CN218491251U - Cage is used in production of rotatory target of ITO - Google Patents
Cage is used in production of rotatory target of ITO Download PDFInfo
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- CN218491251U CN218491251U CN202222450608.7U CN202222450608U CN218491251U CN 218491251 U CN218491251 U CN 218491251U CN 202222450608 U CN202222450608 U CN 202222450608U CN 218491251 U CN218491251 U CN 218491251U
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Abstract
The utility model relates TO the field of target production equipment, and discloses a suspension cage for the production of I TO rotary targets, which comprises a cage body for loading an external powder loading mold, wherein the cage body comprises a loading base layer and a loading superposed layer superposed above the loading base layer, and the loading superposed layer is fixedly connected TO the loading base layer in a detachable manner; the cage body includes and loads basic unit and loads the stack layer, and its loading capacity is big, and a single can load a plurality of dress powder moulds and enter into the container of cold isostatic press, can improve the production efficiency of the rotatory target of IO.
Description
Technical Field
The utility model relates to a target production facility field especially relates to a cage is used in production of rotatory target of ITO.
Background
Indium tin oxide target (ITO target) is an electronic ceramic material and is mainly used for magnetron sputtering coating of ITO films. Two types of targets are used: planar targets and rotary targets.
In the production, the ITO rotary target blank is manufactured by loading ITO powder into a sealed and elastic die and pushing the powder loading die to the next working procedure by using a trolley for cold isostatic pressing. The cold isostatic press is to place the powder-filling mould into a container containing liquid, apply a certain pressure to the powder-filling mould with the liquid, press the material into an entity, and obtain a target blank with an original shape. And after the pressure is released, taking the powder filling mold out of the container, and pushing the powder filling mold to the next working procedure by using a cart for demolding.
The tools for transferring the powder filling molds into the container are integrated cages, the number of the powder filling molds loaded by the cages is fixed, the number of the powder filling molds loaded by one time is small, and the number of the powder filling molds loaded by one time is generally 2/3; because the single loading capacity of the suspension cage is small, and the independent suspension cages cannot be superposed in the cold isostatic press, the utilization rate of a container in the cold isostatic press is low, and the cold isostatic press processing efficiency of the ITO rotary target material is low.
SUMMERY OF THE UTILITY MODEL
The utility model aims at: the production efficiency of the ITO rotary target is improved.
In order to realize above-mentioned purpose, the utility model provides a cage is used in production of rotatory target of ITO, including the cage body that is used for loading the outer dress powder mould, the cage body is in including loading basic unit, stack loading the loading stack layer of basic unit top, loading stack layer with detachable mode fixed connection in load on the basic unit.
In a specific embodiment of the present invention, the loading base layer further comprises a supporting component, and the loading base layer is formed by matching a base layer bottom plate with one of the supporting components; the loading superposed layer is formed by matching a superposed bottom plate with one supporting component;
the stacking base plate is fixedly connected to the supporting component of the loading base layer in a detachable mode.
In a specific embodiment of the present invention, the supporting component comprises a supporting pillar extending upward, and a supporting plate disposed on the top of the supporting pillar;
the base layer bottom plate is fixedly connected with the corresponding support columns; the stacking bottom plate is fixedly connected with the corresponding supporting columns;
the stacking bottom plate is detachably locked on the supporting plate for loading the base layer through a first locking piece.
The utility model discloses a specific embodiment, the support column includes support principal post, support auxiliary, be connected with the baffle between support principal post, the support auxiliary, through the baffle is separated to form and is used for loading the loading station of single peripheral hardware dress powder mould.
The utility model discloses a specific embodiment, the support principal post is one, support the secondary post for around support three that the principal post was arranged, the baffle is three, three one side of baffle is connected support the principal post, and relative opposite side connects three respectively support the secondary post, through three the baffle is separated and is formed three and load the station.
In a specific embodiment of the present invention, the supporting plate includes a main plate body and three sub-plate bodies connected to the main plate body and arranged in a divergent manner, and the three partition plates are respectively arranged corresponding to the three sub-plate bodies; the supporting main column is fixedly connected with the main board body, and the three supporting auxiliary columns are respectively fixedly connected with the three auxiliary board bodies.
In a specific embodiment of the present invention, the stacked bottom plate includes a fixing plate and a loading plate; the fixed plate comprises a fixed main plate and three fixed auxiliary plates which are connected with the fixed main plate and are arranged in a divergent manner; the fixed main board and the main board body are correspondingly arranged, and the three fixed auxiliary boards are respectively correspondingly arranged with the three auxiliary board bodies;
the number of the loading plates is three, and the loading plates are arranged corresponding to the three loading stations; the single loading plate is detachably locked on two adjacent fixing auxiliary plates by a second locking piece;
the first locking piece locks the loading plate and the fixed auxiliary plate on the auxiliary plate body of the loading base layer.
In a specific embodiment of the present invention, the present invention further comprises a top loading layer, wherein the top loading layer is formed by matching a top bottom plate and one of the supporting components;
the top layer bottom plate is fixedly connected with the corresponding support column; the top layer bottom plate is detachably locked on the supporting plate for loading the superposed layers through a third locking piece;
and a lifting ring is also arranged on the supporting plate of the loading top layer.
The utility model discloses a specific embodiment, still include the connecting rod, the connecting rod is used for connecting the support column in two adjacent supporting components; the connecting rod is detachably locked on the supporting column through a fourth locking piece.
In a specific embodiment of the present invention, the utility model further comprises a binding chain; when the external powder loading mould is placed on the loading station, the binding chains are arranged around the three supporting auxiliary columns so as to limit the external powder loading mould on the loading station.
The embodiment of the utility model provides a cage is used in production of rotatory target of ITO, compare with prior art, its beneficial effect lies in:
in the utility model, the cage body comprises a loading base layer and a loading superposed layer, the loading capacity is large, a plurality of powder loading molds can be loaded into a container of the cold isostatic press at a time, and the production efficiency of the ITO rotary target can be improved;
the loading superposed layer is detachably connected with the loading base layer, in practical application, the loading base layer and the loading superposed layer are in a separated state before the powder loading mould is loaded, during loading, the powder loading mould is firstly loaded into the loading base layer and the loading superposed layer, then the loading base layer and the loading superposed layer are combined and then put into a cold isostatic press, and the powder loading mould is loaded in a separated state, so that the loading height of the loading superposed layer can be reduced, the loading work of the powder loading mould is safe and convenient, and the loading efficiency can be improved;
after the suspension cage is taken out of the cold isostatic press, the loading superposed layer is firstly disassembled, then the powder loading mould is taken out of the loading base layer and the loading superposed layer, and the powder loading mould is taken out after the loading superposed layer is disassembled, so that the powder loading mould is safe and convenient to take out, and meanwhile, the taking-out efficiency can be improved.
Drawings
FIG. 1 is a block diagram of a cage according to an embodiment of the present invention;
fig. 2 is an enlarged schematic view of B in fig. 1 according to an embodiment of the present invention;
figure 3 is a top view of a cage according to an embodiment of the present invention;
fig. 4 is a cross-sectional view taken from P-P of fig. 3 in accordance with an embodiment of the present invention.
In the figure, 1, a base layer is loaded; 11. a base substrate; 2. loading the superposed layers; 21. superposing the bottom plates; 211. a fixing plate; 212. a loading plate; 100. a support assembly; 101. a support pillar; 102. a support plate; 103. a partition plate; 3. loading a top layer; 31. a top floor; 4. a hoisting ring; 5. a connecting rod; 6. bundling chains; A. powder filling mold; a. a first locking member; b. a second locking member; c. a third locking member; d. and a fourth locking member.
Detailed Description
The following detailed description of the embodiments of the present invention is provided with reference to the accompanying drawings and examples. The following examples are intended to illustrate the invention, but are not intended to limit the scope of the invention.
As shown in fig. 1 to 4, the suspension cage for producing the ITO rotary target according to the preferred embodiment of the present invention includes a cage body for loading an external powder loading mold, the cage body includes a loading base layer 1 and a loading superimposed layer 2 superimposed on the loading base layer 1, and the loading superimposed layer 2 is fixedly connected to the loading base layer 1 in a detachable manner.
The cage body comprises a loading base layer 1 and a loading superposed layer 2, the loading capacity is large, a plurality of powder loading molds A can be loaded into a container of the cold isostatic press once, and the production efficiency of the ITO rotary target can be improved;
the loading superposed layer 2 is detachably connected with the loading base layer 1, in practical application, the loading base layer 1 and the loading superposed layer 2 are in a separated state before the powder loading mould A is loaded on the cage body, during loading, the powder loading mould A is firstly loaded into the loading base layer 1 and the loading superposed layer 2, then the loading base layer 1 and the loading superposed layer 2 are combined and then put into a cold isostatic press, and the powder loading mould A is loaded in a separated state, so that the loading height of the loading superposed layer 2 can be reduced, the loading work of the powder loading mould A is safe and convenient, and the loading efficiency can be improved;
after the suspension cage is taken out of the cold isostatic press, the loading superposed layer 2 is firstly disassembled, the powder filling mould A is taken out from the loading base layer 1 and the loading superposed layer 2, and the powder filling mould A is taken out after the loading superposed layer 2 is disassembled, so that the powder filling mould A is safe and convenient to take out, and the taking-out efficiency can be improved.
In the embodiment, the loading device further comprises support components 100, and the loading substrate 1 is formed by matching a substrate base plate 11 with one support component 100; the loading superposed layer 2 is formed by matching a superposed bottom plate 21 with one support assembly 100; the stacking base plate 21 is fixedly connected to the supporting component 100 of the loading substrate 1 in a detachable manner;
specifically, the support assembly 100 includes a support column 101 extending upward, a support plate 102 disposed on top of the support column 101; the base layer bottom plate 11 is fixedly connected with the corresponding support column 101; the stacking base plate 21 is fixedly connected with the corresponding supporting column 101; the stacking base 21 is detachably locked to the supporting plate 102 of the loading base 1 by a first locking member a;
the first locking pieces a are screws, and the superposed base plate 21 is locked on the support plate 102 of the loaded base layer 1 in a screw connection mode;
in another embodiment, the first locking member a may be a bolt and a nut, and the stacking base 21 is locked to the supporting plate 102 on which the base layer 1 is loaded by means of a bolt connection.
In this embodiment, the supporting column 101 comprises a main supporting column and a secondary supporting column, a partition plate 103 is connected between the main supporting column and the secondary supporting column, and a loading station for loading a single external powder loading mold a is formed by separating the partition plate 103.
The number of the supporting main columns is one, the number of the supporting auxiliary columns is three, the number of the partition plates 103 is three, one side of each partition plate 103 is connected with the corresponding supporting main column, the other opposite side of each partition plate 103 is respectively connected with the corresponding supporting auxiliary column, and three loading stations are formed by the three partition plates 103 in a partitioned manner; the partition 103 is provided with a plurality of hollow holes to play a role in reducing weight.
In another embodiment, the supporting main column, the supporting auxiliary column and the partition 103 can be one to form two loading stations; or, there are one main support column, four auxiliary support columns, and four partition boards 103 to form four loading stations.
In this embodiment, the supporting plate 102 includes a main plate body, and three sub-plate bodies connected to the main plate body and arranged in a divergent manner, and the three partition plates 103 are respectively arranged corresponding to the three sub-plate bodies; the supporting main column is fixedly connected with the main board body, and the three supporting auxiliary columns are respectively fixedly connected with the three auxiliary board bodies; the supporting plate 102 has a simple structure, and can play a role in reducing weight, and meanwhile, the loading or the taking out of the powder filling mold A is not influenced.
In this embodiment, the stacking base 21 includes a fixing plate 211, a loading plate 212; the fixing plate 211 comprises a fixing main plate and three fixing auxiliary plates which are connected with the fixing main plate and are arranged in a divergent manner; the fixed main plate and the main plate body are correspondingly arranged, and the three fixed auxiliary plates are respectively correspondingly arranged with the three auxiliary plate bodies;
the loading plates 212 are three arranged corresponding to the three loading stations; a single said loading plate 212 is detachably locked to its adjacent two said fixed sub-plates by a second locking member b;
the second locking piece b is also a screw, and the loading plate 212 is locked on the fixed auxiliary plate in a screw connection mode;
the supporting main column is fixedly connected to the fixed main plate, and the supporting auxiliary column is fixedly connected to the fixed auxiliary plate.
When the powder filling mold A is used practically, the height of the powder filling mold A is different, and when the powder filling mold A with higher height needs to be loaded, the loading plate 212 can be detached, so that the cage body can be suitable for the loading work of the powder filling mold A with higher height.
The first locking member a locks the loading plate 212, the fixed subplate, to the subplate body of the loading base 1.
In this embodiment, the present invention further comprises a top loading layer 3, wherein the top loading layer 3 is formed by a top bottom plate 31 and one of the support assemblies 100;
the top layer bottom plate 31 is fixedly connected with the corresponding support column 101; said top floor 31 is removably locked to the supporting plate 102 carrying the superimposed layer 2 by means of a third locking element c; the loading superposed layer 2 is connected with the loading top layer 3, so that the loading capacity of the cage body is further increased, more powder loading molds A can be loaded into the cold isostatic press by the cage body at a time, and the production efficiency of the ITO rotary target material can be further improved;
the arrangement of the loading top layer 3 can enable the cage body to load three layers of powder loading molds A with lower heights, or load a layer of loading mold A with higher height and a layer of loading mold A with lower height after the loading plate 212 for loading the superposed layer 2 is dismounted, so that the adaptability of the cage body to the loading molds A with different heights is improved;
the third locking piece c is a screw, and the top bottom plate 31 is locked on the support plate 102 for loading the superimposed layer 2 through screw connection.
Specifically, base floor 11, stack bottom plate 21, top layer bottom plate 31 all are equipped with the through-hole, and the number of through-hole and the number adaptation of loading the station, and it is three, and when powder filling mould A placed on loading the station, powder filling mould A lid is in on the through-hole, the setting of through-hole guarantees that powder filling mould A's bottom also can contact the liquid in cold isostatic press's the container, guarantees going on of cold isostatic press work.
The loading base layer 1, the loading superposed layer 2 and the loading top layer 3 all adopt the supporting component 100 as a component, namely, the three components have the same structure, the structure of the cage body is simple, excessive components with different structures are not needed, and the cost for manufacturing the cage body can be reduced.
The supporting plate 102 of the loading top layer 3 is also provided with a hanging ring 4, so that the assembly of the loading base layer 1, the loading superposed layer 2 and the loading top layer 3 is facilitated;
during actual use, before the cage body is loaded into a cold isostatic press, the loading base layer 1, the loading superposed layer 2 and the loading top layer 3 are in a separated state, the powder loading mould A is loaded into each loading station of the loading base layer 1, the loading superposed layer 2 and the loading top layer 3, then the lifting ring 4 is hooked by the lifting hook, the loading superposed layer 2 is lifted so that the loading top layer 3 and the loading superposed layer 2 are assembled, finally the loading superposed layer 2 and the loading base layer 1 are assembled to complete the assembly work of the whole cage body, and then the cage body is loaded into the cold isostatic press;
after powder loading mould A accomplishes cold isostatic pressing work, hook rings 4 through the lifting hook and take out the cage body from the cold isostatic pressing built-in, then dismantle the cage body again, during the dismantlement, hook rings 4 through the lifting hook, pull down loading basic unit 1 earlier, pull down again and load superimposed layer 2 to accomplish the cage body and divide the dismantlement to finish, will load powder loading mould A again at last, in order to carry out next process.
In the present embodiment, the present invention further comprises a connecting rod 5, wherein the connecting rod 5 is used for connecting the supporting columns 101 in two adjacent supporting assemblies 100; the connecting rod 5 is detachably locked on the supporting column 101 through a fourth locking piece d;
specifically, the main supporting column and the auxiliary supporting column are both of hollow structures; the connecting rod 5 is used for connecting two adjacent supporting auxiliary columns, and when the connecting rod 5 is connected with the two adjacent supporting auxiliary columns, the connecting rod 5 penetrates into the hollow structures of the supporting auxiliary columns;
before the loading base layer 1, the loading superposed layer 2 and the loading top layer 3 are assembled, a connecting rod 5 for connecting the loading base layer 1 and the loading superposed layer 2 is firstly locked on the loading base layer 1 through a fourth locking piece d and penetrates through a supporting plate 102 of the loading base layer 1, and a connecting rod 5 for connecting the loading superposed layer 2 and the loading top layer 3 is firstly locked on the loading superposed layer 2 through the fourth locking piece d and penetrates through the supporting plate 102 of the loading superposed layer 2; during assembly, the connecting rod 5 on the loading superposed layer 2 is inserted into the hollow structure of the supporting auxiliary column of the loading top layer 3 and is locked by the fourth locking piece d; the connecting rod 5 on the loading base layer 1 is inserted into the hollow structure of the supporting auxiliary column of the loading superposed layer 2 and is locked by a fourth locking piece d;
the fourth locking piece d is a bolt and a nut; connecting rod 5 can play the effect of direction equipment when the equipment of the cage body, can play the effect that increases the connection stability between two adjacent support sublists, guarantees the overall stability of the cage body after the equipment of the cage body.
The connecting rod 5 can also be used to connect two adjacent main supporting columns, and this embodiment is not limited thereto.
In this embodiment, a binding chain 6 is further included; when the external powder loading mould A is placed on the loading station, the binding chain 6 is arranged around the three supporting auxiliary columns so as to limit the external powder loading mould A on the loading station, and the binding chain 6 is fixedly arranged in a detachable mode, for example, a hanging piece is arranged on the supporting auxiliary column so as to hang the binding chain 6, and two ends of the binding chain 6 in the length direction are connected in a detachable mode through a connecting piece; two binding chains 6 are respectively arranged on the loading base layer 1, the loading superposed layer 2 and the loading top layer 3.
In this embodiment, the loading stacking layer 2 is a layer;
in another embodiment, the loading superimposed layer 2 may be two or more layers, which is not limited in this embodiment, and depends on the accommodating height of the container of the cold isostatic press;
when the loading superposed layers 2 are two or more layers, the loading superposed layer 2 close to the loading base layer 1 in the two adjacent layers of the loading superposed layers 2 is regarded as a first loading superposed layer 2, and the loading superposed layer 2 far away from the loading base layer 1 is regarded as a second loading superposed layer 2;
the stacking bottom plate 21 of the second stacking layer 2 is detachably connected with the supporting plate 102 of the first stacking layer 2, so that the two adjacent stacking layers can be detachably connected.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of modifications and replacements can be made without departing from the technical principle of the present invention, and these modifications and replacements should also be regarded as the protection scope of the present invention.
Claims (10)
1. The suspension cage for producing the ITO rotary target comprises a cage body for loading an external powder loading die, and is characterized in that the cage body comprises a loading base layer and a loading superposed layer superposed above the loading base layer, and the loading superposed layer is fixedly connected to the loading base layer in a detachable mode.
2. The suspension cage for producing the ITO rotary target according to claim 1, further comprising support assemblies, wherein the loading base layer is formed by matching a base layer bottom plate with one of the support assemblies; the loading superposed layer is formed by matching a superposed bottom plate with one supporting component;
the stacking base plate is fixedly connected to the supporting component of the loading base layer in a detachable mode.
3. The suspension cage for ITO rotary target production according to claim 2, wherein the support assembly comprises an upwardly extending support column, a support plate disposed on top of the support column;
the base layer bottom plate is fixedly connected with the corresponding support columns; the stacking bottom plate is fixedly connected with the corresponding supporting columns;
the stacking bottom plate is detachably locked on the supporting plate for loading the base layer through a first locking piece.
4. The suspension cage for producing the ITO rotary target material according to claim 3, wherein the supporting columns comprise a main supporting column and an auxiliary supporting column, a partition plate is connected between the main supporting column and the auxiliary supporting column, and loading stations for loading a single external powder loading mold are formed by the partition plate in a separated mode.
5. The suspension cage for ITO rotary target production according to claim 4, wherein the number of the supporting main columns is one, the number of the supporting auxiliary columns is three, the number of the partition plates is three, one side of each of the three partition plates is connected with the supporting main column, the other opposite side of each of the three partition plates is connected with the three supporting auxiliary columns, and three loading stations are formed by the three partition plates in a partitioned manner.
6. The suspension cage for producing the ITO rotary target according to claim 5, wherein the supporting plate comprises a main plate body and three auxiliary plate bodies which are connected with the main plate body and are arranged in a divergent manner, and the three partition plates are respectively arranged corresponding to the three auxiliary plate bodies; the supporting main columns are fixedly connected with the main board body, and the supporting auxiliary columns are respectively fixedly connected with the auxiliary board bodies.
7. The suspension cage for producing the ITO rotary target according to claim 6, wherein the superposition bottom plate comprises a fixing plate and a loading plate; the fixing plate comprises a fixing main plate and three fixing auxiliary plates which are connected with the fixing main plate and are arranged in a divergent manner; the fixed main plate and the main plate body are correspondingly arranged, and the three fixed auxiliary plates are respectively correspondingly arranged with the three auxiliary plate bodies;
the number of the loading plates is three, and the loading plates are arranged corresponding to the three loading stations; the single loading plate is detachably locked on the two adjacent fixing auxiliary plates by a second locking piece;
the first locking piece locks the loading plate and the fixed auxiliary plate on the auxiliary plate body of the loading base layer.
8. The suspension cage for producing the ITO rotary target according to claim 3, further comprising a top loading layer, wherein the top loading layer is formed by matching a top bottom plate with one of the support assemblies;
the top layer bottom plate is fixedly connected with the corresponding support column; the top layer bottom plate is detachably locked on the supporting plate for loading the superposed layers through a third locking piece;
and a lifting ring is also arranged on the supporting plate of the loading top layer.
9. The suspension cage for producing the ITO rotary target according to claim 8, further comprising a connecting rod for connecting the supporting columns of two adjacent supporting assemblies; the connecting rod is detachably locked on the supporting column through a fourth locking piece.
10. The suspension cage for producing the ITO rotary target according to claim 5, further comprising a bundling chain; when the peripheral powder filling mold is placed on the loading station, the bundling chains are arranged around the three supporting auxiliary columns to limit the peripheral powder filling mold on the loading station.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222450608.7U CN218491251U (en) | 2022-09-15 | 2022-09-15 | Cage is used in production of rotatory target of ITO |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222450608.7U CN218491251U (en) | 2022-09-15 | 2022-09-15 | Cage is used in production of rotatory target of ITO |
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| Publication Number | Publication Date |
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| CN218491251U true CN218491251U (en) | 2023-02-17 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202222450608.7U Active CN218491251U (en) | 2022-09-15 | 2022-09-15 | Cage is used in production of rotatory target of ITO |
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| CN (1) | CN218491251U (en) |
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- 2022-09-15 CN CN202222450608.7U patent/CN218491251U/en active Active
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