation structure - Google Patents
Hydrogen chloride reaction unit with multiple dehydrogenation structure Download PDFInfo
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- CN218501996U CN218501996U CN202221119653.8U CN202221119653U CN218501996U CN 218501996 U CN218501996 U CN 218501996U CN 202221119653 U CN202221119653 U CN 202221119653U CN 218501996 U CN218501996 U CN 218501996U
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Abstract
The utility model discloses a hydrogen chloride reaction unit with multiple dehydrogenation structure, including reation kettle and processing apparatus, reation kettle's output tube connection processing apparatus, processing apparatus includes first processing structure, the second is handled the structure, retrieve the structure, supply with structure and control structure, reation kettle's delivery outlet passes through the air inlet of the first processing structure of intake-tube connection, the gas vent of first processing structure is connected to the air inlet of second processing structure through first blast pipe, the inside adsorbate that is provided with of first processing structure and second processing structure, the gas outlet of second processing structure is connected to the recovery structure through the second blast pipe, supply with the structure and pass through the inlet of supply tube connection in first processing structure and second processing structure, an air inlet pipe, first blast pipe, all be provided with the control valve on second blast pipe and the supply tube, be used for splendid attire reaction gas in the reation kettle, first processing structure and second processing structure are used for carrying out dehydrogenation to reaction gas, the recovery mechanism is used for retrieving exhaust waste gas.
Description
Technical Field
The invention belongs to the technical field of hydrogen chloride purification, and particularly relates to a hydrogen chloride reaction device with a multiple dehydrogenation structure.
Background
The high-purity hydrogen chloride is an important material for processes such as silicon chip etching, passivation and epitaxy in integrated circuit production, and can also be used in the fields of metal smelting photoconductive communication, scientific research and the like. With the development of large-scale integrated circuits, the requirement on the purity of hydrogen chloride is higher and higher, the requirement on the injection of impurities in the hydrogen chloride is more and more strict, and a plurality of methods for preparing high-purity hydrogen chloride are available at home and abroad, but the dehydrogenation method in hydrogen chloride synthesis gas is less, the adopted method is relatively traditional, and the dehydrogenation efficiency is low.
Disclosure of Invention
In order to achieve the purpose, the technical scheme of the invention is as follows: the utility model provides a hydrogen chloride reaction unit with multiple dehydrogenation structure, the device includes reation kettle and processing apparatus, reation kettle output connection processing apparatus, processing apparatus includes first processing structure, the second processing structure, retrieve the structure, supply with structure and control structure, reation kettle's delivery outlet passes through the air inlet of the first processing structure of intake-tube connection, the gas vent of first processing structure is connected to the air inlet of second processing structure through first blast pipe, the inside adsorbate that is provided with of first processing structure and second processing structure, the gas outlet of second processing structure is connected to through the second blast pipe and retrieves the structure, supply with the structure and pass through the inlet of supply tube connection in first processing structure and second processing structure, the intake pipe, first blast pipe, all be provided with the control valve on second blast pipe and the supply tube.
Based on above-mentioned scheme, be used for splendid attire reactant gas in the reation kettle, first processing structure and second processing structure are used for carrying out dehydrogenation to reactant gas and handle, and recovery mechanism is used for retrieving exhaust waste gas, and the feed structure is used for carrying out the supply to the adsorbate in first processing structure and the second processing structure.
As an improvement of the utility model, the control structure is including setting up the level sensor who handles structural in first processing structure and second, and level sensor sets up on the inner wall that the structure was handled to first processing structure and second.
Based on above-mentioned scheme, level sensor in first processing structure and the second processing structure can carry out real-time supervision to the liquid of inside, and the liquid in the corresponding controller of cooperation and alarm to processing structure is monitored.
As an improvement of the utility model, the recovery structure comprises a waste gas collecting tank, and a discharge port is arranged on the waste gas collecting tank.
Based on the scheme, the exhaust port on the exhaust gas collecting tank is used for discharging the exhaust gas at regular time.
As an improvement of the utility model, the connection between the supply structure and the first processing structure and the second processing structure is provided with a protection device.
Based on the scheme, the protection device is used for protecting the sealing property of the connection between the supply structure and the first processing structure and the second processing structure, and the stability of the supply process is ensured.
As an improvement of the utility model, the protection device comprises a tetrafluoro pipe and a graphite gasket which are arranged in the inlet of the first processing structure and the second processing structure, and the upper and lower positions of the graphite gasket are also provided with a flange plate and a sealing gasket.
Based on above-mentioned scheme, the downside of ring flange is provided with seal gasket, is provided with the graphite gasket between the ring flange.
The invention has the beneficial effects that: the first processing structure and the second processing structure are used for carrying out dehydrogenation processing on the reaction gas, the recovery mechanism is used for recovering the discharged waste gas, and the supply structure is used for supplying adsorbates in the first processing structure and the second processing structure; level sensor in first processing structure and the second processing structure can carry out real-time supervision to the liquid of inside, and corresponding controller of cooperation and alarm are monitored the liquid in the processing structure.
Drawings
Fig. 1 is a schematic structural view of the medium dehydrogenation device of the present invention.
Fig. 2 is a schematic structural view of the middle protection device of the present invention.
List of reference symbols: 100-reaction kettle, 101-first treatment structure, 102-second treatment structure, 103-recovery structure, 104-supply structure, 105-output port, 106-gas inlet pipe, 107-adsorbate, 108-reaction gas, 109-first exhaust pipe, 110-second exhaust pipe, 111-liquid inlet port, 112-supply pipe, 113-liquid level sensor, 114-waste gas collection tank, 115-discharge port, 116-protection device, 117-tetrafluoride pipe, 118-graphite gasket, 119-flange plate, 120-sealing gasket and 121-control valve.
Detailed Description
The present invention will be further illustrated with reference to the accompanying figures 1-2 and the following detailed description, which should be understood to be illustrative only and not to limit the scope of the invention.
Example 1: referring to fig. 1, a hydrogen chloride reaction device with a multiple dehydrogenation structure includes a reaction kettle 100 and a processing device, an output pipe of the reaction kettle 100 is connected with the processing device, the processing device includes a first processing structure 101, a second processing structure 102, a recovery structure 103, a supply structure 104 and a control structure, an output port 105 of the reaction kettle 100 is connected with an air inlet of the first processing structure 101 through an air inlet pipe 106, an air outlet of the first processing structure 101 is connected to an air inlet of the second processing structure 102 through a first exhaust pipe 109, adsorbates 107 are arranged inside the first processing structure 101 and the second processing structure 102, an air outlet of the second processing structure 102 is connected to the recovery structure 103 through a second exhaust pipe 110, the supply structure 104 is connected to liquid inlets 111 of the first processing structure 101 and the second processing structure 102 through a supply pipe 112, and control valves are arranged on the air inlet pipe 106, the first exhaust pipe 109, the second exhaust pipe 110 and the supply pipe 112. The reaction vessel 100 is used for containing the reaction gas 108, the first processing structure 101 and the second processing structure 102 are used for carrying out dehydrogenation processing on the reaction gas 108, the recovery mechanism is used for recovering the discharged waste gas, and the supply mechanism 104 is used for supplying adsorbate 107 in the first processing structure 101 and the second processing structure 102. The control structure includes level sensors 113 disposed on the first and second processing structures 101 and 102, the level sensors 113 being disposed on the inner walls of the first and second processing structures 101 and 102. The level sensors 113 in the first processing structure 101 and the second processing structure 102 are capable of monitoring the liquid in the interior in real time, and cooperate with corresponding controllers and alarms to monitor the liquid in the processing structures. The recovery structure 103 includes an off-gas collection tank 114, and the off-gas collection tank 114 has a discharge port 115. The exhaust port 115 of the exhaust collection tank 114 is used for discharging the exhaust gas at regular time intervals.
Referring to fig. 2, a protective device 116 is disposed at the junction between the supply structure 104 and the first and second processing structures 101 and 102. The protection device 116 is used to protect the tightness of the connection between the supply structure 104 and the first and second processing structures 101 and 102, ensuring the stability of the supply process. The protection device 116 includes a tetrafluoro pipe 117 and a graphite gasket 118 disposed in the inlet 111 of the first processing structure 101 and the second processing structure 102, and a flange 119 and a sealing gasket 120 are disposed above and below the graphite gasket 118. A sealing gasket 120 is arranged on the lower side of the flanges 119, and a graphite gasket 118 is arranged between the flanges 119.
The working process is as follows: opening a control valve on an air inlet pipe 106, allowing reaction gas 108 in the reaction kettle 100 to enter the first processing structure 101 through the air inlet pipe 106, closing a control valve 121 on the air inlet pipe 106 and the first exhaust pipe 109, after adsorption treatment, opening a control valve on the first exhaust pipe 109 and closing a control valve on the second exhaust pipe 110, allowing the gas to enter the second processing structure 102, closing a control valve on the first exhaust pipe 109, after adsorption treatment by the second processing structure 102, opening a control valve on the second exhaust pipe 110, allowing the gas to enter the recovery structure 103, allowing the adsorbed gas to be further processed in the second processing structure 102, and when liquid supplement is needed, supplementing liquid to the first processing structure 101 and the second processing structure 102 through a supply structure 104, and monitoring in real time through a monitoring device inside the processing structure.
It should be noted that the above-mentioned contents only illustrate the technical idea of the present invention, and the protection scope of the present invention is not limited thereby, and it is obvious to those skilled in the art that several modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations fall within the protection scope of the claims of the present invention.
Claims (3)
1. The utility model provides a hydrogen chloride reaction unit with multiple dehydrogenation structure, a serial communication port, the device includes reation kettle (100) and processing apparatus, reation kettle (100) output connection processing apparatus, processing apparatus includes first processing structure (101), second processing structure (102), retrieve structure (103), supply structure (104) and control structure, the air inlet of first processing structure (101) is connected through intake pipe (106) in delivery outlet (105) of reation kettle (100), the gas vent of first processing structure (101) is connected to the air inlet of second processing structure (102) through first blast pipe (109), first processing structure (101) and second processing structure (102) inside are provided with adsorbate (107), the gas outlet of second processing structure (102) is connected to retrieving structure (103) through second blast pipe (110), supply structure (104) are connected in the liquid inlet (111) of first processing structure (101) and second processing structure (102) through supply pipe (112), intake pipe (106), first blast pipe (109), second blast pipe (110) and second blast pipe (112) all are provided with the control structure (113) and set up in processing structure (101) and processing structure (102) including first processing structure (101) and control structure (113), processing structure (102) and control structure (113), processing structure (113) are provided with the control structure (121) and processing structure (102) on the first processing structure (101), the liquid level sensor (113), the control structure (121) sets up in processing structure (102), the gas inlet (101) is provided with the gas vent (113), the gas vent ) The recovery structure (103) comprises an exhaust gas collection tank (114), and the exhaust gas collection tank (114) is provided with a discharge port (115).
2. A hydrogen chloride reaction apparatus with multiple dehydrogenation structures according to claim 1, wherein a protection device (116) is provided at the connection between the supply structure (104) and the first and second processing structures (101, 102).
3. The hydrogen chloride reaction device with multiple dehydrogenation structures according to claim 2, wherein the protection device (116) comprises a tetrafluoride pipe (117) and a graphite gasket (118) which are arranged in the liquid inlet (111) on the first processing structure (101) and the second processing structure (102), and a flange (119) and a sealing gasket (120) are arranged above and below the graphite gasket (118).
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2021233860998 | 2021-12-30 | ||
| CN202123386099 | 2021-12-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218501996U true CN218501996U (en) | 2023-02-21 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202221119653.8U Active CN218501996U (en) | 2021-12-30 | 2022-05-11 | Hydrogen chloride reaction unit with multiple dehydrogenation structure |
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|---|---|
| CN (1) | CN218501996U (en) |
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